JPH03167504A - Double image element - Google Patents

Double image element

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Publication number
JPH03167504A
JPH03167504A JP30729989A JP30729989A JPH03167504A JP H03167504 A JPH03167504 A JP H03167504A JP 30729989 A JP30729989 A JP 30729989A JP 30729989 A JP30729989 A JP 30729989A JP H03167504 A JPH03167504 A JP H03167504A
Authority
JP
Japan
Prior art keywords
optical axis
crystal
plane
double
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30729989A
Other languages
Japanese (ja)
Inventor
Mitsuru Fujita
満 藤田
Hiroshi Matsumoto
浩 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Communication Equipment Co Ltd
Original Assignee
Toyo Communication Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Communication Equipment Co Ltd filed Critical Toyo Communication Equipment Co Ltd
Priority to JP30729989A priority Critical patent/JPH03167504A/en
Publication of JPH03167504A publication Critical patent/JPH03167504A/en
Pending legal-status Critical Current

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  • Polarising Elements (AREA)

Abstract

PURPOSE:To constitute the optical system without using costly optical elements by inclining the optical axis of the crystal bodies on the incident surface side in the double image prism formed by joining the crystal bodies by 45 deg. with a horizontal reference plane and paralleling the joint boundary line of the two crystal bodies appearing when the prism is cut at the plane orthogonal with the incident optical axis with the horizontal reference plane. CONSTITUTION:The optical axis of the crystal body 20a on the incident surface side has a prescribed angle theta (theta=45 deg.) with the horizontal reference plane 22 and the 2nd crystal body is formed by joining the two crystal bodies so as to intersect with the plane inclusive of the optical axis of the 1st crystal body and the optical axis of the incident light intersect with each other. The joint boundary line 24 of the incident surface side crystal body 20a and exit surface side crystal body 20b having the optical axes orthogonal with each other is paralleled with the horizontal reference plane 22. The optical system is easily constituted without using costly optical parts or holders or without forming the reference plane on the double image prism.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は光磁気ディスク、或は光ディスク用光ヘッドに
関し、特に複像プリズムを用いた光ヘッドの構成及び該
光ヘッドに用いる複像子の構成に関する. (従来技術) 周知の如く、光ディスク及び光磁気ディスクは光の熱効
果を用いて磁区を書き込んで情報信号を記録し、磁気光
学効果を用いてデータを再生するもので、高密度大容量
記録を非接触で行うことができ、近年、磁気テープ及び
磁気ディスクに替わる記録媒体として用いられつつある
. 第4図は光磁気ディスク装置の記録再生用光学系の一例
を示す図であって、半導体レーザ等の光源より出射した
光をコリメートレンズ2及びビームスブリッタ3を介し
て直線偏光に変換すると共に該直線偏光を対物レンズ4
を介して垂直磁化膜を有する記録媒体5に照射する. 記録媒体5に照射された直線偏光は該記録媒体5の表面
において反射し、対物レンズ4を介して再びビームスブ
リ゛ツタ3に入射するが該ビームスブリッタ3の接合面
3aにおいて反射することにより次段のビームスブリッ
タ6に出射される。
DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a magneto-optical disk or an optical head for an optical disk, and in particular to the structure of an optical head using a double-image prism and the structure of a double-image element used in the optical head. Regarding the configuration. (Prior art) As is well known, optical disks and magneto-optical disks use the thermal effect of light to write magnetic domains and record information signals, and use the magneto-optic effect to reproduce data, and are capable of high-density, large-capacity recording. It can be performed without contact, and in recent years it has been used as a recording medium to replace magnetic tape and magnetic disks. FIG. 4 is a diagram showing an example of a recording/reproducing optical system of a magneto-optical disk device, which converts light emitted from a light source such as a semiconductor laser into linearly polarized light via a collimating lens 2 and a beam splitter 3, and also converts it into linearly polarized light. Objective lens 4 for linearly polarized light
The recording medium 5 having a perpendicular magnetization film is irradiated with the irradiation light through the perpendicularly magnetized film. The linearly polarized light irradiated onto the recording medium 5 is reflected on the surface of the recording medium 5 and enters the beam splitter 3 again via the objective lens 4, but is reflected at the joint surface 3a of the beam splitter 3 and is transmitted to the next stage. The beam is emitted to the beam splitter 6.

