JPH03222878A - Piezoelectric vibrator pump - Google Patents

Abstract

PURPOSE:To enable to transfer multiple fluids simultaneously with one piezoelectric vibrator by installing a piezoelectric vibrator in the inner part of a casing, thereby forming plural chambers, and then forming each of inlet ports and discharge ports, equipped with a check valve each, in each of these chambers. CONSTITUTION:A cylindrical piezoelectric vibrator 2 is installed in the inner part of a cylindrical casing 1 free of slide motion, and each of pump chambers 11, 12 is formed in and out of this piezoelectric vibrator 2. In addition, each of inlet ports 4a, 4b and discharge ports 5a, 5b is formed in each of these pump chambers 11, 12, while each of suction side check valves 6a, 6b and discharge side check valves 7a, 7b is installed in these ports respectively. Then, an alternating voltage is impressed on the piezoelectric vibrator 2 whereby this vibrator 2 is vibrated so as to increase or decrease its diameter. With this constitution, each capacity of these pump chambers 11, 12 is increased and decreased alternately, thereby having a fluid sucked or discharged alternately in or from these pump chambers 11, 12. Therefore multiple fluids are simultaneously transferrable with one piezoelectric vibrator 1 alone.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pump using a piezoelectric vibrator for transferring a small flow of liquid in chemical, medical, household, etc. applications.

[Prior Art] A conventional vibrator pump using a piezoelectric vibrator generally has two flat piezoelectric vibrators 2 inside a casing 1 as shown in FIG.
The piezoelectric vibrator 2 is divided into chambers, and a pump chamber 3 is formed on one side of the piezoelectric vibrator 2. The pump chamber 3 is provided with a suction port 4 and a discharge port 5, and a suction side check valve 6 and a discharge side check valve 7 are installed at the suction port 4 and discharge port 5, respectively.

By applying an alternating voltage to this piezoelectric vibrator 2, the piezoelectric vibrator 2 vibrates, and the volume of the pump chamber 3 increases or decreases, so that fluid is sucked into the pump chamber 3 from the suction port 4 and discharged from the discharge port 5. Ru.

[Problem B to be Solved by the Invention] In the conventional piezoelectric vibrator pump described above, only one type of fluid could be transferred.

In addition, the flat piezoelectric vibrator has a unimorph type, bimorph type, or laminated type structure.
These were made by bonding a piezoelectric material to a support and a piezoelectric material to another piezoelectric material, and had a complicated structure.

[Means for Solving the Problems] The piezoelectric vibrator pump of the present invention has a cylindrical piezoelectric vibrator that divides the inside of the casing into two chambers, one inside the cylinder and the other outside the cylinder, and each chamber has an inlet and a discharge port. The invention is characterized in that a suction side check valve and a discharge side check valve are provided at each suction port and each discharge port, respectively.

[Function] If the piezoelectric vibrator pump of the present invention fails, an alternating voltage is applied to the piezoelectric vibrator, and when the piezoelectric vibrator is deformed (displaced) so as to reduce the volume of one chamber, the other chamber is deformed (displaced). The interior volume of the room is increased. Since both chambers are each provided with an inlet and an outlet with check valves, both chambers function as pump chambers. Therefore, by supplying different types of fluids to each chamber, it is possible to simultaneously transfer two or more types of fluids.

Furthermore, since it is sufficient to simply mold the piezoelectric body into a cylindrical shape, the piezoelectric vibrator has a simple structure and is easy to manufacture.

[Example] Examples will be described below with reference to the drawings.

FIG. 1 is a longitudinal cross-sectional view of a piezoelectric vibrator pump according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along line II-II in FIG. 1. In this embodiment, the casing! has a cylindrical shape, and a cylindrical piezoelectric sensor 2 is loaded inside it. The upper and lower end surfaces of the piezoelectric vibrator 2 are connected to the casing 1, respectively.
It is slidably in contact with the ceiling surface and bottom surface (floor surface) of the The inside side of the piezoelectric vibrator 2 is the first pump chamber 11, and the outside side is the second pump chamber 12. Each pump chamber 11.1
2 are respectively provided with suction ports 4a, 4b and discharge ports 5a, 5b, and each suction port and discharge port is provided with a suction side check valve 6a, 6b and a discharge side check valve 7a, 7b, respectively. .

In the piezoelectric vibrator pump configured in this way, the pressure
When an alternating voltage is applied to the rILtjA mover 2, the piezoelectric vibrator 2 vibrates to increase or decrease its diameter.

3 shows a state in which the piezoelectric vibrator 2 has a reduced diameter, and FIG. 4 shows a state in which the piezoelectric vibrator 2 has an increased diameter. During the transition from the state shown in FIG. 4 to the state shown in FIG. 3, the volume of the first pump chamber 11 decreases and the volume of the second pump chamber 11 decreases.
The volume of the pump chamber 12 increases. As a result, the fluid in the first pump chamber 11 is discharged, and the pump chamber 12 of 's2
Fluid is sucked into it. During the transition from the state shown in FIG. 3 to the state shown in FIG. 4, the volume of the first pump chamber 11 increases and the volume of the second pump chamber 12 decreases. As a result, the fluid in the second pump chamber 12 is discharged, and the NIJ
Fluid is sucked into the pump chamber 11 of t.

In this way, according to this piezoelectric vibrator pump, one piezoelectric sensor can simultaneously achieve 2f! or more fluids can be transferred. Furthermore, the piezoelectric vibrator has a simple cylindrical shape, and is easy to manufacture.

In the above embodiment, each pump chamber 11.12 is provided with one suction port and one discharge port, but the number of suction ports and discharge ports may be two or more. Although the casing 1 is shown to have a cylindrical shape, it may have another shape.

In the present invention, the dimensions and shape of the piezoelectric vibrator are appropriately selected depending on the ff1yA, physical properties, flow rate, pressure, etc. of the fluid used. As the check valve, various check valves such as a poppet valve, a duck valve, and an umbrella valve can be used.

In the present invention, the fluid may be either gas or liquid, and even if they are transferred at the same time,
Liquids and liquids, gases and gases, liquids and gases, etc. can be arbitrarily selected.

[Effect J As described above, according to the piezoelectric vibrator pump of the present invention, two types of fluids can be transferred simultaneously. Moreover, it is therefore possible to reduce power consumption per unit transfer amount of the pump. Furthermore, the space occupied by the pump can also be reduced.

The piezoelectric vibrator used in the present invention has a simple structure and can be easily manufactured because it is only necessary to mold the piezoelectric body into a cylindrical shape or the like when manufacturing the piezoelectric vibrator.

[Brief explanation of drawings]

FIG. 1 is a longitudinal sectional view of a piezoelectric vibrator pump according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II in FIG. 1,
3 and 4 are explanatory diagrams of the same operation, and FIG. 5 is a sectional view showing a conventional example. 1... Casing, 2... Piezoelectric vibrator, 3... Pump chamber, 4, 4a, 4b... Suction port, 5.5a,
5b...Discharge port, 6.6a, 6b, 7, 7a, 7b...Check valve, 11.
12...Pump room.

Claims (1)

[Claims] The inside of the casing is divided into two chambers, one inside the cylinder and the other outside the cylinder, using a cylindrical piezoelectric vibrator. Each chamber is provided with an inlet and an outlet, and each inlet and outlet are equipped with a check valve on the suction side and a check valve on the discharge side, respectively. A piezoelectric vibrator pump characterized by being equipped with a check valve.