JPH03225740A - Power source unit for neutral particle incidence device - Google Patents
Power source unit for neutral particle incidence deviceInfo
- Publication number
- JPH03225740A JPH03225740A JP2017851A JP1785190A JPH03225740A JP H03225740 A JPH03225740 A JP H03225740A JP 2017851 A JP2017851 A JP 2017851A JP 1785190 A JP1785190 A JP 1785190A JP H03225740 A JPH03225740 A JP H03225740A
- Authority
- JP
- Japan
- Prior art keywords
- power source
- electrode
- output
- power supply
- neutral particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007935 neutral effect Effects 0.000 title claims abstract description 34
- 239000002245 particle Substances 0.000 title claims abstract description 31
- 230000001133 acceleration Effects 0.000 claims abstract description 24
- 238000011084 recovery Methods 0.000 claims abstract description 23
- 238000002347 injection Methods 0.000 claims description 28
- 239000007924 injection Substances 0.000 claims description 28
- 239000003990 capacitor Substances 0.000 claims description 4
- 238000009499 grossing Methods 0.000 claims description 3
- 238000006386 neutralization reaction Methods 0.000 abstract description 8
- 150000002500 ions Chemical class 0.000 description 31
- 230000004927 fusion Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- -1 hydrogen ions Chemical class 0.000 description 1
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の目的〕
（産業上の利用分野）
本発明は、例えば核融合装置における中性粒子入射装置
用の電源装置の改良に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to an improvement of a power supply device for a neutral particle injection device in, for example, a nuclear fusion device.
（従来の技術）
従来から例えば核融合装置における中性粒子入射装置用
の電源装置としては、最大出力が１００〜２００ｋｖｄ
ｃのものが実用化されてきている。 これらの電源装置
は負荷であるイオン源から、水素等の正イオンを引き出
し、加速した後、正イオンを中性化して核融合装置に打
ち込む正イオン形中性粒子入射装置用の電源として使用
されたが、正イオン形中性粒子入射装置は、正イオンの
加速電圧が１００ｋＶを超えると急激に正イオン中性化
効率が低下して全体的なシステム効率が非常に低くなる
という本質的な欠点を有する。今後核融合装置の大形化
に伴い、中性粒子入射装置も高エネルギー化しなければ
ならないので、増々電源装置の出力は高電圧化していく
傾向にあり、１００ｋＶ以上でも中性化効率がほとんど
低下しない負イオン形中性粒子入射°装置の開発が待た
れている。しかし現状の正イオン形に匹敵する程大電力
の負イオン形中性粒子入射装置は実現していない。(Prior Art) Conventionally, for example, a power supply device for a neutral particle injection device in a nuclear fusion device has a maximum output of 100 to 200 kvd.
c has been put into practical use. These power supplies are used as power sources for positive ion type neutral particle injection devices that extract positive ions such as hydrogen from the ion source that is the load, accelerate them, neutralize the positive ions, and then inject them into the nuclear fusion device. However, the positive ion type neutral particle injection device has the essential drawback that when the positive ion acceleration voltage exceeds 100 kV, the positive ion neutralization efficiency decreases rapidly, resulting in a very low overall system efficiency. has. As nuclear fusion devices become larger in the future, neutral particle injection devices will also need to have higher energy, so the output of power supply devices will tend to increase in voltage, and even at 100 kV or higher, the neutralization efficiency will almost decrease. The development of a negative ion type neutral particle injection device that does not occur is awaited. However, a negative ion type neutral particle injection device with high power comparable to the current positive ion type has not been realized.
そこで、負イオン形の開発と並行して、正イオン形の電
源−効率を上げるために、これまでの装置においては熱
として捨てていた非中性化正イオンのエネルギーを電力
として回収しようとする試みが進められている。負イオ
ン形中性粒子入射装置においても、出力電圧が高くなる
に伴い、少しずつ中性化効率が下がるためＩ ＭｅＶ程
度の出力エネルギーのビームを入射するシステムでは正
イオン形中性粒子入射装置の場合と同様に電源効率を上
げるためにエネルギー回収を考えることが必要である。Therefore, in parallel with the development of the negative ion type, in order to increase the power efficiency of the positive ion type, we are attempting to recover the energy of non-neutralized positive ions, which was discarded as heat in conventional devices, as electricity. Attempts are underway. Even in a negative ion type neutral particle injection device, the neutralization efficiency gradually decreases as the output voltage increases, so in a system that injects a beam with an output energy of about I MeV, it is difficult to use a positive ion type neutral particle injection device. Similarly, it is necessary to consider energy recovery in order to increase power supply efficiency.
正イオン形・負イオン形のいずれのシステムにおいても
電源電圧の極性が異なるのみで他の構成は原理上、同じ
であるので以下の説明においては、正イオン形中性粒子
入射装置を例にとり説明する。第６図はこの種の電源装
置の基本構成を示したものである。下記の文献による。In both positive ion type and negative ion type systems, the only difference is the polarity of the power supply voltage, and the other configurations are basically the same, so the following explanation uses a positive ion type neutral particle injection device as an example. do. FIG. 6 shows the basic configuration of this type of power supply device. According to the following literature.
“Ｄｅｓｉｇｎ ５ｔｕｄｙ ｏｆ ａ １２０−ｋｅ
Ｖ、 ３Ｈｅ ｎｅｕｔｒａｌ ｂａａｍ １ｎｊｅｃ
ｆｏｒ”Ａ、 Ｓ、 Ｂｌｕｅ ｅｔａｊｔ、 ＬＬＮ
Ｌ、 ［ＪＳＡ ； ＬＬＮＬｐｒｅｐｒｉｎｔ ＵＣ
ＲＬ −８３４５６第６図において、１は負荷であるイ
オン源のアークチェンバ、２はイオン源の加速部電極、
３は中性化セル、４はエネルギー回収部の電子抑制電極
、５は回収電極、６はアークチェンバ１内のフィラメン
トを加熱するためのフィラメント電源、７はアークチェ
ンバ１内にアーク放電を発生させるアーク電源、８は加
速電源、９は加速電源８の出力電圧を制御しかつ入／切
するスイッチ、 １０は減速電源、１１は電子抑制電源
、１２は電子抑制電源１１の出力を分圧する抵抗器、Ｉ
３は補助電源である。“Design 5tudy of a 120-ke
V, 3He neutral baam 1njec
for”A, S, Blue etajt, LLN
L, [JSA; LLNLpreprint UC
In Figure 6 of RL-83456, 1 is the arc chamber of the ion source which is the load, 2 is the acceleration part electrode of the ion source,
3 is a neutralization cell, 4 is an electron suppression electrode of the energy recovery section, 5 is a recovery electrode, 6 is a filament power source for heating the filament in the arc chamber 1, and 7 is for generating an arc discharge in the arc chamber 1. 10 is a deceleration power source, 11 is an electronic suppression power source, 12 is a resistor that divides the output of the electronic suppression power source 11. , I
3 is an auxiliary power source.
かかる構成の電源装置において、図示されないガス導入
系よりアークチェンバ１内に導入された水素ガスはフィ
ラメント電源６及びアーク電源７の通電によりアーク放
電を起こしてプラズマ状態となる。このプラズマ中の水
素の正イオンは加速部電極２により引き出され、加速さ
れて中性化セル３内に入いる。ここで正イオンの一部は
中性ガスと荷電交換して、中性の水素原子になり、その
まま直進して、核融合装置に入射される。一方中性化セ
ル３内で中性化しなかった正イオンは、そのまま直進し
て回収電極５の領域に至ると、加速部電極２で正イオン
に印加された加速電圧より少し、低い電圧が印加されて
いる回収電極５により減速される。これに伴い回収電極
５の領域内の正イオンの空間密度が高まり互いに反発し
合って、外側に進行方向を曲げられ、回収電極５に衝突
する。これによって、回収電極５に電流が流れて、正イ
オンの運動エネルギーが電気エネルギーとして回収され
る。In the power supply device having such a configuration, hydrogen gas introduced into the arc chamber 1 from a gas introduction system (not shown) causes arc discharge by energization of the filament power source 6 and the arc power source 7, and becomes a plasma state. Positive hydrogen ions in the plasma are extracted by the accelerator electrode 2, accelerated, and enter the neutralization cell 3. Here, some of the positive ions exchange charge with the neutral gas and become neutral hydrogen atoms, which proceed straight and enter the fusion device. On the other hand, when the positive ions that have not been neutralized in the neutralization cell 3 continue straight and reach the area of the recovery electrode 5, a voltage slightly lower than the acceleration voltage applied to the positive ions at the acceleration section electrode 2 is applied. The speed is decelerated by the recovery electrode 5. As a result, the spatial density of positive ions within the region of the recovery electrode 5 increases and they repel each other, their traveling direction is bent outward and they collide with the recovery electrode 5. As a result, a current flows through the recovery electrode 5, and the kinetic energy of the positive ions is recovered as electrical energy.
加速電源８の出力電圧は、スイッチ９を介して補助電源
１３と回収電極５に与えられ、補助電源１３の出力電圧
を加えられて加速部電極２に印加される。加速部電極２
はその構造上頻繁に放電破壊を起こす上、放電破壊時に
放電発生部に、流入するエネルギーを極力小さく抑制し
てやらないと、電極自身の破壊に至るものであるため、
加速部電極２で放電破壊が発生したら、高速にこれを検
知して、即座にスイッチ９を切ることにより、加速部電
極２を保護している。一方、減速電源１０及び電子抑制
電源１１は、加速部電極２及び回収電極５内で生じた電
子が、加速されるのを防ぐための電源である。The output voltage of the accelerating power source 8 is applied to the auxiliary power source 13 and the recovery electrode 5 via the switch 9, and the output voltage of the auxiliary power source 13 is added thereto and applied to the accelerator electrode 2. Accelerator electrode 2
Because of its structure, it frequently suffers from discharge breakdown, and if the energy that flows into the discharge generation area at the time of discharge breakdown is not kept to a minimum, the electrode itself will be destroyed.
If discharge breakdown occurs in the accelerator electrode 2, this is detected at high speed and the switch 9 is immediately turned off to protect the accelerator electrode 2. On the other hand, the deceleration power source 10 and the electron suppression power source 11 are power sources for preventing the electrons generated within the accelerator electrode 2 and the recovery electrode 5 from being accelerated.
かかる構成とすることによって、回収電極５より回収さ
れた電源は補助電源１３を介して、再び加速部電極２に
流れるので加速電源８及びスイッチ９は、中性粒子とし
て回収電極５を通過する正味の電流に相当する定格を有
すれば十分であり、回収電極５のないシステムに比べて
、小型化することができる。特に従来、スイッチ９は大
電力の四極真空管を使用したので、定格電流が小さくな
ることは、比例して、四極真空管の消費電力を小さくで
きる。このため、せいぜいＩＭＶの許容消費電力しかな
い四極真空管を使用して回収電極５のないシステムに比
べて、より大パワーの中性粒子入射装置を構成できるメ
リットがあった。With this configuration, the power collected from the collection electrode 5 flows through the auxiliary power supply 13 to the accelerator electrode 2 again, so the acceleration power supply 8 and the switch 9 control the net amount of power that passes through the collection electrode 5 as neutral particles. It is sufficient to have a rating corresponding to the current of , and the system can be made smaller than a system without the recovery electrode 5. In particular, conventionally, the switch 9 uses a high-power tetrode vacuum tube, so a reduction in the rated current can proportionally reduce the power consumption of the tetrode vacuum tube. Therefore, compared to a system without the collection electrode 5 using a tetrode vacuum tube, which has an allowable power consumption of IMV at most, there is an advantage that a neutral particle injection device with higher power can be constructed.