該ビームスブリッタ6に入射した光線のうち一部はその
接合面6aに設けた誘電体膜において反Qf L、サー
ボ制御用のセンサ7により検知され、一方、該ビームス
ブリッタ6を透過した透過光は次段に設けられたレンズ
8を介してl/2波長板9に入射し、該172波長板9
において、次段に設けた複像プリズムlOの入射面側の
結晶体の光学軸に対し45゜偏波面が傾くよう偏波面が
回転し、次段の複像プリズムlOに出射する. 該複像プリズム(1)に入射した光線はその偏波面が互
いに直行する2つの成分の常光線O、異常光線Eに分離
出射することにより出射面に配置されたフォトダイオー
ドl1、11により検出され、両出力の差を出力差検出
器12にて求めることにより、前記記録媒体5の情報を
読み取ることができる。
A part of the light beam incident on the beam splitter 6 is detected by a sensor 7 for anti-QfL and servo control on the dielectric film provided on the joint surface 6a, while the transmitted light that has passed through the beam splitter 6 is detected by the sensor 7 for servo control. It enters the 1/2 wavelength plate 9 through the lens 8 provided at the next stage, and the 172-wave plate 9
In this case, the plane of polarization is rotated so that the plane of polarization is tilted by 45 degrees with respect to the optical axis of the crystal on the incident surface side of the double-image prism lO provided in the next stage, and the light is emitted to the double-image prism lO in the next stage. The light beam incident on the double-image prism (1) is separated into two components, an ordinary ray O and an extraordinary ray E, whose polarization planes are perpendicular to each other, and then emitted, and then detected by photodiodes l1 and 11 arranged on the output surface. By determining the difference between the two outputs using the output difference detector 12, the information on the recording medium 5 can be read.

例えば、データが記録されている部分において反射した
光線は、その偏波面がカー効果により照射前の直線偏光
の基準偏波面と比較して一般にl0前後回転しているた
め、複像プリズムに入射する光綴の偏波面は45゜±l
1となり、その結果、複像プリズムを出射する常光線及
び異常光線の出力に変動が生じ、前記出力差検出器12
には前記変動に基づく出力が現れる. また,データが記録されていない部分において反射した
光線はその偏波面が回転せず、従って、複像プリズムI
Oに入射する直#!偏先の偏波面は45゜となるため,
フォトダイオード11には等しい出力が検出され、その
結果、前記出力差検出器l2には出力は現れない。
For example, the plane of polarization of the light beam reflected at the area where data is recorded is generally rotated by around 10 due to the Kerr effect compared to the reference plane of polarization of linearly polarized light before irradiation, so it enters the double-image prism. The polarization plane of optical binding is 45°±l
1, and as a result, the output of the ordinary ray and extraordinary ray emitted from the double-image prism fluctuates, and the output difference detector 12
An output based on the above fluctuation appears. In addition, the plane of polarization of the light beam reflected at the part where no data is recorded does not rotate, so the double-image prism I
Direct # incident on O! Since the polarization plane of the deflection is 45 degrees,
Equal outputs are detected on the photodiodes 11, so that no output appears on the output difference detector l2.

このように差動型の偏波面回転量検出光学系は外部より
゜のノイズ等の影響を補償することができるため一般的
に広く用いられている方式である。
As described above, the differential type polarization plane rotation detection optical system is a generally widely used system because it can compensate for the influence of external noise.

しかし、上述したように差動型の光学系を構成する際に
は複像プリズム(1)において入射する直線偏光を等出
力で2分割せしめるために、前述した如く複像プリズム
(1)に入射する光線の偏波面を該復像プリズム(1)
の入射面側の結晶体の光学軸に対し45“傾けて照射す
る必要があり,そのため複像プリズムの前段において1
72波長板等の光学素子を必要とし、光学系が高価且つ
大型となってしまう問題点があった. またこの問題点を除去するために第5図(alに示すご
とく複像プリズム(1)の入射面側結晶体の光学軸を入
射直線偏光の偏波面に対して45゜傾斜した状態となる
ように該複像プリズム(1)をホルダーl4に#1置す
るか、或は第5図(b)に示す如くホルダー12を用い
る代わりに複像プリズムに大lt面側結晶体の光学軸と
45゜の角度を有す基準面(1)aを設け、該基準面(
1)aを水平に接地せしめることにより、前記ホルダー
に載置した場合と同様に入射直線偏光の偏波面に対し該
複像プリズムの入射面側の結晶体の光学軸を45°傾か
せることが可能となる. しかしながら、前述した如き手法を持ちいた場合、複像
プリズムを載置するためのホルダーを必要とするか或は
該複像プリズムに基準面を設けなくてはならず、部品点
数の増加或はプリズム製造のための工数が増加し、コス
トが増加すると云う問題点があり、また,該複像プリズ
ムを出射する光線は入射面側結晶体光学軸と入射光の光
軸とを含む面と同一面上に出力されることになり、した
がって、該出射光に合わせてセンサ11を傾けて設置し
なくてはならないという問題点があった。
However, as mentioned above, when configuring a differential optical system, in order to split the linearly polarized light incident on the double-image prism (1) into two with equal output, The polarization plane of the light beam is
It is necessary to irradiate at an angle of 45" with respect to the optical axis of the crystal on the incident surface side of the prism.
This requires an optical element such as a 72-wavelength plate, which has the problem of making the optical system expensive and large. In order to eliminate this problem, the optical axis of the crystal on the incident surface side of the double-image prism (1) is tilted at 45 degrees with respect to the polarization plane of the incident linearly polarized light, as shown in Figure 5 (al). Alternatively, instead of using the holder 12 as shown in FIG. 5(b), place the double-image prism (1) #1 on the holder l4, or instead of using the holder 12 as shown in FIG. A reference surface (1) a having an angle of .degree. is provided, and the reference surface (
1) By grounding a horizontally, the optical axis of the crystal on the incident surface side of the double-image prism can be tilted by 45 degrees with respect to the polarization plane of the incident linearly polarized light, similar to when placed on the holder. It becomes possible. However, when using the above-mentioned method, a holder is required to place the double-image prism, or a reference plane must be provided on the double-image prism, which increases the number of parts or increases the number of prisms. There is a problem that the number of man-hours for manufacturing increases and the cost increases, and the light beam exiting from the double-image prism is in the same plane as the plane containing the optical axis of the crystal on the side of incidence and the optical axis of the incident light. Therefore, there was a problem in that the sensor 11 had to be installed at an angle to match the emitted light.

(発明の目的) 本発明は上述したごとき従来の問題点に鑑みなされたも
のであって、高価な光学部品或はホルダーを用いず、ま
た複像プリズムに基準面を形成す)ることなく、容易に
光ディスク、光磁気ディスク等の光学系を構成すること
ができる複像プリズム及び該複像プリズムを用いた偏波
面回転量検出光学系を提供することを目的とする. (発明の概要) この目的を達成するために゛本発明に係る複像プリズム
は、少なくとも2個の結晶体を接合した複像プリズムに
おいて、入射面側の結晶体の光学軸を水平基準面に対し
θ(但し、0゜くθ〈90゜)だけ傾けると共に,入q
1光の光軸と該入射面側の結晶体の光学軸とを含む面が
前記光軸と他の少なくとも一の結晶体の光学軸とを含む
平面に対して直角であり、且つこのプリズムをこれに対
する入射光軸に直交する平面で切断した際,現れる両結
晶体の結合境界線が前記水平基準面に対し平行であるこ
とを特徴とし、また本発明に所かる偏波而回転量検出光
学系は前記複像プリズムを用いて構成したことを特徴と
する. (実施例) 以下、図面に示した実施例に基づいて、本発明を詳細に
説明する. 第1図fatは本発明に係る複像プリズムを示す図であ
って、同図において20aは光線の入射面側結晶体、2
0bは出射面側結晶体であって、同図に示すごとく入射
面制の結晶体20aの光学軸は水平基準面22に対し所
定の角度θ(θ=45゜)を有しており、また、第2の
結晶体は前記第1の結晶体の光学軸と入射光の光軸とを
含む面に対し直交するよう2つの結晶体を接合したもの
である. このように構成した複像プリズムは従来より
用いられていた、ウオーラストンプリズムと同様に入q
−t光線を常光IIOと異常光綿Eとに分離せしめる機
能を有す。
(Object of the Invention) The present invention has been devised in view of the problems of the conventional art as described above, and it is possible to achieve an optical system without using expensive optical parts or holders, and without forming a reference surface on a double-image prism. The object of the present invention is to provide a double-image prism that can easily configure an optical system for an optical disk, a magneto-optical disk, etc., and an optical system for detecting the amount of rotation of the plane of polarization using the double-image prism. (Summary of the Invention) In order to achieve this object, a double-view prism according to the present invention has a double-view prism in which at least two crystal bodies are joined, and the optical axis of the crystal body on the incident surface side is aligned with a horizontal reference plane. In addition to tilting by θ (however, 0° minus θ<90°),
A plane containing the optical axis of one light beam and the optical axis of the crystal body on the side of the incident surface is perpendicular to a plane containing the optical axis and the optical axis of at least one other crystal body, and this prism is The polarization rotation amount detection optical system according to the present invention is characterized in that, when cut along a plane perpendicular to the incident optical axis, the bonding boundary line of both crystals that appears is parallel to the horizontal reference plane. The system is characterized by being constructed using the above-mentioned double-image prism. (Example) The present invention will be described in detail below based on the example shown in the drawings. FIG. 1 fat is a diagram showing a double-image prism according to the present invention, in which 20a is a crystal body on the side of the light incident surface;
0b is a crystal body on the exit surface side, and as shown in the same figure, the optical axis of the crystal body 20a with an incident plane structure has a predetermined angle θ (θ=45°) with respect to the horizontal reference plane 22, and , the second crystal body is obtained by joining two crystal bodies so as to be perpendicular to a plane containing the optical axis of the first crystal body and the optical axis of the incident light. The double-image prism configured in this way has an input q.
- It has a function of separating the t ray into ordinary light IIO and extraordinary light E.

