JPH0317389B2 - - Google Patents
Info
- Publication number
- JPH0317389B2 JPH0317389B2 JP60073469A JP7346985A JPH0317389B2 JP H0317389 B2 JPH0317389 B2 JP H0317389B2 JP 60073469 A JP60073469 A JP 60073469A JP 7346985 A JP7346985 A JP 7346985A JP H0317389 B2 JPH0317389 B2 JP H0317389B2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- laser beam
- optical axis
- laser
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000003287 optical effect Effects 0.000 claims description 20
- 238000000605 extraction Methods 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000011144 upstream manufacturing Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 3
- 235000012489 doughnuts Nutrition 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
- H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
- H01S3/0818—Unstable resonators
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、レーザガスの流れる方向が光軸と
直交しているレーザ共振器の改良に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an improvement in a laser resonator in which the direction in which laser gas flows is perpendicular to the optical axis.
第４図は従来のレーザ共振器の構成を示す説明
図である。図において、１は凹面ミラー、２は凸
面ミラー、３は設定光軸で、凹面ミラー１および
凸面ミラー２のそれぞれの球面の中心を結ぶ線に
相当する。４は取り出しミラー、４ａはこの取り
出しミラー４に設けた取り出しミラー穴であり、
設定光軸３方向から見た形状が真円になるように
形成されている。５は共振器内のレーザビーム、
６は取り出しミラー４より取り出されたレーザビ
ームで、図中の点線で示すように取り出しミラー
穴４ａ部を欠いた円形リング状つまりドーナツ状
になつている。７はレーザビーム規制用アパーチ
ヤー、８の矢印はレーザガスの流れる方向を示し
ており、レーザガスは設定光軸３と直交する方向
に流れている。
FIG. 4 is an explanatory diagram showing the configuration of a conventional laser resonator. In the figure, 1 is a concave mirror, 2 is a convex mirror, and 3 is a set optical axis, which corresponds to a line connecting the centers of the spherical surfaces of concave mirror 1 and convex mirror 2, respectively. 4 is a take-out mirror, 4a is a take-out mirror hole provided in this take-out mirror 4,
It is formed so that the shape viewed from the three directions of the set optical axis is a perfect circle. 5 is a laser beam inside the resonator,
Reference numeral 6 denotes a laser beam taken out from the take-out mirror 4, which has a circular ring shape, that is, a donut shape, with the take-out mirror hole 4a missing, as shown by the dotted line in the figure. Reference numeral 7 indicates an aperture for regulating the laser beam, and an arrow 8 indicates the direction in which the laser gas flows, and the laser gas flows in a direction perpendicular to the set optical axis 3.
上記のような構成の従来のレーザ共振器におい
ては、凹面ミラー１と凸面ミラー２とによつて決
まる設定光軸３を中心として、レーザビーム５が
凹面ミラー１、凸面ミラー２間を往復しながら、
設定光軸３から順次に外に向つて対称に広がつて
ゆくことになる。この広がつたビーム５は取り出
しミラー４によつて共振器外へドーナツ状ビーム
６として取り出される。 In the conventional laser resonator configured as described above, the laser beam 5 is reciprocated between the concave mirror 1 and the convex mirror 2 with the set optical axis 3 determined by the concave mirror 1 and the convex mirror 2 as the center. ,
It will spread symmetrically outward from the set optical axis 3 one after another. This spread beam 5 is taken out of the resonator as a donut-shaped beam 6 by an extraction mirror 4.
