JPH03194536A - X-ray fluoroscopic inspection device - Google Patents

Abstract

PURPOSE:To reduce the cost of this device, to miniaturize the device and to improve reliability by detecting X rays passing through an object to be inspected by the use of an optical fiber in which an X-ray fluoroscopic material is sealed and forming an X-ray fluoroscopic image after performing CT processing. CONSTITUTION:The X rays transmitted through the object 1 irradiate all the surface in the longitudinal direction of the optical fiber 21 constituting an X-ray detection means 2 and light emitted from the X-ray fluoroscopic material sealed in the fiber 21 passes through the fiber 21 itself to be supplied to a photodetector 4 and the intensity of the light is detected. The means 2 is controlled to be rotated by a rotation control means 3 and the fiber 21 of the means 2 is allowed to receive the X rays passing through the object 1 in different directions. Then, an output from the detector 4 is supplied to an X-ray fluoroscopic image forming means 5, and CT processing is performed to form the X-ray fluoroscopic image of the object 1. Thus, the cost of the device is reduced, the device is miniaturized and the reliability is improved.

Description

[Detailed Description of the Invention] [Summary] An object of the present invention is to provide an inexpensive, compact, and highly reliable X-ray fluoroscopic inspection device that performs a fluoroscopic inspection by detecting X-rays that have passed through an object to be inspected. An X-ray fluoroscopic inspection device that performs a fluoroscopic inspection by irradiating an object to be inspected with X-rays and detecting the X-rays that have passed through the object; an X-ray detection means for receiving light in the longitudinal direction of the optical fiber in which the X-ray fluorescent material is encapsulated, and transmitting light generated from the X-ray fluorescent material in the optical fiber through the optical fiber; a rotation control means for controlling the rotation of the X-ray detection means so that the optical fiber receives the X-rays transmitted through the inspection object in different directions; a light detection means for detecting the light transmitted by the optical fiber; and X-ray fluoroscopic image generating means for generating an X-ray fluoroscopic image of the inspection object by subjecting the output of the detection means to CT processing.

[Industrial application field]

The present invention relates to an X-ray fluoroscopic inspection apparatus, and more particularly to an X-ray fluoroscopic inspection apparatus that performs a fluoroscopic inspection by detecting X-rays that have passed through an object to be inspected.

In recent years, xv
A fluoroscopic image of A is generated in real time and a fluoroscopic examination of the inspection object is performed. However, since the device is complicated and expensive, there is a demand for an inexpensive X-ray fluoroscopic inspection device with a simple configuration.

[Conventional technology]

Conventionally, X-ray fluoroscopy has been used for industrial and medical purposes to inspect the object by irradiating the object with X-rays, detecting the X-rays that have passed through the object, and generating a fluoroscopic image of the object in real time. Inspection equipment is in use. xi like this
As IIA fluoroscopic inspection apparatuses, for example, apparatuses using a PBO vidicon tube and apparatuses using an image intensifier are known. Here, the PBO vidicon tube is one in which PbO (lead oxide) or the like is coated on the surface of the vidicon tube so that X-rays can be directly detected.

FIG. 8 is a diagram schematically showing an example of an X-ray fluoroscopic inspection apparatus. As shown in the figure, an X-ray fluoroscopic inspection apparatus using a conventional image intensifier irradiates an inspection object 101 with X-rays generated from an X-ray source (microfocus X-ray source) 106. X transmitted through inspection object 101
The line is detected by a camera 103 via an image intensifier 102, and a CCU 104 performs a predetermined fluoroscopic inspection process.

FIG. 9 is a diagram for explaining the operation of the X-ray fluoroscopic inspection apparatus shown in FIG. 8, and shows the image intensifier 102. As shown in FIG. 9(a), the image intensifier 102 generates photoelectrons upon receiving incident )l (X-rays transmitted through the inspection object 101) at the input surface, and generates photoelectrons from the input surface. The beam is accelerated and focused to irradiate the output phosphor screen. Then, on the output phosphor screen, the irradiated electron beam is converted into light (output light) and output.

Here, as shown in FIG. 9(b), the conversion of incident X-rays into photoelectrons at the input surface is performed by, for example, converting an X-ray beam supplied through an aluminum substrate into a cesium iodide layer. This is done by converting the light into light and then supplying it to the photocathode via a protective film.

[Problems to be Solved by the Invention] In the conventional X-ray fluoroscopic inspection apparatus described above, the X-ray fluoroscopic inspection apparatus using the PBO vidicon tube has a short signal life due to the short life of the PBO vidicon tube, which is about 1000 hours. There is a problem of low gender. Furthermore, the PBO vidicon tube is
It is difficult and expensive to manufacture, and XM fluoroscopic inspection devices using PBO vidicon tubes also have problems in terms of price.

