JPH03202146A - Baking method and apparatus - Google Patents
Baking method and apparatusInfo
- Publication number
- JPH03202146A JPH03202146A JP1343711A JP34371189A JPH03202146A JP H03202146 A JPH03202146 A JP H03202146A JP 1343711 A JP1343711 A JP 1343711A JP 34371189 A JP34371189 A JP 34371189A JP H03202146 A JPH03202146 A JP H03202146A
- Authority
- JP
- Japan
- Prior art keywords
- porous body
- case
- inorganic porous
- waveguide
- inorg
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 23
- 239000012535 impurity Substances 0.000 claims abstract description 31
- 230000001678 irradiating effect Effects 0.000 claims abstract description 8
- 239000003054 catalyst Substances 0.000 abstract description 5
- 238000001914 filtration Methods 0.000 abstract description 5
- 125000002887 hydroxy group Chemical group [H]O* 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 29
- 239000011148 porous material Substances 0.000 description 22
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 239000002023 wood Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241001538234 Nala Species 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
- B01J19/122—Incoherent waves
- B01J19/126—Microwaves
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Catalysts (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、濾過、触媒担体等に使用される無機質多孔体
から水分や不純物を除去するベーキング方法及びそれに
使用する装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a baking method for removing moisture and impurities from an inorganic porous material used for filtration, catalyst carriers, etc., and an apparatus used therefor.
［従来の技術］
一般に無機質多孔体は表面積が大きい為、空気中の水分
を吸着してしまう。無機質多孔体は、その用途に於いて
、水分を有害として嫌う場合、例えば無機質多孔体を半
導体用のガスフィルタとして使用しようとする場合には
、特に無機質多孔体中の水分を除去する必要があった。[Prior Art] Inorganic porous materials generally have a large surface area, so they tend to adsorb moisture in the air. Inorganic porous materials are used in cases where moisture is considered harmful and is disliked, for example, when the inorganic porous material is used as a gas filter for semiconductors, it is necessary to remove the moisture in the inorganic porous material. Ta.
無機質多孔体中の水分を除去する方法とじては、一般に
直接加熱により水分を除去している。As a method for removing moisture in an inorganic porous body, the moisture is generally removed by direct heating.
前記半導体用のガスフィルタとしては、通常有機質多孔
体セラミックスフィルタやアルミナ製のセラミックスフ
ィルタなどが使用されている。As the gas filter for semiconductors, organic porous ceramic filters, alumina ceramic filters, and the like are usually used.
［発明が解決しようとする課題］
ところで、セラミックスフィルタは、耐熱性に優れ、加
熱再生できるという利点を有するが、常温での水分吸着
量が多い。また半導体用のガスフィルタとしては、ケー
ス内に設置されている場合が多く、その場合フィルタ中
の水分を除去するのにケースの外側から加熱していた為
、フィルタに熱が伝わるのに時間がかかり、しかも熱が
十分に伝わらず、十分に脱水することができず、脱水に
も時間がかかった。さらに単なる加熱では、分子レベル
のＯＨ基が残留し易く、フィルタを実使用した時に被濾
過物と反応を生じたりすることがあった。[Problems to be Solved by the Invention] Ceramic filters have the advantage of being excellent in heat resistance and can be regenerated by heating, but they adsorb a large amount of water at room temperature. Additionally, gas filters for semiconductors are often installed inside a case, and in that case, heating is applied from the outside of the case to remove moisture from the filter, so it takes time for the heat to be transferred to the filter. In addition, the heat was not transmitted sufficiently, and dehydration was not possible, and dehydration took a long time. Furthermore, with mere heating, OH groups at the molecular level tend to remain and may react with the filtered material when the filter is actually used.
そこで本発明は、濾過、触媒担体等に使用されるケース
内の無機質多孔体から水分や不純物を短時間に効率良く
除去でき、しかも分子レベルのＯＨ基が残留したり、不
純物等が無機質多孔体に吸着されることのないベーキン
グ方法及び装置を提供しようとするものである。Therefore, the present invention is capable of efficiently removing moisture and impurities from an inorganic porous material in a case used for filtration, catalyst carriers, etc. in a short time, and also prevents OH groups at the molecular level from remaining and impurities from being removed from the inorganic porous material. It is an object of the present invention to provide a baking method and apparatus that are free from adsorption.
