JPH0322682Y2 - - Google Patents

Description

[Detailed explanation of the invention] [Industrial application field] The filter installed on the ceiling of the clean room is divided into multiple grids, a shutter is installed in each grid, and the air volume can be adjusted from the indoor side for each grid. This is a clean room design that allows partial air flow control and the ability to freely change the air volume from a laminar flow clean room to a turbulent flow clean room.

[Conventional technology]

There are several methods for creating vertical laminar flow clean rooms, but there are many points that need to be improved in order to meet the needs of future users.

The plenum chamber system uses a circulation fan to send air between the ceiling filter and the upper floor, and the circulation fan takes in air from the floor suction port at the bottom, making it possible to clean large spaces and making it relatively easy to change the indoor layout. It's becoming mainstream. However, since a large air volume in a large space must be turned on and off at once, the same level of cleanliness is supplied regardless of the level of cleanliness after layout, which results in unnecessary running costs. Since it is not possible to stop the operation or adjust the air volume, it is no longer compatible with future trends in energy conservation and equipment cost reduction.

The Weber method is a method in which a hopper filter with a shutter is connected to the main duct, but although the air volume can be adjusted for each filter, it is difficult to connect the main duct to the ceiling and connect the duct to each filter. Initial equipment is very expensive due to floor height issues, and since the duct is pushed in, there is a high risk of leaks due to air leakage, so it is not widely used in Japan. Furthermore, simply maintaining a constant amount of airflow as in the above-mentioned method cannot easily accommodate changes such as replacing the piping of manufacturing equipment in the clean room or partially changing the cleanliness level.

[Problem that the invention attempts to solve]

The problem is that simply maintaining a certain amount of air volume cannot accommodate the rearrangement of manufacturing equipment in the clean room or partial changes in cleanliness.The relatively high equipment cost is an issue of building floor height. It is an idea.

[Means for solving problems]

The filter installed on the entire surface of the ceiling is divided into multiple grids, and upstream of the filter for each grid is a lower plate that is fixed to the frame of the filter and has multiple circular holes, and a circular hole in the lower plate. An upper plate is provided with a plurality of circular holes similar to the holes, and a pinion is pivotally supported at the center of the lower plate and teeth are carved at the tip thereof, and the rear end is chamfered to adjust the air volume. A shaft for passing through the filter downwardly and protruding into the room, a rack for engaging a pinion of the shaft is provided on the upper plate, and stoppers are erected on both sides of the lower plate to restrict movement of the upper plate. By properly rotating the shaft, the degree of overlap between the circular hole in the lower plate and the circular hole in the upper plate changes, and the air volume is adjusted for each grid without impairing the outlet airflow distribution. A filter was used to maintain the cleanliness of the room. In this way, by adjusting the shutters individually, it is possible to freely change from a laminar flow clean room to a turbulent flow clean room, and the cleanliness level can be changed partially to an appropriate level. This device is designed to reduce air flow by adjusting the amount of air.

[Effect]

Inside the room, a shutter installed upstream of a filter on the ceiling divided into multiple sections can be adjusted to adjust the opening degree of the shutter and partially adjust the air volume, allowing the room to be freely changed to a laminar flow clean room or a turbulent flow clean room.
Adjustment is made according to changes in the clean room. Furthermore, since the shutter is located upstream of the filter, dust that may adhere to the shutter is removed by the downstream filter, thereby maintaining the cleanliness of the room.

〔Example〕

A frame body 2 having approximately the same size as the filter case 1 and surrounding the four sides is attached to the upper part of a filter case 1 which is appropriately formed with a filter inserted therein, and a flange 3 is provided between the top and bottom of the frame body 2. A lower plate 5 for a shutter with a number of circular holes 4 drilled therein is fixed to the lower plate 3, and an upper plate 7 for a shutter with a plurality of circular holes 6 bored therein under exactly the same conditions as the lower plate 5 is placed on the lower plate 5. A horizontal long hole 8 is bored in the center of the upper plate 7, and a shaft 9 is provided passing through the hole 12 of the lower plate 5 and the long hole 8 of the upper plate 7, and the shaft 9 extends to the bottom of the filter. , the lower part of the extension is squarely chamfered 11 to facilitate tool use.

