JPH03233891A - El(electroluminescence) element and manufacture thereof - Google Patents
El(electroluminescence) element and manufacture thereofInfo
- Publication number
- JPH03233891A JPH03233891A JP2027384A JP2738490A JPH03233891A JP H03233891 A JPH03233891 A JP H03233891A JP 2027384 A JP2027384 A JP 2027384A JP 2738490 A JP2738490 A JP 2738490A JP H03233891 A JPH03233891 A JP H03233891A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electroluminescent
- electrode
- forming step
- electrodes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 238000005401 electroluminescence Methods 0.000 title abstract description 3
- 230000005525 hole transport Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 9
- 230000005684 electric field Effects 0.000 claims description 6
- 239000012212 insulator Substances 0.000 claims description 2
- 150000002894 organic compounds Chemical class 0.000 claims 2
- 150000002484 inorganic compounds Chemical class 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 65
- 239000011521 glass Substances 0.000 abstract description 6
- 239000011241 protective layer Substances 0.000 abstract description 3
- 238000010030 laminating Methods 0.000 abstract 1
- 239000000126 substance Substances 0.000 description 7
- 239000011159 matrix material Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 230000000740 bleeding effect Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000003574 free electron Substances 0.000 description 2
- -1 gold metal compound Chemical class 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229960000956 coumarin Drugs 0.000 description 1
- 235000001671 coumarin Nutrition 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
Description
【発明の詳細な説明】
技術分野
本発明は、電界の印加によって発光するエレクトロルミ
ネッセンス層を備えた電界発光素子及びその製造方法に
関する。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an electroluminescent device having an electroluminescent layer that emits light upon application of an electric field, and a method for manufacturing the same.
背景技術
電気信号に応答して多色表示するカラー表示装置として
はブラウン管が広く利用されている。装置の薄型化のた
めに液晶型素子も開発されている更に、完全固体型とし
て高輝度の発光が得られるエレクトロルミネッセンス(
以下ELという)を用いた素子も開発されている。BACKGROUND ART Braun tubes are widely used as color display devices that display multiple colors in response to electrical signals. Liquid crystal type elements have also been developed to make devices thinner.Furthermore, electroluminescence (completely solid-state type elements) that can emit high-brightness light have been developed.
Elements using EL (hereinafter referred to as EL) have also been developed.
かかる電界発光素子は構造で分類すると、電極とEL層
との間に絶縁層又は誘電層をもたない直流形と、電極と
EL層との間に絶縁層をもつ交流形とに分類され、該交
流形のものはドツトマトリクス電界発光素子として適し
ている。When classified by structure, such electroluminescent elements are classified into DC type, which does not have an insulating layer or dielectric layer between the electrode and the EL layer, and AC type, which has an insulating layer between the electrode and the EL layer. The AC type is suitable as a dot matrix electroluminescent device.
また、電界発光素子を発光するEL層構造で分類すると
、EL物質の微粒子をバインダで結合させ塗布形成した
分散形と、EL物質で蒸着、スパッタ等の薄膜形成方法
で成膜した薄膜形とに分けられる。Furthermore, when classifying electroluminescent elements according to the structure of the EL layer that emits light, there are two types: a dispersed type in which fine particles of an EL substance are bonded with a binder and formed by coating, and a thin film type in which an EL substance is formed by a thin film forming method such as vapor deposition or sputtering. Can be divided.
さらにまた、電界発光素子を発光するEL層材質で分類
すると、無機物EL層を有するものと有機物EL層を有
するものとに分けられる。Furthermore, when electroluminescent elements are classified by the material of the EL layer that emits light, they are divided into those having an inorganic EL layer and those having an organic EL layer.