（発明が解決しようとする課題）
以上のように、従来の中性粒子入射装置用電源装置では
、大電力四極真空管を用いてシステムを構成していたこ
とから、真空管の最大許容損失からシステムの入射パワ
ーが制限される問題があった。(Problems to be Solved by the Invention) As described above, in the conventional power supply device for the neutral particle injection device, the system was configured using a high-power tetrode vacuum tube. There was a problem that the incident power was limited.
そこで２本発明では、入射パワーをほぼ制限なく大きく
で、きる中性粒子入射装置用電源装置を提供することを
目的とするものである。Therefore, it is an object of the present invention to provide a power supply device for a neutral particle injection device that can increase the incident power almost without any limit.
（課題を解決するための手段）
上記の目的を達成するために、本発明の中性粒子入射装
置用電源装置では、例えば加速電源の出力を負荷である
イオン源の加速部の１枚の電極に接続すると共に、前記
加速電源の出力を分岐して、加速電源より電圧の低い直
流電圧を出力する第１の補助電源を介して回収電極に接
続し、更に、前記加速電源の出力を分岐して直流電圧を
出力する第２の補助電源を介してイオン源のアークチェ
ンバに接続した構成とする。(Means for Solving the Problems) In order to achieve the above object, in the power supply device for a neutral particle injection device of the present invention, for example, the output of the acceleration power source is connected to one electrode of the acceleration section of the ion source, which is the load. At the same time, the output of the accelerating power source is branched and connected to the recovery electrode via a first auxiliary power source that outputs a DC voltage lower in voltage than the accelerating power source, and the output of the accelerating power source is further branched. The ion source is connected to the arc chamber of the ion source via a second auxiliary power source that outputs a DC voltage.
（作用）
このような構成とした中性粒子入射装置用電源装置にお
いては、四極真空管がないので、加速電源出力をほぼ制
限なく大きくできると共に、第１の補助電源を介して流
れてくる回収電流の変動を、加速電源によって抑制する
ことができる。(Function) In the power supply device for the neutral particle injection device configured as described above, since there is no tetrode vacuum tube, the acceleration power supply output can be increased almost without limit, and the recovery current flowing through the first auxiliary power supply can be increased. It is possible to suppress fluctuations in the acceleration power source.
（実施例）
以下、上述のような考え方に基づく本発明の一実施例に
ついて、図面を参照して説明する。(Example) Hereinafter, an example of the present invention based on the above-mentioned concept will be described with reference to the drawings.
第１図は、本発明による中性粒子入射装置用電源装置の
構成例を示すものである。すなわち、第１図は、加速電
源８の出力を、負荷であるイオン源の加速部電極２の１
枚に接続すると共に、前記加速源８の出力を分岐して、
加速電源８より電圧の低い直流電圧を出力する第１の補
助電源１３ａを介して回収電極５に接続し、更に、前記
加速電源８の出力を分岐して直流電圧を出力する第２の
補助電源１３ｂを介して、 イオン源のアークチェンバ
１に接続して構成したものである。このように構成した
ことにより、回収電源５からの回収電流は第１の補助電
源１３ａを通って、再び加速部電極２に流れ、中性化セ
ル３内で中性化されて、プラズマ中に入射される正味の
電流に相当する分が加速電源８から供給される。第２の
補助電源１３ｂは、アークチェンバ１と加速部電極２と
の間に電位差を与える電源で、通常数Ｖ〜数十ｖ程度で
ある。FIG. 1 shows an example of the configuration of a power supply device for a neutral particle injection device according to the present invention. In other words, in FIG.