The shaft 9 is rotatably attached to the lower plate 5 by a bearing 10.

A pinion 13 is carved into the shaft 9 protruding from the upper plate 7, and a rack 14 that engages with the pinion 13 is fixed to the upper end of the elongated hole 8 of the upper plate 7, and the rack 14 and the pinion 13 are engaged. A shutter A is formed by providing stoppers 15 for the upper plate 7 on both upper sides of the lower plate 5. 16 is a case of a bearing 10 fixed to the lower plate 5.

The pinion 13 can be reliably engaged with the rack 14 by being carved up to the lower surface of the upper plate 7. Reference numeral 17 indicates a reinforcing plate for the frame body 2.

The filter 1 with the shutter A is attached to each grid (compartment) C of a ceiling surface which is divided into a plurality of grids (divisions) by hanging steel members B.

When adjusting the air volume, the shaft 9 is rotated from inside the clean room using a tool, and the pinion 13 rotates, so that the rack 14 meshes with the pinion 13 and moves laterally. The upper plate 7, which is integrated with the rack 14, also moves laterally along the elongated hole 8, and the circular hole 4 of the lower plate 5 and the circular hole 6 of the upper plate 7 can be closed or opened freely from 0 to 100%. The opening state can be adjusted accordingly.

[Effect of idea]

By adjusting the shutter, you can freely change from a laminar flow clean room to a turbulent flow clean room, and you can also change the cleanliness level to an appropriate level in some areas.Also, if the air flow is sluggish in manufacturing equipment, you can adjust the amount of air flowing through that area. It can reduce drooling.

Moreover, it goes without saying that the above-mentioned vertical laminar flow system also includes a full-surface filter system, a random system, or a combination of a 0.3μ filter and a 0.1μ filter. In addition, the cleanliness of the room is maintained by preventing dust that may adhere to the air volume adjustment shutter from entering the room.Furthermore, since the shutter opening/closing mechanism is a rack-and-pinion mechanism, it can be operated with a constant operating force. Therefore, it is easy to operate.

By adopting the system of this application, for example, the wind speed in the aisle can be reduced to 0.2 m/s, and the wind speed in the manufacturing area can be reduced to 0.2 m/s.
0.35m/s, and can be totally controlled according to the circumstances of the production line, such as completely stopping lines that are inactive, so the effective operating rate is extremely high and running costs can be significantly reduced when considered throughout the year. It has the effect of becoming.

[Brief explanation of the drawing]

Figure 1 is a bottom view of the ceiling, Figure 2 is a plan view of the shutter and filter, Figure 3 is a front view of the same, and Figure 4 is a bottom view of the ceiling.
The figure is a perspective view of the shutter, and FIG. 5 is an enlarged sectional view of the shaft attachment part.

Claims (1)

[Scope of utility model registration request] The filter installed on the entire surface of the ceiling is divided into multiple grids, and upstream of the filter for each grid is a lower plate that is fixed to the frame of the filter and has multiple circular holes, and a lower plate that is fixed to the frame of the filter and has multiple circular holes. A shutter is provided, consisting of a circular hole and an upper plate in which a plurality of circular holes identical to the circular hole are bored, and a pinion is pivotally supported at the center of the lower plate and has teeth carved in its tip, and its rear end is chamfered. A shaft for adjusting air volume is passed through the filter downwardly and protrudes into the room, and a rack is provided on the upper plate to engage with a pinion of the shaft, and at the same time, the movement of the upper plate is restricted on both sides of the lower plate. By erecting a stopper and rotating the shaft appropriately, the degree of overlap between the circular hole in the lower plate and the circular hole in the upper plate is changed, and the air volume can be adjusted for each grid without impairing the outlet airflow distribution. This is a plenum chamber type vertical laminar flow clean room equipped with a filter with an air volume adjustment mechanism on the ceiling, which is further cleaned by a filter at the bottom to maintain the cleanliness of the room.