JPH03222511A - Saw resonator filter - Google Patents
Saw resonator filterInfo
- Publication number
- JPH03222511A JPH03222511A JP1600490A JP1600490A JPH03222511A JP H03222511 A JPH03222511 A JP H03222511A JP 1600490 A JP1600490 A JP 1600490A JP 1600490 A JP1600490 A JP 1600490A JP H03222511 A JPH03222511 A JP H03222511A
- Authority
- JP
- Japan
- Prior art keywords
- saw
- electrode
- saw resonator
- terminal
- idt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims 1
- 239000003990 capacitor Substances 0.000 abstract description 20
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 9
- 238000009966 trimming Methods 0.000 abstract description 4
- 238000010897 surface acoustic wave method Methods 0.000 abstract description 3
- 239000006185 dispersion Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 8
- 238000006073 displacement reaction Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 5
- 230000009977 dual effect Effects 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は弾性表面波（５ｕｒｆａｃｅ Ａｃｏｕｓｔｉ
ｃ Ｗａｖｅ＋以下ＳＡＷという）を用いたＳＡＷ共振
器フィルタに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to surface acoustic waves
The present invention relates to a SAW resonator filter using c Wave+ (hereinafter referred to as SAW).
（従来の技術）
近年、 ＵＨＦ／Ｖ）ＩＦ帯帯線線機小形化に伴い、フ
ィルタの小形化が強く要求され、特に狭帯域で安定かつ
低挿入損のＳＡＷ共振器フィルタが注目されている。こ
のＳＡＷ共振器フィルタは２つのＳＡＷ共振器を並列に
配置し、その間の音響結合を利用することにより狭帯域
低損失フィルタを実現するものである。(Prior art) In recent years, as UHF/V) IF band line equipment has become smaller, there has been a strong demand for smaller filters, and in particular, SAW resonator filters that are stable in narrow bands and have low insertion loss are attracting attention. . This SAW resonator filter realizes a narrow band low loss filter by arranging two SAW resonators in parallel and utilizing acoustic coupling between them.
第２図は上記のＳＡＷ共振器フィルタに用いられるＳＡ
Ｗ共振器の説明図であって、（ａ）は電極構成。Figure 2 shows the SA used in the above SAW resonator filter.
It is an explanatory view of a W resonator, and (a) shows an electrode configuration.
（ｂ） 、 ｆｃ）はその変位分布（Ｆ）を示す。第２
図において、インターディジタルトランスジューサ（以
下、ＩＤＴという）１ノにより励振されたＳＡＷは、そ
の両側に近接して設けられた反射器１２．１３により反
射された定在波となり、そのエネルギーは反射器１２．
１３の間に閉じ込められる。このとき。(b), fc) shows the displacement distribution (F). Second
In the figure, a SAW excited by an interdigital transducer (hereinafter referred to as IDT) 1 becomes a standing wave reflected by reflectors 12 and 13 provided close to both sides of the SAW, and its energy is transferred to the reflector 12. ．．
Trapped between 13. At this time.
ＳＡＷの伝搬方向（縦方向）にはキャビティが構成され
、第２図の（ｉ） 、 ｆｉＤ 、 ｆｉｌに示す１次
、２次、３次の変位分布（Ｖりをもつ共振モードが励起
される。A cavity is constructed in the propagation direction (longitudinal direction) of the SAW, and the resonance mode with the first, second, and third order displacement distributions (V curvature) shown in (i), fiD, and fil in Fig. 2 is excited. .
また、５ＡＷＯ伝搬方向と直角な方向（横方向）におい
ては、ＩＤ’ｌ１７の電極指が交叉する領域Ａで電極指
による反射と摂動によりＳＡＷの伝搬送度がその両側の
領域Ｂよシ低下し、弾性波導波路を構成する。In addition, in the direction perpendicular to the 5AWO propagation direction (lateral direction), the SAW propagation degree in region A where the electrode fingers of ID'l17 intersect is lower than that in region B on both sides due to reflection and perturbation by the electrode fingers. , constitutes an elastic wave waveguide.
