JPH03209609A - Production of perpendicular magnetic thin-film head - Google Patents

Abstract

PURPOSE:To eliminate the influence on the magnetization transition of a recording medium and to facilitate high-density recording by forming a main magnetic pole build-up layer on the surface on the main magnetic pole exclusive of the front end part of the main magnetic pole. CONSTITUTION:A thin-film coil 43 of a spiral shape or the like pinched by interlayer insulating layers 42 consisting of a thermosetting resin material, etc., is formed in the main magnetic pole forming region on a magnetic substrate 41 consisting of ferrite to constitute a slider and the main magnetic pole 44 of an amorphous Co-Zr system having 0.3 to 0.5mum thickness is sputtered on the insulating layer 42 covering this coil and thereafter, the main magnetic pole build-up layer 45 consisting of Ni-Fe having about 3mum thickness is patterned and formed by a plating method in the region on the main magnetic pole 44 exclusive of the front end part 44a of the main magnetic pole. A resin layer 46 is so formed on the build-up layer 45 that only the step part 45a at the front end is exposed. The layer 46 is irradiated with an inert gaseous ion thereupon and is thereby ion-etched, by which the step part 45a is worked to a tapered shape. A protective film 47 consisting of Al2O3 is deposited over the entire surface of the substrate 41 and is cut in the position A to polish the cut surface. A medium- facing surface 48 is thus formed. The head formed with the front end of the layer 45 to the tapered shape is obtd. in this way and the leak magnetic fields from the front end part are minimized.

Description

[Detailed Description of the Invention] [Summary] A method for manufacturing a perpendicular magnetic thin film head suitable for high-density recording used in magnetic disk devices, magnetic tape devices, etc. The tip is shaped to weaken the leakage magnetic field to easily form a perpendicular magnetic thin-film head that prevents any adverse effects on the magnetization transition of the recording medium. A thin film coil is provided, a main magnetic pole whose rear end is magnetically connected to the substrate is provided on the interlayer insulating layer, and a main magnetic pole raised layer is formed on the surface of the main magnetic pole excluding the main pole tip. A method for manufacturing a perpendicular magnetic thin film head comprising the steps of forming a main pole raised layer on the main pole, and then coating the raised layer with a resin layer so that only the tip step portion is exposed; It is constructed by performing a step of forming a step portion at the tip of the main pole raised layer exposed from the resin layer into a tapered shape by dry etching.

[Industrial application field]

The present invention relates to a method of manufacturing a perpendicular magnetic thin film head suitable for high-density recording used in magnetic disk devices, magnetic tape devices, etc.

In recent years, magnetic disk drives, which are external storage devices for computer systems, are required to have higher performance magnetic heads due to larger capacity and higher recording density. By combining a perpendicular magnetic recording medium with a two-layer structure in which a perpendicular recording layer with perpendicular anisotropy is formed on a soft magnetic layer with high magnetic flux, information can be magnetized in a direction perpendicular to the medium surface. A single-pole perpendicular magnetic thin-film head that can realize density recording has been proposed.

In such a perpendicular magnetic thin-film head, recording and reproducing efficiency is enhanced by a structure in which a main pole raised layer is further laminated on the main pole for recording and reproduction, but high-density recording is hindered by the shape of the tip of the main pole raised layer. There is a need for a method for easily manufacturing a single-pole type perpendicular magnetic thin film head that eliminates such problems.

[Conventional technology]

In the conventional perpendicular magnetic thin film, as shown in FIG. For example, a thin film coil 13 having a spiral shape or the like sandwiched therebetween, and a coil of 0.3
A main magnetic pole 14 for recording and reproduction made of an amorphous Co-Zr magnetic thin film with a film thickness of ~0.5 μm is attached to the rear end 14.
b is deposited and formed so as to extend on the insulated magnetic substrate 11,
3 in the area on the main pole 14 excluding the main pole tip 14a.
A main pole raised layer 15 made of, for example, Ni--Fe and having a thickness of approximately μm is sequentially laminated.

On the magnetic substrate Il on which the main pole raised layer 15 is formed, a protective film 6 made of A ll 20:l or the like is further deposited.

Then, the head component board is attached to the main pole tip portion 14a.
The medium facing surface I7 is formed by cutting the surface to expose the medium facing surface I7 and performing surface polishing.
is cut into a slider shape.

A perpendicular magnetic thin film head having such a configuration is usually assembled with a perpendicular magnetic disk 21 having a two-layer structure in which a perpendicular recording layer 24 is laminated on a disk substrate 22 via a high permeability soft magnetic layer 23. At the same time, the magnetic flux generated from the main pole tip 14a of the main pole 14 of the perpendicular magnetic thin-film head passes vertically through the perpendicular recording layer 24 of the magnetic disk 21, and horizontally within the soft magnetic layer 23 immediately below it. The magnetic flux passes through the perpendicular recording layer 24 perpendicularly again, passes through the magnetic substrate 11 of the thin film head, and returns to the main pole 14.

