JPH03226607A - Minute size measuring device - Google Patents
Minute size measuring deviceInfo
- Publication number
- JPH03226607A JPH03226607A JP2347590A JP2347590A JPH03226607A JP H03226607 A JPH03226607 A JP H03226607A JP 2347590 A JP2347590 A JP 2347590A JP 2347590 A JP2347590 A JP 2347590A JP H03226607 A JPH03226607 A JP H03226607A
- Authority
- JP
- Japan
- Prior art keywords
- image
- lens system
- light
- objective lens
- focus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 238000005259 measurement Methods 0.000 abstract description 4
- 239000000758 substrate Substances 0.000 description 4
- 238000005286 illumination Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、半導体基板上に形成されたレジストパターン
、回路パターン等の寸法を測定する微小寸法測定器に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a micro-dimensional measuring instrument for measuring the dimensions of resist patterns, circuit patterns, etc. formed on a semiconductor substrate.
従来、この種の微小寸法測定器は、図面には示さないが
、被測定物である半導体基板の表面像を拡大する対物レ
ンズ系と接眼レンズ系とをもつ光学レンズ系と、この拡
大像を画像情報信号として取り込む、例えば、撮像管あ
るいはＣＣＤカメラ等の画像検出器と、この画像情報信
号を演算処理して前記被測定物表面における所定の領域
間の距離を測定する画像演算処理部とを有していた。Although not shown in the drawings, conventional microdimensional measuring instruments of this type include an optical lens system that includes an objective lens system and an eyepiece system that magnify the surface image of the semiconductor substrate that is the object to be measured, and an optical lens system that magnifies this magnified image. An image detector, such as an image pickup tube or a CCD camera, which captures the image information as an image information signal, and an image calculation processing unit which processes the image information signal and measures the distance between predetermined areas on the surface of the object to be measured. had.
また、この微小寸法測定器を使用して、例えば、半導体
基板上のレジストパターンを測定する場合、このレジス
トと下地との段差の上面とか、下面あるいはその中間部
とかを決めた位置に光学レンズ系の焦点を合せ、二つの
パターン間の距離を測定していた。In addition, when using this micro-dimensional measuring instrument to measure a resist pattern on a semiconductor substrate, for example, an optical lens is placed at a predetermined position such as the top surface, bottom surface, or intermediate part of the step between the resist and the substrate. to measure the distance between the two patterns.
〔発明が解決しようとするＲＭＪ
しかしながら、上述した従来の微小寸法測定器では、焦
点合せには個人差もあり、焦点合せの再現性もないため
、精密な測定及び再現性のある測定が出来ないという欠
点がある。[RMJ to be solved by the invention However, with the above-mentioned conventional micro-dimensional measuring instruments, there are individual differences in focusing, and there is no reproducibility of focusing, so accurate measurement and reproducible measurement cannot be performed. There is a drawback.
本発明の目的は、かかる欠点を解消し、より精密な、再
現性のある測定が出来る微小寸法測定器を提供すること
である。An object of the present invention is to eliminate such drawbacks and provide a microdimensional measuring instrument that can perform more precise and reproducible measurements.
本発明の微小寸法測定器は、被測定物表面像を拡大する
対物レンズ系と接眼レンズとをもつ光学レンズ系と、こ
の拡大された像を画像情報信号として取り込む画像検出
器と、この画像情報信号を演算処理して前記被測定物表
面における所定の領域間の距離を測定する画像演算処理
部とを有する微小寸法測定器において、前記領域の高さ
の異なる段差面より反射する光を前記対物レンズ以降で
分岐するハーフミラ−と、この分岐された光のいずれか
を焦点調節する焦点調節機構とを備え、前記異る段差面
の結像を同一光路上の同一位置に形成することを特徴と
している。The microdimensional measuring instrument of the present invention includes an optical lens system having an objective lens system and an eyepiece that magnify an image of the surface of an object to be measured, an image detector that captures this magnified image as an image information signal, and an image detector that captures this magnified image as an image information signal. In a micro-dimensional measuring instrument having an image calculation processing unit that measures a distance between predetermined areas on the surface of the object to be measured by calculating a signal, light reflected from a step surface having a different height in the area is transmitted to the object. It is characterized by comprising a half mirror that branches after the lens and a focus adjustment mechanism that adjusts the focus of either of the branched lights, and forms images of the different stepped surfaces at the same position on the same optical path. There is.
〔実施例〕 次に、本発明について図面を参照して説明する。〔Example〕 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の微小寸法測定器の一実施例を説明する
ための光学レンズ系を示す図である。この微小寸法測定
器は、その光学レンズ系を、同図に示すように、被測定
物１に対面する対物レンズ系３と、ハーフミラ−４によ
り反射させ、対物レンズ系３を通し被測定物１に光を投
射する照明光学系２と、対物レンズ系３の後方にあるリ
レーレンズ８と、このリレーレンズ８の後方にあるとと
もに対物レンズ系よりの光を二分割するハーフミラ−４
と、二分割された光のいずれかを焦点合せして同一位置
に結像させる焦点調節機構５と、この結像された結像を
拡大する接眼レンズ系６と、拡大された結像を検知する
画像検知器７とを有している。FIG. 1 is a diagram showing an optical lens system for explaining an embodiment of the minute dimension measuring instrument of the present invention. As shown in the figure, this minute dimension measuring instrument reflects the optical lens system by an objective lens system 3 facing the object to be measured 1 and a half mirror 4, and passes the object through the objective lens system 3 to the object to be measured. An illumination optical system 2 that projects light onto the object, a relay lens 8 located behind the objective lens system 3, and a half mirror 4 that is located behind the relay lens 8 and divides the light from the objective lens system into two.
