JPH03190606A - Tool for superprecise cutting work - Google Patents
Tool for superprecise cutting workInfo
- Publication number
- JPH03190606A JPH03190606A JP32583289A JP32583289A JPH03190606A JP H03190606 A JPH03190606 A JP H03190606A JP 32583289 A JP32583289 A JP 32583289A JP 32583289 A JP32583289 A JP 32583289A JP H03190606 A JPH03190606 A JP H03190606A
- Authority
- JP
- Japan
- Prior art keywords
- tool
- cbn
- cutting
- single crystal
- cutting work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 37
- 229910052582 BN Inorganic materials 0.000 claims abstract description 12
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000013078 crystal Substances 0.000 claims description 31
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 12
- 239000002184 metal Substances 0.000 abstract description 8
- 229910052751 metal Inorganic materials 0.000 abstract description 8
- 229910052742 iron Inorganic materials 0.000 abstract description 5
- 239000006104 solid solution Substances 0.000 abstract description 5
- 238000006243 chemical reaction Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 16
- 238000000034 method Methods 0.000 description 10
- 238000003754 machining Methods 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 7
- 239000010432 diamond Substances 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 5
- -1 ferrous metals Chemical class 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 238000003776 cleavage reaction Methods 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 230000007017 scission Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- ZPOLOEWJWXZUSP-WAYWQWQTSA-N bis(prop-2-enyl) (z)-but-2-enedioate Chemical compound C=CCOC(=O)\C=C/C(=O)OCC=C ZPOLOEWJWXZUSP-WAYWQWQTSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- PWPJGUXAGUPAHP-UHFFFAOYSA-N lufenuron Chemical compound C1=C(Cl)C(OC(F)(F)C(C(F)(F)F)F)=CC(Cl)=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F PWPJGUXAGUPAHP-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 239000003923 scrap metal Substances 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910000859 α-Fe Inorganic materials 0.000 description 1
Landscapes
- Cutting Tools, Boring Holders, And Turrets (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は鉄系材料の超精密加工を切削で実現できる超精
密切削加工用工具に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an ultra-precision cutting tool that can realize ultra-precision machining of iron-based materials by cutting.
超精密切削加工、すなわち切削のみで被加工物を鏡面と
する加工を行なうための工具材料としては、高硬度で耐
磨耗性に優れる物質であること、及び鋭い刃先を得るこ
とのできる単結晶であることが必要である。この点、す
べての物質中最高の硬度を誇るダイヤモンドの単結晶は
理想的な材料であり、これを用いた／Ｖ、ＣＩ＋等の非
鉄金属の超精密加工では既に実用化されている。Tool materials for ultra-precision machining, that is, machining the workpiece to a mirror surface only by cutting, must be materials with high hardness and excellent wear resistance, and single crystal materials that can obtain sharp cutting edges. It is necessary that In this respect, diamond single crystal, which boasts the highest hardness of all materials, is an ideal material, and it has already been put to practical use in ultra-precision machining of non-ferrous metals such as /V and CI+.
しかし、鉄系材料、特に鋼の場合は、その超精密切削加
工が切望されているにもかかわらず、ダイヤモンド単結
晶で加工することはできない。これはダイヤモンドが切
削加工時の温度下で鉄属金属（Ｆｅ、 Ｎ１． Ｃｏ）
と化学的に反応し、異常に磨耗するためである。そこで
、鉄系材料の超精密切削加工を行なうための工具材料と
しては、ダイヤモンドに次ぐ硬度を有し、切削加工時の
温度で反応しない立方晶窒化硼素（ｃｕｂｉｃ Ｂｏｒ
ｏｎ Ｎ目ｒｉｄｅ以下ｃＢＮと略記する）単結晶が最
有力と考えられてきた。However, ferrous materials, especially steel, cannot be processed using diamond single crystals, even though ultra-precision cutting is desired. This is because diamond is ferrous metal (Fe, N1. Co) under the cutting temperature.
This is because it chemically reacts with the metal and causes abnormal wear. Therefore, as a tool material for ultra-precision cutting of iron-based materials, cubic boron nitride (cubic boron nitride), which has a hardness second only to diamond and does not react at the temperature during cutting, is recommended.
single crystal (hereinafter abbreviated as cBN) has been considered to be the most promising.