即ち、入射面側の結晶体に垂直に入射した光は常光線O
、異常光線E共に同一方向に進むが、出射面側の結晶体
に入射すると,常光線Oと異常光線Eとに分離して出射
される。
That is, the light incident perpendicularly to the crystal on the side of incidence is the ordinary ray O
, extraordinary ray E travel in the same direction, but when they enter the crystal on the exit surface side, they are separated into ordinary ray O and extraordinary ray E and are emitted.

第l図+blは第1図(atに示した複像プリズムの入
射光軸に直交する平面2lで切断した場合の断面図であ
る. 即ち、光学軸が互いに直交する入射面側結晶体20aと
出射面側結晶体20bとの接合境界線24は水平基準面
22に対し平行である.第2図は前記第1図に示した複
像プリズムを光磁気ディスク装置の記録再生光学系に用
いた場合の構成を示した図であって、前記第4図と同一
の符合は同一の意味を持つものとし、その説明を省略す
る. 即ち、前記第4図と異なる点は複像プリズム20として
前記第1図に示したごとき複像プリズムを用いることに
より従来必要であったl/2波長板を除き、更に入射光
線の偏波面に対し複像プリズムの入射面側結晶体の光学
軸を45゜傾けるためのホルダー或は基準端面を必要と
せず光学系を構成した点である。
FIG. 1+bl is a cross-sectional view taken along a plane 2l perpendicular to the incident optical axis of the double-image prism shown in FIG. The junction boundary line 24 with the output surface side crystal body 20b is parallel to the horizontal reference plane 22. Fig. 2 shows an example in which the double-image prism shown in Fig. 1 is used in a recording/reproducing optical system of a magneto-optical disk device. The same reference numerals as those in FIG. 4 have the same meanings, and the explanation thereof will be omitted. That is, the difference from FIG. 4 is that the double-image prism 20 is By using a double-image prism as shown in Fig. 1, the l/2 wavelength plate that was conventionally required can be removed, and the optical axis of the crystal on the side of the entrance surface of the double-image prism can be set at 45 degrees with respect to the polarization plane of the incident light beam. The optical system is constructed without requiring a holder for tilting or a reference end face.

このように構成した偏波面回転量検出光学系に於いて、
ビームスプリッタ6を出射した紙面に平行且つ入射光軸
に直交する偏波面を有す光線は次段の複像プリズム20
に入射するが、該入射光の個波面と前記複像プリズム2
0の入射面側結晶体20aの光学軸とが45″′の偏差
を有しているため、詠複像プリズムを出射する常光線O
及び異常光ill Eの2成分の光線は等出力となる。
In the polarization plane rotation detecting optical system configured in this way,
The light beam, which is emitted from the beam splitter 6 and has a polarization plane parallel to the plane of the paper and perpendicular to the incident optical axis, is transmitted to the next stage double-image prism 20.
The individual wavefront of the incident light and the double image prism 2
Since the optical axis of the crystal body 20a on the incident surface side of O has a deviation of 45'', the ordinary ray O exiting the double-image prism
The two component light beams of the abnormal light ill E have equal output.