第５図は上記ドーナツ状のレーザビーム６の特
性を示す図で、ａはビーム軸に直角の断面におけ
るレーザビーム６の形状を示し、ドーナツ形の内
径は取り出しミラー穴４の穴径と等しく、外径は
凹面ミラー１と凸面ミラー２とのそれぞれの曲率
半径および両ミラー１，２間の距離で決まるビー
ム拡大率と取り出しミラー穴４の穴径との積にな
つている。ｂ図はこのドーナツ状のレーザビーム
６の利得が、レーザガスの流れる方向８に対して
図のG1およびG2で示すように下流側と上流側と
が異なつていることを示している。 FIG. 5 is a diagram showing the characteristics of the donut-shaped laser beam 6, where a shows the shape of the laser beam 6 in a cross section perpendicular to the beam axis, and the inner diameter of the donut shape is equal to the hole diameter of the extraction mirror hole 4. The outer diameter is the product of the beam expansion ratio determined by the radius of curvature of the concave mirror 1 and the convex mirror 2 and the distance between the mirrors 1 and 2, and the diameter of the extraction mirror hole 4. Figure b shows that the gain of this doughnut-shaped laser beam 6 is different on the downstream side and upstream side, as shown by G1 and G2 in the figure, with respect to the direction 8 in which the laser gas flows.
上記のような従来の３軸直交式レー装置では、
第５図ｂで示されたように、レーザガスの流れる
方向８に対して利得分布が異なるので、レーザビ
ーム６の強度が流れの方向に対して上流側が強
く、下流側が弱くなり、一様な強度分布が得られ
ないという問題があつた。
In the conventional three-axis orthogonal Ray device as mentioned above,
As shown in FIG. 5b, the gain distribution differs with respect to the direction 8 in which the laser gas flows, so the intensity of the laser beam 6 is stronger on the upstream side and weaker on the downstream side with respect to the flow direction, resulting in a uniform intensity. There was a problem that the distribution could not be obtained.
この発明は上記のような問題点を解消するため
になされたもので、一様な強度分布が得られるレ
ーザ共振器を提供することを目的とする。 The present invention was made to solve the above-mentioned problems, and an object of the present invention is to provide a laser resonator that can obtain a uniform intensity distribution.
この発明に係るレーザ共振器は、光軸方向から
見て円形の穴を有するレーザビーム取り出しミラ
ーおよびレーザビーム規制用アパーチヤーの取り
付け位置が、それぞれ穴径の中心を設定光軸に対
して、設定光軸と直交する方向に流れるガス流の
下流方向へ変位させるようにしたものである。
In the laser resonator according to the present invention, the mounting position of the laser beam extraction mirror and the laser beam regulating aperture having a circular hole when viewed from the optical axis direction is such that the center of the hole diameter is set relative to the set optical axis. The gas flow is displaced in the downstream direction of the gas flow in the direction perpendicular to the axis.
この発明においては、光軸方向から見て円形の
穴を有するレーザビーム取り出しミラーおよびレ
ーザビーム規制用アパーチヤーの穴の中心を設定
光軸に対してガス流の下流側に変位させることに
よつて、利得分布の低い下流側でのレーザビーム
の往復回数を上流側より多くして、利得分布の低
さを補償するものである。
In this invention, by displacing the center of the hole of the laser beam extraction mirror and the laser beam regulating aperture having a circular hole when viewed from the optical axis direction to the downstream side of the gas flow with respect to the set optical axis, This is to compensate for the low gain distribution by increasing the number of round trips of the laser beam on the downstream side where the gain distribution is low compared to the upstream side.
第１図はこの発明の一実施例のレーザ共振器の
構成を示す図であり、１〜８の符号は従来例を示
した第４図の同符号と同一または相当部分を示
す。
FIG. 1 is a diagram showing the configuration of a laser resonator according to an embodiment of the present invention, and the symbols 1 to 8 indicate the same or corresponding parts as the same symbols in FIG. 4 showing the conventional example.
取り出したミラー４はこの穴の中心を設定光軸
３よりガス流８の下流方向にδだけ変位させて取
り付けられ、アパーチヤー７はこの変位量δとビ
ーム拡大率Ｍとの積Ｍ・δだけ一方向に変位させ
てある。 The taken-out mirror 4 is installed with the center of this hole displaced by δ from the set optical axis 3 in the downstream direction of the gas flow 8, and the aperture 7 is fixed by the product M·δ of this displacement δ and the beam expansion factor M. It is displaced in the direction.