ｃＢＮは天然には存在せず、又その大型単結晶を合成す
ることが大変難しいため、長い間その実証がなされてい
なかったが、最近になり大型の単結晶の合成が可能とな
り、それに伴いｃＢＮ単結晶工具の作成も可能となった
。Since cBN does not exist in nature and it is very difficult to synthesize large single crystals, it has not been proven for a long time, but recently it has become possible to synthesize large single crystals, and as a result cBN It has also become possible to create single-crystal tools.
しかし、実際にｃＢＮ単結晶工具で鉄系材料の超精密切
削加工を行ってみると、予想外に工具の磨耗が大きく良
好な加工面粗さの得られる切削距離（寿命）が数百ｍで
あり、直ちに実用化することは難しい、思われた〔例え
ば文献： ＦＩＲＳＴ ＩＮＴＥＲＮＡＴＩＯＮＡＬ
Ｃ０ＮＦＩＥＲＥＮＣＥ ＯＮ Ｎ［ｉＷ ＤＩＡＭＯ
ＮＤ ５ＣＩＥＮＣＥＡＮＤ ＴεＣｌｌＮ０ＬＯＧＹ
、 ＰＲＯＧＲＡＭ ａｎｄ ＡＢＳＴＲＡＣＴＳ、
ｐ２０４（１９８８）、参照）。この寿命はダイヤモン
ド単結晶で非鉄金属を超精密切削加工するときの寿命数
百ｋｍには及ぶべくもないが、対象が鉄系材料であるこ
とを考えると、もう１桁程度つまり寿命を数ｋｍを実現
できれば、十分実用レベルに到達可能なものと考えられ
る。However, when we actually performed ultra-precision machining of ferrous materials using cBN single crystal tools, we found that the tool wear was unexpectedly large and the cutting distance (life) at which good machined surface roughness could be obtained was only a few hundred meters. However, it seemed difficult to put it into practical use immediately [for example, literature: FIRST INTERNATIONAL
C0NFIERENCE ON N[iW DIAMO
ND 5CIENCEAND TεCllN0LOGY
, PROGRAM and ABSTRACTS,
p204 (1988), see). This lifespan is unlikely to reach the hundreds of kilometers that is required when ultra-precision cutting non-ferrous metals using diamond single crystals, but considering that the target is ferrous materials, it is about one order of magnitude longer, which means the lifespan is several kilometers. If this can be realized, it is considered that it will be possible to reach a sufficiently practical level.
すなわち、鏡面の要求される非鉄金属の用途が磁気ディ
スク等大型で又多量、低コストの要求される製品である
のに対し、鉄系材料特に鋼の用途きして考えられる金型
等は、数量、コストに対する要求はあまり厳しくな（、
又比較的小型の製品であることが多い。本発明者らの試
算では、寿命が数ｋｍであれば、十分実用化に繋がると
思われた。In other words, non-ferrous metals that require a mirror surface are used for large-sized products such as magnetic disks, and products that require large quantities and low cost, while molds and other materials that are considered to be used for ferrous materials, especially steel, are Requirements for quantity and cost are not very strict (,
In addition, they are often relatively small products. According to the inventors' calculations, it was thought that a lifespan of several kilometers would be sufficient for practical use.
このような検討の結果、本発明は寿命が数ｋｍ程度に向
上したｃＢＮ系の超精密切削加工用工具の開発を課題と
してなされたものである。As a result of such studies, the present invention was developed with the objective of developing a cBN-based ultra-precision cutting tool with an improved lifespan of several kilometers.
本発明者らは、上記課題を達成すべく研究努力し、特に
ｃＢＮ単結晶に不純物元素をドープすることで寿命延長
をはかることを試みた結果、あのドープが非常に好結果
を与えることを見出し本発明に到った。The inventors of the present invention have made research efforts to achieve the above-mentioned problems, and have particularly attempted to extend the lifespan of cBN single crystals by doping them with impurity elements. As a result, they have discovered that doping gives very good results. We have arrived at the present invention.
すなわち、本発明は０．００１〜０．５重量％のＢｅを
含有してなる立方晶窒化硼素単結晶を刃先としてなる超
精密切削加工用工具である。That is, the present invention is an ultra-precision cutting tool having a cutting edge made of a cubic boron nitride single crystal containing 0.001 to 0.5% by weight of Be.
本発明の効果を得られるトのドーピング量としては、０
．００１〜０．５重量％が必要である。立方品窒化硼素
単結晶中で賑は固溶体として存在している。ｏ、 ｏ
ｏ を重量％未満ではあのドーピング効果が現れず、又
、０．５重量％を越えると、固溶体として存在する限界
を越え、ｃＢＮ中にインクルージジン（包含物）として
存在するようになるため、ｃＢＮの強度が低下する。The doping amount for obtaining the effects of the present invention is 0.
．． 0.001 to 0.5% by weight is required. The particles exist as a solid solution in the cubic boron nitride single crystal. o, o
If o is less than 0.5% by weight, the doping effect will not appear, and if it exceeds 0.5% by weight, it will exceed the limit of existing as a solid solution and will exist as an inclusion in cBN. strength decreases.
ｃＢＮ中に艮をドーピングすることにより切削工具の寿
命が数ｋｍ、っまり１桁程度向上する理由としては、
■硬度の向上； １をドーピングしないｃＢＮの硬度が
Ｈｖ４，２５０であるのに対し、本発明の戊をドーピン
グしたｃＢＮの硬度はＨｖ５．０００を示した。これは
耐磨耗性の向上を意味する。The reasons why the life of a cutting tool can be improved by several kilometers, or about one order of magnitude, by doping cBN with Ai are as follows: ■Improvement in hardness: While the hardness of cBN without doping with 1 is Hv4,250, The hardness of the cBN doped with the present invention was Hv5.000. This means improved wear resistance.
■靭性の向上； ｃＢＮは硬脆材料の代表的物質であ
るから非常に破砕しやすい。特に（１，１，０］面での
ヘキ開が大変激しい。賑をドープすることにより、この
ヘキ開が緩和されることは十分あり得る。実際にｃＢＮ
へのＳＩのドーピングによりヘキ開が緩和され、靭性が
向上したとの報告（特開昭５９−１９９５１４号公報）
も知られている。■Improvement in toughness; cBN is a typical hard and brittle material, so it is extremely easy to fracture. In particular, the cleavage on the (1,1,0] plane is very severe.It is quite possible that this cleavage can be alleviated by doping with ferrite.Actually, cBN
It has been reported that cleavage is alleviated and the toughness is improved by doping SI into
is also known.
■導電性付与； ｃＢＮ自身は絶縁体であるが、島を
ドーピングするとｐ型の半導体となることはよく知られ
ている。半導体となることで静電気による切削屑の付着
が低減されることによる効果も考えられる。(2) Adding conductivity; Although cBN itself is an insulator, it is well known that doping the islands makes it a p-type semiconductor. It is also thought that the effect of reducing the adhesion of cutting debris due to static electricity by becoming a semiconductor.
０反応性の低減； ｃＢＮは鉄属金属と反応しないと
言われているが、実際には僅かながら反応するものと考
えられるところがある。本発明者らの実験によると、曵
のドーピングにより、ｃＢＮと鉄屑金属の反応が抑制さ
れることは十分に考えられる。0 Reduction of reactivity; Although it is said that cBN does not react with ferrous metals, in reality it is thought that it does react, albeit slightly. According to the experiments conducted by the present inventors, it is highly conceivable that the reaction between cBN and iron scrap metal is suppressed by doping.
以上のように考えられるが、現在のところ、上記■〜■
の何れが主要因であるかは、明らかでない。但し、島と
同じ＜ｃＢＮ中に固溶体として存在し得るＳｌ、 Ｓ等
のドープでは、寿命の向上は見られなかった。It is possible to think of the above, but at present, the above ■～■
It is not clear which of these is the main factor. However, no improvement in life was observed with doping of Sl, S, etc., which can exist as a solid solution in cBN, which is the same as the island.
ｃＢＮ中に１をドーピングする方法としては、（ａｌ
ｃ Ｂ Ｎ単結晶育成時にドーピングする方法と、Ｔｂ
）既に育成されたｃＢＮ単結晶にイオンプランテーショ
ン等の手段により融イオンを打ち込む方法がある。本発
明工具に用いるあドープｃＢＮとしては、（ａｌの方法
で作成した方がより好ましいが、（ｂｌの方法によるも
のも使用可能である。但しくｂｌによる場合、戊イオン
を打ち込んだ後、Ｂ−Ｂｅ又はＮ−ｆ３ｅの結合を持た
せるため、最低５００℃以上の高温でアニーリングする
ことが必要である。As a method of doping 1 into cBN, (al
c Doping method during growth of BN single crystal and Tb
) There is a method of implanting molten ions into an already grown cBN single crystal by means such as ion plantation. As for the a-doped CBN used in the tool of the present invention, it is more preferable to create it by the method of (al), but it is also possible to use the method of (bl). In order to form a bond of -Be or N-f3e, it is necessary to perform annealing at a high temperature of at least 500°C or higher.
