JPH0318171U - - Google Patents
Info
- Publication number
- JPH0318171U JPH0318171U JP7649289U JP7649289U JPH0318171U JP H0318171 U JPH0318171 U JP H0318171U JP 7649289 U JP7649289 U JP 7649289U JP 7649289 U JP7649289 U JP 7649289U JP H0318171 U JPH0318171 U JP H0318171U
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- light
- processor
- output
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000155 melt Substances 0.000 claims description 6
- 238000012935 Averaging Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 8
- 238000005259 measurement Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の実施例を示す融液面レベル測
定装置の模式図、第２図ａは受光位置検出器の出
力波形図、第２図ｂは入力制限処理器の出力波形
図、第２図ｃは平均化処理器の出力波形図、第３
図ａは入力制限処理器の動作を示す波形図、第３
図ｂは平均化処理器の動作を示す波形図、第４図
は従来の融液面レベル測定装置の模式図、第５図
は融液面レベル測定の測定原理を示す模式図であ
る。
Ａ……投射光、Ｂ……反射光、１……融液面、
２……揺ぎ、３……受光素子、４……光源、５…
…受光位置検出器、７……入力制限処理器、９…
…平均化処理器、１１……融液面レベル演算器。
Fig. 1 is a schematic diagram of a melt level measuring device showing an embodiment of the present invention, Fig. 2a is an output waveform diagram of a light receiving position detector, Fig. 2b is an output waveform diagram of an input limiting processor, Figure 2c is the output waveform diagram of the averaging processor, the third
Figure a is a waveform diagram showing the operation of the input limit processor;
Figure b is a waveform diagram showing the operation of the averaging processor, Figure 4 is a schematic diagram of a conventional melt level measuring device, and Figure 5 is a schematic diagram showing the measurement principle of melt level measurement. A... Projected light, B... Reflected light, 1... Melt surface,
2... Fluctuation, 3... Light receiving element, 4... Light source, 5...
...Light receiving position detector, 7...Input restriction processor, 9...
...Averaging processor, 11...Melt surface level calculator.
Claims (1)
融液面からの反射光を受光する受光素子を有し、
該受光素子が受光した反射光の受光位置を検出す
る受光位置検出器と、該受光位置検出器の出力に
制限幅を設ける入力制限処理器と、該入力制限処
理器の出力を平滑化する平均化処理器と、該平均
化処理器の出力に基づいて融液面レベルを求める
融液面レベル演算器とを備えることを特徴とする
融液面レベル測定装置。 a light source that projects light obliquely toward the melt surface;
It has a light receiving element that receives reflected light from the melt surface,
a light receiving position detector that detects the light receiving position of the reflected light received by the light receiving element; an input limiting processor that limits the output of the light receiving position detector; and an average that smoothes the output of the input limiting processor. 1. A melt level measuring device comprising: an averaging processor; and a melt level calculating unit that calculates a melt level based on the output of the averaging processor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076492U JP2512705Y2 (en) | 1989-06-29 | 1989-06-29 | Melt level measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989076492U JP2512705Y2 (en) | 1989-06-29 | 1989-06-29 | Melt level measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0318171U true JPH0318171U (en) | 1991-02-22 |
| JP2512705Y2 JP2512705Y2 (en) | 1996-10-02 |
Family
ID=31618012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989076492U Expired - Fee Related JP2512705Y2 (en) | 1989-06-29 | 1989-06-29 | Melt level measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2512705Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4713437U (en) * | 1971-03-18 | 1972-10-17 | ||
| JPS5612204U (en) * | 1979-07-06 | 1981-02-02 |
-
1989
- 1989-06-29 JP JP1989076492U patent/JP2512705Y2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4713437U (en) * | 1971-03-18 | 1972-10-17 | ||
| JPS5612204U (en) * | 1979-07-06 | 1981-02-02 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2512705Y2 (en) | 1996-10-02 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |