JPH03183939A - Infrared-ray image inspecting device - Google Patents

Infrared-ray image inspecting device

Info

Publication number
JPH03183939A
JPH03183939A JP1324273A JP32427389A JPH03183939A JP H03183939 A JPH03183939 A JP H03183939A JP 1324273 A JP1324273 A JP 1324273A JP 32427389 A JP32427389 A JP 32427389A JP H03183939 A JPH03183939 A JP H03183939A
Authority
JP
Japan
Prior art keywords
infrared
mirror
inspected
speed
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1324273A
Other languages
Japanese (ja)
Inventor
Shigeo Fujimura
藤村 成男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1324273A priority Critical patent/JPH03183939A/en
Publication of JPH03183939A publication Critical patent/JPH03183939A/en
Pending legal-status Critical Current

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  • Closed-Circuit Television Systems (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Radiation Pyrometers (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)

Abstract

PURPOSE:To easily perform inspection even when a body to be inspected moves fast by driving an infrared-ray mirror which reflects infrared rays radiated by the body to be inspected at a speed corresponding to the moving speed of the body to be inspected. CONSTITUTION:The infrared rays 2 radiated by the body 1 to be inspected are reflected by the infrared-ray mirror 3 and then inputted to an infrared-ray camera 6. The mirror 3 is placed in repetitive following-up and returning opera tion by a mirror driving part 5 at the speed corresponding to the moving speed of the body 1 to be inspected detected by a speed detection part 4. Therefore, while the mirror 3 is in the following-up operation, infrared rays 2 radiated from the same position of the body 1 to be inspected are inputted to the camera 6 and an infrared-ray video signal which has no image run is obtained. This video signal is inputted to and stored in an image memory 8 through a video interface 7. Further, the following-up and returning operation of the mirror 3 is performed in synchronism with a vertical synchronizing signal supplied to the driving part 5 through a vertical synchronization part 10 and a processor 9 controls the interface 7 to input image data only in the following-up operation of the mirror 3.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、物体が放射する赤外線を利用して被検査物
の外観等を検査する赤外線画像検査装置に関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an infrared image inspection apparatus that inspects the external appearance of an object to be inspected using infrared rays emitted by the object.

[従来の技術] 第3図は従来のこの種の赤外線画像検査装置である。第
3図において、(1)は所定の温度を有し移動する被検
査物、(2)はこの被検査物(1)から放射される赤外
線、(6)はこの赤外線(2)を入力して赤外線映像信
号を作成する赤外線カメラであり1例えば水平に512
個、垂直に512列の受光素子が二次元に配列され、垂
直周波数が60)(zのものである。(7)はこの赤外
線カメラ(6)が出力する映像信号をディジタル画像デ
ータに変換するビデオ・インタフェース、(8)はこの
ビデオ・インタフェース(7)が出力する画像データを
記憶する画像メモリ、(9)はこの画像メモリ(8)へ
の画像ブタの人力制御及び画像データの解析処理を行う
なうプロセッサであり、各種の演算処理機能・情報の記
憶及び入力機能を備えたものである。(Illは上記画
像メモリ(8)に記憶された画像データの表示を行う表
示部である。
[Prior Art] FIG. 3 shows a conventional infrared image inspection apparatus of this type. In Figure 3, (1) is an object to be inspected that has a predetermined temperature and is moving, (2) is an infrared ray emitted from this object (1), and (6) is an input of this infrared ray (2). It is an infrared camera that creates an infrared video signal by
512 vertical rows of light-receiving elements are arranged two-dimensionally, and the vertical frequency is 60) (z). (7) converts the video signal output from this infrared camera (6) into digital image data. A video interface (8) is an image memory for storing image data output by this video interface (7), and (9) is an image memory (9) that performs manual control of image control and analysis processing of image data to this image memory (8). It is a processor that is equipped with various arithmetic processing functions and information storage and input functions. (Ill is a display unit that displays image data stored in the image memory (8).

次に動作について説明する。被検査物(1)が放射する
赤外線(2)は赤外線カメラ(6)により赤外線映像信
号となり、ビデオ・インタフェース(7)によりディジ
タル画像データに変換され画像メモリ(8)に入力記憶
される。プロセッサ(9)でこの画像メモリ(8)内の
画像データを解析することにより被検査物(11の欠損
有無等の外観検査を行う。
Next, the operation will be explained. Infrared rays (2) emitted by the object to be inspected (1) are converted into infrared video signals by an infrared camera (6), converted into digital image data by a video interface (7), and input and stored in an image memory (8). A processor (9) analyzes the image data in the image memory (8) to perform an external appearance inspection of the object to be inspected (11), such as the presence or absence of defects.

