JPH03225739A - Structure of power source introduction part for electron beam generation device - Google Patents
Structure of power source introduction part for electron beam generation deviceInfo
- Publication number
- JPH03225739A JPH03225739A JP1804590A JP1804590A JPH03225739A JP H03225739 A JPH03225739 A JP H03225739A JP 1804590 A JP1804590 A JP 1804590A JP 1804590 A JP1804590 A JP 1804590A JP H03225739 A JPH03225739 A JP H03225739A
- Authority
- JP
- Japan
- Prior art keywords
- insulator
- oil tank
- oil
- terminal block
- cooling water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 7
- 239000012212 insulator Substances 0.000 claims abstract description 31
- 239000000498 cooling water Substances 0.000 claims abstract description 14
- 238000009413 insulation Methods 0.000 abstract description 5
- 238000007789 sealing Methods 0.000 abstract description 4
- 238000002955 isolation Methods 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 238000001816 cooling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は電子ビーム発生装置の電源導入部の冷却構造に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a cooling structure for a power introduction part of an electron beam generator.
第２図は電子ビーム発生装置の従来の電源導入部を示し
たもので、１は電子ビーム発生装置の筒状容器、２は筒
状容器１の上蓋部、３は筒状の絶縁碍子であって、鍔部
４を有し、この鍔部４より下方部分５を上蓋部２の中央
に形成した孔部２Ａを通して筒状容器１内に挿入されて
いる。６は環体であって、絶縁碍子３の鍔部４に外嵌さ
れて上蓋部２上に載置されている。７は頭部７Ａを有す
る絶縁ブロックであって、頭部７Ａを絶縁碍子３の上面
に係合して該絶縁碍子３内に嵌入されたうえ上電源導入
部カバー８に螺着されたキャップ８Ａで保護縁板８Ｂを
介し固定されている。絶縁ブロック７の下部には高圧コ
ネクタ９Ａ、９Ｂの一部を収納する凹部７Ｂが形成され
ている。ｌＯは端子台であって、絶縁碍子３に嵌着され
ており、この端子台１０には電流導入端子１２が設けら
れている。電流導入端子１２Ａ、１２Ｂは高圧コネクタ
に接続されるとともにカソードユニット１３に接続され
る。カソードユニット１３はカソード電力とウェーネル
ト電極を有し、カソードホルダ１４で端子台１０に支持
されている。１５はアット電極、１６は収束レンズであ
る。１７Ａ、１７Ｂは高圧ケーブルであって、外部から
絶縁ブロック７を貫通して引き込まれ、高圧コネクタ９
Ａ、９Ｂに接続される。１８．１９はシールド部材であ
る。Fig. 2 shows a conventional power introduction part of an electron beam generator, in which 1 is a cylindrical container of the electron beam generator, 2 is the upper lid of the cylindrical container 1, and 3 is a cylindrical insulator. It has a flange 4, and a portion 5 below the flange 4 is inserted into the cylindrical container 1 through a hole 2A formed in the center of the upper lid 2. Reference numeral 6 denotes a ring body, which is fitted around the collar 4 of the insulator 3 and placed on the upper lid 2. Reference numeral 7 denotes an insulating block having a head 7A, which is fitted into the insulator 3 by engaging the head 7A with the upper surface of the insulator 3, and a cap 8A screwed onto the upper power introduction part cover 8. It is fixed via the protective edge plate 8B. A recess 7B is formed in the lower part of the insulating block 7 to accommodate a portion of the high voltage connectors 9A and 9B. 1O is a terminal block, which is fitted onto the insulator 3, and this terminal block 10 is provided with a current introduction terminal 12. The current introduction terminals 12A and 12B are connected to the high voltage connector and also to the cathode unit 13. The cathode unit 13 has a cathode power and a Wehnelt electrode, and is supported on the terminal block 10 by a cathode holder 14 . 15 is an at electrode, and 16 is a converging lens. High-voltage cables 17A and 17B are drawn in from the outside through the insulation block 7, and are connected to the high-voltage connector 9.
Connected to A and 9B. 18 and 19 are shield members.
