JPH0318163U - - Google Patents

Info

Publication number
JPH0318163U
JPH0318163U JP7868589U JP7868589U JPH0318163U JP H0318163 U JPH0318163 U JP H0318163U JP 7868589 U JP7868589 U JP 7868589U JP 7868589 U JP7868589 U JP 7868589U JP H0318163 U JPH0318163 U JP H0318163U
Authority
JP
Japan
Prior art keywords
heater
held
utility
scope
heater body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7868589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7868589U priority Critical patent/JPH0318163U/ja
Publication of JPH0318163U publication Critical patent/JPH0318163U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7868589U 1989-07-05 1989-07-05 Pending JPH0318163U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7868589U JPH0318163U (en, 2012) 1989-07-05 1989-07-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7868589U JPH0318163U (en, 2012) 1989-07-05 1989-07-05

Publications (1)

Publication Number Publication Date
JPH0318163U true JPH0318163U (en, 2012) 1991-02-22

Family

ID=31622169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7868589U Pending JPH0318163U (en, 2012) 1989-07-05 1989-07-05

Country Status (1)

Country Link
JP (1) JPH0318163U (en, 2012)

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