[発明が解決しようとする課題] 従来の赤外線画像検査装置は以上のように構成されてお
り、被検査物が放射する赤外線を直接赤外線カメラに入
力するようになっているので、被検査物が高速に移動す
る場合に通常の可視光カメラでも見られるような像流れ
が発生し、検査が困難になるという課題があった。通常
の可視光カメラにおいてはシャッタ機構を付加すること
により上記のような課題を解消できるが、赤外線カメラ
においては微小な赤外線を受光する必要から一般にシャ
ッタ機構を付加することは困難とされている。
[Problem to be Solved by the Invention] The conventional infrared image inspection device is configured as described above, and the infrared rays emitted by the object to be inspected are directly input to the infrared camera, so that the object to be inspected is When moving at high speeds, image blurring, which can be seen even with ordinary visible light cameras, occurs, making inspection difficult. In a normal visible light camera, the above problems can be solved by adding a shutter mechanism, but it is generally difficult to add a shutter mechanism to an infrared camera because it needs to receive minute infrared rays.

この発明は、上記のような課題を解消するためになされ
たもので、被検査物が高速に移動する場合でも検査容易
な赤外線画像検査装置を得ることを目的としている。
The present invention has been made to solve the above-mentioned problems, and aims to provide an infrared image inspection apparatus that allows easy inspection even when an object to be inspected moves at high speed.

[課題を解決するための手段] この発明に係る赤外線画像検査装置は上記従来装置に加
え、移動する被検査物が放射する赤外綿を反射する赤外
線ミラーと、被検査物の移動速度を検出する速度検出部
とこの速度検出部が出力する速度値に応じた速度で上記
赤外線ミラーを駆動するミラー駆動部を備え、赤外線カ
メラを赤外線ミラーが反射した赤外線を人力する位置に
設置したものである。
[Means for Solving the Problems] In addition to the conventional device described above, an infrared image inspection device according to the present invention includes an infrared mirror that reflects infrared cotton emitted by a moving object to be inspected, and detects the moving speed of the object to be inspected. and a mirror drive section that drives the infrared mirror at a speed corresponding to the speed value output by the speed detection section, and an infrared camera is installed at a position where the infrared rays reflected by the infrared mirror are manually transmitted. .

[作用] この発明においては、赤外線ミラーが速度検出部で検出
された被検査物の移動速度に応じた速度でミラー駆動部
により駆動されるので、赤外線カメラに被検査物の同一
・両所の赤外線を一定時間人力することになり、像流れ
のない検査容易な赤外線画像を得ることができる。
[Function] In this invention, since the infrared mirror is driven by the mirror drive section at a speed corresponding to the moving speed of the object to be inspected detected by the speed detection section, the infrared camera can detect the same or both locations of the object to be inspected. Since infrared rays are manually applied for a certain period of time, it is possible to obtain infrared images that are easy to inspect without image blurring.

[実施例1 第1図はこの発明の一実施例を示す図である。[Example 1 FIG. 1 is a diagram showing an embodiment of the present invention.

第1図において、 +11 、 (2) 、 f61〜
(9)及び(11)は上記従来の装置と全く同一のもの
である。
In Figure 1, +11, (2), f61~
(9) and (11) are exactly the same as the conventional device described above.

(3)は移動する被検査物i11が放射する赤外線(2
)を反射する赤外線ミラーであり、平板形で所定角度で
被検査物(1)の移動方向への追従動作と復帰動作を繰
り返すものである。(4)は被検査物fl+の移動速度
を検出する速度検出部、(5)はこの速度検出部(4)
が出力する速度値に応じた速度でL記赤外線ミラー(:
))を駆動するミラー駆動部である。(lO)は赤外線
カメラ(6)が出力する映像信号に含まれている垂直同
期信号を上記ミラー駆動部(5)及びプロセッサ(9)
に供給するための垂直同期部である。
(3) is the infrared rays (2) emitted by the moving inspection object i11.
), and is a flat plate-shaped mirror that repeats the following operation and return operation in the moving direction of the object to be inspected (1) at a predetermined angle. (4) is a speed detection unit that detects the moving speed of the inspected object fl+, and (5) is this speed detection unit (4).
L infrared mirror (:
)) is a mirror drive unit that drives the mirror. (lO) transmits the vertical synchronization signal included in the video signal output from the infrared camera (6) to the mirror drive unit (5) and the processor (9).
This is a vertical synchronization section for supplying

