JPH03177670A - Valve driving mechanism - Google Patents
Valve driving mechanismInfo
- Publication number
- JPH03177670A JPH03177670A JP29657489A JP29657489A JPH03177670A JP H03177670 A JPH03177670 A JP H03177670A JP 29657489 A JP29657489 A JP 29657489A JP 29657489 A JP29657489 A JP 29657489A JP H03177670 A JPH03177670 A JP H03177670A
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- plunger
- valve
- mass flow
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 37
- 239000000696 magnetic material Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 6
- 230000003068 static effect Effects 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 208000003251 Pruritus Diseases 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000003483 aging Methods 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 150000002222 fluorine compounds Chemical class 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000007803 itching Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 1
- -1 polychlorofluoroethylene Polymers 0.000 description 1
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 210000002268 wool Anatomy 0.000 description 1
Landscapes
- Magnetically Actuated Valves (AREA)
Abstract
Description
【発明の詳細な説明】
（イ〉産業上の利用分野
本発明は流体の質量流量を精密に自動制御するバルブ機
構に関するものである。DETAILED DESCRIPTION OF THE INVENTION (A) Field of Industrial Application The present invention relates to a valve mechanism that precisely and automatically controls the mass flow rate of a fluid.
（０）従来の技術
従来超ＬＳＩの製造に使用される、多種多様な流体の質
量流量を精密に自動制御するバルブ機構は、第５図側断
面図に示すように、バルブ部１１と駆動部５１とよりな
っている。(0) Prior Art Conventionally, a valve mechanism that precisely and automatically controls the mass flow rate of a wide variety of fluids used in the manufacture of VLSIs consists of a valve section 11 and a drive section, as shown in the side sectional view of FIG. 51 and more.
バルブ部１１は、バルブ筺体１２の一方の壁に流体の人
口１３及び出口１４を設け、人口１３からの流体流量は
、Ｐ Ｃ’ｒ ｌ” Ｅ （ポリクロロフルオエチレン
）よりなるバルブ本体１５の上下移動により、流体シー
ル部１６を開閉させて制御するようになっている。１１
１ちバルブ本体１５はフラットプラグになっている、バ
ルブ本体１５はスプリング１７で押し上げられ、バルブ
本体１５（ＪＪ突出部１８で、バルブダイヤフラｉｓ
ｌ ９ ［７）中心部を押し上げる構造になっている。The valve part 11 is provided with a fluid port 13 and an outlet 14 on one wall of the valve housing 12, and the fluid flow rate from the port 13 is controlled by a valve body 15 made of P C'r l''E (polychlorofluoroethylene). The fluid seal portion 16 is opened/closed and controlled by vertical movement.11
1. The valve body 15 is a flat plug. The valve body 15 is pushed up by a spring 17, and the valve diaphragm is
l 9 [7] It has a structure that pushes up the center.
バルブ筺体１２、バルブダイヤフラム１９及び人、出口
０バイブはずべて５ＵＳ−３１６（ステンレススチール
）で出来ていて、フッ素化合物、塩素化合物などの＠触
性気体にも安心して使用出来るようにしである。又バル
ブ本体１５をＰＣＴＦＥで、弁座（バルブ筐体）を５Ｕ
Ｓ−３１６で構成することによりパーデｌクルな痒幌の
発生を防止している。The valve housing 12, the valve diaphragm 19, the person and the exit 0 vibe are all made of 5US-316 (stainless steel), so that they can be used safely even with tactile gases such as fluorine compounds and chlorine compounds. Also, the valve body 15 is made of PCTFE, and the valve seat (valve housing) is made of 5U.
By being composed of S-316, it prevents the occurrence of excessive itching.
バルブ本体１５ｔＪ）」：、Ｖｆ多チＪＪを誹起する駆
動部は５１に示すようにピエゾドライバが用いられてい
る。これは、チタン酸バリウム等の薄い圧電素子を多数
枚頂層したピエゾ素子、５２．５２．５２ ’；： ケ
ース５３ 内部（ｉ：ｌ、ｉｉミｍね、下端をバルブ押
しピース５４、上端を調整ピース５５で挾みつけている
。Valve body 15tJ): As shown in 51, a piezo driver is used as the drive unit for driving the Vf multiplier JJ. This is a piezo element made of many thin piezoelectric elements such as barium titanate layered on top.52. It is attached with piece 55.