第３図はこのようなＳＡＷ共振器の動作を応用した二重
モードＳＡＷ共振器フィルタの説明図であって、（ａ）
は軍縮構成、（ｂ）はその変位分布を示す。この二重モ
ードＳＡＷ共振器フィルタは、２つの同一なＳＡＷ共振
器を並列に近接配置したものであって、２つのＳＡＷ共
振器の間隔が十分に狭い場合にはこれらのＳＡＷ共振器
間に音響結合が生じ、第３図（ｂ）に示すような２つの
共振モードが励起されろ。その１つは、２つのＳＡＷ共
振器の中心に対して対称な変位分布をもち、他の１つは
、前記中心に対して点対称な変位分布をもち、前者を対
称モード。FIG. 3 is an explanatory diagram of a dual mode SAW resonator filter applying the operation of such a SAW resonator, and (a)
shows the disarmament configuration, and (b) shows its displacement distribution. This dual-mode SAW resonator filter has two identical SAW resonators placed close to each other in parallel, and if the spacing between the two SAW resonators is sufficiently narrow, the acoustic Coupling occurs and two resonant modes are excited as shown in FIG. 3(b). One has a displacement distribution that is symmetrical with respect to the centers of the two SAW resonators, and the other has a displacement distribution that is point symmetrical with respect to the center, and the former is called a symmetric mode.
後者を反対称モードと呼ぶ。The latter is called the antisymmetric mode.
第３図（ａ）に示す５つの領域（領域ｒ−Ｖ）からなる
弾性表面波導波路モデルを用いて解析すると、領域■、
■は低速度領域、領域１，１．Ｖは高速度領域である。When analyzed using a surface acoustic wave waveguide model consisting of five regions (regions r-V) shown in FIG. 3(a), the regions ■,
■ is a low speed region, region 1, 1. V is a high speed region.
また、領域Ｉは２つのＳＡＷ共振器の音響結合領域であ
シ、その幅をギャップＧとする。第３図において、ＳＡ
Ｗの伝搬方向をＸ方向、これと直角な方向を２方向とし
、その表面上にＳＡＷ共振器が形成される圧電基板（図
示せず）を均一な等方向性物質と仮定すれば、 ５ＡＷ
Ｏ伝搬はスカラー２テンシヤルＶ （低速度領域） 、
Ｗ、 （高速度領域）を用いて式（１） ＃ （２）
で表わされる。Further, region I is an acoustic coupling region between two SAW resonators, and its width is defined as gap G. In Figure 3, SA
If we assume that the propagation direction of W is the X direction and the two directions perpendicular to this, and that the piezoelectric substrate (not shown) on which the SAW resonator is formed is a uniform isotropic material, then 5AW
O propagation is a scalar 2-tensional V (low velocity region),
Formula (1) # (2) using W, (high speed region)
It is expressed as
ここで、Ｖｓ、Ｖ、はそれぞれ低速度領域、高速度領域
におけるＳＡＷの速度、ωは共振角周波数である。Here, Vs and V are the speeds of the SAW in the low speed region and high speed region, respectively, and ω is the resonance angular frequency.
境界条件を、各境界において変位および応力が連続であ
ることおよび最外端で力が加わらないこととし、外側の
高速度領域の幅Ｂが十分に大きいと仮定して上記の式（
１） ｅ （２）を解くと式（３） ＋ （４）が得ら
れる。Assuming that the boundary conditions are that the displacement and stress are continuous at each boundary and that no force is applied at the outermost edge, and that the width B of the outer high-speed region is sufficiently large, the above equation (
1) Equation (3) + (4) is obtained by solving e (2).
ここで、■は各モードにおけるＳＡＷの伝搬速度である
。式（３）は領域Ｉ１．ＩＶにおける変位を同方向とし
た場合、すなわち対称モードに対応し、式（４）は領域
ＴＩ、ＩＶにおける変位を逆方向とした場合、すなわち
反対称モードに対応するものである。Here, ■ is the propagation speed of the SAW in each mode. Equation (3) applies to region I1. When the displacements in IV are in the same direction, that is, it corresponds to a symmetric mode, and equation (4) corresponds to when the displacements in regions TI and IV are in opposite directions, that is, it corresponds to an antisymmetric mode.
このような二重モードＳＡＷ共振器フィルタの等価回路
は第４図で表わすことができる。ここで。The equivalent circuit of such a dual mode SAW resonator filter can be represented in FIG. here.
ｆ 、Ｌ 、Ｃ、Ｒはそれぞれ対称モードの共振周波数
。f, L, C, and R are the resonant frequencies of the symmetric modes, respectively.
Ｂｓ Ｓ ｓ
等価インダクタンス、等価キャパシタンス、等価抵抗で
ありｈ ｆ ａ ＊ Ｌａ Ｔ Ｃａ ＊ Ｒａはそれ
ぞれ反対称モードの共振周波数１等価インダクタンス、
等価キヤｉ？シタンス１等価抵抗であって、ＬａキＬ、
、 Ｒ，キＲである。また、Ｃ０は各ＳＡＷ共振器の
並列キャパシタンスである。この等価回路は回路理論に
より更に第５図に示すラダー回路に変換することができ
る。Bs S s are equivalent inductance, equivalent capacitance, and equivalent resistance, and h f a * La T Ca * Ra are the equivalent inductance of antisymmetric mode resonance frequency 1, respectively.
Equivalent kiya i? Sitance 1 equivalent resistance, Laki L,
, R, KiR. Further, C0 is the parallel capacitance of each SAW resonator. This equivalent circuit can be further converted into a ladder circuit shown in FIG. 5 using circuit theory.
（発明が解決しようとする課題）
しかしながら、上記構成のＳＡＷ共振器フィルタでは、
その中心周波数を所望の周波数に実現することが製造上
困難であり１歩留りが低いという問題点があった。すな
わち、上記ＳＡＷ共振器フィルタの中心周波数はＩＤＴ
の電極幅および電極膜厚により決１す、！た。製造後の
それらの調整は困難であるので、製造に際して精度よく
設計値通りに実現する必要がある。しかしながら、ＩＤ
Ｔの電極幅はリングラフィ技術に犬きく依存し、現像条
件や露光条件等のバラツキが電極幅の絶対値を変動させ
ることになり、また、電極膜厚は膜を形成するだめの製
造設備、例えば蒸着装置、スフ９ツタ装置の性能に大き
く依存し、上記技術や装置では前記中心周波数を無調整
で実現することは困難であった。(Problem to be solved by the invention) However, in the SAW resonator filter with the above configuration,
There was a problem in that it was difficult to realize the center frequency to a desired frequency in manufacturing, and the yield was low. That is, the center frequency of the SAW resonator filter is IDT
Determined by the electrode width and electrode film thickness! Ta. Since it is difficult to adjust these after manufacturing, it is necessary to achieve the designed values with high precision during manufacturing. However, I.D.
The electrode width of T is highly dependent on the phosphorography technology, and variations in development conditions, exposure conditions, etc. will change the absolute value of the electrode width, and the electrode film thickness depends on the manufacturing equipment used to form the film, For example, it largely depends on the performance of the vapor deposition apparatus and the Suffinet apparatus, and it has been difficult to realize the center frequency without adjustment using the above-mentioned techniques and apparatuses.
本発明は、上記問題点を解決するためになされたもので
あって、ＳＡＷ共振器フィルタに調整用容量を設は電極
幅や膜厚の・ぐラツキによる中心周波数の変動を補正し
、歩留りの向上を図ったＳＡＷ共振器フィルタを提供す
ることを目的とする。The present invention has been made in order to solve the above-mentioned problems, and by providing an adjustment capacitor in the SAW resonator filter, it corrects fluctuations in the center frequency due to fluctuations in electrode width and film thickness, and improves yield. It is an object of the present invention to provide an improved SAW resonator filter.