上記のように構成された赤外線画像検査装置においては
、被検査物(11が放射する赤外線(2)は赤外線ミラ
ー(3)で反射した後、赤外線カメラ(6)に入力され
る。赤外線ミラー(3)は、ミラー駆動部(5)によっ
て速度検出部(4)で検出した被検査物(11の移動速
度に応じた速度で追従・復帰動作が繰り返される。従っ
て、赤外線ミラー(3)が被検査物(1)への追従動作
を行なっている間は、被検査物filの同一箇所が放射
する赤外線(2)を赤外線カメラ(6)に入力すること
になり。
In the infrared image inspection apparatus configured as described above, the infrared rays (2) emitted by the inspection object (11) are reflected by the infrared mirror (3) and then input to the infrared camera (6). 3), the mirror driving section (5) repeats the following and returning operations at a speed corresponding to the moving speed of the object to be inspected (11) detected by the speed detecting section (4). Therefore, the infrared mirror (3) While the inspection object (1) is being tracked, infrared rays (2) emitted from the same location on the inspection object fil are input to the infrared camera (6).

被検青物(1)が紳1ヒしている場合と同様の像流れの
ない赤外線映像信号が得られることになる。この映像信
号は、ビデオ・インタフェース(7)でディジタル画像
データに変更される画像メモリ(8)に入力記憶される
。プロセッサ(9)でこの画像メモリ(8)内の画像デ
ータを解析することにより被検査物(11の欠損有無等
の外観検査を行う。
An infrared video signal without image blur can be obtained, similar to when the object (1) to be examined is dark. This video signal is input and stored in an image memory (8) where it is converted into digital image data at a video interface (7). A processor (9) analyzes the image data in the image memory (8) to perform an external appearance inspection of the object to be inspected (11), such as the presence or absence of defects.

一方、赤外線ミラー(3)の被検査物(11への追従動
作及び復帰動作を、垂直同期部(lO)を介してミラー
駆動部(5)に供給される垂直同期信号に同期して行な
い、プロセッサ(9)によるビデオ・インタフェース(
7)への制御によって、赤外線ミラー(3)が追従動作
中のときのみの画像データを入力する。第2図はこの動
作タイミング例を示す図である。第2図において、(a
)は垂直同期部(lO)から出力される垂直向!i11
(M号のタイミング、(b)はこの垂直同期信号のタイ
ミング(a)に同期して追従・復帰動作を繰り返す赤外
線ミラー(3)の動作タイミング、(C)は画像メモリ
(8)への画像ブタの人力タイミングである。この動作
タイミングにおいては、il’F+t’f同1用信矛の
タイミング(YXlの1周期で赤外線ミラー(3)の追
従動作と画像メモリ(8)への画像データ人力を行ない
1次の1周期で復帰動作を行なうようになっている。プ
ロセッサ(9)がこの垂直同期信号(a)に同期して2
周期に1回画像人力制御を行なうことにより、赤外線ミ
ラー(3)が追従動作中の赤外線画像を入力することが
容易にできる。
On the other hand, the following operation and return operation of the infrared mirror (3) to the object to be inspected (11) are performed in synchronization with a vertical synchronization signal supplied to the mirror drive unit (5) via the vertical synchronization unit (1O), Video interface (
7), image data only when the infrared mirror (3) is in the tracking operation is input. FIG. 2 is a diagram showing an example of this operation timing. In Figure 2, (a
) is the vertical direction ! output from the vertical synchronization unit (lO). i11
(Timing of No. M, (b) is the operation timing of the infrared mirror (3) that repeats the tracking and return operation in synchronization with the timing (a) of this vertical synchronization signal, (C) is the image stored in the image memory (8) This is the human power timing of the pig.In this operation timing, the following operation of the infrared mirror (3) and the image data input to the image memory (8) are performed in one cycle of il'F + t'f. The processor (9) synchronizes with this vertical synchronizing signal (a) and performs the return operation in one cycle of the first order.
By performing manual image control once every cycle, it is possible to easily input an infrared image while the infrared mirror (3) is in a tracking operation.