ピエゾドライバ５１の取ｆ′：Ｊ’ １．ｆｆｌ ５
（３とバルブ筐体１２を固着し、ピエゾ素子５２．５２
．５２に最高直流電圧を印加して伸びた状態とし押しね
じ５７をねじ込むと、ボール５８を介して、調整ピース
５５、ピエゾ素子５２．５２．５２バルブ押しピース５
／ｌを押し下げバルブ押しピース５４Φ先端５９が、
バルブダイヤフラム１９の中心部を押し、バルブダイヤ
フラノ、１９はδＳたＣｊ変（１′／、シ、バルブ本体
１５は、流体シール部１６を閉ぢる。δ８は高々０・１
ｒｎ ｍ以下である。Take f' of piezo driver 51: J' 1. ffl 5
(Fix the valve housing 12 and the piezo element 52.
．． When the highest DC voltage is applied to 52 to extend it and the push screw 57 is screwed in, the adjustment piece 55, piezo element 52, 52, 52, valve push piece 5
/l is pushed down and the valve push piece 54Φ tip 59 is
Pushing the center of the valve diaphragm 19, the valve diaphragm 19 changes δS and Cj (1'/, and the valve body 15 closes the fluid seal part 16. δ8 is at most 0.1
rn m or less.
この状態でピエゾ素子５２．５２．５２に印加する直流
電圧を減ずれば、バルブダイヤクラム１９の復元力と、
スプリング１７によって、バルブ本体１５が押し上げら
れ、流体シール部１６が開き、流体は人口１３から出口
１４へ流出する。而して図示していないセンサによって
流出流体υ］′ｔＩＬ竜流量を検知し、その検出された
Ｔ４量流量出力信号と、流量；ｑ定信号を比較し、両者
が一致するようにビニニジ素子５２．５２．５２への印
加電圧を自動制御すれば流体の’ｔ１’Ｅｔ流量を目動
制御することが出来る。In this state, if the DC voltage applied to the piezo elements 52, 52, 52 is reduced, the restoring force of the valve diaphragm 19 will be reduced.
The valve body 15 is pushed up by the spring 17, the fluid seal 16 opens, and the fluid flows out from the port 13 to the outlet 14. Then, the flow rate of the outflow fluid υ]'tIL is detected by a sensor (not shown), and the detected T4 flow rate output signal and the flow rate; If the voltage applied to .52 and 52 is automatically controlled, the 't1'Et flow rate of the fluid can be controlled in a variable manner.
（ハ〉発明が解決しようとする問題点
ピエゾ素子５２．５２．５２は、長さ方向のスチイフネ
スＡ、／＝引張又は圧縮力／変位が異常に大きい、例え
ば印加電圧を数百ヴオルトに上昇しても、変位が高’４
０ 、０５ ｍｍ程度と小さく、動きを制約したとき発
生する力は１００ Ｋ ｇ子以上にもなる。即ち、あ。(C) Problem to be solved by the invention The piezo element 52.52.52 has an abnormally large stiffness A in the longitudinal direction, /= tensile or compressive force/displacement, for example, when the applied voltage is increased to several hundred volts. Even if the displacement is high
Although it is small at about 0.05 mm, the force generated when its movement is restricted is over 100 kg. In other words, ah.
＞ ２ Ｘ Ｉ Ｕ３Ｋ ｇｆ ／ｍｔｎである・従っ
て流体シール部１６（７）開きが小さく、制御出来る流
体の質量流爪の上限が少なすぎる欠点があった。> 2 X I U3K gf /mtn Therefore, there was a drawback that the opening of the fluid seal portion 16 (7) was small and the upper limit of the controllable mass flow of the fluid was too small.
（ニ）問題点を解決するための手段
本発明は、上記欠点をなくすためになされたもので、そ
Ｏ特徴とするところは、流体の質量流量を制御するバル
ブとして、フラットプラグバルブを用い、フラツトプラ
グ０駆軸部を、高強度、高靭性な材料よりなる、円環状
ダイヤフラムで支持された、軟磁性＋４よりなるプラン
ジャと、プランジャを吸引する軟磁性材よりなる磁極と
を具備した、いわゆる直進型ソレノイドで構成したこと
にある。(d) Means for solving the problems The present invention has been made to eliminate the above-mentioned drawbacks, and is characterized by using a flat plug valve as a valve for controlling the mass flow rate of fluid. The flat plug 0 drive shaft is a so-called straight-travel type with a plunger made of soft magnetic material +4 supported by an annular diaphragm made of a high-strength, high-toughness material, and a magnetic pole made of a soft magnetic material that attracts the plunger. The reason is that it is composed of a type solenoid.
