JPH03217048A - Heat transfer material for junction - Google Patents

Heat transfer material for junction

Info

Publication number
JPH03217048A
JPH03217048A JP9012090A JP1209090A JPH03217048A JP H03217048 A JPH03217048 A JP H03217048A JP 9012090 A JP9012090 A JP 9012090A JP 1209090 A JP1209090 A JP 1209090A JP H03217048 A JPH03217048 A JP H03217048A
Authority
JP
Japan
Prior art keywords
heat transfer
mixed
resin material
transfer material
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9012090A
Other languages
Japanese (ja)
Inventor
Hiroshi Tate
宏 舘
Kanji Otsuka
寛治 大塚
Masayuki Kawashima
川島 正之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi ULSI Engineering Corp
Hitachi Ltd
Original Assignee
Hitachi ULSI Engineering Corp
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi ULSI Engineering Corp, Hitachi Ltd filed Critical Hitachi ULSI Engineering Corp
Priority to JP9012090A priority Critical patent/JPH03217048A/en
Publication of JPH03217048A publication Critical patent/JPH03217048A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/28Structure, shape, material or disposition of the layer connectors prior to the connecting process
    • H01L2224/29Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
    • H01L2224/29001Core members of the layer connector
    • H01L2224/29099Material
    • H01L2224/29198Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
    • H01L2224/29298Fillers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector

Abstract

PURPOSE:To obtain adhering function and high thermal conductivity by forming of resin material, metal and ceramic particles to be mixed in the resin. CONSTITUTION:A heat transfer material for a junction to thermally conduct and bond between a heating element and a member to be bonded thereto is composed of resins 1, 2, a metal and ceramic particles 3, 4 to be mixed in the resins 1, 2. For example, the particles 3, 4 are filled in a vessel in which main agent 1 of 2-liquid resin material are filled, agitated, curing agent 2 is then mixed, stirred to promote curing reaction. A bonding material mixed with low melting point metal particles 5 is applied on one adhering surface of a component 6 or 7 to be brought into close contact according to the manufacturing method, pressurized to press-bond both, allowed to stand for a hot atmosphere and to cure the resin in the material.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は接合面間に形成された空隙内の熱伝導を向上さ
せる技術、特に、半導体装置などの発熱部品と放熱器な
どの附属部品との間に配設して両者間の熱伝導を促進さ
せるために用いて効果のある技術に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a technology for improving heat conduction within a gap formed between bonding surfaces, and in particular, to technology for improving heat conduction within a gap formed between bonding surfaces, and in particular between a heat generating component such as a semiconductor device and an accessory component such as a radiator. The present invention relates to a technique that can be effectively used to promote heat conduction between the two.

〔従来の技術〕[Conventional technology]

例えば、消費電力の大きい半導体装置では、放熱のため
の放熱器もしくは同等の効果を有する部材が半導体チッ
プの放熱面に取り付けられる。そして、一体化を考慮し
ない場合、放熱面にシリコーングリースなどを塗布し、
放熱器をねじ止めなどにより固定するが、一体化を図る
場合には、接続面がともにはんだ濡れ性が良ければ、は
んだを用いて接続する。また、はんだ接続が行えない場
合には、樹脂材などに熱伝導率の高い微粒子を混合した
ものを接着及び伝熱のために用い、発熱部材と放熱部材
とを一体化している。
For example, in a semiconductor device that consumes a large amount of power, a heat sink for heat radiation or a member having an equivalent effect is attached to the heat radiation surface of the semiconductor chip. If integration is not considered, apply silicone grease or the like to the heat dissipation surface.
The radiator is fixed with screws or the like, but if it is to be integrated, if both connection surfaces have good solder wettability, they can be connected using solder. If solder connection is not possible, a resin material mixed with fine particles having high thermal conductivity is used for adhesion and heat transfer to integrate the heat generating member and the heat radiating member.

このような熱伝導を考慮した樹脂材に関する技術は、例
えば、総研出版株式会社発行、武石善幸監訳「超LSI
テクノロジー」617頁に記載されている。
Technologies related to resin materials that take such heat conduction into account are known, for example, in the book "Ultra LSI
Technology” page 617.

ところで、本発明者は、樹脂材を主体としたものを伝熱
材料として用いた場合の熱伝導性について検討した。
By the way, the present inventor studied the thermal conductivity when a material mainly composed of a resin material is used as a heat transfer material.

以下は、本発明者によって検討された技術であり、その
概要は次の通りである。
The following are the techniques studied by the present inventor, and the outline thereof is as follows.