On the other hand, regarding the X-ray fluoroscopic inspection apparatus described with reference to FIGS. 8 and 9, the image intensifier is not only expensive to manufacture, but also has a complex structure and a large occupied volume. An X-ray fluoroscopic inspection device using a tensifier is expensive and large in size. Furthermore, since scintillation fluorescence is used, the resolution is limited to about 250 μm.

SUMMARY OF THE INVENTION In view of the above-mentioned problems of the conventional X-ray fluoroscopic inspection apparatus, it is an object of the present invention to provide an inexpensive, small-sized, and highly reliable X-ray fluoroscopic inspection apparatus.

[Means to solve the problem]

FIG. 1 is a diagram showing the principle of an X-ray fluoroscopic inspection apparatus according to the present invention.

According to the present invention, there is provided an X-ray fluoroscopy inspection apparatus that performs a fluoroscopic inspection by irradiating an inspection object 1 with X-rays and detecting the X-rays that have passed through the inspection object 1. X the line
The optical fiber 21 is an optical fiber 21 in which a fluorescent material is sealed.
1 in the longitudinal direction and transmits light generated from the X-ray fluorescent material in the optical fiber 21 through the optical fiber 21.
ray detection means 2 and optical fiber 21 of the X-ray detection means 2
rotation control means 3 for controlling the rotation of the X-ray detection means 2 so that the X-rays transmitted through the inspection object 1 are received in different directions;
, a light detection means 4 that detects the light transmitted by the optical fiber 21, and an X-ray fluoroscopic image generation means that performs CT processing on the output of the light detection means 4 to generate an X-ray fluoroscopic image of the inspection object 1. 5 is provided.

[For production]

According to the X-ray fluoroscopic inspection apparatus of the present invention, X-rays transmitted through the inspection object 1 are detected by the photodetector 4 via the optical fiber 21 in which an X-ray fluorescent material is sealed. In other words, inspection object 1
The X-rays transmitted through the X-rays irradiate the entire longitudinal direction of the optical fiber 21 constituting the
Fluorescence (visible light) is generated from the X-ray fluorescent material sealed inside. The light generated from this X-ray fluorescent material is supplied to the photodetector 4 through the optical fiber 21 itself enclosing it, and the intensity of the light is detected.

The rotation of the X-ray detection means 2 is controlled by the rotation control means 3, so that the optical fiber 21 of the X-ray detection means 2 receives the X-rays transmitted through the inspection object 1 in different directions.

The light detection means 4 is then supplied to an X-ray fluoroscopic image generating means 5, where it is subjected to CT processing and an X-ray fluoroscopic image of the inspection object 1 is generated.

As described above, the X-ray fluoroscopic inspection apparatus of the present invention detects X-rays that have passed through the inspection object using an optical fiber sealed with an X-ray fluorescent material, and performs CT processing to generate an X-ray fluoroscopic image. By doing so, it is possible to provide the device at a low price, reduce the size, and improve the reliability of the device.

It is also possible to improve the resolution by reducing the fiber size.

〔Example〕

Embodiments of the X-ray fluoroscopic inspection apparatus according to the present invention will be described below with reference to the drawings. Here, the X-ray fluoroscopic inspection apparatus of the present invention is used for industrial purposes, for example, to detect defects in internal wiring in a multi-layered board, or to detect air bubbles in solder at locations where electrical components are attached to a circuit board. It can be used not only for X-ray fluoroscopic examination, but also for medical purposes, for performing X-ray fluoroscopic examination of various parts of the human body.

FIG. 2 is a diagram showing an embodiment of the X-ray fluoroscopic inspection apparatus of the present invention. As shown in the figure, the X-ray fluoroscopic inspection apparatus of this embodiment has an X-ray source (
a microfocus X-ray source) 1, an X-ray detector 2 that detects X-rays transmitted through the inspection object l, a rotation stage 3 that rotationally controls the X-ray detector 2, and a A CCD line sensor 4 detects the intensity of light, and the output signal of the CCD line sensor 4 is computed (CT).
and an X-ray fluoroscopic image main unit 5 that performs tomography processing to generate an X-ray fluoroscopic image of the inspection object 1.