（課題を解決するための手段）
本発明は上記目的を達成するために、同一圧電基板上に
複数のＳＡＷ共振器を並列に隣接して形成し、隣接する
前記ＳＡＷ共振器間を音響結合する多重モードのＳＡＷ
共振器フィルタにおいて、入力側ＳＡＷ共振器と入力端
子との間、および出力側ＳＡＷ共振器と出力端子との間
を、前記圧電基板上に形成したインターディジタル形電
極からなる容量でそれぞれ電気的に接続したものである
。(Means for Solving the Problems) In order to achieve the above object, the present invention forms a plurality of SAW resonators in parallel and adjacent to each other on the same piezoelectric substrate, and acoustically couples the adjacent SAW resonators. Multimode SAW
In the resonator filter, electrical connections are made between the input-side SAW resonator and the input terminal, and between the output-side SAW resonator and the output terminal using capacitances made of interdigital electrodes formed on the piezoelectric substrate. It is connected.
（作用）
入力側ＳＡＷ共振器は入力端子と直列に接続されている
容量を含んだ形で共振し、１だ、出力側ＳＡＷ共振器は
出力端子と直列に接続されている容量を含んだ形で共振
する。従って、ＳＡＷ共振器の製造時に生じる電極の線
幅や膜厚のバラツキによる共振周波数のずれは、前記各
容量をトリミング等することによって容易に調整するこ
とができ、歩留りの向上や寸法許容偏差の緩和が可能と
なる。(Function) The input side SAW resonator resonates in a form that includes a capacitance connected in series with the input terminal, and the output side SAW resonator resonates in a form that includes a capacitance connected in series with the output terminal. resonates with Therefore, deviations in the resonant frequency due to variations in electrode line width and film thickness that occur during the manufacture of SAW resonators can be easily adjusted by trimming each capacitance, improving yield and reducing dimensional tolerance. Relaxation becomes possible.
（実施例） 第１図は本発明の実施例の概略構成図であって。(Example) FIG. 1 is a schematic diagram of an embodiment of the present invention.
−枚の圧電基板５上にＩＤＴ６とその両側に隣接して設
けたＳＡＷ反射器７，８とからなる２つのＳＡＷ共振器
１．２を並列に形成すると共に、ＳＡＷ共振器１の上側
に容量３を、またＳＡＷ共振器２の下側に容量４をそれ
ぞれ形成し、更に容量３の一端を入力端子９に、他端を
ＳＡＷ共振器１のＩＤＴ６の電極にそれぞれ接続し、容
量４の一端を出力端子１θに、他端をＳＡＷ共振器２の
ＩＤＴ ６の電極にそれぞれ接続した構成となっている
。前記容量３゜４は圧電基板５上にＩＤＴ電極指を形成
したものであり、該圧電基板５は誘電率を有しているこ
とからそのＩＤＴ電極指により容量が生じる。その容量
ＣＴは（５）式により表示される。- Two SAW resonators 1.2 consisting of an IDT 6 and SAW reflectors 7 and 8 provided adjacent to both sides of the IDT 6 are formed in parallel on a piezoelectric substrate 5, and a capacitance is provided above the SAW resonator 1. 3 and a capacitor 4 below the SAW resonator 2, one end of the capacitor 3 is connected to the input terminal 9, the other end is connected to the electrode of the IDT 6 of the SAW resonator 1, and one end of the capacitor 4 is connected to the input terminal 9. is connected to the output terminal 1θ, and the other end is connected to the electrode of the IDT 6 of the SAW resonator 2. The capacitance 3.4 is formed by forming IDT electrode fingers on the piezoelectric substrate 5, and since the piezoelectric substrate 5 has a dielectric constant, a capacitance is generated by the IDT electrode fingers. The capacitance CT is expressed by equation (5).