［ｉ１題を解決するための手段］
上記課題を解決するための本発明の第１のベーキング方
法は、ケース内に設けられた無機質多孔体にマイクロ波
を照射すると共に実質的に不純物を含まないガスを無機
質多孔体に流通させて、無機質多孔体から水分、不純物
等を除去することを特徴とするものである。[Means for Solving Problem i1] A first baking method of the present invention for solving the above problem irradiates an inorganic porous material provided in a case with microwaves and substantially contains no impurities. It is characterized in that water, impurities, etc. are removed from the inorganic porous body by passing gas through the inorganic porous body.
本発明の第□のベーキング方法は、ケース内に設けられ
た無機質多孔体にマイクロ波を照射すると共にケース内
を真空引きして、無機質多孔体から水分、不純物等を除
去することを特徴とするものである。The baking method No. □ of the present invention is characterized by irradiating the inorganic porous body provided in the case with microwaves and evacuating the inside of the case to remove moisture, impurities, etc. from the inorganic porous body. It is something.
上記第１のベーキング方法を実施するための本発明の第
１のベーキング装置は、内部に無機質多孔体が設けられ
両端に開口を有するケースの一端開口に取付けられる接
続部材と、該接続部材に一端が接続された導波管と、該
導波管の途中に接続されたガス導入管と、導波管の他端
部に設けられたマイクロ波発生装置とより成るものであ
る。A first baking device of the present invention for carrying out the first baking method includes a connecting member attached to an opening at one end of a case having an inorganic porous body inside and openings at both ends; It consists of a waveguide to which is connected, a gas introduction pipe connected to the middle of the waveguide, and a microwave generator provided at the other end of the waveguide.
上記第２のベーキング方法を実施するための本発明の第
２のベーキング装置は、内部に無機質多孔体が設けられ
両端に開口を有するケースの一端開口に取付けられる接
続部材と、該接続部材に一端が接続された導波管と、該
導波管の他端部に設けられたマイクロ波発生装置と、前
記ケースの他端開口に接続される真空ポンプとより成る
ものである。A second baking device of the present invention for carrying out the second baking method includes a connecting member attached to an opening at one end of a case having an inorganic porous body inside and openings at both ends; A microwave generating device is provided at the other end of the waveguide, and a vacuum pump is connected to the opening at the other end of the case.
［作 用］
上述の如く構成された第１のベーキング装置を用いる第
１のベーキング方法によれば、ケース内の無機質多孔体
から水分又は不純物を除去するのに適切な周波数のマイ
クロ波をマイクロ波発生装置により発生させ、これを導
波管を伝って直接ケース内の無機質多孔体に照射するこ
とにより、無機質多孔体は若干発熱し、ケース内でマイ
クロ波は無機質多孔体とケース内壁面などで反射しなが
ら無機質多孔体中の水分又は不純物を励起することどな
る。そして励起された水分又は不純物は気体となり、導
波管の途中のガス導入管から導波管を通してケース内に
導入された不活性ガスにより運ばれ、ケースの他端開口
より外部に排出除去される。無機質多孔体及びケースは
、水分、不純物等よりマイクロ波を吸収しにくいので、
それほど発熱量は大きくなく、処理後の取扱いが楽であ
る。[Function] According to the first baking method using the first baking device configured as described above, microwaves of a frequency appropriate for removing moisture or impurities from the inorganic porous material in the case are applied. The inorganic porous body generates a slight amount of heat by being generated by a generator and directly irradiating the inorganic porous body inside the case through a waveguide. While reflecting, the sound excites moisture or impurities in the inorganic porous material. The excited water or impurities then becomes a gas, which is carried by the inert gas introduced into the case through the waveguide from the gas introduction pipe in the middle of the waveguide, and is discharged and removed from the opening at the other end of the case. . Inorganic porous bodies and cases absorb microwaves more easily than moisture, impurities, etc.