[発明の効果] 以上のようにこの発明によれば、被検査物が放射する赤
外線を反射する赤外線ミラー、被検査物の移動速度を検
出する速度検出部及びこの速度検出部の検出速度に応じ
た速度で赤外線ミラーを駆動するミラー駆動部を4=1
加し、赤外線カメラを赤外線ミラーが反射する赤外線を
人力する位置に設置したことにより、被検査物が高速で
移動しても像流れのない検査容易な赤外線画像を人力で
きる効果がある。
[Effects of the Invention] As described above, according to the present invention, an infrared mirror that reflects infrared rays emitted by an object to be inspected, a speed detecting section that detects the moving speed of the object to be inspected, and a sensor that responds to the detected speed of the speed detecting section. The mirror drive unit that drives the infrared mirror at a speed of 4=1
In addition, by installing the infrared camera at a position where the infrared rays reflected by the infrared mirror are manually generated, it is possible to manually produce infrared images that are easy to inspect without image blurring even when the object to be inspected moves at high speed.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の赤外線画像検査装置の一実施例の図
、第2図は動作タイミング例の図、第3図は従来の赤外
線画像検査装置を示す図である。 図において、(1)は被検査物、(2)は赤外線。 (3)は赤外線ミラー、(4)は速度検出部、(5)は
ミラー駆動部、(6)は赤外線カメラ、(7)はビデオ
・インタフェース、(8)は画像メモリ、(9)はプロ
セッサ、 (101は垂直同期部、 (11)は表示部
。 (alは垂直同期信号のタイミング、(b)は赤外線ミ
ラー(3)の動作タイミング、(C)は画像データの入
力タイミングである。 なお、各図中同一符号は同一または相当部分を示す。
FIG. 1 is a diagram of an embodiment of the infrared image inspection apparatus of the present invention, FIG. 2 is a diagram of an example of operation timing, and FIG. 3 is a diagram showing a conventional infrared image inspection apparatus. In the figure, (1) is the object to be inspected, and (2) is the infrared rays. (3) is an infrared mirror, (4) is a speed detection unit, (5) is a mirror drive unit, (6) is an infrared camera, (7) is a video interface, (8) is an image memory, and (9) is a processor. , (101 is the vertical synchronization section, (11) is the display section. (al is the timing of the vertical synchronization signal, (b) is the operation timing of the infrared mirror (3), and (C) is the input timing of image data. , the same reference numerals in each figure indicate the same or corresponding parts.

Claims (2)

【特許請求の範囲】[Claims] (1)移動する被検査物が放射する赤外線を反射する赤
外線ミラーと、被検査物の移動速度を検出する速度検出
部と、この速度検出部が出力する速度値に応じた速度で
上記赤外線ミラーを駆動するミラー駆動部と、上記赤外
線ミラーが反射した赤外線を入力して赤外線映像信号を
作成する赤外線カメラと、この赤外線カメラが出力する
映像信号をディジタル画像データに変換するビデオ・イ
ンタフェースと、このビデオ・インタフェースが出力す
る画像データを記憶する画像メモリと、この画像メモリ
に記憶された画像データの解析処理を行なうプロセッサ
を備えたことを特徴とする赤外線画像検査装置。
(1) An infrared mirror that reflects infrared rays emitted by a moving object to be inspected, a speed detection section that detects the moving speed of the object to be inspected, and the infrared mirror that moves at a speed corresponding to the speed value output by this speed detection section. an infrared camera that inputs the infrared rays reflected by the infrared mirror to create an infrared video signal; a video interface that converts the video signal output from the infrared camera into digital image data; An infrared image inspection apparatus comprising: an image memory that stores image data output from a video interface; and a processor that performs analysis processing of the image data stored in the image memory.
(2)ミラー駆動部に、赤外線ミラーを赤外線カメラの
走査に同期して駆動するための垂直同期信号を供給した
ことを特徴とする特許請求の範囲第(1)項記載の赤外
線画像検査装置。
(2) The infrared image inspection apparatus according to claim (1), wherein the mirror drive section is supplied with a vertical synchronization signal for driving the infrared mirror in synchronization with scanning of the infrared camera.
JP1324273A 1989-12-14 1989-12-14 Infrared-ray image inspecting device Pending JPH03183939A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1324273A JPH03183939A (en) 1989-12-14 1989-12-14 Infrared-ray image inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1324273A JPH03183939A (en) 1989-12-14 1989-12-14 Infrared-ray image inspecting device

Publications (1)

Publication Number Publication Date
JPH03183939A true JPH03183939A (en) 1991-08-09

Family

ID=18163969

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1324273A Pending JPH03183939A (en) 1989-12-14 1989-12-14 Infrared-ray image inspecting device

Country Status (1)

Country Link
JP (1) JPH03183939A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150150453A1 (en) * 2002-04-22 2015-06-04 Geelux Holding, Ltd. Thermal imaging system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150150453A1 (en) * 2002-04-22 2015-06-04 Geelux Holding, Ltd. Thermal imaging system
US9398856B2 (en) * 2002-04-22 2016-07-26 Geelux Holdings, Ltd. Thermal imaging system

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