しかも、複像プリズム20を出射する2光線は該複像プ
リズム20の端面20cに対して平行に出射するため、
該出射光を検出するセンサ11.11を傾けて設置する
必要がない. 即ち、従来の複像プリズム、例えばウオーラストンプリ
ズムの入射面側の結晶体の光学軸は水平基準面に対し直
角であり、また、第2の結晶体の光学軸は水平基準面に
対し平行且つ入射光軸に対し直交するよう構成されてい
たため、入射光綿を:なプリズムに入射せしめる際には
172波長板を用いて入射光線の偏波面を複像子の入射
面側の結晶体の光学軸に対して45゜回転せしめなくて
はならなかったものを本発明の複像プリズムを用いれば
上述したごとき光学素子を用いることなく光学系を構成
することができる。
Moreover, since the two light beams exiting the double-image prism 20 are parallel to the end surface 20c of the double-image prism 20,
There is no need to tilt and install the sensor 11.11 that detects the emitted light. That is, in a conventional double-image prism, for example, a Wallaston prism, the optical axis of the crystal on the incident surface side is perpendicular to the horizontal reference plane, and the optical axis of the second crystal is parallel to the horizontal reference plane. In addition, since it was configured to be orthogonal to the incident optical axis, when the incident light beam is made to enter the prism, a 172-wave plate is used to change the plane of polarization of the incident light beam to the crystal body on the incident surface side of the double image element. By using the double-image prism of the present invention, an optical system that had to be rotated by 45 degrees with respect to the optical axis can be constructed without using the above-mentioned optical elements.

第3図(alは本発明に係る複像プリズムの他の実施例
を示した図であって、前記第1図と異なる点は入q;t
面側結晶体20aと出射面flll結晶体20bとの接
合面において透過率及び反射率が常光線0及び異常光綿
E共に等しくなる機能を有する誘電体多層膜26を形成
した点である。
FIG. 3 (al is a diagram showing another embodiment of the double-image prism according to the present invention, and the points different from the above-mentioned FIG. 1 are inputs q; t;
The point is that a dielectric multilayer film 26 having the function of making the transmittance and reflectance equal for both the ordinary ray 0 and the extraordinary ray E is formed at the joint surface between the surface-side crystal body 20a and the output surface full crystal body 20b.

従って、入射直線偏光は該誘電体多層112 2 6に
おいて反射する常光線O、異常光線E成分を含む光線と
,出射面側結晶体20bを出射する偏波面が互いに直交
する常光線O及び異常光線Eとの3成分に分離して出目
すする。
Therefore, the incident linearly polarized light includes the ordinary ray O and the extraordinary ray E component reflected by the dielectric multilayer 112 2 6, and the ordinary ray O and the extraordinary ray whose polarization planes are orthogonal to each other and exit from the output surface side crystal body 20b. Separate it into three components with E and roll.

このように構成した複像プリズムは入射した光線の一部
な註誘電体多層膜26において反射することが可能なた
め、前述したごとき備波面回転量検出光学系を構成する
場合には、第3図(bl に示す如くサーボ制御用のた
めに高価なビームスプリツタを用いることなくその出力
を得ることができ、光学系を更に簡易に構成することが
できる。
Since the double-image prism configured in this way can reflect a portion of the incident light beam on the dielectric multilayer film 26, when configuring the wavefront rotation detection optical system as described above, the third As shown in Figure (bl), the output can be obtained without using an expensive beam splitter for servo control, and the optical system can be configured more simply.

尚,本発明の実施例においては直線偏光の偏波面を45
゜回転せしめるためにI/2波長板を用いた実施例を挙
げて説明したが、これに限定するものでな<45゜旋光
子を用いても良いことは明らかである。
In addition, in the embodiment of the present invention, the polarization plane of linearly polarized light is set to 45
Although the embodiment has been described in which an I/2 wavelength plate is used for the rotation, the present invention is not limited to this, and it is clear that a <45° optical rotator may be used.