第4図に無機物電界発光素子であるX、Yマトリクス型
の二重線縁形交流電界発光素子の概略断面を示す。該電
界発光素子は、ガラス透明基板1上に、ITO等の複数
の透明電極2、第1絶縁膜3、無機物EL層4、第2絶
縁膜5、透明電極2に交差する複数の背面電極6を順に
積層、形成したものである。無機物EL層4は、例えば
ZnS。FIG. 4 shows a schematic cross section of an X,Y matrix type double line edge AC electroluminescent device which is an inorganic electroluminescent device. The electroluminescent device includes, on a glass transparent substrate 1, a plurality of transparent electrodes 2 such as ITO, a first insulating film 3, an inorganic EL layer 4, a second insulating film 5, and a plurality of back electrodes 6 crossing the transparent electrodes 2. are laminated and formed in order. The inorganic EL layer 4 is made of, for example, ZnS.
Zn5e、CaS、SrS等のII−Vll金金属化合
物半導体物質を母体物質として数%の発光中心物質を含
む層である。This layer contains a II-Vll gold metal compound semiconductor material such as Zn5e, CaS, SrS, etc. as a host material and contains several percent of a luminescent center material.
無機物電界発光素子においては、背面電極6と透明電極
2との間に電圧を印加して第1及び第2絶縁膜5を介し
て無機物EL層4に電界が印加される。かかる印加電界
により無機物EL層4の母体物質中に自由電子が発生し
、電界で自由電子が加速されて高エネルギー状態となる
。この電子が無機物EL層4の発光中心物質を励起して
、励起状態の緩和により所定スペクトル分布を有する発
光をする。発光色は無機物EL層4の母体物質と発光中
心物質の組合せで決定される。例えば、2nSを母体物
質とする場合は、発光中心物質がSmでは赤色発光を呈
し、同様にMnでは黄色発光を、Tbでは緑色発光を、
Tmでは青色発光をそれぞれ呈する。In the inorganic electroluminescent device, a voltage is applied between the back electrode 6 and the transparent electrode 2, and an electric field is applied to the inorganic EL layer 4 via the first and second insulating films 5. The applied electric field generates free electrons in the host material of the inorganic EL layer 4, and the electric field accelerates the free electrons to a high energy state. These electrons excite the luminescent center substance of the inorganic EL layer 4, and the excited state is relaxed to emit light having a predetermined spectral distribution. The color of the emitted light is determined by the combination of the host substance of the inorganic EL layer 4 and the luminescent center substance. For example, when using 2nS as the host substance, the luminescence center substance emits red light when it is Sm, similarly emits yellow light when it is Mn, and emits green light when it is Tb.
At Tm, each exhibits blue light emission.
第5図及び第6図においては、有機物電界発光素子であ
るX、Yマトリクス型のものの一例を示す。該電界発光
素子は、ガラス透明基板1上に、ITO等の複数の透明
電極2、正孔輸送層10゜有機物EL層14、透明電極
2に交差する複数の背面電極6を順に積層、形成したも
のである。有機物電界発光素子は、図に示す正孔輸送層
10及び有機物EL層14からなる2層構造のものや、
図示しないが有機物EL層14及び背面電極6間に有機
電子輸送層がさらに配された3層構造のものが知られて
いる。有機物EL層14は、例えばクマリン化合物を含
む層である。また、第6図に示すように背面電極6の上
には、通常これを保護し短絡を防ぐ保護層15が被覆さ
れている。なお、第5図は第6図の■−■線の断面図を
示す。5 and 6 show an example of an X,Y matrix type organic electroluminescent device. The electroluminescent device has a plurality of transparent electrodes 2 such as ITO, a hole transport layer 10°, an organic EL layer 14, and a plurality of back electrodes 6 intersecting the transparent electrodes 2, which are laminated in order on a glass transparent substrate 1. It is something. The organic electroluminescent device has a two-layer structure consisting of a hole transport layer 10 and an organic EL layer 14 as shown in the figure,
Although not shown, a three-layer structure in which an organic electron transport layer is further disposed between the organic EL layer 14 and the back electrode 6 is known. The organic EL layer 14 is a layer containing, for example, a coumarin compound. Further, as shown in FIG. 6, the back electrode 6 is usually coated with a protective layer 15 that protects the back electrode 6 and prevents short circuits. Incidentally, FIG. 5 shows a sectional view taken along the line ■-■ in FIG. 6.
