JPH0322224U - - Google Patents

Info

Publication number

JPH0322224U

JPH0322224U JP8273289U JP8273289U JPH0322224U JP H0322224 U JPH0322224 U JP H0322224U JP 8273289 U JP8273289 U JP 8273289U JP 8273289 U JP8273289 U JP 8273289U JP H0322224 U JPH0322224 U JP H0322224U

Authority

JP

Japan

Prior art keywords

lower metal

insulator

resistance element

nonlinear resistance

support substrate

Prior art date

1989-07-14

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052751 metal Inorganic materials 0.000 claims description 5
• 239000002184 metal Substances 0.000 claims description 5
• 239000012212 insulator Substances 0.000 claims description 3
• 239000004020 conductor Substances 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 229910000676 Si alloy Inorganic materials 0.000 claims 1
• 229910001362 Ta alloys Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 1