（ネ）作 用
プランジャを支持する円環状ダイヤフラムは、これを支
持クランプする外、内径の大きさ及びその厚さを変化さ
せることにより、プランジャ直進方向Ｏスｆ７ソネスＡ
、ビニプランジャを動かす力／変１３″Ｌ、を相当高範
囲に設定することが出来る。従って直進型ソレノイドの
磁気空隙が零付近の磁気吸引力のスチイフネス４ｔｔ
＝磁気吸引力／磁λ空隙長、に対しで大きく、且つピエ
ゾ駆動部のスチイフネスＡ、より小さくした円環状ダイ
ヤフラムを提供することが出来るので、直進形ソレノイ
ドへの供給電力を増減することにより流体の質量流量を
従来のものより多量に制御することが出来る。(N) Function The annular diaphragm that supports the plunger can be clamped to support it by changing its inner diameter and thickness.
, the force to move the vinyl plunger (13"L) can be set in a fairly high range. Therefore, the stiffness of the magnetic attraction force is 4tt when the magnetic air gap of the linear solenoid is near zero.
It is possible to provide an annular diaphragm that has a large value for = magnetic attraction force/magnetic λ air gap length and has a smaller stiffness A of the piezo actuator, so by increasing or decreasing the power supplied to the linear solenoid, the fluid The mass flow rate can be controlled to a greater extent than in the conventional method.
（へ）実施例 以下図面について詳細に説明する。(f) Example The drawings will be explained in detail below.
第１図は本発明の駆動部として用いた、直進型ソレノイ
ドの一実施例を示す側断面図、第２１２１は第１図駆動
部とバルブ部を結合した状態を示す側断面図である。FIG. 1 is a side sectional view showing an embodiment of a linear solenoid used as a drive section of the present invention, and FIG. 2121 is a side sectional view showing a state in which the drive section and valve section in FIG. 1 are combined.
第１図において２１は本発明の駆動部として用いた直進
型ソレノイドで、ソレノイド部２２と、軟磁性材よりな
るケース２３より構成される。In FIG. 1, reference numeral 21 denotes a linear solenoid used as a drive section of the present invention, which is composed of a solenoid section 22 and a case 23 made of a soft magnetic material.
２４は、軟磁性材よりなるプランジャ、２５及び２６は
軟磁性材よりなるヨーク、２７はプランジャ２４を吸引
する軟磁性材よりなる磁極。２８は例えばニッケル、コ
バルト、クローム、毛すブデンｆｇ（９％Ｎｊ、９％Ｃ
０１８％Ｃｒ、４％ＭＯ１０，１２％Ａ、／、０４％′
１′１．０．０１％じ残りＩ？、）を眞空中又は水素中
で４８０°Ｃ５時間時効硬化処理し、高強度、高靭性と
したヰ４料よりなる、浦い厚さ尤のソレノイドダイヤプ
ラムで、そＯ外周をヨーク２６の突出円筒部２９とリン
グ３０で扶み、小ねじ３１でクランプする、２ａはその
クランプ外径である。又ソレノイドダイヤフラム２８の
内周をプランジャ２４とランプする、２ｂはそのクラン
プ内径である。24 is a plunger made of a soft magnetic material, 25 and 26 are yokes made of a soft magnetic material, and 27 is a magnetic pole made of a soft magnetic material that attracts the plunger 24. 28 is, for example, nickel, cobalt, chromium, wool fg (9% Nj, 9% C
018%Cr, 4%MO10, 12%A, /, 04%'
1'1.0.01% remaining I? , ) is age-hardened in air or hydrogen at 480°C for 5 hours to make it high strength and toughness. It is made of a thick solenoid diaphragm with a large thickness, and the yoke 26 protrudes from the outer periphery of the solenoid diaphragm. It is supported by a cylindrical portion 29 and a ring 30, and is clamped by a machine screw 31. 2a is the outer diameter of the clamp. Further, the inner periphery of the solenoid diaphragm 28 is connected to the plunger 24, and 2b is the inner diameter of the clamp.
面してプランジャ２４は中心部に保持され、ヨーク２Ｇ
との間に磁気空隙３５が構成される。３６は非磁性材よ
りなるガイドビンでプランジャ２４の上部にｌ！ｌｆｆ
１．ｒｉ１極２７に埋め込まれに軸受３７内を滑動する
ようにな−）ている。（につでプランジャ２４０）変位
は、ソレノイドダイヤフラム
よって上下方向−みに限定される。３２３は河いスベー
りで、：！−タ２５と磁極２７σノ鍔；３５）で挾み、
小ねし４０で締めｌ；ｌ’ Ｃｊる。スベーリ；１０σ
ノ厚さを調びするごとにより、磁気？１！隙４１の空隙
長δを調！１１ｒることが出来る。The plunger 24 is held in the center and the yoke 2G
A magnetic gap 35 is formed between the two. 36 is a guide bottle made of non-magnetic material and is placed above the plunger 24. lff
1. It is embedded in the ri1 pole 27 and slides within the bearing 37. (Plunger 240) Displacement is limited in the vertical direction by the solenoid diaphragm. 323 is a river subere, :! - sandwiched between ta 25 and magnetic pole 27σ no tsuba; 35),
Tighten with 40 min. Subere; 10σ
Is it magnetic depending on the thickness? 1! Find the gap length δ of gap 41! I can do 11r.
ないが、三１−り２５に磁拠２７を１，１し込む構造と
し°Ｃも可能である。／ｌ ２は絶縁＋４よりなるボビ
ン、４３はボビン／ｌ ２にプリンジャ２／ｌを１ｒ、
１回するように捲かれたコイル。以−１，てソレノイド
部２２ ｔｉ：ＬＸ成しでいる。However, it is also possible to have a structure in which the magnetic base 27 is inserted 1, 1 into the 31-ri 25. /l 2 is a bobbin made of insulation +4, 43 is a bobbin /l 2 with a prinper 2/l 1r,
A coil that is wound once. Below-1, the solenoid part 22 ti:LX is constructed.
４４は波形ワッシャー １１５はリンクわして、リング
わじ４５をわし込むことζこよ奄」、ソレノイド部２２
Ｃよ波形り・ソシャー／ｌ ／ｌを′彰形させて、ケー
ス２３内部に固定される。44 is a wave washer 115 is a link, and the ring washer 45 is inserted into the solenoid part 22.
It is fixed inside the case 23 with the waveform C and sosher /l being shaped into a 'shape'.
４６はプランジャ２１１ ＣＩＪＴ部突出部、４７は駆
動部２１の取付座、４８は取１１座４７の底面である。46 is a protruding portion of the CIJT portion of the plunger 211, 47 is a mounting seat for the drive unit 21, and 48 is a bottom surface of the holder 47.
第２１ざ１はバルブ部１１と駆チｈ部２１を結合した状
態な示した側を折面１ツ１゛Ｃ１１！乃竿１９は第５図
と、２Ｉ乃棄４８ζ；ｔｉ１図と同様である。The 21st piece 1 is a folded surface of the side shown in which the valve part 11 and the driving part 21 are combined. The rod 19 is the same as that shown in FIG. 5 and 2I-1.
バルソ°本１本１５はバルフ′ダイヤ゛ノラノ、１５）
山中休部を賛。たＣ１押し１ζＣＪ’たとき、ｉＡＥ
Ｉ・１、シール部１６が閉じる上・°）にな−）Ｃいる
。（１２、は高／Ｊ （＋ 、 Ｉ Ｉｎ…程度であ
るが、バルブダイＡ・フラム１９はＳ Ｕ Ｓ −；１
１ Ｇで出来Ｃい°Ｃ５Ｕ３３１Ｇの剛力が約２１１（
ｇ ｆ ／ ｍ ＋ｎ’と低いため、この程度の変形で
、バルブダイヤフラム１９の内部応力は比例限界値を越
えて、塑性変形の範囲内に人ってしまう。即ちバルブダ
イヤフラム１９の復元力は無いものと見なさなければな
らない。One balso book 15 is a balf diamond, 15)
Praise Yamanaka Reshube. When C1 is pressed 1ζCJ', iAE
I・1, the seal portion 16 is closed above・°). (12 is about high /J (+, I In...), but the valve die A/flamm 19 is SUS -;
The stiffness of 1G is approximately 211 (C5U331G)
Since g f /m + n' is low, with this degree of deformation, the internal stress of the valve diaphragm 19 exceeds the proportional limit value and falls within the range of plastic deformation. That is, it must be assumed that the valve diaphragm 19 has no restoring force.