The amount of heat generated is not so large and it is easy to handle after treatment.
また第２のベーキング装置を用いる第２のベキング方法
によれば、ケース内の無機質多孔体から水分又は不純物
を除去するのに適切な周波数のマイクロ波をマイクロ波
発生装置により発生させ、これを導波管を伝って直接ケ
ース内の無機質多孔体に照射することにより、無機質多
孔体は若干発熱し、ケース内でマイクロ波は無機質多孔
体とケース内壁面などで反射しながら無機質多孔体中の
水分又は不純物を励起することとなる。そして励起され
た水分又は不純物は気体となり、ケー＼スの他端開口に
接続した真空ポンプにより吸引されて外部に排出除去さ
れる。無機質多孔体及びケースは、水分、不純物等より
マイクロ波を吸収しにくいので、それほど発熱量は大き
くなく、処理後の取扱いが楽である。According to a second baking method using a second baking device, a microwave generator generates microwaves with a frequency suitable for removing moisture or impurities from the inorganic porous material in the case, and the microwaves are guided. By directly irradiating the inorganic porous material inside the case through the wave tube, the inorganic porous material generates a slight amount of heat, and inside the case, the microwave is reflected by the inorganic porous material and the inner wall of the case, and absorbs the moisture in the inorganic porous material. Or it will excite impurities. The excited moisture or impurities turn into a gas, which is sucked by a vacuum pump connected to the opening at the other end of the case and discharged to the outside. Since the inorganic porous body and the case absorb microwaves less easily than moisture, impurities, etc., they do not generate a large amount of heat and are easy to handle after processing.
［実施例］
本発明の第１のベーキング方法に用いる第１のベーキン
グ装置の一実施例を図によって説明する。第１．２図に
於いて、１はマイクロ波を反射し易い材料、例えばＳＵ
Ｓより成るフィルターケースで、その両端に夫々弁２ａ
、３ａの設けられた開口２，３を有し、内部にフィルタ
ーエレメントである無機質多孔体４が設けられている。[Example] An example of the first baking apparatus used in the first baking method of the present invention will be described with reference to the drawings. In Figure 1.2, 1 is a material that easily reflects microwaves, such as SU.
A filter case consisting of S, with valves 2a at each end.
, 3a, and an inorganic porous body 4 serving as a filter element is provided inside.
無機質多孔体４は多数の本例では１９木の細孔５を一定
間隔に軸方向に有するアルミナ製六角柱状体で、フィル
ターケース１内で他端面に配したプレート６により細孔
５の他端が封塞され、その封塞部の後側周囲にガス通路
７が形成され、このガス通路７は無機質多孔体４の外周
面とケース１の内壁面との間に形成された環状隙間８と
連通しており、環状隙間８の一端はフィルターケース１
の環状板９で封塞されている。フィルターケース１の一
端の開口２には本発明のベーキング装置１゜が図示の如
く接続されるもので、該ベーキング装置１０は前記開口
２に継手１１を介して接続されるＳＵＳより成る導波管
１２と、該導波管１２の途中に接続された開閉弁１３を
有するガス導入管１４と、前記導波管１２の他端部に設
けられたマイクロ波発生装置１５とより成るものである
。The inorganic porous body 4 is a hexagonal columnar body made of alumina having a large number of pores 5 of 19 wood in the axial direction at regular intervals in the filter case 1. is sealed, and a gas passage 7 is formed around the rear side of the sealed part, and this gas passage 7 is connected to an annular gap 8 formed between the outer peripheral surface of the inorganic porous body 4 and the inner wall surface of the case 1 One end of the annular gap 8 is connected to the filter case 1.
It is sealed with an annular plate 9. A baking device 1° of the present invention is connected to an opening 2 at one end of the filter case 1 as shown in the figure, and the baking device 10 has a waveguide made of SUS connected to the opening 2 via a joint 11. 12, a gas introduction pipe 14 having an on-off valve 13 connected to the middle of the waveguide 12, and a microwave generator 15 provided at the other end of the waveguide 12.