有機物電界発光素子において、有機正孔輸送層10は電
極から正孔を注入させ易くする機能と電子をブロックす
る機能とを有し、有機電子輸送層は電極から電子を注入
させ易くする機能を有している。有機物電界発光素子に
おいて、一対の電極から注入された電子と正孔との再結
合によって励起子が生じ、この励起子が放射失活する過
程で光を放ち、この光が透明電極及びガラス基板を介し
て外部に放出されることになる。In the organic electroluminescent device, the organic hole transport layer 10 has a function of facilitating injection of holes from the electrode and a function of blocking electrons, and the organic electron transport layer has a function of facilitating injection of electrons from the electrode. are doing. In an organic electroluminescent device, excitons are generated by the recombination of electrons and holes injected from a pair of electrodes, and in the process of radiation deactivation of these excitons, light is emitted, and this light penetrates the transparent electrode and glass substrate. It will be released to the outside through.
有機物及び無機物電界発光素子は、いずれも背面電極6
側から見た第7図の平面図に示すように、Xn、Ynマ
トリクスの構造なので、交差した電極2.6間の挟まれ
かつ重なる領域のEL層に画素すなわち発光領域Aが形
成される。Both organic and inorganic electroluminescent elements have a back electrode 6
As shown in the plan view of FIG. 7 viewed from the side, since the structure is an Xn, Yn matrix, pixels, that is, light emitting regions A are formed in the EL layer in the sandwiched and overlapping region between the crossed electrodes 2.6.
しかしながら、各電極2.6のX、Y、間に通電すると
x、y、の交差点以外のx、y2及びX2YI も発光
(発光領域B)してしまうことがある。いわゆるクロス
トークが発生する。また、発光領域A周囲の部分Cも発
光してしまうことがある。However, when current is applied between X and Y of each electrode 2.6, x, y2 and X2YI other than the intersection of x and y may also emit light (light emitting region B). So-called crosstalk occurs. Furthermore, the portion C around the light emitting area A may also emit light.
すなわち、1層のEL層の故に、近隣の画素や画素の周
囲にクロストーク及び発光の「にじみ」が発生してしま
う。このために、電界発光素子を表示装置に用いた場合
、素子全体としても、解像度が低下して精細な画像が得
られない。That is, because of the single EL layer, crosstalk and "bleeding" of light emission occur in neighboring pixels and around the pixels. For this reason, when an electroluminescent device is used in a display device, the resolution of the device as a whole decreases, making it impossible to obtain a fine image.
発明の概要
[発明の目的〕
本発明の目的は、精細な画像が得られる電界発光素子及
びその製造方法を提供することにある。Summary of the Invention [Object of the Invention] An object of the present invention is to provide an electroluminescent device capable of producing fine images and a method for manufacturing the same.
[発明の構成]
本発明の電界発光素子は、互いに対向する電極対の複数
と前記電極対間に配置されたエレクトロルミネッセンス
層とからなる電界発光素子であって、前記エレクトロル
ミネッセンス層は前記電極対によって挾まれる複数の領
域の各々に独立して存在する島領域群からなることを特
徴とする。[Structure of the Invention] The electroluminescent device of the present invention is an electroluminescent device comprising a plurality of electrode pairs facing each other and an electroluminescent layer disposed between the electrode pairs, the electroluminescent layer disposed between the electrode pairs. It is characterized by consisting of a group of island regions that exist independently in each of a plurality of regions sandwiched by.