バルブ本体１５を押し上げる力は、スプリング１７によ
って与えられる。スプリング１７は又、入口流体が眞空
に近い状態でもバルブ本体１５を押し上げなくてはなら
ない、この力をＦ とする、一方入口流体圧がｐ２圧の
とき、流体シール部１６を閉ぢておくために、Ｆ／）の
力が必要であるとすると、ノ〈ルブ本体１５を常時（Ｆ
ゆ＋Ｆｌ＋ ｔｘ ）の力で押し１″Ｉけていなければ
ならない。（Ｆ ｕ ＋ Ｆ７Ｊ十α〉の力は、ソレノ
イドダイヤフラム２８を第２図に示すようにδ、だけ変
形させて発生させる。その方法の一つは、駆動部２１の
取付座４７とバルブ筐体１２とを固着し、人口流体圧を
（ｐ＋Δｐ）気圧とし、リングねじ４５をねじ込んで、
ソレノイド部２２を下方に押し下げ、流体出口１４から
の流体の流出が無くなるのを確認することによって遂行
される。A force for pushing up the valve body 15 is provided by a spring 17. The spring 17 also has to push up the valve body 15 even when the inlet fluid is nearly empty, and this force is denoted by F. On the other hand, when the inlet fluid pressure is p2 pressure, it is necessary to keep the fluid seal part 16 closed. Assuming that a force of F/) is required for
It must be pushed 1"I with a force of One method is to fix the mounting seat 47 of the drive unit 21 and the valve housing 12, set the artificial fluid pressure to (p+Δp) atmospheric pressure, and screw in the ring screw 45.
This is accomplished by pushing down the solenoid section 22 and confirming that no fluid flows out from the fluid outlet 14.
磁気空隙４１の空隙長δ２はスペーサ３８の厚さを調整
しδ２＃δ。に調整する。The gap length δ2 of the magnetic gap 41 is determined by adjusting the thickness of the spacer 38 to obtain δ2#δ. Adjust to.
第３図及び第４図は本発明バルブ駆動機構の動作を説明
する図である
第３図実線はコイル４３への直流印加電圧■ｏをパラメ
ータとし、プランジャ２４の磁気吸引力Ｆ０を縦軸に、
磁気空隙４１の空隙長δを横軸にとって測定したＦ。の
実測例である。3 and 4 are diagrams for explaining the operation of the valve drive mechanism of the present invention. The solid line in FIG. 3 shows the DC applied voltage o to the coil 43 as a parameter, and the magnetic attraction force F0 of the plunger 24 as the vertical axis. ,
F measured with the gap length δ of the magnetic gap 41 taken as the horizontal axis. This is an actual measurement example.
第４図はソレノイド部２２の外側を固定し、プランジャ
２４の先端４６に押し上げ力Ｆ２を加えたときの、プラ
ンジャダイヤフラム２８の変位ξを横軸にとり、Ｆｊを
縦軸にとって測定した、Ｆ の実測例である。Fig. 4 shows the actual measurement of F when the outside of the solenoid section 22 is fixed and a pushing force F2 is applied to the tip 46 of the plunger 24, with the horizontal axis representing displacement ξ of the plunger diaphragm 28 and Fj representing the vertical axis. This is an example.
第３図点線は第３図Ｆ＋１０と第４図Ｆｊｏが等しくな
るように、第４図の実測値を変位方向が逆になるように
画いたものである。The dotted line in FIG. 3 is the actual measured value in FIG. 4 drawn with the direction of displacement reversed so that F+10 in FIG. 3 and Fjo in FIG. 4 are equal.
第３図及び第４図でプランジャダイヤフラム２８にδ、
の変位を与えるには（Ｆ ｓ ＋ Ｆ ｐ＋α）の力を
、プランジャ２４の先端４６に加えなければならない、
即ちバルブ本体１５は（Ｆ、＋Ｆｊ＋α）の力で、流体
シール部１６を押し付けていることになる。In FIGS. 3 and 4, the plunger diaphragm 28 has δ,
A force of (F s + F p + α) must be applied to the tip 46 of the plunger 24 to provide a displacement of
In other words, the valve body 15 presses against the fluid seal portion 16 with a force of (F, +Fj+α).
又コイル４３への印加電圧がＶＣ１以下ではプランジャ
２４は静止しているが、印加電圧をＶＣＩ、ＶＣ２、Ｖ
Ｃ３のように増加すると、プランジャダイヤフラム２８
を変形させる力Ｆ４と磁気吸引力Ｆ６との釣合い点がＡ
、Ｂ、Ｃの順に移動し、バルブ本体１５がスプリング１
７によって押し上げられ、流体シール部１６が順次開か
れ、流体は人口１３か出口１４へ流出する。而して図示
していないセンサによって流出流体の質ｍ流量を検知し
、その検出された質量流量出力信号と、流量設定信号を
比較し、両者が一致するようにコイル４３への印加電圧
を自動制御すれば、流体の質量流量を自動制御すること
が出来る。Further, when the voltage applied to the coil 43 is lower than VC1, the plunger 24 is stationary, but when the applied voltage is changed to VCI, VC2, V
When increasing like C3, the plunger diaphragm 28
The balance point between the force F4 that deforms and the magnetic attraction force F6 is A
, B, and C in order, and the valve body 15 is moved to the spring 1.