好ましい（ａｌの方法で艮をドーピングしたｃＢＮ単結
晶を合成する方法は以下の実施例及びＮＥＷ ＤＩＡＭ
ＯＮＤ、卸、 ２１ （１９８８）の記載に具体的に示
される。The method of synthesizing the cBN single crystal doped with the preferable (al) method is described in the following examples and NEW DIAM
This is specifically shown in the description of OND, Wholesale, 21 (1988).
以下に本発明を実施例を挙げて説明するが、本発明はこ
れに限定されるところはない。The present invention will be explained below with reference to Examples, but the present invention is not limited thereto.
実施例１
第１図に示す試料室の構成により戊をドーピングしたｃ
ｒ３Ｎ単結晶を合成した。同図中、■は艮を含む原料窒
化硼素（６０重量％ｃＢＮ＋３９重量％六方品窒化硼素
＋１重量％Ｂｅ）、２は溶媒でコノ例では〔８重ｆｆ１
ＸＬｉ３ＯＮ、＋ １６重量ＸＳＩ、Ｂ、Ｎ、＋７６重
瓜％Ｓｒ、Ｂ１０ａ ］ 、３は種子結晶ｃＢＮ単結晶
（約０．３ ｍ ｒｎ径）、４はＭＯ製容器、５は圧力
媒体、６は黒鉛ヒーターである。又、同図右部分は室内
の温度分布を示す。Example 1 C doped with 戊 using the configuration of the sample chamber shown in Figure 1.
An r3N single crystal was synthesized. In the same figure, ■ is the raw material boron nitride containing the material (60 wt% cBN + 39 wt% hexagonal boron nitride + 1 wt% Be), 2 is the solvent, and in this example [8-fold ff1
XLi3ON, +16 wt. It is a graphite heater. Also, the right part of the figure shows the temperature distribution in the room.
これをベルト型高圧発生装置により五万気圧に加圧する
一方、黒鉛ヒーター６に交流電流を流し、戊を含む原料
窒化硼素１と溶媒２の界面を１７２０℃、種子結晶ｃＢ
Ｎ単結晶３付近を１６９０℃とした。この状態で５０時
間保持したところ、温度差により良を含む原料窒化硼素
１が溶媒を介し種子結晶ｃｒ３Ｎ単結晶３上に析出し、
約３ｍｍ径の、賑がドーピングされたｃＢＮ単結晶が生
成した。この生成融ドープｃＢＮ単結晶中の隔置をＳＩ
ＭＳ （２次イオン質量分析器）により測定したところ
、約０．０２重量％であった。該シドーブＣＢＮ単結晶
を〜−ｃｕ−Ｔｔ鑞にて鋼シャンクに鑞付けした後、＃
４００のレジンボンドダイヤモンド砥石にてノーズ半径
０．８ｍｍ、逃げ角３″、すくい角０°のＲ形状の工具
に成形した。更に、該工具の刃先を＃８０００のレジン
ボンドダイヤモンド砥石にて研磨し、鋭い刃先を形成し
た。This is pressurized to 50,000 atmospheres using a belt-type high pressure generator, while an alternating current is passed through the graphite heater 6 to heat the interface between the raw material boron nitride 1 containing boron and the solvent 2 to 1720°C and seed crystal cB.
The temperature near N single crystal 3 was set to 1690°C. When this state was maintained for 50 hours, the raw material boron nitride 1 containing good particles precipitated on the seed crystal cr3N single crystal 3 through the solvent due to the temperature difference.
A doped cBN single crystal with a diameter of about 3 mm was produced. The spacing in this produced melt-doped cBN single crystal is SI
As measured by MS (secondary ion mass spectrometer), it was approximately 0.02% by weight. After brazing the Sidob CBN single crystal to a steel shank with ~-cu-Tt solder, #
The tool was formed into an R-shaped tool with a nose radius of 0.8 mm, clearance angle of 3'', and rake angle of 0° using a #400 resin bond diamond grindstone.Furthermore, the cutting edge of the tool was polished using a #8000 resin bond diamond grindstone. , forming a sharp cutting edge.