このように構成されたベーキング装置１ｏにより半導体
製造装置に使用されたフィルターから水分を除去するベ
ーキング方法について説明する。A baking method for removing moisture from a filter used in a semiconductor manufacturing device using the baking apparatus 1o configured as described above will be described.
図示の如くベーキング装置１ｏを継手１１を介してフィ
ルターケース１の一端の開口２に接続する。次はフィル
ターケース１内のフィルターエレメントである無機質多
孔体４から水分を除去するに適切な周波数（約２４００
ＭＨｚ）のマイクロ波をマイクロ波発生装置１５により
発生させ、これを導波管１２を伝って直接フィルターケ
ース１内の無機質多孔体４に照射する。その結果、無機
質多孔体４は若干発熱し、フィルターケース１内でマイ
クロ波は無機質多孔体４とケース内壁面などで反射しな
がら無機質多孔体４中の水分を励起することになる。そ
して励起された水分は気体となり、この気体は導波管１
２の途中のガス導入管１４の開閉弁１３を開けて導波管
１２を通してフィルターケース１内に導入されたＮ２ガ
スが無機質多孔体４を通過する際に運ばれて、無機質多
孔体４の外周の環状隙間８に至り、ここから他端部のガ
ス通路７を通って他端の開口３より外部へ排出除去され
る。Ｎ２ガスは無機質多孔体４を通過した時励起された
残留不純物や捕集された粒子と反応を生じにくいのでフ
ィルター性能を劣化することがない。As shown in the figure, a baking device 1o is connected to an opening 2 at one end of a filter case 1 via a joint 11. Next, the frequency (approximately 2400
Microwaves (MHz) are generated by a microwave generator 15 and transmitted through a waveguide 12 to directly irradiate the inorganic porous body 4 in the filter case 1. As a result, the inorganic porous body 4 generates a little heat, and the microwaves in the filter case 1 excite the moisture in the inorganic porous body 4 while being reflected by the inorganic porous body 4 and the inner wall surface of the case. The excited water then becomes a gas, and this gas flows through the waveguide 1.
N2 gas, which is introduced into the filter case 1 through the waveguide 12 by opening the on-off valve 13 of the gas introduction pipe 14 in the middle of the inorganic porous body 4, is transported to the outer periphery of the inorganic porous body 4. From there, the gas passes through the gas passage 7 at the other end and is discharged and removed outside through the opening 3 at the other end. Since the N2 gas hardly reacts with the residual impurities excited and the collected particles when passing through the inorganic porous body 4, the filter performance is not deteriorated.
次に第２のベーキング方法に用いる第２のベーキング装
置の一実施例を第３図によって説明する。図中第１図と
同一符号はその説明を省略する。フィルターケース１の
一端の開口２に接続する本発明のベーキング装置１０′
は、前記開口２に継手１１を介して接続されるＳＵＳよ
り成る導波管１２と、該導波管１２の他端部に設けられ
たマイクロ波発生装置１５と、フィルターケース１の他
端の開口３に吸引ホース１６を接続する真空ポンプ１７
とより成るものである。Next, an embodiment of the second baking apparatus used in the second baking method will be described with reference to FIG. In the figure, the same reference numerals as in FIG. 1 will omit the explanation. Baking device 10' of the present invention connected to opening 2 at one end of filter case 1
A waveguide 12 made of SUS is connected to the opening 2 via a joint 11, a microwave generator 15 provided at the other end of the waveguide 12, and a microwave generator 15 at the other end of the filter case 1. Vacuum pump 17 connecting suction hose 16 to opening 3
It consists of
このように構成されたベーキング装置１０′により半導
体製造装置に使用されたフィルターから水分を除去する
ベーキング方法について説明する。図示の如くベーキン
グ装置１０’を継手１１を介してフィルターケース１の
一端の開口２に接続し且つ他端の開口３に真空ポンプ１
７の吸弓ホース１６を接続する。次にフィルターケース
１内のフィルターエレメントである無機質多孔体４から
水分を除去するに適切な周波数（約２４００ＭＨｚ）の
マイクロ波をマイクロ波発生装置１５により発生させ、
これを導波管１２を伝って直接フィルターケース１内の
無機質多孔体４に照射する。その結果、無機質多孔体４
は若干発熱し、フィルターケース１内でマイクロ波は無
機質多孔体４とケース内壁面などで反射しながら無機質
多孔体４中の水分を励起することになる。そして励起さ
れた水分は気体となり、この気体はフィルターケース１
の他端の開口３に吸引ホース１７を接続した真空ポンプ
１６により吸引されて外部にｔＪ［出除去される。この
真空吸引により無機質多孔体４中の励起された気体、残
留不純物１粒子等は無機質多孔体４から抜は出るのが促
進されるので、効率の良いベーキングが行われる。A baking method for removing moisture from a filter used in a semiconductor manufacturing apparatus using the baking apparatus 10' configured as described above will be described. As shown in the figure, a baking device 10' is connected to an opening 2 at one end of the filter case 1 via a joint 11, and a vacuum pump 1 is connected to an opening 3 at the other end.