7, the fluid seal portions 16 are successively opened, and the fluid flows out to the port 13 or the outlet 14. The quality and flow rate of the outflow fluid is detected by a sensor (not shown), the detected mass flow rate output signal and the flow rate setting signal are compared, and the voltage applied to the coil 43 is automatically adjusted so that the two match. If controlled, the mass flow rate of the fluid can be automatically controlled.
尚ケース取付座４７の底面４８が平坦になっているのは
、人口流体圧が誤って規定値より上昇した場合でも、バ
ルブダイヤフラム１９が底面４８で支えられ、無益な変
形を起こさないためである。The reason why the bottom surface 48 of the case mounting seat 47 is flat is that even if the artificial fluid pressure accidentally rises above the specified value, the valve diaphragm 19 will be supported by the bottom surface 48 and will not cause useless deformation. .
（ト）効果
以上図面について詳細に説明したが、本発明によるバル
ブ駆動機構で流体流量を自多り制御出来るための必要且
つ十分條件は、次０通りである。(g) Effects Although the drawings have been described in detail above, the following are the necessary and sufficient conditions for the valve drive mechanism according to the present invention to be able to independently control the fluid flow rate.
（１）規定の直流入力電力によって磁気空隙４１の空隙
長δが零のときの磁気吸引力が第３図Ｆｎｏ以上である
こと。(1) The magnetic attraction force when the gap length δ of the magnetic gap 41 is zero due to the prescribed DC input power is greater than or equal to Fno in FIG. 3.
（２）プランジャダイヤフラム２８のスチイフネスＡｄ
が、磁気吸引力のスチイフネス＾はり大きいこと。(2) Stiffness Ad of plunger diaphragm 28
However, the stiffness of the magnetic attraction force is large.
（３）プランジャダイヤフラム２８の内部応力が、その
材料の比例限界内であること。(3) The internal stress of plunger diaphragm 28 is within the proportional limits of its material.
（１）の條件は、ソレノイドの大きさによって満足ｄｔ
することが出来る。Condition (1) is satisfied dt depending on the size of the solenoid.
You can.
（２）及び（３）の條件は、本発明のプランジャダイヤ
フラム２８即ち円環状ダイ４・フラムに上って満足させ
ることが出来る。Conditions (2) and (3) can be satisfied by the plunger diaphragm 28, ie, the annular die 4/flame of the present invention.
即ち円環状ダイヤプラムのスチイフネスＪノと、内部応
力の最大値σ、、ｘは例えば、Ｓ。That is, the stiffness J of the annular diaphragm and the maximum internal stress σ, x are, for example, S.
１’ Ｉ Ｍ ＯＳ ＨＥ Ｎ Ｋ Ｏ著、北畠顕正、
片山９皇太部共訳ｒ ｌｆＡ科力学」下巻ＰＩＯＧコロ
ナ社によれば、材料のヤング率をＥ、パッソン比をν、
７＝ｂ／ａとして（１）式及び（２）式の通りである。1' I M OS HE N KO author, Akimasa Kitabatake,
According to Katayama 9 Co-translated by Kotabe r lfA Scientific Mechanics, Volume 2, PIOG Corona Publishing, the Young's modulus of the material is E, the Passon's ratio is ν,
Assuming 7=b/a, equations (1) and (2) are obtained.
荷重Ｐを加えたときσ３．８は円周部に生じ（１）式Ｊ
ｅｔは円環状ダイヤフラムの変位ξが、厚さムに対して
同程度以上になると徐々に増大する。従ってσｓｅｘ
も（２）式で示す値より大きくなるが、円環状ダイヤ
フラムを決定する自山度がａｓ２及びｙと３種類もある
のでＡＩを、メ無より大きく、σ１１．．を材料の比例
限界値内によめることは容易である。When load P is applied, σ3.8 occurs at the circumference (1) Equation J
et gradually increases when the displacement ξ of the annular diaphragm becomes equal to or more than the thickness m. Therefore σsex
is also larger than the value shown by equation (2), but since there are three types of self-heightness, as2 and y, which determine the annular diaphragm, AI is set to be larger than the value of σ11. ．． It is easy to bring it within the proportional limits of the material.