上記のように構成したこの発明によるレーザ共
振器においては、レーザビーム５は凹面ミラー１
と凸面ミラー２との間を往復しながら、設定光軸
３から外側に広がつてゆく。この時、取り出しミ
ラー４の穴の中心が設定光軸３からδだけガス流
８の下流方向に変位しているため、ガス流８の上
流側と下流側とでは凹面ミラー１と凸面ミラー２
間の往復回数が異なつてくる。第２図はこのガス
流８の上流側と下流側におけるレーザビーム５の
往復回数の相異を説明する図であり、レーザビー
ム５ａは、ガス流８の下流側を往復し、レーザビ
ーム５ｂは上流側を往復して、それぞれが取り出
しミラー４に反射してドーナツ上のレーザビーム
６ａ，６ｂとなつて共振器外へ発射するようにな
つている。 In the laser resonator according to the present invention configured as described above, the laser beam 5 is transmitted through the concave mirror 1.
The light beam spreads outward from the set optical axis 3 while reciprocating between the light beam and the convex mirror 2. At this time, since the center of the hole in the take-out mirror 4 is displaced from the set optical axis 3 by δ in the downstream direction of the gas flow 8, the concave mirror 1 and the convex mirror 2 are located on the upstream and downstream sides of the gas flow 8.
The number of round trips will vary. FIG. 2 is a diagram explaining the difference in the number of reciprocations of the laser beam 5 on the upstream and downstream sides of the gas flow 8. The laser beam 5a reciprocates on the downstream side of the gas flow 8, and the laser beam 5b reciprocates on the downstream side of the gas flow 8. The laser beams reciprocate on the upstream side, are reflected by the take-out mirror 4, become donut-shaped laser beams 6a and 6b, and are emitted outside the resonator.
上記のようにガス流８の下流側のレーザビーム
５ａのほうが上流側よりも往復回数が多いので、
この回数の多い分だけ増幅の度合が大きくなり、
利得分布の平滑化ができる。 As mentioned above, the laser beam 5a on the downstream side of the gas flow 8 makes more reciprocations than on the upstream side, so
The greater the number of times, the greater the degree of amplification.
Gain distribution can be smoothed.
第３図はこの利得分布の平滑化によつて得られ
たドーナツ状のレーザビームを示す図で、ｂ図に
示すように利得分布の平滑化によつてビームの強
さG3はガス流８の上流側と下流側ともに等しく
なる。ただし、この上流側と下流側のリング幅
W1とW2とは、W1＜W2の関係が生ずるが実用上
では問題はない。 Figure 3 is a diagram showing a donut-shaped laser beam obtained by smoothing this gain distribution.As shown in Figure b, by smoothing the gain distribution, the beam intensity G3 is Both the upstream and downstream sides of are equal. However, this upstream and downstream ring width
Although W 1 and W 2 have a relationship of W 1 <W 2 , there is no problem in practical use.
なお、上記実施例では、設定光軸３から取り出
しミラー４の穴の中心を変位させるように取り付
け位置を移動させた場合について説明したが、取
り出しミラー４の外径と穴とを所定の偏心量を有
するようにしてもよく、全く同様にアパーチヤー
７についても外径と穴とを偏心させたものを使用
してもよく、上記実施例と同様の効果を奏する。 In the above embodiment, the mounting position is moved so as to displace the center of the hole in the take-out mirror 4 from the set optical axis 3. Similarly, the aperture 7 may have an eccentric outer diameter and hole, and the same effect as in the above embodiment can be obtained.