During the reflux process, the perpendicular recording layer 24 of the magnetic disk 21 is magnetized and information is recorded. Further, the main magnetic pole 14 of the thin film head is magnetized by leakage magnetic flux from the magnetic disk 21 on which information has already been recorded, and reproduction is performed by extracting a signal due to an electromotive force generated in the nearby thin film coil 13.

[Problem to be solved by the invention]

By the way, in the conventional perpendicular magnetic thin film head as described above, in order to improve the recording efficiency by concentrating the magnetic flux on the main pole tip 14a and to improve the reproduction efficiency by reducing the magnetic resistance of the main pole 14. In addition, since the main pole build-up layer 15 is laminated on the main pole 14 by a mask plating method using a resist mask, the tip of the formed main pole build-up [15] is at right angles due to the pattern shape of the resist mask. The leakage magnetic field mainly from the step edges of the main pole raised layer 15 disturbs the magnetization transition of the recording medium due to the original recording magnetic field from the main pole tip 14a, resulting in a high magnetic field. There was a drawback that density recording was inhibited.

In view of the above-mentioned conventional drawbacks, the present invention provides a perpendicular magnetic thin film head in which the tip of the main pole raised layer stacked on the main pole is shaped to weaken the leakage magnetic field, thereby preventing an adverse effect on the magnetization transition of the recording medium. The object is to provide a new manufacturing method that allows easy formation.

[Means to solve the problem]

In order to achieve the above object, the present invention provides a thin film coil sandwiched between interlayer insulating layers on the magnetic pole forming surface of a magnetic substrate, and has a rear end portion magnetically connected to the substrate on the interlayer insulating layer. A method for manufacturing a perpendicular magnetic thin film head in which a main pole is provided and a main pole raised layer is formed on a surface of the main pole excluding the tip of the main pole, the main pole raised layer being formed on the main pole. After that, a step of coating the raised layer with a resin layer so that only the stepped portion at the tip is exposed, and a step of forming the stepped portion at the tip of the main pole raised layer exposed from the resin layer into a tapered shape by dry etching. Construct by applying.

[For production]

In the present invention, in the dry etching method, for example, ion etching, as shown in FIG. When the gas ions are irradiated onto the object to be etched 31 having a stepped portion 32 at an incident angle θ as shown in FIG. Figure (from bl (C
) and (d), the step portion 32 is etched in an inclined manner faster than other portions. By etching the part with the gas ions, the film thickness of that part is gradually thinned and formed into a tapered shape, so that the magnetic field leaking from the tip of the main pole raised layer is reduced. It becomes very weak, and as a result, there is no adverse effect on the magnetization transition of the recording medium.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIGS. 1(a) to 1(e) are sectional views of essential parts showing an embodiment of a method for manufacturing a perpendicular magnetic thin film head according to the present invention in the order of steps.

First, as shown in Figure 1 (a.
n.

Alternatively, a magnetic substrate 4 made of ferrite such as Mn-Zn
A thin film coil 43 having a spiral shape, for example, sandwiched between interlayer insulating layers 42 made of a thermosetting resin material or the like is formed in the main magnetic pole forming region on the main magnetic pole forming region 1, and a thin film coil 43 having a spiral shape or the like is formed on the interlayer insulating layer 42 that covers the thin film coil 43. For example, 0.3 to 0 by sputtering method.
．． A main magnetic pole 44 for recording and reproducing made of an amorphous Co--Zr magnetic thin film with a film thickness of 5 μm is deposited so that its rear end 44b extends on the substrate 41, and then a layer on the main magnetic pole 44 is formed. 3 in the area excluding the main pole tip 44a.
A main pole raised layer 45 made of Ni--Fe having a thickness of approximately μm is patterned by mask plating.

Next, as shown in FIG. 1(b), a resin material made of photoresist or the like is applied on the main pole raised layer 45 including the interlayer insulating layer 42 and the main pole tip portion 44a so that only the tip stepped portion 45a is exposed. The resin layer 46 is formed by adjusting the viscosity and coating by a spin coating method.

Next, as shown in FIG. 1C, the surface on which the resin layer 46 is formed is irradiated with ions of an inert gas such as argon (Ar) in the direction shown by the arrow to perform ion etching.
The tip stepped portion 45a of the main pole raised layer 45 exposed from the resin layer 46 is processed into a tapered shape.

Thereafter, as shown in FIG. 1(d), the resin layer 46 is dissolved and removed using an organic solvent, etc., and A N 20. A protective film 47 consisting of the like is deposited and then cut at the position indicated by the dashed line A in the figure so that the main pole tip 44a is exposed, and the cut surface is ground and polished into a slider shape. Go to the medium facing surface 48
form.

In this way, as shown in FIG.
A perpendicular magnetic thin film head with a tapered shape can be easily obtained.
Since the leakage magnetic field from the tip of the main pole raised layer 45 becomes weak, the adverse effect on the magnetization transition of the recording medium is eliminated.