and branching the output of the acceleration source 8,
A second auxiliary power source is connected to the recovery electrode 5 via a first auxiliary power source 13a that outputs a DC voltage lower in voltage than the acceleration power source 8, and further branches the output of the acceleration power source 8 to output a DC voltage. 13b, it is connected to the arc chamber 1 of the ion source. With this configuration, the recovery current from the recovery power source 5 passes through the first auxiliary power source 13a, flows to the accelerating section electrode 2 again, is neutralized in the neutralization cell 3, and is added to the plasma. An amount corresponding to the net input current is supplied from the accelerating power source 8. The second auxiliary power source 13b is a power source that provides a potential difference between the arc chamber 1 and the accelerator electrode 2, and is usually about several volts to several tens of volts.
従って、直流スイッチがないためほぼ制限なく大パワー
の中−性粒子入射装置を提供することができる。Therefore, since there is no DC switch, it is possible to provide a high power neutral particle injection device with almost no limitations.
なお、本実施例において、加速電源８と第１の補助電源
１３ａは、例えば第２図のように構成することができる
。In this embodiment, the acceleration power source 8 and the first auxiliary power source 13a can be configured as shown in FIG. 2, for example.
第２図において１４はＡＣ／ＡＣコンバータ、１５は変
圧器、１６はダイオード整流器である。このような構成
において、ＡＣ／ＡＣコンバータ１４の入力は高周波化
されて、変圧器１５に入力され、続いてダイオード整流
器１６に入力されて直流に変換される。ＡＣ／ＡＣコン
バータ１４は、スイッチング機能を有し、直流側に短絡
等があった場合に即座に、直流出力をオフすることがで
きる。このような構成は、第１図における加速電源８と
第１の補助電源１３ａのいずれにも適用できるが、加速
電源８のみに適用することもできる。この場合、第１の
補助電源１３ａは、例えば第３図のようにも構成するこ
とができる。In FIG. 2, 14 is an AC/AC converter, 15 is a transformer, and 16 is a diode rectifier. In such a configuration, the input of the AC/AC converter 14 is made high-frequency, inputted to the transformer 15, and then inputted to the diode rectifier 16, where it is converted into direct current. The AC/AC converter 14 has a switching function and can immediately turn off the DC output when there is a short circuit or the like on the DC side. Although such a configuration can be applied to both the acceleration power source 8 and the first auxiliary power source 13a in FIG. 1, it can also be applied only to the acceleration power source 8. In this case, the first auxiliary power source 13a can also be configured as shown in FIG. 3, for example.
第３図において、１７は出力電圧可変の変圧器、１８は
ダイオード整流器、１９は平滑回路、２０はスイッチ、
２１はリアクトル、２２はダイオードである。In FIG. 3, 17 is a variable output voltage transformer, 18 is a diode rectifier, 19 is a smoothing circuit, 20 is a switch,
21 is a reactor, and 22 is a diode.
このような構成において、変圧器１７の出力はダイオー
ド整流器１８に入力されて直流に変換されて平滑回路１
９により出力電圧が平滑化される。この出力はスイッチ
２０によって、入／切される。リアクトル２１とダイオ
ード２２は、この電源回路の出力端における短絡等の異
常時スイッチ２０等に印加される異常電圧を除去するた
めのものである。In such a configuration, the output of the transformer 17 is input to the diode rectifier 18 and converted to direct current, which is then passed through the smoothing circuit 1.
9 smooths the output voltage. This output is turned on/off by a switch 20. The reactor 21 and the diode 22 are for removing an abnormal voltage applied to the switch 20 and the like in the event of an abnormality such as a short circuit at the output end of this power supply circuit.
本発明は上述した実施例に限定されるものではなく、次
のようにしても実施することができる。The present invention is not limited to the embodiments described above, but can also be implemented as follows.
第４図は本発明による中性粒子入射装置用電源装置の第
２の実施例を示したものであり、第１図と同一部分には
、同一符号を付して、その説明を省略し、ここでは異な
る部分についてのみ述べる。FIG. 4 shows a second embodiment of the power supply device for a neutral particle injection device according to the present invention, and the same parts as in FIG. Only the different parts will be described here.
すなわち第４図は、第１図における第２の補助電源１３
ｂを、 抵抗器２２とコンデンサ２３で代用したもので
ある。イオン源の構造にもよるがアークチェンバ１と加
速部電極２との間には、多少の電位差が発生する場合が
ある。この時抵抗器２２によりその電位差を保持するこ
とができる。コンデンサ２３は、アークチェンバ１と加
速部電極２との間を高周波的に接続するためのカップリ
ングコンデンサである。That is, FIG. 4 shows the second auxiliary power supply 13 in FIG.
b is replaced by a resistor 22 and a capacitor 23. Although it depends on the structure of the ion source, some potential difference may occur between the arc chamber 1 and the accelerator electrode 2. At this time, the potential difference can be maintained by the resistor 22. The capacitor 23 is a coupling capacitor for high frequency connection between the arc chamber 1 and the accelerator electrode 2.
かかるように構成しても第１図の構成例と同じ作用を有
する。Even with such a configuration, the same effect as the configuration example shown in FIG. 1 is obtained.
第５図は本発明による中性粒子入射装置用電源装置の第
３の実施例を示したものであり第１図と同一部分には、
同一符号を付して、その説明を省略し、ここでは、異な
る部分についてのみ述べる。FIG. 5 shows a third embodiment of the power supply device for a neutral particle injection device according to the present invention, and the same parts as FIG. 1 include:
The same reference numerals are used to omit the explanation, and only the different parts will be described here.
すなわち、第５図は加速電源８の出力を回収電極５に直
接接続すると共に、第１の補助電源１３ａを介してイオ
ン源の加速部電極２の１枚に接続し、更に第１の補助電
源１３ａの出力を第２の補助電源１３ｂを介して、アー
クチェンバ１に接続して構成したものである。このよう
に構成しても第１図の構成例と同じ作用を有することが
できる。That is, in FIG. 5, the output of the accelerating power source 8 is directly connected to the recovery electrode 5, and also connected to one of the accelerator electrodes 2 of the ion source via the first auxiliary power source 13a, and further connected to the first auxiliary power source 13a. 13a is connected to the arc chamber 1 via a second auxiliary power source 13b. Even with this configuration, it is possible to have the same effect as the configuration example shown in FIG.
以上説明したように、本発明によれば、四極真空管を用
いないで済むので入射パワーをほぼ制限なく大きくでき
る中性粒子入射装置用電源装置を提供することができる
。As explained above, according to the present invention, it is possible to provide a power supply device for a neutral particle injection device that can increase the incident power almost without any limit because it does not require the use of a tetrode vacuum tube.
第１図は本発明による中性粒子入射装置用電源装置の第
１の実施例を示す構成図、第２図及び第３図は上記実施
例における加速電源と補助電源の構成図、第４図と第５
図は本発明の他の実施例を示す構成図、第６図は従来の
中性粒子入射装置用電源装置の構成図である。
１・・・アークチェンバ ２・・・加速部電極５・
・・回収電極 ８・・・加速電源１３ａ、
１３ｂ・・・補助電源FIG. 1 is a block diagram showing a first embodiment of a power supply device for a neutral particle injection device according to the present invention, FIGS. 2 and 3 are block diagrams of an accelerating power supply and an auxiliary power supply in the above embodiment, and FIG. 4 and the fifth
The figure is a block diagram showing another embodiment of the present invention, and FIG. 6 is a block diagram of a conventional power supply device for a neutral particle injection device. 1...Arc chamber 2...Acceleration section electrode 5.
...Recovery electrode 8...Acceleration power source 13a,
13b...Auxiliary power supply
Claims (6)
るイオン源の加速部の電極の一部に接続し、前記加速電
源の出力を分岐して加速電源より電圧の低い直流電圧を
出力する第１の補助電源を介して回収電極に接続し、前
記加速電源の出力を分岐して直流電圧を出力する第２の
補助電源を介してイオン源のアークチェンバに接続した
ことを特徴とする中性粒子入射装置用電源装置。(1) Connect the output of an accelerating power source that outputs a high DC voltage to a part of the electrode of the accelerating section of the ion source, which is a load, and branch the output of the accelerating power source to output a DC voltage that is lower in voltage than the accelerating power source. The ion source is connected to the recovery electrode via a first auxiliary power source that outputs a DC voltage, and connected to the arc chamber of the ion source via a second auxiliary power source that branches the output of the acceleration power source and outputs a DC voltage. Power supply device for neutral particle injection device.
補助電源を介してイオン源の加速部の電極の一部に接続
し、第１の補助電源の出力を第２の補助電源を介してイ
オン源のアークチャンバに接続したことを特徴とする中
性粒子入射装置用電源装置。(2) Connect the output of the accelerating power source directly to the recovery electrode, connect it to a part of the electrode of the acceleration section of the ion source via the first auxiliary power source, and connect the output of the first auxiliary power source to the second auxiliary power source. A power supply device for a neutral particle injection device, characterized in that the power supply device is connected to an arc chamber of an ion source via a.
オード整流器で構成したことを特徴とする請求項（１）
または（２）記載の中性粒子入射装置用電源装置。(3) Claim (1) characterized in that the accelerating power source is composed of an AC/AC converter, a transformer, and a diode rectifier.
Or a power supply device for a neutral particle injection device described in (2).
ード整流器と平滑回路と直流スイッチとリアクトルで構
成したことを特徴とする請求項（１）または（２）記載
の中性粒子入射装置用電源装置。(4) The neutral particle injection device according to claim (1) or (2), characterized in that the first auxiliary power source is constituted by a transformer with variable output voltage, a diode rectifier, a smoothing circuit, a DC switch, and a reactor. power supply unit.
てなる請求項（１）または（２）記載の中性粒子入射装
置用電源装置。(5) A power supply device for a neutral particle injection device according to claim (1) or (2), wherein the second auxiliary power supply is replaced with a resistor and a capacitor.
とダイオード整流器で構成したことを特徴とする請求項
（１）または（２）記載の中性粒子入射装置用電源装置
。(6) A power supply device for a neutral particle injection device according to claim (1) or (2), wherein the first auxiliary power source is composed of an AC/AC converter, a transformer, and a diode rectifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017851A JPH03225740A (en) | 1990-01-30 | 1990-01-30 | Power source unit for neutral particle incidence device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017851A JPH03225740A (en) | 1990-01-30 | 1990-01-30 | Power source unit for neutral particle incidence device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03225740A true JPH03225740A (en) | 1991-10-04 |
Family
ID=11955165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017851A Pending JPH03225740A (en) | 1990-01-30 | 1990-01-30 | Power source unit for neutral particle incidence device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03225740A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0541294A (en) * | 1991-07-31 | 1993-02-19 | Masahiro Nishikawa | Neutral particle beam radiation equipment |
| JPH05101899A (en) * | 1991-10-07 | 1993-04-23 | Masahiro Nishikawa | Neutral particle beam irradiation device |
| KR100671675B1 (en) * | 1999-12-20 | 2007-01-18 | 액셀리스 테크놀로지스, 인크. | Power supply hardening for ion beam systems |
-
1990
- 1990-01-30 JP JP2017851A patent/JPH03225740A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0541294A (en) * | 1991-07-31 | 1993-02-19 | Masahiro Nishikawa | Neutral particle beam radiation equipment |
| JPH05101899A (en) * | 1991-10-07 | 1993-04-23 | Masahiro Nishikawa | Neutral particle beam irradiation device |
| KR100671675B1 (en) * | 1999-12-20 | 2007-01-18 | 액셀리스 테크놀로지스, 인크. | Power supply hardening for ion beam systems |
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