この発明は以上説明したとおり、設定光軸方向
から見て円形の穴を有するレーザビーム取り出し
ミラーおよびレーザビーム規制用アパーチヤーの
穴の中心を、設定光軸に対して、設定光軸と直交
する方向に流れるガス流の下流側に変位させて、
凹面ミラーと凸面ミラーとの間のガス流の上流側
と下流側のレーザビームの往復回数が相違するよ
うに構成したので、近視野において利得分布が均
一の円形リング状レーザビームを得ることができ
る効果がある。
As explained above, the present invention is arranged such that the center of the hole of the laser beam extraction mirror having a circular hole when viewed from the direction of the set optical axis and the center of the hole of the laser beam regulating aperture is set in a direction perpendicular to the set optical axis. Displaced to the downstream side of the gas flow flowing through the
Since the structure is configured so that the number of round trips of the laser beam on the upstream and downstream sides of the gas flow between the concave mirror and the convex mirror is different, it is possible to obtain a circular ring-shaped laser beam with a uniform gain distribution in the near field. effective.
第１図はこの発明の一実施例によるレーザ共振
器の構成図、第２図は第１図の構成によるレーザ
ビームの往復状態を示す説明図、第３図は第１図
の構成によつて得られるドーナツ状のレーザビー
ムの特性説明図、第４図は従来のレーザ共振器の
構成図、第５図は従来のレーザ共振器によつて得
られるドーナツ状のレーザビームの特性説明図で
ある。
図において、１は凹面ミラー、２は凸面ミラ
ー、３は設定光軸、４は取り出しミラー、５およ
び６はレーザビーム、７はアパーチヤー、８はガ
ス流である。なお、図中同一符号は同一または相
当部分を示す。
FIG. 1 is a configuration diagram of a laser resonator according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing the reciprocating state of a laser beam according to the configuration of FIG. 1, and FIG. FIG. 4 is a configuration diagram of a conventional laser resonator, and FIG. 5 is a diagram explanatory of characteristics of a donut-shaped laser beam obtained by a conventional laser resonator. . In the figure, 1 is a concave mirror, 2 is a convex mirror, 3 is a set optical axis, 4 is an extraction mirror, 5 and 6 are laser beams, 7 is an aperture, and 8 is a gas flow. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
あらかじめ設定された光軸に対して、前記光軸の
方向から見て円形の穴を有するレーザビーム取り
出しミラーおよびレーザビーム規制用アパーチヤ
ーのそれぞれの穴の中心を、前記光軸と直交する
方向に流れるガス流の下流側に変位させたことを
特徴とするレーザ共振器。 ２ アパーチヤーの穴の中心の変位量が取り出し
ミラーの変位とビーム拡大率との積であることを
特徴とする特許請求の範囲第１項記載のレーザ共
振器。[Claims] 1. A laser beam extraction mirror and a laser beam regulating mirror having a circular hole when viewed from the direction of the optical axis with respect to a preset optical axis connecting both spherical centers of a concave mirror and a convex mirror. A laser resonator characterized in that the center of each hole of the aperture is displaced to the downstream side of a gas flow flowing in a direction perpendicular to the optical axis. 2. The laser resonator according to claim 1, wherein the amount of displacement of the center of the aperture hole is the product of the displacement of the extraction mirror and the beam expansion factor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7346985A JPS61232690A (en) | 1985-04-09 | 1985-04-09 | Laser resonator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7346985A JPS61232690A (en) | 1985-04-09 | 1985-04-09 | Laser resonator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61232690A JPS61232690A (en) | 1986-10-16 |
| JPH0317389B2 true JPH0317389B2 (en) | 1991-03-07 |
Family
ID=13519161
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7346985A Granted JPS61232690A (en) | 1985-04-09 | 1985-04-09 | Laser resonator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61232690A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106187A (en) * | 1980-11-12 | 1982-07-01 | Atomic Energy Authority Uk | Laser |
-
1985
- 1985-04-09 JP JP7346985A patent/JPS61232690A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57106187A (en) * | 1980-11-12 | 1982-07-01 | Atomic Energy Authority Uk | Laser |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61232690A (en) | 1986-10-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |