JPH03219702A - Waveguide connection structure of microwave module - Google Patents

Abstract

PURPOSE:To attain waveguide connection of a microwave module with strong mechanical strength by mounting a slot of the module from. the short-circuit face of the waveguide so as to match with the slot provided to the short-circuit face or the like of a specific value and making the direction of magnetic field of both the slots in parallel. CONSTITUTION:A slot 22 is provided to a rear side of a micromodule 2 with a semiconductor chip integrated therein. Then the module 2 is mounted to a waveguide 1 so that the slot 22 is in matching with a slot 11 provided to an electric field face 13 or a short-circuit face 10 of lambdag/4+lambdagXn/2 from the short-circuit face 10 of the waveguide 1, where lambdag is a guide wavelength and (n) is zero or a positive integer. Thus, the direction of a magnetic field of a microwave of both the slots 11, 22 is made in parallel. Thus, the connection is implemented by having only to connect the microwave module to the waveguide and mechanical strength is improved.

Description

[Detailed Description of the Invention] [Summary] The present invention relates to a device for inputting and outputting microwaves by coupling a microwave module incorporating a semiconductor chip with a waveguide. For the purpose of providing a wave tube connection structure, a slot is provided on the back side of a microwave module incorporating a semiconductor chip.
The slot extends from the short surface of the waveguide to the guide wavelength/4+
The module is attached to the waveguide so as to fit into the slot provided on the electric surface or short surface of the tube wavelength x n/2 (n is zero or a positive integer), so that microwaves in both slots are The magnetic field directions are parallel to each other.

[Industrial application field]

The present invention relates to a waveguide connection structure for a microwave module, and more particularly to a device for coupling a microwave module incorporating a semiconductor chip and a waveguide to input and output microwaves.

Applications of ceramics and other materials to the microwave band have been used to form strip lines as substrates for microwave circuits or used alone as resonators. It has come to be used for

Therefore, it is necessary to efficiently couple the module to the waveguide.

[Conventional technology]

FIG. 4 shows the waveguide connection structure of a conventional microwave module. In FIG. (interface) surface 13, and on the back side of this H surface, a microwave module 2 on which a semiconductor knob having a layered structure by integrating a resistor, a capacitor, an inductance, etc. is mounted is glued. and this module 2
Electrical coupling between the waveguide 1 and the waveguide 1 is also performed by a coupling rod 30 protruding into the waveguide 1 from the back surface of the H-plane 12. The position of this connecting rod 30 is approximately λ from the short surface 10.
g/4+λg-n/2 (λg indicates the wavelength inside the waveguide, n
indicates zero or a positive integer).

The mounting structure of this coupling rod 30 is shown in the same figure (b), and a glass part 31 is attached to the outer periphery of this coupling rod 30 and is fitted as a glass terminal into a hole 14 provided in the waveguide 1. The glass portion 31 is fixed by brazing.

The coupling rod 30 is electrically connected to the module 2 by, for example, a coaxial line 15, and transmits the microwave signal oscillated from the module 2 to the waveguide 1 through the coupling rod 30.
I am trying to propagate it to.

[Problem to be solved by the invention]

However, such a conventional microwave module waveguide connection structure has a problem in that the mechanical strength is poor because the coupling rod 30 of the glass terminal is used.

Therefore, an object of the present invention is to provide a waveguide connection structure for a microwave module that has good mechanical strength.

[Means to solve the problem]

In order to solve the above problems, in the waveguide connection structure of a microwave module according to the present invention, as schematically shown in FIG. 1, a slot 22 is provided on the back surface of the microwave module 2 incorporating a semiconductor chip. , the slot 22 is
From the short surface 10 of the waveguide 1 to the internal wavelength λg/4+nx
Electric surface 13 with tube wavelength λg/2 (n is zero or a positive integer)
Alternatively, the module 2 is attached to the waveguide 1 so as to fit into the slot 11 provided in the short surface 10, so that the directions of the microwave magnetic fields in both slots are parallel.

are parallel, and microwave coupling will take place.

1 and 2) show a case where a slot 11 is provided on the electric surface (E surface) 13 of the waveguide 1, and in this case also, the microwave output from the output section 26 of the module 2 is transmitted to the slot 22. The direction of the magnetic field (arrow A) when leaking from the waveguide 1 is parallel to the direction of the magnetic field (arrow B) of the waveguide 1, and microwave coupling is performed.

With such a connection structure, good microwave coupling can be achieved without using a coupling member with poor mechanical strength inside the waveguide 1.

[For production]

FIG. 1(a) shows a case where a slot 11 is provided in the short surface 10 of the waveguide 1, and in this case, the microwave output from the output section 26 of the module 2 penetrates the ceramic medium. The direction of the magnetic field (arrow A) when leaking from the slot 22 provided on the back surface of the waveguide 1, the direction of the magnetic field (arrow B) of the waveguide 1, and [Example] Fig. 2 shows the microwave module according to the present invention. This figure shows an example of a module (for example, a ceramic module) used in a waveguide connection structure.In this example, as shown in FIG.
Open slot 22 at 0. Note that the module 2 may not be provided with a ground plane, and the connected waveguide surface may be used as the ground plane.

Then, as shown in FIG. 2B, the transistor 25, output section 26, etc. are interconnected from the bias supply point 23 to the pattern surface 21 opposite to the ground surface 2° by the microstrip line 24, so that the module is formed into a module. do.

At this time, the output part 26 is arranged at the middle position of the slot 22, and the length of the slot 22 on both sides is approximately λg/4 (
When n=Q).

FIG. 3 shows how the microwave module 2 prepared as shown in FIG. 2 is connected to the waveguide 1.
In this embodiment, as shown in FIG. 3(a), a slot 11 is provided on the E surface I3 of the waveguide 1 at a position of λg/4 from the short surface 10, and a module is provided as shown in FIG. 2
It is configured so that the slot 22 provided in the same figure (
As shown in plan view in C), the module 2 is bonded to this E surface 13.

In the above embodiment, the slot 11 on the E surface 13 of the waveguide 1 was provided at the λg/40 position from the short surface 10.
It may be provided at any position as long as λg/4+n·λg/2<n=01.2.3...).

Further, although the case where the connection is made to the E side is shown, the case where the connection is made to the short side can be made in exactly the same manner.

〔Effect of the invention〕

As explained above, in the present invention, the slot provided in the microwave module is arranged to extend from the short surface of the waveguide to the short surface or electric current of the tube wavelength/4+tube wavelength x n/2 (n is zero or a positive integer). The module was attached to the waveguide so that it matched with the slot provided at the interface, and the microwave magnetic field directions in both slots were parallel, so it was only necessary to connect the microwave module to the waveguide. Mechanical strength can be improved and costs can be kept low.

[Brief explanation of drawings]

FIG. 1 is a diagram for explaining the principle of the waveguide connection structure of a microwave module according to the present invention, and FIG. 2 is a diagram showing a module used for the waveguide connection structure of a microwave module according to the present invention. FIG. 3 is a diagram illustrating an overall waveguide connection structure of a microwave module according to the present invention, and FIG. 4 is a diagram illustrating a conventional example. In FIG. 1, 1... Waveguide, 2... Microwave module, 10... Short surface, 11.22... Slot, 12... Magnetic interface (H plane), 13...・Electric surface (E surface). In the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] Microwave module incorporating a semiconductor chip (2
) is provided with a slot (22) on the back surface of the slot (22
) is provided on the electric surface (13) or short surface (10) of the waveguide (1) from the short surface (10) to the tube wavelength/4 + tube wavelength x n/2 (n is zero or a positive integer). slot(
11) to fit the module (2) into the waveguide (1).
), so that the directions of the microwave magnetic fields in both slots are parallel to each other.