ＣＴ−Ｋ（ε８＋１） （５）λ
Ｄ：電極幅、Ｌ＝Σ
なお、前記ＳＡＷ共振器１，２．容量３，４は、圧電基
板５上に蒸着法、ス）？ツタ法等によシアルミニューム
、金等の金属を付着し、半導体プロセスを用いて形成す
ることができる。CT-K(ε8+1) (5) λ D: electrode width, L=Σ Note that the SAW resonators 1, 2. The capacitors 3 and 4 are formed by vapor deposition on the piezoelectric substrate 5. It can be formed using a semiconductor process by depositing metal such as sia aluminum or gold by the ivy method or the like.
次に、本実施例の動作を説明する。入力端子９に入力さ
れた電気信号は容量３に印加され、該容量３とＳＡＷ共
振器１とにより所定の周波数で共振する。また、 ＳＡ
Ｗ共振器ノの下側には該ＳＡＷ共振器１と同一構造のＳ
ＡＷ共振器２が並列に隣接配置されており、このような
構成のＳＡＷ共振器フィルタは第３図に示すいわゆるエ
ネルギー閉じ込め形の二重モードフィルタとして動作す
る。この場合、容量３．４はＳＡＷ共振器１，２にそれ
ぞれ直列に接続されているので、この容量３，４を含ん
だ形で共振周波数が現われる。Next, the operation of this embodiment will be explained. The electrical signal input to the input terminal 9 is applied to the capacitor 3, and the capacitor 3 and the SAW resonator 1 resonate at a predetermined frequency. Also, SA
Below the W resonator, there is an S having the same structure as the SAW resonator 1.
The AW resonators 2 are arranged adjacent to each other in parallel, and the SAW resonator filter having such a configuration operates as a so-called energy trap type double mode filter shown in FIG. In this case, since the capacitors 3.4 are connected in series to the SAW resonators 1 and 2, the resonance frequency appears including the capacitors 3 and 4.
第６図は第１図に示すＳＡＷ共振器フィルタの等価回路
であって、入力側のし。、Ｃｏ１は゛ｓ４ｗ共振器１を
、出力側のり。１Ｃ０１はＳＡＷ共振器２をそれぞれ表
わしており、Ｃ１２はＳＡＷ共振器１とＳＡＷ共振器２
の間の結合容量を示す。また、入力側り。、ｃｏ、と直
列に接続されている可変容量ＣＴは前記容量３を、出力
側り。、Ｃｏ１と直列に接続されている可変容量ＣＴは
前記容量４をそれぞれ示している。FIG. 6 is an equivalent circuit of the SAW resonator filter shown in FIG. 1, and shows the input side circuit. , Co1 connects the s4w resonator 1 to the output side. 1C01 represents SAW resonator 2, and C12 represents SAW resonator 1 and SAW resonator 2.
Indicates the coupling capacity between Also, on the input side. , co, and the variable capacitor CT connected in series connects the capacitor 3 to the output side. , Co1 and the variable capacitors CT connected in series represent the capacitors 4, respectively.
ところで、ＳＡＷ共振器フィルタの中心周波数はＩＤＴ
の電極幅および電極膜厚により決まる。従って、製造の
際、これら電極幅や電極膜厚が変動すると前記中心周波
数が変動する。一方本実施例では、前記容量３，４を構
成するＩＤＴの電極をトリミングすることによりその容
量を小さくシ、フィルタの中心周波数を等何重に上昇さ
せることができる。従って、前記容量３．４を、フィル
タの中心周波数が所望の値よりやや低になるように予め
決めておき、製造後にその電極をトリミングすることに
より容量を減少させてフィルタの中心周波数を上昇させ
、該中心周波数のバラツキを合わせ込むことができる。By the way, the center frequency of the SAW resonator filter is IDT
Determined by the electrode width and electrode film thickness. Therefore, during manufacturing, if these electrode widths and electrode film thicknesses change, the center frequency changes. On the other hand, in this embodiment, by trimming the electrodes of the IDTs constituting the capacitances 3 and 4, the capacitance can be reduced and the center frequency of the filter can be increased an equal number of times. Therefore, the capacitance 3.4 is determined in advance so that the center frequency of the filter is slightly lower than the desired value, and by trimming the electrode after manufacturing, the capacitance is reduced and the center frequency of the filter is increased. , it is possible to adjust the variation in the center frequency.