この従来の電源導入部の構造では、カソードホルダ）１
３から端子台１０等を通して絶縁碍子３に伝導する熱に
より高圧コネクタ９Ａ、９Ｂのコネクタ接点やシールド
部材１８．１９等の傷みが激しいという問題があった。In this conventional structure of the power introduction part, the cathode holder) 1
There has been a problem in that the connector contacts, shield members 18, 19, etc. of the high voltage connectors 9A, 9B are severely damaged due to heat conducted from the high voltage connectors 3 to the insulator 3 through the terminal block 10, etc.
本発明は上記問題を解消するためになされたもので、カ
ソードユニットからの熱を外部に逃散さ廿ることができ
る電子ビーム発生装置の電源導入部の構造を提供するこ
とを目的とする。The present invention has been made to solve the above problems, and an object of the present invention is to provide a structure of a power introduction part of an electron beam generator that can dissipate heat from a cathode unit to the outside.
本発明は上記目的を達成するため、カソードユニットお
よびアノードを収納した筒状容器の上蓋部を貫通して上
方に伸びる筒状絶縁碍子、この筒状絶縁碍子に嵌入され
・て該筒状絶縁碍子の上部を塞ぐ絶縁ブロック、この絶
縁ブロックの下面を覆い上記筒状絶縁碍子に油密に内嵌
される上端子台、上記筒状絶縁碍子内を上記上端子台側
と上記筒状容器側とに区画し上記上端子台との間に絶縁
油を貯える油槽を形成する上端子台、この油槽を上記絶
縁碍子を介在して取巻く冷却水通路を有し、上記上端子
台には高圧コネクタが設けられ、上記上端子台には上記
油槽内で上記高圧コネクタと接続されるとともに上記カ
ソードユニットに接続される電流導入端子が設けられ、
外部から上記絶縁ブロックを通して引き込まれた高圧ケ
ーブルは上記高圧コネクタに接続される構成としたもの
である。In order to achieve the above object, the present invention includes a cylindrical insulator that extends upwardly through the upper lid of a cylindrical container housing a cathode unit and an anode; an insulating block that covers the upper part of the insulating block, an upper terminal block that covers the lower surface of the insulating block and is oil-tightly fitted into the cylindrical insulator, and an insulating block that connects the inside of the cylindrical insulator to the upper terminal block side and the cylindrical container side. an upper terminal block that is partitioned into an oil tank for storing insulating oil between the upper terminal block and the upper terminal block, a cooling water passage surrounding the oil tank with the insulator interposed therebetween, and a high voltage connector attached to the upper terminal block; and the upper terminal block is provided with a current introduction terminal connected to the high voltage connector in the oil tank and connected to the cathode unit,
A high voltage cable drawn in from the outside through the insulating block is connected to the high voltage connector.
（作用）
本発明では、カソードユニットが接続される電流導入端
子の端子台の上方に絶縁油の油槽を区画したので、カソ
ードユニットからの熱はこの絶縁油を通して絶縁碍子に
速やかに熱伝達され、絶縁碍子に伝達された熱は該絶縁
碍子を取り巻く冷却水通路の冷却水によって奪熱される
。(Function) In the present invention, since an oil tank containing insulating oil is partitioned above the terminal block of the current introduction terminal to which the cathode unit is connected, heat from the cathode unit is quickly transferred to the insulator through the insulating oil. The heat transferred to the insulator is removed by cooling water in a cooling water passage surrounding the insulator.
（実施例〕 以下、本発明の１実施例を図面を参照して説明する。(Example〕 Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
第１図において、端子台１０はシール部材２１を介在し
て絶縁碍子３に油密に嵌合し、絶縁碍子３に溶着されて
いる上端子台（金属板）１１との間に油槽３０を区画し
て、この油槽３０に絶縁油３１が充填されている。３２
は冷却水通路であって、絶縁碍子３の油槽３０に対応す
る部分の外周を取り巻いて電源導入部カバー８の内周に
形成された凹部８Ｂに嵌着され、電源導入部カバー８を
貫通して図示しない循環ポンプを介し冷却水タンク（図
示しない）に接続されている。In FIG. 1, the terminal block 10 is oil-tightly fitted to the insulator 3 with a seal member 21 interposed therebetween, and an oil tank 30 is provided between the terminal block 10 and the upper terminal block (metal plate) 11 welded to the insulator 3. This oil tank 30 is divided and filled with insulating oil 31. 32
is a cooling water passage, which is fitted into a recess 8B formed on the inner periphery of the power introduction part cover 8 surrounding the outer periphery of the part of the insulator 3 corresponding to the oil tank 30, and passes through the power introduction part cover 8. It is connected to a cooling water tank (not shown) via a circulation pump (not shown).
