JPH03172771A - High voltage measuring device - Google Patents

High voltage measuring device

Info

Publication number
JPH03172771A
JPH03172771A JP1312167A JP31216789A JPH03172771A JP H03172771 A JPH03172771 A JP H03172771A JP 1312167 A JP1312167 A JP 1312167A JP 31216789 A JP31216789 A JP 31216789A JP H03172771 A JPH03172771 A JP H03172771A
Authority
JP
Japan
Prior art keywords
electrode plate
high voltage
movable electrode
gas tank
electrostatic capacitance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1312167A
Other languages
Japanese (ja)
Inventor
Yoshiyuki Konishi
善之 小西
Masakatsu Kosaka
向坂 正勝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1312167A priority Critical patent/JPH03172771A/en
Publication of JPH03172771A publication Critical patent/JPH03172771A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make an adjustment of device easy and to measure a high voltage with high accuracy by providing a movable electrode plate held movably by receiving an electrostatically attracting force and a fixed electrode plate held so as to oppositely face the movable electrode plate. CONSTITUTION:The movable electrode plate 4 is assumed to be placed in the position same as the side wall of a gas tank 1. The movable electrode plate 4 is pulled toward the direction of high voltage terminal 2 by an electrostatically attracting force exerted between the side wall of gas tank 1 and the high voltage terminal 2. As the result, the electrostatic capacitance formed between the movable electrode plate 4 and the fixed electrode plate 5 is decreased. A resonance circuit 9 is formed by this electrostatic capacitance, and the resonance frequency is varied in accordance with the decrease of electrostatic capacitance. Then, the high voltage is measured by means of detecting the change of resonance frequency in the resonance circuit 9 by a frequency detecting circuit 10. By this procedure, the accurate voltage measurement is attained without requiring specially a precision resistor, etc.

Description

【発明の詳細な説明】[Detailed description of the invention] 【産業上の利用分野】[Industrial application field]

この発明は、たとえばバンプグラフ、ペレトロン等に使
用される非常に高い直流高電圧(たとえば200KV〜
1MV)の測定を行うのに好適な、高電圧測定装置に関
する。
This invention applies to extremely high DC high voltages (for example, 200 KV to 200 KV) used in bump graphs, pelletrons, etc.
The present invention relates to a high voltage measuring device suitable for measuring 1 MV).

【従来の技術】[Conventional technology]

直流高電圧の測定装置としては、従来より、静電電圧計
、回転電圧計、振動電圧計や高抵抗を倍率器や分圧器と
して使用するものなどが知られている(六本正路r高電
圧工学」槙書店、2306〜315)。
As DC high voltage measuring devices, electrostatic voltmeters, rotary voltmeters, vibrating voltmeters, and devices that use high resistance as multipliers or voltage dividers are conventionally known. ” Maki Shoten, 2306-315).

【発明が解決しようとする課題】[Problem to be solved by the invention]

しかしながら、従来の高電圧測定装置のうち、静電電圧
計、回転電圧計、振動電圧計等はいずれも機械的に可動
な構造を有しているため調整や寿命などに問題があり、
さらに大きな設置スペースを必要とする。 また、高抵抗を倍率器や分圧器として用いる装置では、
漏れ電流やコロナ放電の影響を受は易く精度に問題があ
る。 この発明は、簡単な構造で調整や寿命などの点での問題
がなく、高い精度で高電圧を測定できる、高電圧測定装
置を提供することを目的とする。
However, among conventional high voltage measurement devices, electrostatic voltmeters, rotary voltmeters, vibration voltmeters, etc. all have mechanically movable structures, so they have problems with adjustment and lifespan.
It requires a larger installation space. In addition, in devices that use high resistance as a multiplier or voltage divider,
It is easily affected by leakage current and corona discharge and has accuracy problems. An object of the present invention is to provide a high voltage measuring device that has a simple structure, is free from problems in terms of adjustment and service life, and can measure high voltage with high accuracy.

【課題を解決するための手段】[Means to solve the problem]

上記目的を達成するため、この発明による高電圧測定装
置においては、高電圧の印加された部分より静電的吸引
力を受けて移動するように保持された可動電極板と、該
可動電極板と対向するよう保持される固定電極板と、こ
の可動電極板と固定電極板との間で形成される静電容量
を含んで構成される共振回路と、該共振回路の共振周波
数変化を検出する回路とが備えられている。
In order to achieve the above object, the high voltage measuring device according to the present invention includes a movable electrode plate that is held so as to be moved by receiving electrostatic attraction from a portion to which a high voltage is applied; A resonant circuit that includes a fixed electrode plate held to face each other, a capacitance formed between the movable electrode plate and the fixed electrode plate, and a circuit that detects changes in the resonant frequency of the resonant circuit. are provided.