すなわち、従来、伝熱材料には二液混合形の熱硬化性樹
脂材が用いられ、この樹脂材に混ぜる微粒子として、ア
ルミナ、シリカ、セラミックスなどが用いられている。
That is, conventionally, a two-component mixed type thermosetting resin material has been used as a heat transfer material, and alumina, silica, ceramics, etc. have been used as fine particles mixed with this resin material.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、前記の如く微粒子を混合した樹脂材による接
合部用伝熱材料においては、微粒子材料が、それ自身伝
熱性に優れるとは言えないものであるため、伝熱部に用
いるには不十分であることが本発明者に見出された。
However, in the heat transfer material for joints made of a resin material mixed with fine particles as described above, the fine particle material itself cannot be said to have excellent heat transfer properties, so it is insufficient for use in heat transfer parts. The inventor has discovered something.

そこで、本発明の目的は、接着機能及び高熱伝導性を備
えることのできる技術を提供することに3一 ある。
Therefore, an object of the present invention is to provide a technology that can provide adhesive function and high thermal conductivity.

本発明の前記目的と新規な特徴は、本明細書の記述およ
び添付図面から明らかになるであろう。
The above objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔課題を解決するための手段〕[Means to solve the problem]

本願において開示される発明のうち、代表的なものの概
要を簡単に説明すれば、以下の通りである。
A brief overview of typical inventions disclosed in this application is as follows.

すなわち、発熱体とこれに接合される物体との間に配設
されて、前記両物体間の熱伝導及び接合を司る接合部用
伝熱材料であって、樹脂材と、この樹脂材中に混入され
る金属およびセラミックスの粒体とから成るようにした
ものである。
That is, it is a heat transfer material for a joint part that is disposed between a heating element and an object to be joined to the heat generating element and controls heat conduction and joining between the two objects, and includes a resin material and a resin material in the resin material. It consists of mixed metal and ceramic particles.

〔作用〕[Effect]

上記した手段によれば、セラミックスと共に樹脂材中に
混入された金属粒体が、セラミックスに対し数倍〜10
倍程度゜の熱伝導度を有しているため、伝熱材料内の熱
抵抗が低減するように機能する。また、セラミックス粒
体は、金属粒体に比べて直径が小さく、樹脂材中に分散
して金属粒体同士の接触を防止すると共に伝熱性を改善
するよう4 に機能する。
According to the above-mentioned means, the metal particles mixed into the resin material together with the ceramics are several times to 10 times larger than the ceramics.
Since it has a thermal conductivity that is about twice as high, it functions to reduce the thermal resistance within the heat transfer material. Furthermore, the ceramic grains have a smaller diameter than the metal grains, and when dispersed in the resin material, function to prevent contact between the metal grains and improve heat conductivity.

〔実施例1〕 第1図は本発明による伝熱部用接合材料の製造方法を示
す説明図である。
[Example 1] FIG. 1 is an explanatory diagram showing a method of manufacturing a bonding material for a heat transfer part according to the present invention.

固着材料には、主剤1と硬化剤2から成る二液性樹脂材
が用いられる。主剤1及び硬化剤2は、各々異なる容器
に収納され、使用時に混合される。
A two-component resin material consisting of a main agent 1 and a curing agent 2 is used as the fixing material. The main agent 1 and the curing agent 2 are stored in different containers and mixed at the time of use.

まず、主剤1の入った容器に金属粒体3及びセラミック
ス粒体(またはシリカ粒体)4を投入してかき混ぜる。
First, metal granules 3 and ceramic granules (or silica granules) 4 are placed in a container containing base material 1 and stirred.

ついで、各粒体を混入した主剤1に硬化剤2を混合して
かき混ぜることにより、硬化反応を進行させる。さらに
、必要に応じて、加熱により硬化を促進する。セラミッ
クス粒体4は、金属粒体3よりも直径が小さく、樹脂材
中に平均に分散され、金属粒体3同士が接触するのを防
止するように働くと共に、伝熱性の改善にも寄与する。
Next, the hardening agent 2 is mixed into the base material 1 mixed with each particle and stirred to advance the hardening reaction. Furthermore, if necessary, curing is accelerated by heating. The ceramic grains 4 have a smaller diameter than the metal grains 3, are evenly dispersed in the resin material, work to prevent the metal grains 3 from coming into contact with each other, and also contribute to improving heat conductivity. .

また、樹鮨中の架橋密度が硬化剤配合比によって左右さ
れるタイプにおいては、配合比の選択によって、硬化後
の樹脂形態をゲル状、柔らかいゴム状、硬いゴム状など
に幅広くコントロールすることができる。
In addition, for types in which the crosslinking density in Jusushi is influenced by the curing agent compounding ratio, the form of the resin after curing can be controlled in a wide range of ways, such as gel-like, soft rubber-like, hard rubber-like, etc. by selecting the compounding ratio. can.

また、薄い伝熱接着層を必要とする場合、金属粒体3に
Bi(ビスマス)−Pb(鉛), BiPb−Sn(錫
),  Bi−Sn−Cd  (カドミウム),  B
i−Sn−Zn (亜鉛),Bi−Cd,Pb−Snな
どの融点が200℃以下の低融点金属を用いるのがよい
In addition, when a thin heat-transfer adhesive layer is required, the metal particles 3 include Bi (bismuth)-Pb (lead), BiPb-Sn (tin), Bi-Sn-Cd (cadmium), B
It is preferable to use a low melting point metal such as i-Sn-Zn (zinc), Bi-Cd, or Pb-Sn, which has a melting point of 200° C. or less.

このような組成の伝熱部用接合材料を半導体装置に用い
た一例が第2図である。
FIG. 2 shows an example in which a bonding material for a heat transfer part having such a composition is used in a semiconductor device.

この使用例では、上記金属粒体3として上記組成による
低融点金属粒体5を用いている。そして、上記の製造方
法に従って低融点金属粒体5を混合した接合材料を、部
品6または部品7の一方の接着面に塗布して部品同士を
密着させ、両者が圧着するように加圧し、この状態のま
ま加熱雰囲気に放置して接合材料中の樹脂を硬化させる
In this usage example, low melting point metal particles 5 having the above composition are used as the metal particles 3. Then, according to the above manufacturing method, a bonding material mixed with the low melting point metal particles 5 is applied to the bonding surface of one of the parts 6 or 7 to make the parts stick together, and pressure is applied so that the two are crimped. The resin in the bonding material is cured by leaving it in a heated atmosphere.

このとき、低融点金属粒体5は、融点が低いため、溶融
及び加圧により、球状の低融点金属粒体5は押し潰され
て偏平な形状に変化する。しだがって、部品6と部品7
の間の接合材料の厚みは、低融点金属粒体5の直径より
も薄くなり、この部分の熱抵抗を小さくすることができ
、放熱効果を高めることができる。
At this time, since the low melting point metal particles 5 have a low melting point, the spherical low melting point metal particles 5 are crushed and changed into a flat shape by melting and pressurization. Therefore, parts 6 and 7
The thickness of the bonding material between the two is made thinner than the diameter of the low melting point metal particles 5, so that the thermal resistance of this portion can be reduced and the heat dissipation effect can be enhanced.

〔実施例2〕 第3図は本発明の他の実施例を示す断面図である。[Example 2] FIG. 3 is a sectional view showing another embodiment of the present invention.

本実施例は、前記実施例が接合材料を塗布などの方法に
よって部品間に介在させたのに対し、1つの部品として
取り扱えるようにシート状に加工したものである。すな
わち、第3図に示すように、前記した方法により〔主剤
l十硬化剤2+金属粒体3+セラミックス粒体4 (又
は低融点金属粒体5)〕から成る粒体温合樹脂材8をシ
ート状にし、その外表面をシリコーンゲルによるゲル状
層9によって覆うようにしたものである。このゲル状層
9は、グリスと異なり液垂れを生じることがない。
In this example, whereas in the previous example the bonding material was interposed between the parts by a method such as coating, the present example is processed into a sheet shape so that it can be handled as one part. That is, as shown in FIG. 3, a granular polymeric resin material 8 consisting of [base material 10 curing agent 2 + metal particles 3 + ceramic particles 4 (or low melting point metal particles 5)] is formed into a sheet as shown in FIG. and its outer surface is covered with a gel-like layer 9 made of silicone gel. Unlike grease, this gel-like layer 9 does not cause dripping.

使用に際しては、第2図における塗布の代わりに部品間
に挟み込於ばよい。
When in use, instead of applying it as shown in FIG. 2, it may be inserted between parts.

この構成では、ゲル状層9が自在に変形するため、これ
に接する被接着物(部品など)が凹凸を有していても、
その全面を埋めるように接合する。
In this configuration, since the gel layer 9 deforms freely, even if the adhered object (such as a component) in contact with it has unevenness,
Join so as to fill the entire surface.

したがって、接合面に気泡などを生じさせることがなく
、伝熱面積を広くし、熱抵抗を小さくすることができる
。また、ゲル状層9は粘着力を有しているた必、接着剤
として機能し、これに接する被接着物を保持ならびに固
定することができる。
Therefore, it is possible to widen the heat transfer area and reduce thermal resistance without creating bubbles on the joint surfaces. Furthermore, since the gel layer 9 has adhesive strength, it functions as an adhesive and can hold and fix objects that come into contact with it.