(発明の効果) 本発明は上述した如く構成し且つ機能するものであるか
ら、偏波面回転量検出光学系にl/2波長板或は45゜
旋光子を用いることなく、また複像プリズムを保持する
ためのホルダー或は複像プリズムを設置するための新た
な基準端面を必要とせず、更には出射光を検出するため
のセンサを傾けて1設置する必要がないため安価且つ小
型に光学系を構成する上で著しい効果を発揮する.
(Effects of the Invention) Since the present invention is constructed and functions as described above, the optical system for detecting the amount of rotation of the polarization plane does not require the use of a 1/2 wavelength plate or a 45° optical rotator, and a double-image prism. There is no need for a holder to hold it or a new reference end surface for installing the double-image prism, and there is no need to tilt the sensor to detect the emitted light and install it, making the optical system inexpensive and compact. It is extremely effective in configuring the system.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(al (blは本発明に係る複像プリズムの構
成を示す斜視図及び断面図、第2図は本発明に係る複像
プリズムを用いて構成した偏波面回転量検出光学系を示
す図、第3図1B)は本発明に係る複像プリズムの他の
実施例を示す図、第3図(blは本発明に係る複像プリ
ズムを用いて構成した偏波面回転量検出光学系を示す図
、第4図は光磁気ディスク装置の記録再生用光学系の一
例を示す図、第5図1a) lblは従来用いられてい
た複像プリズムの構成を示す図である。 1・・・光源,2・・・コリメートレンズ、3、6・・
・ビームスプリツタ、4・・・対物レンズ、5・・・記
憶媒体、7・・・センサ、8・・・レンズ、9・・・l
/2波長板、(1)・・・複像プリズム、loa・・・
基準面、11・・・フォトダイオード、l2・・・出力
差検出器、20・・・複像プリズム、20a・・・入Q
{面側結晶体、 20b・・嘲出射.面側結晶体、22・・・水平基準面
、24・・・接合境界綿、26・・・誘電体多Ig膜
FIG. 1 (al (bl) is a perspective view and a cross-sectional view showing the configuration of a double-image prism according to the present invention, and FIG. 2 is a polarization plane rotation detecting optical system constructed using the double-image prism according to the present invention. 1B) is a diagram showing another embodiment of the double-image prism according to the present invention, and FIG. 4 is a diagram showing an example of a recording/reproducing optical system of a magneto-optical disk device, and FIG. 5 is a diagram showing the configuration of a conventionally used double-image prism. 1... Light source, 2...Collimating lens, 3, 6...
・Beam splitter, 4... Objective lens, 5... Storage medium, 7... Sensor, 8... Lens, 9... l
/2 wavelength plate, (1)...double image prism, loa...
Reference plane, 11... Photodiode, l2... Output difference detector, 20... Double image prism, 20a... Input Q
{Face side crystal body, 20b... mocking emission. Surface side crystal body, 22... Horizontal reference plane, 24... Junction boundary cotton, 26... Dielectric multi-Ig film

Claims (2)

【特許請求の範囲】[Claims] (1)少なくとも2個の結晶体を接合した複像プリズム
において、入射面側の結晶体の光学軸を水平基準面に対
しθ(θ=45゜)だけ傾けると共に、入射光の光軸と
該入射面側の結晶体の光学軸とを含む面が前記光軸と他
の少なくとも一の結晶体の光学軸とを含む平面に対して
直角であり、且つこのプリズムをこれに対する入射光軸
に直交する平面で切断した際、現れる両結晶体の接合境
界線が前記水平基準面に対して平行であることを特徴と
するウォーラストンプリズム。
(1) In a double-image prism in which at least two crystal bodies are joined, the optical axis of the crystal body on the incident surface side is tilted by θ (θ = 45°) with respect to the horizontal reference plane, and the optical axis of the incident light is aligned with the optical axis of the incident light. a plane containing the optical axis of the crystal on the side of incidence is perpendicular to a plane containing the optical axis and the optical axis of at least one other crystal, and the prism is perpendicular to the optical axis of incidence thereon; A Wollaston prism characterized in that, when cut along a plane where the prism is cut, a joining boundary line between both crystal bodies that appears is parallel to the horizontal reference plane.
(2)特許請求の範囲第1項記載のウォーラストンプリ
ズムを用いたことを特徴とする光磁気効果による偏波面
回転量検出光学系。
(2) An optical system for detecting the amount of rotation of the plane of polarization using the magneto-optical effect, characterized by using the Wollaston prism according to claim 1.
JP30729989A 1989-11-27 1989-11-27 Double image element Pending JPH03167504A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30729989A JPH03167504A (en) 1989-11-27 1989-11-27 Double image element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30729989A JPH03167504A (en) 1989-11-27 1989-11-27 Double image element

Publications (1)

Publication Number Publication Date
JPH03167504A true JPH03167504A (en) 1991-07-19

Family

ID=17967472

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30729989A Pending JPH03167504A (en) 1989-11-27 1989-11-27 Double image element

Country Status (1)

Country Link
JP (1) JPH03167504A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7317528B2 (en) 2004-07-19 2008-01-08 Asml Netherlands B.V. Ellipsometer, measurement device and method, and lithographic apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7317528B2 (en) 2004-07-19 2008-01-08 Asml Netherlands B.V. Ellipsometer, measurement device and method, and lithographic apparatus and method

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