（発明の効果）
以上、詳細に説明したように本発明によれば、ＳＡＷ共
振器フィルタの入力側ＳＡＷ共振器と出力側ＳＡＷ共振
器とに容量を直列に接続したので、この容量をトリミン
グ等することによりその大きさを変えてＳＡＷ共振器フ
ィルタの中心周波数を所望の周波数に合わせることがで
きる。(Effects of the Invention) As described in detail above, according to the present invention, since a capacitor is connected in series to the input side SAW resonator and the output side SAW resonator of the SAW resonator filter, this capacitance can be trimmed, etc. By doing so, the center frequency of the SAW resonator filter can be adjusted to a desired frequency by changing its size.
従って５本発明により、 ＳＡＷ共振器フィルタにおけ
る電極幅や電極膜厚の許容製造偏差をゆるくすることが
でき５製造上の歩留りを従来に増して向上させることが
可能となる。Therefore, according to the present invention, the permissible manufacturing deviations of the electrode width and electrode film thickness in the SAW resonator filter can be relaxed, and the manufacturing yield can be improved more than ever.
第１図は本発明の実施例の概略構成図、第２図はＳＡＷ
共振器の説明図、第３図は従来の二重モードＳＡＷ共振
器フィルタの説明図、第４図は第３図に示す二重モード
ＳＡＷ共振器フィルタの等価回路図、第５図は第４図に
示す等価回路を変換して得た等価変換回路図、第６図は
第１図のＳＡＷ共振器フィルタの等価回路図である。
１．２・・・ＳＡＷ共振器、３，４・・・容量、５・・
・圧電基板、６・・・ＩＤＴ、７，８・・・反射器、９
・・・入力端子。
１０・・・出力端子。
（ｂ）
ＳＡＷ只Ｂの 量定８月図
第２図
第
訛１図のＳＡＷ Ｘ刃艮４＊フィルりの１９価回護４第
６図
従来ｎｃＡＷ 只型政茗各フィルタFIG. 1 is a schematic configuration diagram of an embodiment of the present invention, and FIG. 2 is a SAW
Fig. 3 is an explanatory diagram of a conventional dual mode SAW resonator filter, Fig. 4 is an equivalent circuit diagram of the dual mode SAW resonator filter shown in Fig. 3, and Fig. 5 is an explanatory diagram of a conventional dual mode SAW resonator filter. An equivalent conversion circuit diagram obtained by converting the equivalent circuit shown in the figure, FIG. 6 is an equivalent circuit diagram of the SAW resonator filter of FIG. 1. 1.2...SAW resonator, 3,4...capacitance, 5...