以上で得られた本発明の工具による、予め而粗さを１／
７１１Ｒ＋ｉａｘに調製されたＳＫＳ鋼（Ｈ＊ｃ６３）
を切削速度１００ ｍ／ｓｉｎ 、送り速度５／ｊＩ／
ｒｅｖ、切り込み５ｐで切削加工したところ、切削距離
８０００ｍまで０．０５ ｕＲｍａｘの鏡面に加工でき
た。By using the tool of the present invention obtained above, the roughness can be reduced to 1/
SKS steel prepared to 711R+iax (H*c63)
Cutting speed 100 m/sin, feed rate 5/jI/
When cutting with rev and depth of cut of 5p, it was possible to process to a mirror surface of 0.05 uRmax up to a cutting distance of 8000 m.
ちなみに、ＢｅをドーピングしていないｃＢＮ単結晶製
工具により同様の加工を行ったところ、０、０５ ｐｓ
Ｒａｉａｘ以下の而粗さの得られた切削距離は２５０
ｍであった（比較例１）。By the way, when similar processing was performed using a cBN single crystal tool that was not doped with Be, the processing speed was 0.05 ps.
The cutting distance obtained with roughness below Raiax is 250
m (Comparative Example 1).
実施例２
第１図の試料室構成において艮を加えずに合成したｃＢ
Ｎ単結晶にイオンプランテーション方により、後に工具
の刃先となる部分の戊濃度が０．０５重量％となるよう
に山イオンを注入した。Example 2 cB synthesized without adding a barb in the sample chamber configuration shown in Figure 1
Mountain ions were implanted into the N single crystal by an ion plantation method so that the ion concentration at the portion that would later become the cutting edge of the tool was 0.05% by weight.
これを真空中１２５０℃で５０時間処理した後、実施例
１と同じ方法により工具とした。After treating this in vacuum at 1250° C. for 50 hours, it was made into a tool using the same method as in Example 1.
この工具により切削速度１００ｍ＋／膳１ｎ１送り速度
５／Ｊｌ／ｒｅｖ１切り込みＩＯ−で５ＫＤＩＩ鋼（Ｈ
肛６０）を切削したところ、０．０５４Ｒ＋ｓａｘ以下
の而粗さを得られた切削距離は４０００ｍであった。With this tool, 5KDII steel (H
When the hole 60) was cut, the cutting distance at which a roughness of 0.054R+sax or less was obtained was 4000 m.
比較のために行った戊をドーピングしていないｃＢＮ単
結晶製工具のそれは１８０ｍＬかなかった（比較例２）
。For comparison, the cBN single crystal tool without doping had only 180 mL (Comparative Example 2)
.
以上の実施例と比較例の結果から、本発明のシドープし
たｃＢＮ単結晶刃先を有する切削工具が、ｃＢＮ単結晶
のみからなる刃先の工具に比べ、■桁オーダー高い寿命
を実現できたことが明らかである。そしてこのような寿
命であれば、充分に実用できる。From the results of the above examples and comparative examples, it is clear that the cutting tool having the doped cBN single crystal cutting edge of the present invention was able to achieve an order of magnitude longer life than a tool having a cutting edge made only of cBN single crystal. It is. Such a lifespan is sufficient for practical use.
以上説明したように、本発明の超精密加工用切削工具に
よれば鋼の切削において数ｋｍの切削距離にわたり面粗
さ０．０５７ａ＋Ｒｍｉｘ以下の鏡面が得られる。この
ため従来は手間とコストの掛かる研削及び研磨により行
われた精密金型類等の高高度かつ高精度の要求される鉄
屑金属の加工が、切削加工のみで実現できる。従って本
発明はコストダウン、品質向」二の効果の大きい、産業
上の利用価値が非常に高いものである。As explained above, according to the cutting tool for ultra-precision machining of the present invention, a mirror surface with a surface roughness of 0.057a+Rmix or less can be obtained over a cutting distance of several kilometers when cutting steel. Therefore, the machining of scrap iron metal, which requires high precision and high precision, such as precision molds, which was conventionally performed by grinding and polishing, which was laborious and costly, can be realized only by cutting. Therefore, the present invention has great effects in terms of cost reduction and quality improvement, and has very high industrial utility value.