なお、更に伝熱性が必要な場合には、ゲル状層9に金属
粒体3、セラミックス粒体4などを混入させればよい。
In addition, if further heat conductivity is required, metal particles 3, ceramic particles 4, etc. may be mixed into the gel-like layer 9.

以上本発明によってなされた発明を実施例に基づき具体
的に説明したが、本発明は前記実施例に限定されるもの
ではなく、その要旨を逸脱しない範囲で種々変更可能で
あることは言うまでもない。
Although the invention made by the present invention has been specifically described above based on Examples, it goes without saying that the present invention is not limited to the above-mentioned Examples and can be modified in various ways without departing from the gist thereof.

例えば、前記実施例では主剤1に粒体を混入するものと
したが、硬化剤2に混入してもよいし、或いは両方に混
入してもよい。
For example, in the above embodiment, the particles were mixed into the main agent 1, but they may be mixed into the curing agent 2, or into both.

以上の説明では、主として本発明者によってなされた発
明をその利用分野である半導体装置に適用した場合につ
いて説明したが、発熱する物体とこれに接合される物体
に広く適用可能である。
In the above description, the invention made by the present inventor was mainly applied to semiconductor devices, which is its field of application, but the invention can be widely applied to objects that generate heat and objects bonded thereto.

〔発胡の効果〕[Effect of Hathu]

本願において開示される発明のうち、代表的なものによ
って得られる効果を簡単に説明すれば下記の通りである
Among the inventions disclosed in this application, the effects obtained by typical ones are as follows.

すなわち、発熱体とこれに接合される物体との間に配設
されて、前記両物体間の熱伝導及び接合を司る接合部用
伝熱材料であって、樹脂材と、この樹脂材中に混入され
る金属およびセラミ.ソクスの粒体とから成るようにし
たので、伝熱材料内の熱抵抗を低減し、熱伝導性を向上
させることが出来る。
That is, it is a heat transfer material for a joint part that is disposed between a heating element and an object to be joined to the heat generating element and controls heat conduction and joining between the two objects, and includes a resin material and a resin material in the resin material. Metals and ceramics mixed in. Since the heat transfer material is composed of grains of Sox, the thermal resistance within the heat transfer material can be reduced and the thermal conductivity can be improved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明による伝熱部用接合材料の製造方法を示
す説明図、 第2図は本発明による伝熱部用接合材料の使用例を示す
断面図、 第3図は本発明の他の実施例を示す断面図である。 1・・・主剤、2・・・硬化剤、3・・・金属粒体、4
・・・セラミックス粒体、5・・・低融点金属粒体、6
.7・・・部品、8・・・粒体混合樹脂材、9・・・ゲ
ル状層。
FIG. 1 is an explanatory diagram showing a method for manufacturing a bonding material for heat transfer parts according to the present invention, FIG. 2 is a sectional view showing an example of use of the bonding material for heat transfer parts according to the present invention, and FIG. FIG. 1... Main agent, 2... Curing agent, 3... Metal particles, 4
... Ceramic granules, 5... Low melting point metal particles, 6
.. 7... Parts, 8... Granular mixed resin material, 9... Gel layer.

Claims (1)

【特許請求の範囲】 1、発熱体とこれに接合される部材との間に配設されて
、前記両物体間の熱伝導及び接合を司る接合部用伝熱材
料であって、樹脂材と、この樹脂材中に混入される金属
およびセラミックスの粒体とから成ることを特徴とする
接合部用伝熱材料。 2、前記樹脂材を二液混合型とし、この二液の配合比を
要求される硬化後の弾性に応じて設定することを特徴と
する請求項1記載の接合部用伝熱材料。 3、前記金属粒体の融点が、前記樹脂材のキュア温度以
下であることを特徴とする請求項1記載の接合部用伝熱
材料。 4、請求項1記載の伝熱材料をシート状にし、その外表
面をゲル状樹脂材で被覆したことを特徴とする接合部用
伝熱材料。
[Scope of Claims] 1. A heat transfer material for a joint, which is disposed between a heating element and a member to be joined to the heat generating element and controls heat conduction and joining between the two objects, the material comprising a resin material and A heat transfer material for joints, characterized in that it consists of metal and ceramic particles mixed in this resin material. 2. The heat transfer material for joints according to claim 1, wherein the resin material is a two-component mixture type, and the blending ratio of the two components is set depending on the required elasticity after curing. 3. The heat transfer material for joints according to claim 1, wherein the melting point of the metal particles is lower than the curing temperature of the resin material. 4. A heat transfer material for joints, characterized in that the heat transfer material according to claim 1 is formed into a sheet and the outer surface thereof is coated with a gel-like resin material.
JP9012090A 1990-01-22 1990-01-22 Heat transfer material for junction Pending JPH03217048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9012090A JPH03217048A (en) 1990-01-22 1990-01-22 Heat transfer material for junction