【作  用】[For production]

一般に相対する2つの導体間に電圧Vを印加すると、そ
の導体間に電圧■の2乗に比例した静電的吸引力が作用
する。 そこで、この静電的吸引力が作用するように可動電極板
を置いて、静電的吸引力で可動電極板が移動するように
保持しておく、そして、この可動電極板に対向するよう
に固定電極板を保持する。 すると、可動電極板が静電的吸引力の作用で移動したと
き、可動電極板と固定電極板との間に形成された静電容
量が変化することになる。 その結果、この静電容量は共振回路を形成しているため
、その共振周波数の変化となって現れ、その共振周波数
変化を検出することによって上記の印加された電圧■を
求めることができる。
Generally, when a voltage V is applied between two opposing conductors, an electrostatic attractive force proportional to the square of the voltage ■ acts between the conductors. Therefore, the movable electrode plate is placed so that this electrostatic attraction force acts, the movable electrode plate is held so that it moves by the electrostatic attraction force, and the movable electrode plate is held so that it is opposed to this movable electrode plate. Hold the fixed electrode plate. Then, when the movable electrode plate moves due to the action of electrostatic attraction, the capacitance formed between the movable electrode plate and the fixed electrode plate changes. As a result, since this capacitance forms a resonant circuit, it appears as a change in the resonant frequency, and by detecting the change in the resonant frequency, the above-mentioned applied voltage (2) can be determined.

【実 施 例】【Example】

つぎにこの発明の一実施例について図面を参照しながら
説明する。第1図において、円筒形のガスタンク1の中
には絶縁耐力の大きなガスが封入されており、その中心
に円柱形の高電圧ターミナル2が同心円的に配置されて
いる。このガスタンク1の側壁には電極保持用のハウジ
ング3が取り付けられている。このハウジング3におい
て、可動電極板4が適宜な弾性的保持部材たとえば図示
のベローズ6で移動可能に保持されている。そして、こ
の可動電極板4に対向するように固定電極板5が端子棒
7によって固定されている。この端子棒7はハウジング
3の後部に絶縁板8を介して取り付けられている。 可動電極板4は上述のようにベローズ6によって図の左
右方向つまりガスタンクlの中心に位置する高電圧ター
ミナル2に近づいたり遠ざかったりする方向に移動可能
に保持されており、導電性のベローズ6及びハウジング
3を介してガスタンク1の側壁と同電位に保たれる。そ
のため、この可動電極板4は高電圧ターミナル2に印加
されている高電圧により静電的吸引力を受けて上記の方
向に移動することになる。 今、可動電極板4がガスタンク1の側壁と同じ位置にあ
ると仮定する。ガスタンク1の側壁と高電圧ターミナル
2間に働く静電的吸引力Fは、高電圧ターミナル2の外
径をrl、ガスタンクlの内径をrlとするとそれらの
間の間隔tはt=r2−rl であり、これらの間の電圧がVとすると電界強度Eは、
t<rl、rlのとき良い近似で、E=V/l であるから、 F=(εoE2)/2 = (t oV2) / (2t ”)  [N/m2
1となり、この力Fが可動電極板4に作用してこれを移
動させようとする。すなわち、この力Fで可動電極板4
が高電圧ターミナル2方向に引き寄せられる。 その結果、可動電極板4と固定電極板5との間に形成さ
れた静電容量Cが減少する。この静電容JiCは共振回
路9を形成し、Cの減少に応じて共振周波数が変化する
。たとえばLC共振回路をなしているとき、その共振周
波数fは、 f=1/(2πrrτ) であるから、Cの変化分ΔCとfの変化分Δfとの間に Δf/f=<−172>  (ΔC/C)が成り立つ。 また電極板4.5の間の距離をb、電極板4.5の有効
面積をSとすると、C=εs / b ΔC=−(εs/b2)Δb となる。 そこで、これらの式より ΔfccΔCocFccV2 が成立ち、これよりfτ了から高電圧■を測定できるこ
とが分かる。 そのためこの実施例では、第1図に示すように共振回路
9の共振周波数fの変化を周波数検出回路10で検出す
ることによって高電圧を測定している。なおこの周波数
検出回路10はたとえば周波数検波回路などを用いるこ
とができる。 このように高電圧■の2乗に比例する静電的吸引力Fを
静電容量Cの変化としてとらえているので、特に精密な
抵抗などを必要とせずに高精度な電圧測定が可能となる
。また、共振回路9のQ(尖鋭度)を高めることにより
、共振周波数fの変1ヒを鋭敏にとらえることができる
Next, an embodiment of the present invention will be described with reference to the drawings. In FIG. 1, a cylindrical gas tank 1 is filled with gas having a large dielectric strength, and a cylindrical high voltage terminal 2 is concentrically arranged in the center thereof. A housing 3 for holding electrodes is attached to the side wall of the gas tank 1. In this housing 3, a movable electrode plate 4 is movably held by a suitable elastic holding member, such as the bellows 6 shown. A fixed electrode plate 5 is fixed by a terminal bar 7 so as to face the movable electrode plate 4. This terminal bar 7 is attached to the rear part of the housing 3 via an insulating plate 8. As described above, the movable electrode plate 4 is held by the bellows 6 so as to be movable in the horizontal direction in the figure, that is, in the direction toward and away from the high voltage terminal 2 located at the center of the gas tank 1. It is maintained at the same potential as the side wall of the gas tank 1 via the housing 3. Therefore, the movable electrode plate 4 receives electrostatic attraction force due to the high voltage applied to the high voltage terminal 2 and moves in the above direction. Assume now that the movable electrode plate 4 is in the same position as the side wall of the gas tank 1. The electrostatic attractive force F acting between the side wall of the gas tank 1 and the high voltage terminal 2 is expressed as follows: If the outer diameter of the high voltage terminal 2 is rl and the inner diameter of the gas tank l is rl, then the distance t between them is t=r2-rl. , and if the voltage between these is V, the electric field strength E is
When t<rl, rl, it is a good approximation and E=V/l, so F=(εoE2)/2 = (t oV2) / (2t '') [N/m2
1, and this force F acts on the movable electrode plate 4 and tries to move it. That is, with this force F, the movable electrode plate 4
is attracted towards the two high voltage terminals. As a result, the capacitance C formed between the movable electrode plate 4 and the fixed electrode plate 5 decreases. This capacitance JiC forms a resonant circuit 9, and the resonant frequency changes as C decreases. For example, when forming an LC resonant circuit, its resonant frequency f is f=1/(2πrrτ), so between the change ΔC in C and the change Δf in f, Δf/f=<-172> (ΔC/C) holds true. Further, if the distance between the electrode plates 4.5 is b and the effective area of the electrode plates 4.5 is S, then C=εs/b ΔC=−(εs/b2)Δb. Therefore, from these equations, ΔfccΔCocFccV2 is established, and from this it can be seen that the high voltage ■ can be measured from fτ. Therefore, in this embodiment, the high voltage is measured by detecting the change in the resonant frequency f of the resonant circuit 9 using the frequency detection circuit 10, as shown in FIG. Note that this frequency detection circuit 10 may be, for example, a frequency detection circuit. In this way, since the electrostatic attraction force F, which is proportional to the square of the high voltage ■, is taken as a change in the capacitance C, highly accurate voltage measurement is possible without the need for a particularly precise resistor. . Furthermore, by increasing the Q (sharpness) of the resonant circuit 9, changes in the resonant frequency f can be detected more acutely.