・Piezoelectric substrate, 6...IDT, 7, 8...Reflector, 9
...Input terminal. 10... Output terminal. (b) Quantitative figure of SAW only B Fig. 2 Fig. 1 SAW
Claims (1)
形成し、先端に抵抗体支持体固定金具を固定したパッド
減衰器と、 上面の中心部に長手方向に細長い孔を設けた矩形導波管
を有する導波管部と からなり、前記抵抗体支持体は前記細長い孔に挿通され
、前記抵抗体支持体固定金具は前記矩形導波管に取付け
られていることを特徴とする導波管固定減衰器。[Scope of Claims] A pad attenuator in which a resistor is formed on the surface of a resistor support made of a plate-shaped insulator, and a resistor support fixing fitting is fixed at the tip; a waveguide section having a rectangular waveguide provided with an elongated hole, the resistor support is inserted through the elongate hole, and the resistor support fixing fitting is attached to the rectangular waveguide. A waveguide fixed attenuator characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1600490A JPH03222511A (en) | 1990-01-29 | 1990-01-29 | Saw resonator filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1600490A JPH03222511A (en) | 1990-01-29 | 1990-01-29 | Saw resonator filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03222511A true JPH03222511A (en) | 1991-10-01 |
Family
ID=11904471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1600490A Pending JPH03222511A (en) | 1990-01-29 | 1990-01-29 | Saw resonator filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03222511A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0600705A1 (en) * | 1992-12-01 | 1994-06-08 | Japan Radio Co., Ltd | Surface acoustic wave filter and mobile communication system using same |
| EP0633659A1 (en) * | 1993-07-08 | 1995-01-11 | Murata Manufacturing Co., Ltd. | Surface acoustic wave filter |
| US5499003A (en) * | 1994-10-03 | 1996-03-12 | Motorola, Inc. | Differential saw filter including series coupled resonant/antiresonant tracks |
| US5610566A (en) * | 1993-08-04 | 1997-03-11 | Advanced Saw Products Sa | Saw filter with a coupled saw impedance element |
| US5694095A (en) * | 1994-04-26 | 1997-12-02 | Fujitsu Limited | Surface acoustic wave resonance device adapted to simple and precise adjustment of resonant frequency |
| WO2005099083A1 (en) * | 2004-04-06 | 2005-10-20 | Seiko Epson Corporation | Oscillation circuit and electronic device |
| JP2006067119A (en) * | 2004-08-25 | 2006-03-09 | Seiko Epson Corp | Transmitter |
| EP1758245A3 (en) * | 2005-08-25 | 2009-01-07 | Seiko Epson Corporation | Saw resonator |
| US7688161B2 (en) * | 2006-10-25 | 2010-03-30 | Fujitsu Media Devices Limited | Acoustic wave device and filter using the same |
-
1990
- 1990-01-29 JP JP1600490A patent/JPH03222511A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0600705A1 (en) * | 1992-12-01 | 1994-06-08 | Japan Radio Co., Ltd | Surface acoustic wave filter and mobile communication system using same |
| US5521453A (en) * | 1992-12-01 | 1996-05-28 | Japan Radio Co., Ltd. | Surface acoustic wave filter and mobile communication system using same |
| EP0633659A1 (en) * | 1993-07-08 | 1995-01-11 | Murata Manufacturing Co., Ltd. | Surface acoustic wave filter |
| US5694096A (en) * | 1993-07-08 | 1997-12-02 | Murata Manufacturing Co., Ltd. | Surface acoustic wave filter |
| US5610566A (en) * | 1993-08-04 | 1997-03-11 | Advanced Saw Products Sa | Saw filter with a coupled saw impedance element |
| US5694095A (en) * | 1994-04-26 | 1997-12-02 | Fujitsu Limited | Surface acoustic wave resonance device adapted to simple and precise adjustment of resonant frequency |
| US5499003A (en) * | 1994-10-03 | 1996-03-12 | Motorola, Inc. | Differential saw filter including series coupled resonant/antiresonant tracks |
| WO2005099083A1 (en) * | 2004-04-06 | 2005-10-20 | Seiko Epson Corporation | Oscillation circuit and electronic device |
| US7230501B2 (en) | 2004-04-06 | 2007-06-12 | Seiko Epson Corporation | Oscillation circuit and electronic equipment |
| JP2006067119A (en) * | 2004-08-25 | 2006-03-09 | Seiko Epson Corp | Transmitter |
| EP1758245A3 (en) * | 2005-08-25 | 2009-01-07 | Seiko Epson Corporation | Saw resonator |
| US7688161B2 (en) * | 2006-10-25 | 2010-03-30 | Fujitsu Media Devices Limited | Acoustic wave device and filter using the same |
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