本発明の電界発光素子の製造方法は、互いに対向する電
極対の複数と前記電極対間に配置されたエレクトロルミ
ネッセンス層とを有し、前記エレクトロルミネッセンス
層の前記電極対によって挾まれる複数の部分を発光領域
とする電界発光素子の製造方法であって、
基板上に複数の帯状第1電極を成膜する第1電極形成工
程と、
前記第1電極上にかつこれに沿って複数の島状のエレク
トロルミネッセンス層を並置して成膜するエレクトロル
ミネッセンス層形成工程と、前記エレクトロルミネッセ
ンス層上において前記第1電極と交差するように複数の
帯状第2電極を成膜する第2電極層形成工程とを含むこ
とを特徴とする。The method for manufacturing an electroluminescent device of the present invention includes a plurality of electrode pairs facing each other and an electroluminescent layer disposed between the electrode pairs, and a plurality of portions of the electroluminescent layer sandwiched by the electrode pairs. A method for manufacturing an electroluminescent device having a light-emitting region as a light-emitting region, comprising: a first electrode forming step of forming a plurality of strip-shaped first electrodes on a substrate; and a plurality of island-shaped strips formed on and along the first electrode. an electroluminescent layer forming step of forming electroluminescent layers in parallel, and a second electrode layer forming step of forming a plurality of strip-shaped second electrodes on the electroluminescent layer so as to intersect with the first electrode. It is characterized by including.
[発明の作用]
本発明によれば、電界発光素子の一対の電極間にEL層
を連続的に積層せず独立積層体となすので、該素子へ電
力を印加し発光させる時においてもクロストーク及び「
にじみ」が発生しない。[Operation of the Invention] According to the present invention, since the EL layer is not continuously laminated between a pair of electrodes of an electroluminescent element, but is formed as an independent laminated body, there is no crosstalk even when power is applied to the element to cause it to emit light. as well as"
No "bleeding" occurs.
実施例
以下、本発明による実施例を図面を参照しつつ説明する
。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第1図に実施例の有機物電界発光素子を示す。FIG. 1 shows an organic electroluminescent device according to an example.
該電界発光素子は、ガラス透明基板1上に、ITO等の
複数の透明電極2、正孔輸送層10.複数の独立した有
機物EL層14、透明電極2に交差する複数の背面電極
6を順に積層、形成したものである。これでは、EL層
として複数の島状発光領域14が電極2.6の交点間に
てマトリクス状に画定されており、個々の発光領域を囲
繞するように保護層15が積層されている。The electroluminescent device includes a glass transparent substrate 1, a plurality of transparent electrodes 2 such as ITO, a hole transport layer 10. A plurality of independent organic EL layers 14 and a plurality of back electrodes 6 intersecting the transparent electrode 2 are sequentially laminated and formed. In this case, a plurality of island-shaped light-emitting regions 14 are defined as a matrix between the intersections of the electrodes 2.6 as the EL layer, and a protective layer 15 is laminated to surround each light-emitting region.
よって、実施例によれば、一対の電極2.6間の漏電の
要因であるEL層の周囲を介しての電子及び正孔が漏電
することはなくなる。Therefore, according to the embodiment, leakage of electrons and holes through the periphery of the EL layer, which is a cause of leakage between the pair of electrodes 2.6, is eliminated.
かかる電界発光素子を製造するには、まず、第2図(a
)に示すように、ガラス基板1の主面上に複数の帯状の
透明電極2を各々が平行となるようにスパッタリング法
及びリソグラフィ法などによって積層する。In order to manufacture such an electroluminescent device, first, the method shown in FIG.
), a plurality of band-shaped transparent electrodes 2 are laminated on the main surface of a glass substrate 1 so that they are parallel to each other by sputtering, lithography, or the like.
次に、第2図(b)に示すように、複数の透明電極2上
に正孔輸送層10を蒸着法などによって均一に一様に積
層する。Next, as shown in FIG. 2(b), the hole transport layer 10 is uniformly laminated on the plurality of transparent electrodes 2 by a vapor deposition method or the like.
次に、第2図(C)に示すように、正孔輸送層10上に
おいて蒸着法などによって複数の島状のEL層を透明電
極2に沿って形成する。このようにして、マトリクス状
に配置された独立した複数の発光領域のELL12型形
成される。Next, as shown in FIG. 2(C), a plurality of island-shaped EL layers are formed along the transparent electrode 2 on the hole transport layer 10 by vapor deposition or the like. In this way, an ELL12 type of a plurality of independent light emitting regions arranged in a matrix is formed.