, a focusing mechanism 5 that focuses either of the two divided lights and forms an image at the same position, an eyepiece system 6 that magnifies the formed image, and detects the expanded image. It has an image detector 7 that
次に、この微小寸法測定器の動作を説明する。Next, the operation of this minute dimension measuring instrument will be explained.
まず、照明光学系２により光をハーフミラ−４及び対物
レンズ系３を介して被測定物１に照射する。First, the illumination optical system 2 irradiates the object 1 with light via the half mirror 4 and the objective lens system 3 .
次に、対物レンズ系３を被測定物１の下面と上面との間
に焦点合せを行なう、このことにより下面からの光は、
ハーフミラ−４ａにより半分の光量が反射され、ミラー
４Ｃにより反射され、焦点調節機構５によりハーフミラ
−４ａを透過した光の結像位置と同一の位置に結像する
０次に、接眼レンズ系６よりこの結像を拡大し、画像検
出器７の撮像面に第２の結像を形成する。このことによ
り被測定物の上面と下面と上面の合成憎を合成する。Next, the objective lens system 3 is focused between the bottom surface and the top surface of the object to be measured 1, so that the light from the bottom surface is
Half the amount of light is reflected by the half mirror 4a, reflected by the mirror 4C, and focused by the focusing mechanism 5 at the same position as the imaging position of the light transmitted through the half mirror 4a. This image is enlarged to form a second image on the imaging surface of the image detector 7. As a result, the upper surface, lower surface, and upper surface of the object to be measured are combined.
このように本発明の微小寸法測定器の光学系は、対物レ
ンズ系よりの光を二分割し、それぞれの光の光路長を変
え、同一位置に結像することによって、二つの画像を合
成し、この画像を画像検出器で画像信号に変換し、図面
では示していない画像演算処理部で画像信号を演算処理
し、それぞれの寸法を測定する。In this way, the optical system of the microdimensional measuring instrument of the present invention splits the light from the objective lens system into two, changes the optical path length of each light, and focuses the two lights at the same position, thereby synthesizing the two images. , this image is converted into an image signal by an image detector, and the image signal is processed by an image processing section (not shown in the drawing), and the dimensions of each are measured.
以上説明したように本発明は、被測定物と対物レンズ系
との距離の異なる領域からの反射光を対物レンズ系以降
で二つの光に分岐するハーフミラ−と、分岐された光の
いずれかを焦点調節する焦点調節機構とを備え、二つの
光を同一位置に結像することによって、被測定物の焦点
合せ位置による誤差がなくなるので、精度のより高い、
より再現性のある微小寸法測定器が得られるという効果
がある。As explained above, the present invention provides a half mirror that splits the reflected light from areas with different distances between the object to be measured and the objective lens system into two lights after the objective lens system, and a half mirror that splits the reflected light into two lights after the objective lens system. It is equipped with a focus adjustment mechanism that adjusts the focus, and by focusing the two lights at the same position, errors due to the focus position of the object to be measured are eliminated, resulting in higher precision.
This has the effect of providing a micro dimension measuring instrument with more reproducibility.
第１図は本発明の微小寸法測定器の一実施例を説明する
ための光学レンズ系を示す図である。
１、−・・被測定物、２−・照明光学系、３・・・対物
レンズ系、４．４ａ、４ｂ・・・ハーフミラ−１４Ｃ・
・・ミラー、５・・・焦点調節機構、６・・・接額レン
ズ、７・・・画像検出器。FIG. 1 is a diagram showing an optical lens system for explaining an embodiment of the minute dimension measuring instrument of the present invention. 1. Object to be measured, 2- Illumination optical system, 3. Objective lens system, 4.4a, 4b... Half mirror-14C.
... Mirror, 5... Focus adjustment mechanism, 6... Eyepiece lens, 7... Image detector.
Claims (1)
とをもつ光学レンズ系と、この拡大された像を画像情報
信号として取り込む画像検出器と、この画像情報信号を
演算処理して前記被測定物表面における所定の領域間の
距離を測定する画像演算処理部とを有する微小寸法測定
器において、前記領域の高さの異なる段差面より反射す
る光を前記対物レンズ以降で分岐するハーフミラーと、
この分岐された光のいずれかを焦点調節する焦点調節機
構とを備え、前記異る段差面の結像を同一光路上の同一
位置に形成することを特徴とする微小寸法測定器。an optical lens system having an objective lens system and an eyepiece that magnify an image of the surface of the object to be measured; an image detector that captures this expanded image as an image information signal; A micro-dimensional measuring instrument having an image calculation processing unit that measures the distance between predetermined regions on the surface of an object, a half mirror that branches light reflected from a step surface having different heights of the regions after the objective lens;
A micro-dimensional measuring instrument comprising a focus adjustment mechanism that adjusts the focus of any of the branched lights, and forms images of the different stepped surfaces at the same position on the same optical path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2347590A JPH03226607A (en) | 1990-01-31 | 1990-01-31 | Minute size measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2347590A JPH03226607A (en) | 1990-01-31 | 1990-01-31 | Minute size measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03226607A true JPH03226607A (en) | 1991-10-07 |
Family
ID=12111558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2347590A Pending JPH03226607A (en) | 1990-01-31 | 1990-01-31 | Minute size measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03226607A (en) |
-
1990
- 1990-01-31 JP JP2347590A patent/JPH03226607A/en active Pending
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