この構成においては、カソードユニット１３で発生した
熱は上端子台１１等から油槽３０内の絶縁油３１を通し
て、容易に、速やかに絶縁碍子３に熱伝達され、絶縁碍
子３の熱は冷却水通路３２を流れる冷却水が奪熱する。In this configuration, the heat generated in the cathode unit 13 is easily and quickly transferred from the upper terminal block 11 etc. to the insulator 3 through the insulating oil 31 in the oil tank 30, and the heat of the insulator 3 is transferred to the cooling water passage. The cooling water flowing through 32 absorbs heat.
従って、絶縁碍子３が高温度に上昇することは防止され
、高圧コネク・夕やシール部材が高温で傷むことが無く
なる。Therefore, the insulator 3 is prevented from rising to a high temperature, and the high-voltage connector, connector, and seal member are prevented from being damaged by the high temperature.
本発明は以上説明した通り、電源導入部の高圧コネクタ
部とカソードユニット接続部との間に絶縁油の油槽を区
画し、その周囲を絶縁碍子を介して冷却水通路で囲んだ
から、カソードユニットが発生する熱を速やかに外部に
逃散させることができ、電源導入部のシール部材等の熱
による損傷を防止し、従来に比し、長持ちさせることが
でき、信頼性を向上することができる。As explained above, in the present invention, an oil tank for insulating oil is partitioned between the high-voltage connector part of the power introduction part and the cathode unit connection part, and the tank is surrounded by a cooling water passage through an insulator, so that the cathode unit The generated heat can be quickly dissipated to the outside, preventing damage to the sealing member of the power introduction part, etc. due to heat, making it possible to extend the life of the seal member, etc. in the power introduction part, and improve reliability.
第１図は本発明の実施例を示す縦断面図、第２図は従来
の電子ビーム発生装置の電源導入部を示す縦断面図であ
る。
１−筒状容器、２−上蓋部、３−筒状絶縁碍子、７−・
絶縁ブロック、８−電源導入部カバー７Ｂ−凹部、８Ｂ
−保護板、９Ａ、９Ｂ−高圧コネクタ、１０・一端子台
、１１−下端千金、１２Ａ、１２Ｂ〜電流端子、１３−
カソードユニット、１４−カソードホルダ、１５−アノ
ード電極、１７ＡＳ １７Ｂ−高圧ケーブル、３０−油
槽３ｍ−一絶縁油、３２−冷却水通路。FIG. 1 is a vertical cross-sectional view showing an embodiment of the present invention, and FIG. 2 is a vertical cross-sectional view showing a power introduction section of a conventional electron beam generator. 1- cylindrical container, 2- upper lid part, 3- cylindrical insulator, 7-.
Insulation block, 8-power supply introduction part cover 7B-recess, 8B
-Protection plate, 9A, 9B-High voltage connector, 10/1 terminal block, 11-Lower end gold plate, 12A, 12B~Current terminal, 13-
Cathode unit, 14-cathode holder, 15-anode electrode, 17AS 17B-high voltage cable, 30-oil tank 3m--insulating oil, 32-cooling water passage.