実施例による／、及び２１の値は夫々（３）式の通りで
あった。The values of / and 21 according to the example were as shown in equation (3).
又、プランジャダイヤフラム２８の材料、ニッケル、コ
バルト、クローム、モリブデン鋼の時効硬化後の比例限
界値は、２００ Ｋ ｇｆ ／ ｍ ｍ”以上で非常に
大きく、プランジャダイヤフラム２８を使用限度の２倍
まで変位させ数千回繰返しても永久歪は認められなかつ
（３）式ソｌ：ａａｔ＜ｇｆ／ｍｍの値は、ピエゾ素子
のスチイフネスＪｐ ＞ ２０００ Ｋｇ ｆ ／ ｍ
ｍに比較して十分小さくなっているので、バルブ本体
１５の移動量を従来のものより大きくすることが出来る
ので、流体の質量流量の上限を大きく出来る効果がある
。In addition, the proportional limit value after age hardening of the material of the plunger diaphragm 28, nickel, cobalt, chromium, and molybdenum steel, is extremely large at 200 K gf/mm" or more, and the plunger diaphragm 28 can be displaced up to twice its service limit. No permanent deformation was observed even after repeating the process several thousand times, and the value of formula (3): aat < gf/mm is the stiffness of the piezo element Jp > 2000 Kg f/m
Since the valve body 15 is sufficiently smaller than m, the amount of movement of the valve body 15 can be made larger than that of the conventional valve, which has the effect of increasing the upper limit of the mass flow rate of the fluid.
第１図は本発明のバルブ駆動部として用いた、直進型ソ
レノイドの一実施例を示す側断面図、第２図はバルブ部
１１と駆動部２１を結合した状態を示した側断面図、第
３図及び第４図は本発明バルブ駆動機構の動作を説明す
る図、第５図は従来Ｏバルブ駆動機構の側断面図である
。
１１・・・バルブ部、１２・・・バルブ筐体、１３・・
・流体入口、１４・・・流体出口、１５・・・バルブ本
体、１６・・・流体シール部、１７・・・スプリング１
８・・・バルブ本体１５の突出部、１９・・・バルブダ
イヤフラム、２０・・・駆動部、２２・・・ソレノイド
部、２３・・・ケース、２４・・・プランジャ２５．２
６・・・ヨーク、２７・・・磁極、２８・・・プランジ
ャダイヤプラム、２９・・・ヨーク２６の突出円筒部、
３０・・・リング、３１・・・小ねじ、３２・・・クラ
ンブリング、３３・・・ナツト、３４・・・プランジャ
２４の先端ねし部、３５・・・磁気空隙、３６・・・ガ
イドピン、３７・・・軸受、３８・・・スペーサ、３９
・・・磁極２７の鍔、４０・・・小ねじ、４１・・・磁
気空隙、４２・・・ボビン、４３・・・コイル、４４・
・・波形ワッシャー ４５・・・リングねじ、４６・・
・プランジャ先端、４７・・・駆動部２１の取付座、４
８・・・取付座４７の底面５１・・・ピエゾドライバ、
５２．５２．５２・・・ピエゾ素子、５３・・・ケース
、５４・・・バルブ押しピース、５５・・・測路ピース
、５６・・・ケースの取４′４座、５７・・・押しねじ
、５Ｂ・・・ボール、５９・・・バルブ押しピース５４
の先端第１図
第２図
第３図
第４図FIG. 1 is a side cross-sectional view showing an embodiment of a linear solenoid used as a valve drive unit of the present invention, FIG. 3 and 4 are diagrams for explaining the operation of the valve drive mechanism of the present invention, and FIG. 5 is a side sectional view of the conventional O valve drive mechanism. 11... Valve part, 12... Valve housing, 13...
・Fluid inlet, 14...Fluid outlet, 15...Valve body, 16...Fluid seal portion, 17...Spring 1
8... Projection of valve body 15, 19... Valve diaphragm, 20... Drive section, 22... Solenoid section, 23... Case, 24... Plunger 25.2
6...Yoke, 27...Magnetic pole, 28...Plunger diaphragm, 29...Protruding cylindrical portion of yoke 26,
30...Ring, 31...Machine screw, 32...Crumble ring, 33...Nut, 34...Top thread of plunger 24, 35...Magnetic gap, 36...Guide Pin, 37...Bearing, 38...Spacer, 39
... Flange of magnetic pole 27, 40... Machine screw, 41... Magnetic gap, 42... Bobbin, 43... Coil, 44...