【発明の効果】【Effect of the invention】

この発明の高電圧測定装置によれば、非常にシンプルな
構成で且つ可動部分も少ないのでメインテナンスが簡単
で設置スペースもとらず、しかも高電圧を精度高く測定
することができる。
According to the high voltage measuring device of the present invention, it has a very simple configuration and has few moving parts, so maintenance is easy and does not take up much installation space, and high voltage can be measured with high accuracy.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例の断面図である。 1・・・ガスタンク、2・・・高電圧ターミナル、3・
・・電極保持用ハウジング、4・・・可動電極板1.5
・・・固定電極板、6・・・ベローズ、7・・・端子棒
、8・・・絶縁板、9・・・共振回路、10・・・周波
数検出回路。
FIG. 1 is a sectional view of one embodiment of the present invention. 1... Gas tank, 2... High voltage terminal, 3...
... Electrode holding housing, 4... Movable electrode plate 1.5
... Fixed electrode plate, 6... Bellows, 7... Terminal bar, 8... Insulating plate, 9... Resonance circuit, 10... Frequency detection circuit.

Claims (1)

【特許請求の範囲】[Claims] (1)高電圧の印加された部分より静電的吸引力を受け
て移動するように保持された可動電極板と、該可動電極
板と対向するよう保持される固定電極板と、この可動電
極板と固定電極板との間で形成される静電容量を含んで
構成される共振回路と、該共振回路の共振周波数変化を
検出する回路とを備えることを特徴とする高電圧測定装
置。
(1) A movable electrode plate held so as to be moved by electrostatic attraction from a portion to which a high voltage is applied, a fixed electrode plate held so as to face the movable electrode plate, and this movable electrode A high voltage measurement device comprising: a resonant circuit including a capacitance formed between a plate and a fixed electrode plate; and a circuit for detecting a change in the resonant frequency of the resonant circuit.
JP1312167A 1989-11-30 1989-11-30 High voltage measuring device Pending JPH03172771A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1312167A JPH03172771A (en) 1989-11-30 1989-11-30 High voltage measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1312167A JPH03172771A (en) 1989-11-30 1989-11-30 High voltage measuring device

Publications (1)

Publication Number Publication Date
JPH03172771A true JPH03172771A (en) 1991-07-26

Family

ID=18026042

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1312167A Pending JPH03172771A (en) 1989-11-30 1989-11-30 High voltage measuring device

Country Status (1)

Country Link
JP (1) JPH03172771A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104977449A (en) * 2015-07-20 2015-10-14 三峡大学 Optical voltage transformer based on SF6 coaxial capacitance voltage divider

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104977449A (en) * 2015-07-20 2015-10-14 三峡大学 Optical voltage transformer based on SF6 coaxial capacitance voltage divider

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