As will be described in detail later, the X-ray detector 2 has a plurality of optical fibers 21 arranged in parallel and encapsulated with X-ray fluorescent materials, and each optical fiber 21 is extended to form a CCD line sensor. 4. These plurality of optical fibers 21 receive the X-rays transmitted through the inspection object 1 in the longitudinal direction, and the light generated from the X-ray fluorescent material in each optical fiber 21 is transmitted to the CCD line sensor 4 by the optical fibers 21 themselves. It is designed to transmit.

The rotation stage 3 controls the rotation of the X-ray detector 2 to
The output of the D line sensor 4 is subjected to CT processing and the X of the inspection object 1 is
It is adapted to obtain the data required to generate a line perspective image. The rotation control of this rotation stage 3 is as follows:
It is controlled by CP[J54 etc. in the X-ray fluoroscopic image forming section 5.

The X-ray fluoroscopic image forming section 5 includes a grayscale image input circuit 51 that receives the output of the CCD line sensor 4, an image memory 52, an image transfer circuit, and an image transfer circuit, each of which is connected by a lotus.
CPU54. A display 57 includes an I10 circuit 55 and a display circuit 56, and is further connected to the display circuit 56.
It is equipped with Then, the X-ray fluoroscopic image forming unit 5
The output of the D line sensor 4 is subjected to CT processing and the X of the inspection object 1 is
A fluoroscopic image is generated and a predetermined fluoroscopic examination is performed.

FIG. 3 is a diagram showing an example of an X-ray detector in the X-ray fluoroscopic inspection apparatus shown in FIG. As shown in the figure, the X-ray detector 2 includes a plurality of optical fibers 21 arranged in parallel, and each optical fiber 21 receives the X-rays transmitted through the inspection object 1 in its longitudinal direction. It is composed of Here, one end 21a of each optical fiber 21 is formed to totally reflect light, and the other end of each optical fiber 21 is formed to be a CCD.
It is configured to extend and connect to the line sensor 4.

Further, a shielding plate 23 for blocking x4m is provided on the back surface of the substrate 22 on which a plurality of optical fibers arranged in parallel are provided to improve collection efficiency. In addition, a plurality of optical fibers 2 arranged in parallel
1 may be entirely sealed with a substrate 22 made of an X-ray transparent material such as aluminum.

FIG. 4 is a diagram showing the optical fiber used in the X-ray detector of FIG. FIG. 2 is a cross-sectional view of the optical fiber 21 cut along a plane S in FIG.

As shown in FIGS. 4(a) and 4(b), the optical fiber 21 is composed of a cladding part 211 and a core part 212, and the core part 212 has a cladding part 211 and a core part 212. A substance (X-ray fluorescent material) is added uniformly. Thereby, when X-rays (X-rays that have passed through the inspection object l) enter the optical fiber 21, a part of them will be converted into light (fluorescence). Furthermore, the light generated by the X-ray fluorescent material sealed in the core portion 212 of the optical fiber 21 is trapped inside the optical fiber 21, and an amount of light proportional to the total amount of X-rays incident on the optical fiber 21 is emitted. The light is supplied to the CCD line sensor 4 from the end of the fiber 21. At this time, as shown in FIG. 3, if the one end 21a of the optical fiber 21 is formed so that the light is totally reflected, the light traveling from the X-ray fluorescent material of the optical fiber 21 toward the one end 21a can also be transmitted to the CCD. It will be supplied to the line sensor 4.

FIG. 5 is a diagram for explaining the principle of CT processing used in the X-ray fluoroscopic examination apparatus of the present invention. The CT processing used in the X-ray fluoroscopic examination apparatus of the present invention is similar to the CT processing conventionally used in fields such as medicine, so it will be briefly explained here.

As shown in Figure 5, the line integral value (
If projection data) can be obtained from multiple directions, the physical quantity distribution can be reconstructed by calculation using Fourier back projection method or the like.

That is, for example, if there is a location 1a in the inspection object (f(x, y)) 1 that is difficult for X-rays to pass through, the light detected by the CCD line sensor 4 at an angle θ with respect to the optical fiber 21 From the data of the intensity (gradation image) and the light intensity (corresponding to the integral value!!!) detected by the CCD line sensor 4 at the angle θ2, the position f(xo+Vo) of the location 1a where it is difficult for the X-ray to pass through is determined. will be identified. In this way, by using CT processing, an X-ray fluoroscopic image can be generated from light intensity data detected by the CCD line sensor 4 at different angles.

FIG. 6 is a diagram showing how the X-ray fluoroscopic inspection apparatus of the present invention is arranged in a cabinet. As an actual X-ray fluoroscopic inspection device, an X-ray fluoroscopic inspection device having the above-mentioned configuration is used.
It is installed in the cabinet 8 that interrupts the line, and the inspection target 1 is
A rotation stage 3 placed on a manipulator 7 movable in the axial direction, Y-axis direction, and Z-axis direction and rotatable in the R direction and T direction, and to which the X-ray detector 2 is attached.
It is preferable to configure it so that it can move in the Z-axis direction.