Connect the suction bow hose 16 of No. 7. Next, a microwave generator 15 generates microwaves at an appropriate frequency (approximately 2400 MHz) to remove moisture from the inorganic porous body 4 that is the filter element in the filter case 1.
This light passes through the waveguide 12 and is irradiated directly onto the inorganic porous body 4 inside the filter case 1 . As a result, the inorganic porous body 4
generates a little heat, and the microwave inside the filter case 1 excites the moisture in the inorganic porous body 4 while being reflected by the inorganic porous body 4 and the inner wall surface of the case. Then, the excited moisture becomes gas, and this gas is
It is sucked by a vacuum pump 16 to which a suction hose 17 is connected to the opening 3 at the other end, and removed to the outside. This vacuum suction promotes the removal of the excited gas and residual impurity particles in the inorganic porous body 4 from the inorganic porous body 4, resulting in efficient baking.
上記各実施例の水分除去後のフィルターは、フィルター
ケース１内に高純度ガス、好ましくはＮ、ガスを大気圧
より高く充填し、両端間口２３に設けられた弁２ａ、３
ａを閉じて保管、輸送する。The filter after water removal in each of the above embodiments has a filter case 1 filled with high-purity gas, preferably N gas, at a pressure higher than atmospheric pressure, and valves 2a and 3 provided at both end openings 23.
Store and transport with a closed.
尚、上記各実施例のベーキング方法は、無機質多孔体４
中の水分除去の場合であるが、これに限るものではなく
、例えば触媒などに使用された無機質多孔体中からＣを
含む有機物を除去するのにも適用できるもので、要はマ
イクロ波を吸収し易い不純物ならば、その不純物除去に
適切な周波数、つまり不純物が最も吸収し易い周波数の
マイクロ波を無機Ｘ多孔体に照射して気化させることに
より除去できるものである。Incidentally, the baking method of each of the above embodiments is based on the inorganic porous body 4.
However, this is not limited to this, and can also be applied to removing organic matter containing carbon from inorganic porous materials used in catalysts, etc. In short, it is a method that absorbs microwaves. If the impurity is easy to absorb, it can be removed by irradiating the inorganic X-porous material with microwaves at a frequency appropriate for removing the impurity, that is, a frequency at which the impurity is most easily absorbed and vaporizing it.
また上記各実施例のベーキング方法は無機Ｘ多孔体４に
マイクロ波を照射すると同時にＮ、ガスを導入したり、
真空引きしたりしているが、Ｎ。In addition, the baking method of each of the above embodiments includes irradiating the inorganic X-porous material 4 with microwaves and simultaneously introducing N and gas.
I tried vacuuming it, but no.
ガスの導入と真空引きを併用しても良いものである。Gas introduction and evacuation may be used together.
さらに上記各実施例は使用したフィルターの一端開口２
に継手１１を介して導波管１２をＩｆｆ ＬＶ＋ｔ。Furthermore, each of the above embodiments has an opening 2 at one end of the filter used.
If the waveguide 12 is connected via the joint 11 to Iff LV+t.
