JPH0320436U - - Google Patents
Info
- Publication number
- JPH0320436U JPH0320436U JP7952589U JP7952589U JPH0320436U JP H0320436 U JPH0320436 U JP H0320436U JP 7952589 U JP7952589 U JP 7952589U JP 7952589 U JP7952589 U JP 7952589U JP H0320436 U JPH0320436 U JP H0320436U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- photoresist
- impurity
- view
- main part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims 2
- 238000002513 implantation Methods 0.000 claims 1
- 238000000034 method Methods 0.000 description 5
- 238000005468 ion implantation Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7952589U JPH0320436U (ko) | 1989-07-07 | 1989-07-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7952589U JPH0320436U (ko) | 1989-07-07 | 1989-07-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0320436U true JPH0320436U (ko) | 1991-02-28 |
Family
ID=31623757
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7952589U Pending JPH0320436U (ko) | 1989-07-07 | 1989-07-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320436U (ko) |
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1989
- 1989-07-07 JP JP7952589U patent/JPH0320436U/ja active Pending