第１図は本発明の超精密加工用切削工具材料とするシド
ープｃＢＮ単結晶を合成する装置の試料室の一例の構成
と温度分布を説明する概略図である。
図中、１は開を含む原料窒化硼素、２は溶媒、３は種子
結晶、
４はＭｏ製容器、
５は圧力媒体、
は黒鉛ヒーターである。FIG. 1 is a schematic diagram illustrating the configuration and temperature distribution of an example of a sample chamber of an apparatus for synthesizing a Sydope cBN single crystal as a cutting tool material for ultra-precision machining of the present invention. In the figure, 1 is a raw material boron nitride containing open matter, 2 is a solvent, 3 is a seed crystal, 4 is a container made of Mo, 5 is a pressure medium, and is a graphite heater.
Claims (1)
立方晶窒化硼素単結晶を刃先としてなる超精密切削加工
用工具。(1) An ultra-precision cutting tool whose cutting edge is made of cubic boron nitride single crystal containing 0.001 to 0.5% by weight of Be.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32583289A JPH03190606A (en) | 1989-12-18 | 1989-12-18 | Tool for superprecise cutting work |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32583289A JPH03190606A (en) | 1989-12-18 | 1989-12-18 | Tool for superprecise cutting work |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03190606A true JPH03190606A (en) | 1991-08-20 |
Family
ID=18181109
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32583289A Pending JPH03190606A (en) | 1989-12-18 | 1989-12-18 | Tool for superprecise cutting work |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03190606A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007123482A1 (en) * | 2006-04-25 | 2007-11-01 | Seco Tools Ab | A threading tool, a threading insert with a face of pcbn and a method of forming a thread |
-
1989
- 1989-12-18 JP JP32583289A patent/JPH03190606A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007123482A1 (en) * | 2006-04-25 | 2007-11-01 | Seco Tools Ab | A threading tool, a threading insert with a face of pcbn and a method of forming a thread |
| US7476063B2 (en) | 2006-04-25 | 2009-01-13 | Seco Tools Ab | Threading tool, threading insert, and method of forming a thread |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6409930B2 (en) | CVD diamond single crystal | |
| EP3257829B1 (en) | Cubic boron nitride polycrystal, cutting tool, wear resistant tool, grinding tool, and method of producing cubic boron nitride polycrystal | |
| US5133332A (en) | Diamond tool | |
| CA1103042A (en) | Sintered compact for use in a cutting tool and a method of producing the same | |
| Hodgson et al. | Turning hardened tool steels with cubic boron nitride inserts | |
| CN102939261B (en) | Diamond tool | |
| Narutaki et al. | High-speed machining of Inconel 718 with ceramic tools | |
| EP0662025B1 (en) | Coated grinding tools and methods for their preparation | |
| US5567532A (en) | Amorphous metal/diamond composite material | |
| JP6728395B2 (en) | Diamond tool pieces | |
| US6592436B1 (en) | Grinding and polishing tool for diamond, method for polishing diamond, and polished diamond, single crystal diamond and single diamond compact obtained thereby | |
| Qi et al. | Vacuum brazing diamond grits with Cu-based or Ni-based filler metal | |
| US5569862A (en) | High-pressure phase boron nitride sintered body for cutting tools and method of producing the same | |
| JP4732169B2 (en) | Diamond tool and method for synthesizing single crystal diamond | |
| US6737377B1 (en) | Cutting tool of a cubic boron nitride sintered compact | |
| CN102658529A (en) | Method for preparing nano particles by nano grinding through superfine abrasive particles | |
| US4476656A (en) | Method of dressing a plated cubic boron nitride grinding wheel | |
| JPH03190606A (en) | Tool for superprecise cutting work | |
| EP0102843A2 (en) | Tool inserts | |
| JP2783428B2 (en) | Single crystal silicon carbide tool | |
| CN113621892A (en) | Hard alloy milling cutter with high impact resistance and preparation method thereof | |
| GB2541289A (en) | Single crystal synthetic diamond | |
| JPH03228504A (en) | Diamond tool | |
| JPH01240204A (en) | Cubic system boron nitride single crystal cutting tool | |
| JPS60165340A (en) | Selectively and partially modified sintered alloy |