...Wave washer 45...Ring screw, 46...
- Plunger tip, 47...Mounting seat of drive unit 21, 4
8... Bottom surface 51 of mounting seat 47... Piezo driver,
52.52.52... Piezo element, 53... Case, 54... Valve push piece, 55... Survey piece, 56... Case 4'4 seat, 57... Push Screw, 5B...Ball, 59...Valve push piece 54
Tip of Figure 1 Figure 2 Figure 3 Figure 4
Claims (1)
を、高強度、高靭性な材料よりなる円環状ダイヤフラム
で支持された、軟磁性材よりなるプランジャと、プラン
ジャを吸引する軟磁性材よりなる磁極を具備した、いわ
ゆる直進型ソレノイドで構成したことを特徴とするバル
ブ駆動機構[Claims] A flat plug valve is used as a valve for controlling the mass flow rate of fluid, and the driving part of the flat plug is made of a soft magnetic material supported by an annular diaphragm made of a material with high strength and high toughness. A valve drive mechanism characterized by comprising a so-called straight solenoid, which is equipped with a plunger made of a magnetic material and a magnetic pole made of a soft magnetic material that attracts the plunger.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1296574A JP2553398B2 (en) | 1989-11-14 | 1989-11-14 | Valve drive mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1296574A JP2553398B2 (en) | 1989-11-14 | 1989-11-14 | Valve drive mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03177670A true JPH03177670A (en) | 1991-08-01 |
| JP2553398B2 JP2553398B2 (en) | 1996-11-13 |
Family
ID=17835303
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1296574A Expired - Lifetime JP2553398B2 (en) | 1989-11-14 | 1989-11-14 | Valve drive mechanism |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2553398B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0718081U (en) * | 1993-04-22 | 1995-03-31 | タカノ株式会社 | Always open valve drive mechanism |
| WO2015029252A1 (en) | 2013-09-02 | 2015-03-05 | 株式会社島津製作所 | Pressure control valve and supercritical fluid chromatograph |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62151480U (en) * | 1986-03-18 | 1987-09-25 |
-
1989
- 1989-11-14 JP JP1296574A patent/JP2553398B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62151480U (en) * | 1986-03-18 | 1987-09-25 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0718081U (en) * | 1993-04-22 | 1995-03-31 | タカノ株式会社 | Always open valve drive mechanism |
| WO2015029252A1 (en) | 2013-09-02 | 2015-03-05 | 株式会社島津製作所 | Pressure control valve and supercritical fluid chromatograph |
| US9910019B2 (en) | 2013-09-02 | 2018-03-06 | Shimadzu Corporation | Pressure control valve and supercritical fluid chromatograph |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2553398B2 (en) | 1996-11-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6062246A (en) | Mass flow controller and operating method thereof | |
| JP3586075B2 (en) | Pressure type flow controller | |
| KR0148499B1 (en) | Valve device | |
| JPH06308303A (en) | Varifocal lens and device for driving it | |
| JPH03177670A (en) | Valve driving mechanism | |
| US4771983A (en) | Magnetic flow control valve | |
| JPH11154022A (en) | Mass-flow controller and operation control method therefor | |
| JPH10500198A (en) | Adjustment valve | |
| JPH11101352A (en) | Flow control valve | |
| JPH07310842A (en) | Fine flow rate adjustment valve | |
| JPS61127983A (en) | Fluid control valve | |
| JPS62141381A (en) | Piezoelectric driving type valve | |
| JPH117325A (en) | Pressure reducing valve | |
| US20100108923A1 (en) | Electropneumatic transducer with a pneumatic pressure-regulating valve | |
| JP2529388B2 (en) | Valve for gas flow controller | |
| JPS60263793A (en) | Diaphragm valve | |
| JPS62224780A (en) | Piezo-electric driving type valve | |
| JPH06109163A (en) | Flow rate regulating valve | |
| JPH01105080A (en) | Piezoelectric flow control valve | |
| JP2536864B2 (en) | Micro flow control valve | |
| JP2668122B2 (en) | Micro flow controller | |
| JPH1038111A (en) | Relief valve | |
| JPH02203087A (en) | Flow control valve | |
| JPS63199968A (en) | Fluidic powder control valve | |
| JP3001771U (en) | Pressure control valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080822 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100822 Year of fee payment: 14 |
|
| EXPY | Cancellation because of completion of term | ||
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100822 Year of fee payment: 14 |