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9012090A JPH03217048A (en) 1990-01-22 1990-01-22 Heat transfer material for junction

Publications (1)

Publication Number Publication Date
JPH03217048A true JPH03217048A (en) 1991-09-24

Family

ID=11795875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9012090A Pending JPH03217048A (en) 1990-01-22 1990-01-22 Heat transfer material for junction

Country Status (1)

Country Link
JP (1) JPH03217048A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001065603A1 (en) * 2000-02-29 2001-09-07 Siemens Aktiengesellschaft Heat-conducting adhesive compound and a method for producing a heat-conducting adhesive compound
JP2003176414A (en) * 2001-12-11 2003-06-24 Shin Etsu Chem Co Ltd Thermally conductive silicone composition, cured product thereof and method for laying the same, and heat- releasing structure for semiconductor device using the same
US8726573B2 (en) 2009-09-29 2014-05-20 Aisin Seiki Kabushiki Kaisha Window regulator device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001065603A1 (en) * 2000-02-29 2001-09-07 Siemens Aktiengesellschaft Heat-conducting adhesive compound and a method for producing a heat-conducting adhesive compound
US6823915B2 (en) 2000-02-29 2004-11-30 Siemens Aktiengesellschaft Heat-conducting adhesive joint with an adhesive-filled, porous heat conductor
KR100735933B1 (en) * 2000-02-29 2007-07-06 지멘스 악티엔게젤샤프트 Heat-conducting adhesive compound and a method for producing a heat-conducting adhesive compound
JP2003176414A (en) * 2001-12-11 2003-06-24 Shin Etsu Chem Co Ltd Thermally conductive silicone composition, cured product thereof and method for laying the same, and heat- releasing structure for semiconductor device using the same
US8726573B2 (en) 2009-09-29 2014-05-20 Aisin Seiki Kabushiki Kaisha Window regulator device

Similar Documents

Publication Publication Date Title
KR101609198B1 (en) Methods for establishing thermal joints between heat spreaders and heat sources, and electronic device
US7846778B2 (en) Integrated heat spreader, heat sink or heat pipe with pre-attached phase change thermal interface material and method of making an electronic assembly
JP4776192B2 (en) Thermal interface adhesive
EP1376689B1 (en) Radiating structural body of electronic part and radiating sheet used for the radiating structural body
CN1290963C (en) Phase change thermal interface composition having induced bonding property
US7473995B2 (en) Integrated heat spreader, heat sink or heat pipe with pre-attached phase change thermal interface material and method of making an electronic assembly
US7147367B2 (en) Thermal interface material with low melting alloy
KR20160126879A (en) Reusable thermoplastic thermal interface materials and methods for establishing thermal joints between heat sources and heat dissipating/removal structures
US4147669A (en) Conductive adhesive for providing electrical and thermal conductivity
US6286212B1 (en) Thermally conductive material and method of using the same
US20030020159A1 (en) Heat-conducting adhesive compound and a method for producing a heat-conducting adhesive compound
JPH09501016A (en) Thermally conductive interface material with good familiarity
KR20100133449A (en) Thermally enhanced electrically insulative adhesive paste
JP2002003830A (en) Highly heat conductive composition and its application
US20060128068A1 (en) Methods of using sonication to couple a heat sink to a heat-generating component
TW200302557A (en) Heat-dissipating member, manufacturing method and installation method
JPH0352510B2 (en)
JPH03217048A (en) Heat transfer material for junction
US10943796B2 (en) Semiconductor device assembly having a thermal interface bond between a semiconductor die and a passive heat exchanger
JP2004335872A (en) Thermally conductive material and thermally conductive junction using same and method for manufacturing the same
CN104766845B (en) Heat transfer structure and its manufacture method
ATE349475T1 (en) ONE-COMPONENT HOT CURING EPOXY RESIN COMPOSITION AND SEMICONDUCTOR ASSEMBLY BACKING MATERIAL
WO2008037559A1 (en) Use of an adhesive composition for die-attaching high power semiconductors
JP2003069262A (en) Method for bonding heat dissipation sheet
JP4115024B2 (en) Sheet with conductivity and thermal conductivity