次に、ELL12型形成した正孔輸送層10上に、第2
図(d)に示すように、透明電極2の上においてこれと
交差するようにかつELL12型それぞれが交点となる
ように対応させ第2電極層6を重ねて蒸着形成する。Next, on the hole transport layer 10 formed in the ELL12 type, a second
As shown in Figure (d), the second electrode layer 6 is deposited on top of the transparent electrode 2 so as to intersect with the transparent electrode 2 and to correspond to each other so that each of the ELL12 types forms an intersection point.
次に、第2電極層6を形成した上に、第2図(e)に示
すように、絶縁体層15を一様に成膜する。Next, after forming the second electrode layer 6, as shown in FIG. 2(e), an insulator layer 15 is uniformly formed.
このようにして、第1図に示す本発明の電界発光素子が
得られる。In this way, the electroluminescent device of the present invention shown in FIG. 1 is obtained.
また、他の実施例としては、第3図の有機物電界発光素
子の断面図に示すように、正孔輸送層10を、各画素に
共通して1層として形成せずに、EL層14と同様に島
状に独立して電極2の側面を覆うように形成すれば、さ
らに漏電による発光の影響を防止することができる。In addition, as another example, as shown in the cross-sectional view of the organic electroluminescent device in FIG. Similarly, if they are formed independently in an island shape so as to cover the side surface of the electrode 2, it is possible to further prevent the influence of light emission due to electrical leakage.
なお、第2図(a)ないしくb)及び第3図は第1図の
I−I線の断面に対応する断面図を示す。Incidentally, FIGS. 2(a) to 3(b) and 3 show cross-sectional views corresponding to the cross-section taken along line II in FIG. 1.
上記実施例では有機物電界発光素子とした構造について
説明したが、無機物電界発光素子として無機物EL層を
独立に島状に形成してもよい。また、この場合、電極と
EL層との間に絶゛縁層又は誘電層を有する交流形とし
ても、電極とEL層との間に絶縁層を有さない直流形の
電界発光素子にしてもΦ適用できる。In the above embodiments, the structure of an organic electroluminescent device has been described, but an inorganic EL layer may be formed independently in the form of an island as an inorganic electroluminescent device. In this case, the electroluminescent element may be an AC type that has an insulating layer or a dielectric layer between the electrode and the EL layer, or a DC type electroluminescent element that does not have an insulating layer between the electrode and the EL layer. ΦApplicable.
発明の効果
以上の如く、本発明の電界発光素子によれば、互いに対
向する電極対の複数と電極間に配置されたEL層とから
なり、EL層は電極対によって挾まれかつ重なる複数の
領域に独立して存在する島領域群からなるので、該素子
へ電力を印加し発光させる時においても発光領域のみが
発光し、発光領域の周囲のクロストークや発光の「にじ
みjが減少し、精細な画像が得られる。Effects of the Invention As described above, the electroluminescent device of the present invention is composed of a plurality of electrode pairs facing each other and an EL layer disposed between the electrodes, and the EL layer has a plurality of regions sandwiched between and overlapping by the electrode pairs. Since the device consists of a group of island regions that exist independently, even when power is applied to the element to emit light, only the light emitting region emits light, reducing crosstalk around the light emitting region and "bleeding" of light emission, and improving definition. You can get a good image.
第1図は本発明による実施例の電界発光素子の部分切欠
斜視図、第2図は本発明による電界発光素子の製造中に
おける素子部材の部分断面図、第3図は本発明による他
の実施例の電界発光素子の部分断面図、第4図及び第5
図は従来の電界発光素子の部分断面図、第6図は従来の
電界発光素子の部分切欠斜視図、第7図は従来の電界発
光素子の部分平面図である。
主要部分の符号の説明
1・・・・・・基板
2・・・・・・透明電極
4.14・・・・・・EL層
6・・・・・・電極
15・・・・・・保護層FIG. 1 is a partially cutaway perspective view of an electroluminescent device according to an embodiment of the present invention, FIG. 2 is a partial sectional view of an element member during manufacture of an electroluminescent device according to the present invention, and FIG. 3 is a diagram showing another embodiment of the present invention. Partial cross-sectional views of example electroluminescent devices, FIGS. 4 and 5
6 is a partially cutaway perspective view of a conventional electroluminescent device, and FIG. 7 is a partial plan view of a conventional electroluminescent device. Explanation of symbols of main parts 1...Substrate 2...Transparent electrode 4.14...EL layer 6...Electrode 15...Protection layer
Claims (6)
置されたエレクトロルミネッセンス層とからなる電界発
光素子であって、前記エレクトロルミネッセンス層は前
記電極対によって挾まれる複数の領域の各々に独立して
存在する島領域群からなることを特徴とする電界発光素
子。(1) An electroluminescent device comprising a plurality of electrode pairs facing each other and an electroluminescent layer disposed between the electrode pairs, wherein the electroluminescent layer is arranged in each of the plurality of regions sandwiched by the electrode pairs. An electroluminescent device comprising a group of independently existing island regions.
らなり、前記エレクトロルミネッセンス層及び前記電極
対の一方の間に有機化合物からなる正孔輸送層が配置さ
れていることを特徴とする請求項1記載の電界発光素子
。(2) The electric field according to claim 1, wherein the electroluminescent layer is made of an organic compound, and a hole transport layer made of the organic compound is disposed between the electroluminescent layer and one of the electrode pair. Light emitting element.
らなり、前記エレクトロルミネッセンス層及び前記電極
対間の各々に絶縁層が夫々配置されていることを特徴と
する請求項1記載の電界発光素子。(3) The electroluminescent device according to claim 1, wherein the electroluminescent layer is made of an inorganic compound, and an insulating layer is disposed between the electroluminescent layer and the electrode pair.
置されたエレクトロルミネッセンス層とを有し、前記エ
レクトロルミネッセンス層の前記電極対によって挾まれ
る複数の部分を発光領域とする電界発光素子の製造方法
であって、 基板上に複数の帯状第1電極を成膜する第1電極形成工
程と、 前記第1電極上にかつこれに沿って複数の島状のエレク
トロルミネッセンス層を並置して成膜するエレクトロル
ミネッセンス層形成工程と、前記エレクトロルミネッセ
ンス層上において前記第1電極と交差するように複数の
帯状第2電極を成膜する第2電極層形成工程とを含むこ
とを特徴とする電界発光素子の製造方法。(4) An electroluminescent element comprising a plurality of electrode pairs facing each other and an electroluminescent layer disposed between the electrode pairs, and in which a plurality of portions of the electroluminescent layer sandwiched by the electrode pairs serve as light emitting regions. A manufacturing method comprising: a first electrode forming step of forming a plurality of band-shaped first electrodes on a substrate; and a plurality of island-shaped electroluminescent layers arranged side by side on and along the first electrode. An electric field characterized by comprising an electroluminescent layer forming step of forming a film, and a second electrode layer forming step of forming a plurality of band-shaped second electrodes on the electroluminescent layer so as to intersect with the first electrode. A method for manufacturing a light emitting element.
センス層形成工程との間に正孔輸送層を成膜する正孔輸
送層形成工程を有することを特徴とする請求項4記載の
電界発光素子の製造方法。(5) The electroluminescent device according to claim 4, further comprising a hole transport layer forming step of forming a hole transport layer between the first electrode forming step and the electroluminescent layer forming step. Production method.
