JPH032211U - - Google Patents
Info
- Publication number
- JPH032211U JPH032211U JP6287489U JP6287489U JPH032211U JP H032211 U JPH032211 U JP H032211U JP 6287489 U JP6287489 U JP 6287489U JP 6287489 U JP6287489 U JP 6287489U JP H032211 U JPH032211 U JP H032211U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- patterned
- hole
- electrodes
- measuring device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000000605 extraction Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6287489U JPH032211U (de) | 1989-05-29 | 1989-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6287489U JPH032211U (de) | 1989-05-29 | 1989-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH032211U true JPH032211U (de) | 1991-01-10 |
Family
ID=31592417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6287489U Pending JPH032211U (de) | 1989-05-29 | 1989-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH032211U (de) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59153119A (ja) * | 1983-02-19 | 1984-09-01 | Hitachi Ltd | 磁気エンコ−ダ |
| JPS59212710A (ja) * | 1983-05-18 | 1984-12-01 | Mitsutoyo Mfg Co Ltd | 静電容量型変位検出器 |
| JPS642575B2 (de) * | 1986-12-10 | 1989-01-18 | Kogyo Gijutsuin |
-
1989
- 1989-05-29 JP JP6287489U patent/JPH032211U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59153119A (ja) * | 1983-02-19 | 1984-09-01 | Hitachi Ltd | 磁気エンコ−ダ |
| JPS59212710A (ja) * | 1983-05-18 | 1984-12-01 | Mitsutoyo Mfg Co Ltd | 静電容量型変位検出器 |
| JPS642575B2 (de) * | 1986-12-10 | 1989-01-18 | Kogyo Gijutsuin |