FIG. 7 is a diagram showing another example of the X-ray detector in the X-ray fluoroscopic inspection apparatus of FIG. The X-ray detector 2'' shown in the same figure has a single X-ray detector that can move in parallel instead of the plurality of optical fibers 21 arranged in parallel in the X-ray detector 2 of FIG.
An optical fiber 21' in which a fluorescent material is encapsulated is provided. Here, as the CCD line sensor 4 in the X-ray detector 2 of FIG. 3, a CCD sensor composed of one CC element corresponding to one optical fiber 21' is used. Although the number of optical fibers used in this X-ray detector 2 is just one, the optical fibers are sequentially translated in parallel to correspond to the plurality of optical fibers 21 in the X-ray detector 2 shown in FIG. The mechanism for collecting and processing data must be complicated.

Here, the parallel movable optical fiber 21' described above is
Needless to say, the number is not limited to one, and may be several.

In the above, the X-ray fluoroscopic inspection apparatus of the present invention includes, for example,
Not only is it used for industrial purposes to detect defects in internal wiring in multilayer boards and air bubbles in solder when installing electrical components on circuit boards, but also to detect
It can also be used for medical purposes such as fluoroscopy.

〔Effect of the invention〕

As described above, according to the X-ray fluoroscopic inspection apparatus of the present invention, the X-rays that have passed through the inspection object are detected using an optical fiber sealed with an X-ray fluorescent material, and the X-rays are subjected to CT processing. By generating each fluoroscopic image, the cost of the apparatus can be kept low, the size can be reduced, and the reliability of the apparatus can be improved.

[Brief explanation of drawings]

FIG. 1 is a diagram showing the principle of the X-ray fluoroscopic inspection device according to the present invention, FIG. 2 is a diagram showing an embodiment of the X-ray fluoroscopic inspection device of the present invention, and FIG. 3 is the X-ray fluoroscopic inspection device of FIG. FIG. 4 is a diagram showing an example of an X-ray detector in an inspection device. FIG. 4 is a diagram showing an optical fiber used in the X-ray detector in FIG. 3. FIG. Figure 6 is a diagram showing how the X-ray fluoroscopic inspection apparatus of the present invention is installed in a cabinet; Figure 7 is a diagram showing the X-ray fluoroscopic inspection apparatus of Figure 2. FIG. 8 is a diagram schematically showing an example of an X-ray fluoroscopic inspection device; FIG. 9 is a diagram for explaining the operation of the X-ray fluoroscopic inspection device shown in FIG. be. (Explanation of symbols) 1... Inspection object, 2... X-ray detection means, 20... X-ray fluorescent material, 21... Optical fiber, 211... Clad part, 212... Core Part, 3...Rotation control means,...Photodetection means,...X-ray fluoroscopic image generation means,...X-ray source (microfocus X-ray source),...Manipulator,...Cabinet .

Claims (1)

[Scope of Claims] 1. An X-ray fluoroscopic inspection device that performs a fluoroscopic inspection by irradiating an inspection object (1) with X-rays and detecting the X-rays that have passed through the inspection object, the apparatus comprising: receive the X-rays in the longitudinal direction of the optical fiber (21) in which an X-ray fluorescent material is sealed;
X-ray detection means (2) for transmitting light generated from an X-ray fluorescent material in the optical fiber through the optical fiber; a rotation control means (3) for controlling the rotation of the X-ray detection means so as to receive the X-rays; a light detection means (4) for detecting the light transmitted by the optical fiber; and a CT processing for the output of the light detection means. An X-ray fluoroscopic inspection apparatus comprising an X-ray fluoroscopic image generating means (5) for generating an X-ray fluoroscopic image of the inspection object. 2. The X-ray fluoroscopic inspection apparatus according to claim 1, wherein the X-ray detection means (2) comprises a plurality of optical fibers arranged in parallel. 3. The X-ray fluoroscopic inspection apparatus according to claim 1, wherein the X-ray detection means (2) comprises at least one optical fiber that is movable in parallel. 4. One end of the optical fiber (21) is formed to totally reflect light, and the other end of the optical fiber is connected to the light detection means. The X-ray fluoroscopic inspection device according to item 1. 5. The optical fiber (21) has a cladding part and a core part, and the X-ray fluorescent material is sealed in the core part. The X-ray fluoroscopic inspection device according to item 1.