JPH03221180A - Apparatus for washing core pipe - Google Patents

Abstract

PURPOSE:To reduce the consumption of a chemical solution and a time by mounting a rotary roller, a washing solution supply pipe and a brush. CONSTITUTION:A large number of bristles 2 are embedded in the peripheries of the fluoric acid outflow orifices 4 of fluoric acid piping 3a injecting, for example, fluoric acid being a washing solution. The inner surface of a core pipe 1 can be wiped by a brush with the rotation of the core pipe 1 while fluoric acid is allowed to flow by the feed mechanism moving the piping 3a. By this method, a washing time can be shortened.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a furnace core tube cleaning device for cleaning a cylindrical furnace core tube used in a vapor phase growth apparatus.

[Conventional technology]

Conventionally, vapor phase growth apparatuses have been used as apparatuses for forming various films on semiconductor substrates. However, since various gases are used depending on the film forming conditions, the furnace core tube is subject to contamination each time. Therefore, since the gas changes depending on the type of film formation, it is necessary to clean the furnace core tube each time.

FIG. 4 is a sectional view for explaining an example of a conventional furnace core tube cleaning device. As shown in FIG. 4, this type of furnace core tube cleaning device includes, for example, a rotating roller 5 that rotates a cylindrical furnace core tube 1, and a hydrofluoric acid pipe 3 that flows hydrofluoric acid into the furnace core tube 1.
Although it is not shown in the drawing, the hydrofluoric acid that flows out is stored,
It consists of a collection tank. To clean the furnace core tube 1, while rotating the furnace core tube 1 with the rotating roller 5,
Hydrofluoric acid was poured into the pipe to remove contaminants.

[Problem to be solved by the invention]

The conventional furnace core tube cleaning device described above simply rotates the cylindrical furnace core tube and flows the chemical solution into the furnace, so it does not require the use of a large amount of chemical solution and a large amount of time and materials. The disadvantage is that it does not.

The object of the present invention is to eliminate such drawbacks and to
It is an object of the present invention to provide a furnace core tube cleaning device that consumes less energy.

[Means to solve the problem]

The furnace core tube cleaning device of the present invention includes a rotary roller on which the furnace core tube is placed and rotated, and a cleaning liquid supply pipe that is inserted into the furnace core tube and has a large number of cleaning liquid outlet ports on one side into which a cleaning chemical solution is poured. and a brush embedded in the one surface side of the cleaning liquid supply pipe.

〔Example〕

Next, the present invention will be explained with reference to the drawings.

FIG. 1 is a cross-sectional view for explaining one embodiment of the furnace core tube cleaning device of the present invention, FIG. 2 is a cross-sectional view along line AA in FIG. 1, and FIG. 3 is a cross-sectional view along line BB in FIG. As shown in the figure, this furnace core tube cleaning device has a hydrofluoric acid pipe 3a into which hydrofluoric acid, which is a cleaning liquid, is poured.
A large number of hairs 2 are embedded around the hydrofluoric acid outlet 4. Other than that, it is the same as the conventional example. This multi-bristle brush is made of acid-resistant vinyl fluoride, for example. Also, although not shown in the drawing, the hydrofluoric acid piping 3
A feeding mechanism is provided to move a in the direction of the arrow. As a result, the inner surface is wiped with a brush as the furnace core tube 1 rotates while constantly flowing hydrofluoric acid.

When using such a furnace core tube cleaning device to clean a furnace core tube into which an 8-inch wafer is inserted, conventionally, hydrofluoric acid was 40! ! The result was that the cleaning time required was less than IQA', and the cleaning time, which conventionally required more than 3 hours, was only 5 minutes or less.

〔Effect of the invention〕

As explained above, the present invention provides a brush for wiping the inner wall of the cylindrical furnace core tube while flowing a chemical solution, which is the cleaning fluid, thereby reducing the amount of cleaning fluid consumed and cleaning the furnace core tube in a shorter cleaning time. This has the effect of providing a device.

[Brief explanation of drawings]

FIG. 1 is a sectional view for explaining one embodiment of the furnace core tube cleaning device of the present invention, FIG. 2 is a sectional view taken along line AA in FIG. 1, FIG. The figure is a sectional view for explaining an example of a conventional furnace core tube cleaning device. 1... Furnace core tube, 2... Hair, 3, 3a... Hydrofluoric acid piping,
4...Hydrofluoric acid outlet, 5...Rotating roller.

Claims (1)

[Claims] A rotating roller on which a furnace core tube is placed and rotated; a cleaning liquid supply pipe that is inserted into the furnace core tube and has a number of cleaning liquid outlet ports on one side into which a cleaning chemical solution is poured; and one side of the cleaning liquid supply pipe. A furnace core tube cleaning device characterized by having a brush embedded in the furnace core tube cleaning device.