センス層形成工程との間に第1絶縁層を成膜する第1絶
縁体層形成工程を有し、前記エレクトロルミネッセンス
層形成工程と前記第2電極層形成工程との間に第2絶縁
層を成膜する第2絶縁体層形成工程を有することを特徴
とする請求項4記載の電界発光素子の製造方法。(6) a first insulator layer forming step of forming a first insulating layer between the first electrode forming step and the electroluminescent layer forming step; 5. The method of manufacturing an electroluminescent device according to claim 4, further comprising a second insulating layer forming step of forming a second insulating layer between the layer forming step and the second insulating layer forming step.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027384A JP3016808B2 (en) | 1990-02-06 | 1990-02-06 | Electroluminescent device and method of manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2027384A JP3016808B2 (en) | 1990-02-06 | 1990-02-06 | Electroluminescent device and method of manufacturing the same |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH03233891A true JPH03233891A (en) | 1991-10-17 |
JP3016808B2 JP3016808B2 (en) | 2000-03-06 |
Family
ID=12219554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2027384A Expired - Fee Related JP3016808B2 (en) | 1990-02-06 | 1990-02-06 | Electroluminescent device and method of manufacturing the same |
Country Status (1)
Country | Link |
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JP (1) | JP3016808B2 (en) |
Cited By (7)
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US5896006A (en) * | 1996-09-27 | 1999-04-20 | Nec Corporation | Organic thin film light-emitting device having second electrodes layer covering periphery of first electrodes layer |
US6054809A (en) * | 1996-08-14 | 2000-04-25 | Add-Vision, Inc. | Electroluminescent lamp designs |
US6366016B1 (en) | 1998-01-22 | 2002-04-02 | Nec Corporation | Multicolor organic electroluminescent panel and process for production thereof |
US6538374B2 (en) | 2000-02-16 | 2003-03-25 | Idemitsu Kosan Co., Ltd. | Actively driven organic EL device and manufacturing method thereof |
US6995736B2 (en) | 2000-03-07 | 2006-02-07 | Idemitsu Kosan Co., Ltd. | Active-driving type organic EL display device, and a method of producing the same |
US7034339B2 (en) | 2001-08-09 | 2006-04-25 | Idemitsu Kosan Co., Ltd. | Organic EL display device having host compound and phosphorescent luminous compound, and method of driving same |
EP1057216B1 (en) * | 1998-02-17 | 2016-06-29 | Transpacific Infinity, LLC | Sealing of large area display structures |
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1990
- 1990-02-06 JP JP2027384A patent/JP3016808B2/en not_active Expired - Fee Related
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US6054809A (en) * | 1996-08-14 | 2000-04-25 | Add-Vision, Inc. | Electroluminescent lamp designs |
US5896006A (en) * | 1996-09-27 | 1999-04-20 | Nec Corporation | Organic thin film light-emitting device having second electrodes layer covering periphery of first electrodes layer |
US6366016B1 (en) | 1998-01-22 | 2002-04-02 | Nec Corporation | Multicolor organic electroluminescent panel and process for production thereof |
US6656519B2 (en) | 1998-01-22 | 2003-12-02 | Nec Corporation | Multicolor organic electroluminescent panel and process for production thereof |
EP1057216B1 (en) * | 1998-02-17 | 2016-06-29 | Transpacific Infinity, LLC | Sealing of large area display structures |
US7994705B2 (en) | 2000-02-16 | 2011-08-09 | Idemitsu Kosan Co. | Actively driven organic EL device and manufacturing method thereof |
US7250718B2 (en) | 2000-02-16 | 2007-07-31 | Idemitsu Kosan Co., Ltd. | Actively driven organic EL device and manufacturing method thereof |
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US6933672B2 (en) | 2000-02-16 | 2005-08-23 | Idemitsu Kosan Co., Ltd. | Actively driven organic EL device and manufacturing method thereof |
US6538374B2 (en) | 2000-02-16 | 2003-03-25 | Idemitsu Kosan Co., Ltd. | Actively driven organic EL device and manufacturing method thereof |
US6995736B2 (en) | 2000-03-07 | 2006-02-07 | Idemitsu Kosan Co., Ltd. | Active-driving type organic EL display device, and a method of producing the same |
US7227518B2 (en) | 2000-03-07 | 2007-06-05 | Idemitsu Kosan Co., Ltd. | Active-driving type organic el display device, and a method of producing the same |
US7034339B2 (en) | 2001-08-09 | 2006-04-25 | Idemitsu Kosan Co., Ltd. | Organic EL display device having host compound and phosphorescent luminous compound, and method of driving same |
US7956828B2 (en) | 2001-08-09 | 2011-06-07 | Idemitsu Kosan Co., Ltd. | Organic electroluminescence display device and method for driving the same |
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