してベーキングを行っているが、逆に使用し）こフィル
ターの他端間口３に継手１１を介して導波管１２を接続
してベーキングを行っても良いものである。つまり無機
質多孔体４中の励起したヌ体はフィルターケース１の一
端開口２、他端開口３のいずれの開口から排出除去をし
ても良いものである。但しフィルターが使用される時の
ガスの移動方向とは逆の方向からベーキングを行うと、
無ｍ質多孔体４の最終層側より水分、不純物等が励起さ
れ、−層効率良く無機Ｘ多孔体４から水分不純物等を除
去できるのて、好ましい。Although the baking is performed using the filter, the baking may be performed by connecting the waveguide 12 to the other end opening 3 of the filter via the joint 11. In other words, the excited N-bodies in the inorganic porous body 4 may be discharged and removed from either the opening 2 at one end of the filter case 1 or the opening 3 at the other end. However, if baking is performed in the opposite direction to the direction of gas movement when the filter is used,
This is preferable because water, impurities, etc. are excited from the final layer side of the inorganic porous material 4, and water impurities, etc. can be removed from the inorganic X-porous material 4 with high layer efficiency.
また上記各実施例のベーキング装置１０゜１０’ に於
ける導波管１２はＳＵＳ製であるのて継手１１を介して
フィルターケース１の一端間［１１
２
２に接続しているが、金属以外のアルミナ等のセラミッ
ク製の場合は、第４図に示す如く導波管１２′、継手１
１′に夫々フランジ１８．１８’を設けて、導波管１２
′と継手ＩＩ’ をフランジ１８．１８’ にパツキン
＋９を挟んだ上ボルト・ナツト２０にて締付すて接続し
、継手＋１’をフィルターケースｌの−１１６１１＋３
０２に螺着すると良い。In addition, the waveguide 12 in the baking apparatus 10° 10' of each of the above embodiments is made of SUS and is connected to one end of the filter case 1 [11 2 2] via the joint 11, but it is not made of metal. If the waveguide is made of ceramic such as alumina, the waveguide 12' and the joint 1 are connected as shown in Figure 4.
1' are provided with flanges 18 and 18' respectively, and the waveguide 12
' and joint II' are connected to flange 18.18' by tightening the upper bolt/nut 20 with gasket +9 in between, and joint +1' is connected to -11611+3 of filter case L.
It is best to screw it onto 02.
［発明の効果］
以上の説明で判るように木発明のベーキング方法によれ
ば、濾過、触媒担体等に使用されるケース内の無ｇ３１
１多孔体を若干発熱して水分や不純物を気化し、ガスの
供給通過や真空引きにより短時間に効率良く除去でき、
しかも分子レベルのＯＨ基が残留したり、不純物等が無
機質多孔体に吸着されることがｆｌいという効果を奏す
る。[Effect of the invention] As can be seen from the above explanation, according to the baking method of the wood invention, the non-g31 inside the case used for filtration, catalyst carrier, etc.
1. The porous material generates a little heat to vaporize moisture and impurities, and can be removed efficiently in a short time by passing a gas supply or vacuuming.
Moreover, the effect is that OH groups at the molecular level are less likely to remain and impurities are less likely to be adsorbed to the inorganic porous body.
また本発明のベーキング装置は、ベーキングする無機質
多孔体を内部ＬＳ ｆｌ＆えたケースの一端開口に接続
することにより 上記効果を奏するベーキング方法を容
易に行うことができて作業性が良いという利点がある。Furthermore, the baking apparatus of the present invention has the advantage that by connecting the inorganic porous body to be baked to one end opening of the internal LS fl&, the baking method having the above-mentioned effects can be easily carried out and the workability is good.