Furthermore, FIGS. 4(a) to 4(el) show other embodiments of the manufacturing method based on the present invention in the order of steps, and FIGS. 1(a) to (e)
The same parts are given the same symbols. The difference between the embodiment shown in these figures and the embodiment shown in FIGS. 1(a) to (e) is that, as shown in FIG. 4(a), the Ni-Zn slider
A thin film coil 43, for example, in a spiral shape, sandwiched between interlayer insulating layers 42 made of a thermosetting resin material, etc., is formed in the main pole formation region on a magnetic substrate 41 made of ferrite such as;
On the interlayer insulating layer 42 covering the thin film coil 43, an amorphous Co-Zr based magnetic thin film 51 for forming a main magnetic pole having a film thickness of, for example, 0.3 to 0.5 μm is formed by sputtering.
3 on the magnetic thin film 51 for forming the main magnetic pole.
A main magnetic pole raised layer 45 made of Ni--Fe and having a thickness as thick as a μ-sheath is patterned by mask plating.

Next, as shown in FIG. 4('b), a photoresist whose viscosity etc. have been adjusted so that only the tip stepped portion 45a is exposed is applied on the main pole heaping layer 45 including the magnetic thin film 51 for forming the main pole. is coated by a spin coating method, and then patterned in the shape of the main pole to form a resist film 5 in the shape of the main pole pattern.
form 2.

Next, as shown in FIG. 4(e), the magnetic thin film 5 for forming the main magnetic pole is exposed on the patterned resist film 52.
1, perform ion etching by irradiating inert gas ions such as argon (^r) in the direction shown by the arrow,
The portion of the magnetic thin film 51 for forming the main pole exposed from the resist film 52 is removed to form the main pole 53, and the tip stepped portion 45a of the main pole raised layer 45 is processed into a tapered shape.

After that, as shown in FIG. 4 (di), the resist film 52
A protective film 47 made of 1Z03 or the like is formed on the entire surface of the head constituting substrate by dissolving and removing it by organic cutting or the like, and a point indicated by B in the figure is formed so that the main pole tip 53a is exposed. The medium facing surface 48 is formed by cutting at the position of the chain line and grinding and polishing the cut surface into a slider shape.

Even with such an embodiment, a perpendicular magnetic thin film head in which the tip of the main pole raised layer 45 on the main pole 53 is tapered can be easily obtained as shown in FIG. As explained in (e), the leakage magnetic field from the tip of the main magnetic pole heaping layer 45 can be weakened, and the adverse effect on the magnetization transition of the recording medium can be eliminated.

〔Effect of the invention〕

As is clear from the above description, according to the method of manufacturing a perpendicular magnetic thin film head according to the present invention, the tip of the main pole heaping layer on the main pole can be easily made into a tapered shape. With such a configuration, the leakage magnetic field from the tip of the main pole heaping layer is weakened, eliminating the influence on the magnetization transition of the recording medium, facilitating high-density recording, and improving practical cost. It has a great effect.

[Brief explanation of drawings]

FIGS. 1(a) to tel are cross-sectional views of main parts showing the process order of an embodiment of the method for manufacturing a perpendicular magnetic thin film head according to the present invention. FIG. Figures 3(a) to (11 are cross-sectional views of main parts sequentially showing changes in shape of stepped portions due to ion etching, and Figures 4(a) to (e) are perpendicular magnetic thin films according to the present invention. FIG. 5 is a cross-sectional view of a main part showing another embodiment of a head manufacturing method in the order of steps. FIG. 5 is a cross-sectional view of a main part for explaining a conventional perpendicular magnetic thin film head. 4 (al to (el), 31 is the object to be etched, 32 is the stepped portion, 41 is the magnetic substrate, 42 is the interlayer insulating layer, 43 is the thin film coil, 44.
53 is a main pole, 45 is a main pole build-up layer, 46 is a resin layer,
47 is a protective film, 48 is a medium facing surface, 51 is a magnetic thin film, 5
2 indicates a resist film, respectively. (e) A→bR@I distribution force J take Le Shun to 11F^ pull-! Owo lack n
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Claims (1)

[Claims] An interlayer insulating layer (42) is provided on the magnetic pole formation surface on the magnetic substrate (41).
A thin film coil (43) sandwiched between the interlayer insulating layer (43) is provided.
42) A main magnetic pole (44) whose rear end (44b) is magnetically connected to the substrate (41) is provided on the main magnetic pole (44).
) A method for manufacturing a perpendicular magnetic thin film head in which a main pole raised layer (45) is formed on a surface other than a main pole tip (44a) on the main pole (44), the main pole raised layer (45) being formed on the main pole (44). After forming (45), a step of covering the raised layer (45) with a resin layer (46) so that only the tip stepped portion (45a) is exposed;
Main pole raised layer (45) exposed from the resin layer (46)
A method of manufacturing a perpendicular magnetic thin film head, comprising: forming a step portion (45a) at a tip end into a tapered shape by dry etching.