Claims (1)
上蓋部を貫通して上方に伸びる筒状絶縁碍子、この筒状
絶縁碍子に嵌入されて該筒状絶縁碍子の上部を塞ぐ絶縁
ブロック、この絶縁ブロックの下面を覆い上記筒状絶縁
碍子に油密に内嵌される上端子台、上記筒状絶縁碍子内
を上記上端子台側と上記筒状容器側とに区画し上記上端
子台との間に絶縁油を貯える油槽を形成する下端子台、
この油槽を上記絶縁碍子を介在して取巻く冷却水通路を
有し、上記上端子台には高圧コネクタが設けられ、上記
下端子台には上記油槽内で上記高圧コネクタと接続され
るとともに上記カソードユニットに接続される電流導入
端子が設けられ、外部から上記絶縁ブロックを通して引
き込まれた高圧ケーブルは上記高圧コネクタに接続され
ることを特徴とする電子ビーム発生装置の電源導入部の
構造。A cylindrical insulator that extends upwardly through the upper lid of a cylindrical container housing a cathode unit and an anode; an insulating block that is fitted into the cylindrical insulator to close the upper part of the cylindrical insulator; an upper terminal block that covers the lower surface and is oil-tightly fitted into the cylindrical insulator; the interior of the cylindrical insulator is divided into the upper terminal block side and the cylindrical container side; The lower terminal block forms an oil tank for storing insulating oil,
A cooling water passage surrounds the oil tank with the insulator interposed therebetween, the upper terminal block is provided with a high voltage connector, and the lower terminal block is connected to the high voltage connector in the oil tank and is connected to the cathode. A structure of a power introduction part of an electron beam generator, characterized in that a current introduction terminal connected to the unit is provided, and a high voltage cable drawn from the outside through the insulating block is connected to the high voltage connector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804590A JPH03225739A (en) | 1990-01-30 | 1990-01-30 | Structure of power source introduction part for electron beam generation device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1804590A JPH03225739A (en) | 1990-01-30 | 1990-01-30 | Structure of power source introduction part for electron beam generation device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03225739A true JPH03225739A (en) | 1991-10-04 |
Family
ID=11960719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1804590A Pending JPH03225739A (en) | 1990-01-30 | 1990-01-30 | Structure of power source introduction part for electron beam generation device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03225739A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680866B1 (en) * | 2005-10-31 | 2007-02-09 | (주) 브이에스아이 | An insulation-oil tank of an ion source |
| CN105161394A (en) * | 2015-08-13 | 2015-12-16 | 北京中科科仪股份有限公司 | High-voltage cable leading-in device of field emission electron gun |
| CN110227909A (en) * | 2019-06-17 | 2019-09-13 | 中国航发南方工业有限公司 | Open type double-layer heat insulation tank body of oil tank processing method |
-
1990
- 1990-01-30 JP JP1804590A patent/JPH03225739A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100680866B1 (en) * | 2005-10-31 | 2007-02-09 | (주) 브이에스아이 | An insulation-oil tank of an ion source |
| CN105161394A (en) * | 2015-08-13 | 2015-12-16 | 北京中科科仪股份有限公司 | High-voltage cable leading-in device of field emission electron gun |
| CN110227909A (en) * | 2019-06-17 | 2019-09-13 | 中国航发南方工业有限公司 | Open type double-layer heat insulation tank body of oil tank processing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7274551B1 (en) | Hermetically sealed electrolytic capacitor | |
| CA1217537A (en) | Hermetic terminal assembly | |
| US6700471B2 (en) | Fixing device of current transformer | |
| CN101714616B (en) | Electrode leading structure and electricity storage electric element adopting thereof | |
| US3187292A (en) | Junction device for electrical cables | |
| JP3634865B2 (en) | Device for preventing fault arcs, especially for low voltage switchgear for electrical energy distribution | |
| JPH03225739A (en) | Structure of power source introduction part for electron beam generation device | |
| JP2021530841A (en) | Battery safety vent assembly | |
| US2896136A (en) | Semiconductor units | |
| US2490598A (en) | Tubular secondary electric battery | |
| TWI801535B (en) | X-ray generating device | |
| JPH0222523B2 (en) | ||
| JPS62183103A (en) | High voltage current transformer and manufacture of the same | |
| US4084076A (en) | Electron beam welding gun | |
| US6375497B1 (en) | Recessed hermetic terminal assembly | |
| US4769521A (en) | Small TIG-arc welding torch | |
| CN219287791U (en) | High-efficient radiating micro-focus ray source | |
| US1110557A (en) | Mercury-vapor rectifier. | |
| JP4279994B2 (en) | X-ray tube device | |
| JPH0668861A (en) | Lithium-ion secondary battery | |
| JPH057725Y2 (en) | ||
| JPH05144494A (en) | Hermetically sealed terminal and hermetic motor-driven compressor | |
| JP2019169424A (en) | Bushing | |
| JPH0356025Y2 (en) | ||
| JP2007014070A (en) | Insulating spacer for gas-insulated electrical equipment |