第１図は木発明の第１のベーキング装置による第１のベ
ーキング方法を示す図、第２図は第１図のＡ−Ａ線断面
図、第３図は木発明の第２のへキング装置による第２の
ベーキング方法を示す図、第４図は木発明のヘーヘング
シ冒；ｑの−ｒＸじ変Ｉｌ１例を示す図である。
１・・・フィルターケース、２，３・・開［１，２ａ、
３ａ・・・弁、４・・・無機質多孔体、５・・・イ（１
１孔、６・・・プレート、７・・・ガス通路、８・・・
工１１状隙間、９・・・環状板、ｌＯ・・・ベーキング
父苦、１１．１１’・・・継手、１２．１２′導波！１
′ｆ、１３・・・開閉弁、１４・・・ガス導入管、＋５
・・・マイクロ波発生装置、１６・・・吸引ホース、１
７・・・真空ポンプ、１８．１８’ フランジ、１９・
・・パンキン、２０・・・ボルト・ナラ１〜Fig. 1 is a diagram showing a first baking method using the first baking device of the wood invention, Fig. 2 is a cross-sectional view taken along the line A-A in Fig. 1, and Fig. 3 is the second baking device of the wood invention. FIG. 4 is a diagram showing an example of the -rX modification of q of the wood invention. 1... Filter case, 2, 3... Open [1, 2a,
3a...Valve, 4...Inorganic porous body, 5...I (1
1 hole, 6... plate, 7... gas passage, 8...
11-shaped gap, 9... annular plate, lO... baking space, 11.11'... joint, 12.12' waveguide! 1
'f, 13...Opening/closing valve, 14...Gas introduction pipe, +5
...Microwave generator, 16...Suction hose, 1
7...Vacuum pump, 18.18' flange, 19.
...Punkin, 20...Boruto Nala 1~
Claims (1)
照射すると共に実質的に不純物を含まないガスを無機質
多孔体に流通させて、無機質多孔体から水分、不純物等
を除去することを特徴とするベーキング方法。 ２）ケース内に設けられた無機質多孔体にマイクロ波を
照射すると共にケース内を真空引きして、無機質多孔体
から水分、不純物等を除去することを特徴とするベーキ
ング方法。３）内部に無機質多孔体が設けられ両端に開
口を有するケースの一端開口に取付けられる接続部材と
、該接続部材に一端が接続された導波管と、該導波管の
途中に接続されたガス導入管と、導波管の他端部に設け
られたマイクロ波発生装置とより成るベーキング装置。 ４）内部に無機質多孔体が設けられ両端に開口を有する
ケースの一端開口に取付けられる接続部材と、該接続部
材に一端が接続された導波管と、該導波管の他端部に設
けられたマイクロ波発生装置と、前記ケースの他端開口
に接続される真空ポンプとより成るベーキング装置。[Claims] 1) A method of removing moisture, impurities, etc. from the inorganic porous body by irradiating the inorganic porous body provided in the case with microwaves and flowing a gas substantially free of impurities through the inorganic porous body. A baking method characterized by removing. 2) A baking method characterized by irradiating the inorganic porous body provided in the case with microwaves and evacuating the inside of the case to remove moisture, impurities, etc. from the inorganic porous body. 3) A connecting member attached to an opening at one end of a case having an inorganic porous body inside and openings at both ends, a waveguide having one end connected to the connecting member, and a waveguide connected in the middle of the waveguide. A baking device consisting of a gas introduction pipe and a microwave generator provided at the other end of the waveguide. 4) A connecting member attached to an opening at one end of a case having an inorganic porous body inside and openings at both ends, a waveguide having one end connected to the connecting member, and a connecting member attached to the other end of the waveguide. and a vacuum pump connected to an opening at the other end of the case.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1343711A JPH0787897B2 (en) | 1989-12-28 | 1989-12-28 | Baking method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1343711A JPH0787897B2 (en) | 1989-12-28 | 1989-12-28 | Baking method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03202146A true JPH03202146A (en) | 1991-09-03 |
| JPH0787897B2 JPH0787897B2 (en) | 1995-09-27 |
Family
ID=18363661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1343711A Expired - Fee Related JPH0787897B2 (en) | 1989-12-28 | 1989-12-28 | Baking method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0787897B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003225522A (en) * | 2002-02-05 | 2003-08-12 | Toyo Element Industry Co Ltd | Method for regenerating air filter element |
-
1989
- 1989-12-28 JP JP1343711A patent/JPH0787897B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003225522A (en) * | 2002-02-05 | 2003-08-12 | Toyo Element Industry Co Ltd | Method for regenerating air filter element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0787897B2 (en) | 1995-09-27 |
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