JPH03165395A - Magnetic bubble memory element - Google Patents

Magnetic bubble memory element

Info

Publication number
JPH03165395A
JPH03165395A JP1302153A JP30215389A JPH03165395A JP H03165395 A JPH03165395 A JP H03165395A JP 1302153 A JP1302153 A JP 1302153A JP 30215389 A JP30215389 A JP 30215389A JP H03165395 A JPH03165395 A JP H03165395A
Authority
JP
Japan
Prior art keywords
transfer path
width
detection line
thin film
line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1302153A
Other languages
Japanese (ja)
Inventor
Masatoshi Takeshita
正敏 竹下
Hideo Chigasaki
千ケ崎 英夫
Takashi Toyooka
孝資 豊岡
Minoru Hiroshima
實 廣島
Toshihiro Sato
敏浩 佐藤
Makoto Suzuki
良 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Hitachi Consumer Electronics Co Ltd
Japan Display Inc
Original Assignee
Hitachi Device Engineering Co Ltd
Hitachi Ltd
Hitachi Consumer Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Device Engineering Co Ltd, Hitachi Ltd, Hitachi Consumer Electronics Co Ltd filed Critical Hitachi Device Engineering Co Ltd
Priority to JP1302153A priority Critical patent/JPH03165395A/en
Publication of JPH03165395A publication Critical patent/JPH03165395A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To reduce heat generation caused by the current of a detecting line by enlarging the line width of a soft magnetic substance thin film detecting line near he crossing of a transfer path rather than the line width of the other soft magnetic substance thin film detecting line or arranging the detecting line while being divided into more than two lines. CONSTITUTION:A hair pin-shaped conductor 3 is provided to enlarge a magnetic bubble 2 on an ion injection transfer path 1 and a soft magnetic substance thin film detecting line 4 is provided to convert the leaked magnetic field of a stripe-shaped magnetic domain enlarging the magnetic bubble to an electric signal by utilizing a magneto-resistance effect. Width W2 of the detecting line 4 near the crossing of the transfer path 1 is enlarged rather than width W1 of the detecting line in the other area. Namely, the width W2 is set to 5 mum and the width W1 is set to 1.5 mum. Thus, a detector bias magnetic field margin can be almost equal to the bias magnetic field margin of the major line transfer path 1 and the common margin can be enlarged.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はイオン打込み転送路を用いた磁気バブルメモリ
素子に係わり、特に磁気バブルをコンダクタパターンで
拡大し、軟磁性体薄膜検出線で検出する磁気バブルメモ
リ素子に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a magnetic bubble memory element using an ion implantation transfer path, and in particular, a magnetic bubble is expanded with a conductor pattern and detected with a soft magnetic thin film detection line. The present invention relates to a magnetic bubble memory device.

〔従来の技術〕[Conventional technology]

イオン打込み転送路を用いた磁気バブルメモリ素子では
、発生器、ゲートおよび検出及器を含む部分を軟磁性体
転送路で構成するハイブリッド方式と、これらの機能部
をコンダクタパターンおよび検出線用の薄膜軟磁性体パ
ターンとで植成するイオン打込み機能部方式とが使われ
ている。
A magnetic bubble memory element using an ion implantation transfer path uses a hybrid method in which the generator, gate, and detector are constructed using a soft magnetic transfer path, and these functional parts are constructed using a thin film for the conductor pattern and detection line. An ion implantation functional part method in which a soft magnetic material pattern is implanted is used.

情報の記憶を行うマイナループ部の転送路周期を3μm
以下とするには0.8μm以下のバブルを使う必要があ
る。この場合には軟磁性体転送路の特性が不十分なため
、ハイブリッド方式よりもイオン打込み機能部方式が有
利である。
The transfer path period of the minor loop section that stores information is 3 μm.
To make it less than 0.8 μm, it is necessary to use bubbles of 0.8 μm or less. In this case, since the characteristics of the soft magnetic material transfer path are insufficient, the ion implantation function method is more advantageous than the hybrid method.

イオン打込み機能部を用いたメモリ素子の検出器は、ビ
ー・ニス・ティー・ジェー第59巻、2号、(1980
年)第229ページから第257ページ(BSTJ  
νoQ 、 59. Nn2. (Feb、 1980
)pP229−257)に記載されているように、また
、第3図に示すようにイオン打込み転送路1上の磁気バ
ブル2を拡大するヘアピン型コンダクタにより構成する
ストレッチャ3と、磁気抵抗効果を利用して磁気バブル
を拡大したストリップ状磁区の漏洩磁界を電気信号に変
換する軟磁性体検出線4とから構成する。磁気バブル2
はイオン打込み転送路1上を転送され、カスプ5に存在
する時にストレッチャ3に第4図に示したパルス電流6
を印加することによりストレッチャ3のヘアピンコンダ
クタ内のバイアス磁界を下げ、磁気バブル2を伸長して
ストリップ状磁区に変える。ストリップ状磁区はヘアピ
ンコンダクタのループ内で伸長する。
A memory device detector using an ion implantation function is described in B.N.T.J. Vol. 59, No. 2, (1980).
) pages 229 to 257 (BSTJ
νoQ, 59. Nn2. (Feb. 1980
) pP229-257), and as shown in FIG. 3, a stretcher 3 composed of a hairpin type conductor that expands the magnetic bubble 2 on the ion implantation transfer path 1 and a magnetoresistive effect are utilized. The soft magnetic body detection line 4 converts the leakage magnetic field of the strip-shaped magnetic domain, which is an enlarged magnetic bubble, into an electric signal. magnetic bubble 2
is transferred on the ion implantation transfer path 1, and when present at the cusp 5, a pulse current 6 shown in FIG. 4 is applied to the stretcher 3.
By applying , the bias magnetic field in the hairpin conductor of the stretcher 3 is lowered, and the magnetic bubble 2 is expanded and changed into a strip-like magnetic domain. Strip-like domains extend within the loops of the hairpin conductor.

そして、そのストリップ状磁区の漏洩磁界により検出線
4の磁化が変化する。この変化は検出線4に1〜4mA
程度の直流電流を流しておくことにより、軟磁性体の磁
気抵抗効果を用いて数mVから数十mVの振幅を有する
電圧信号として取り出すことができる。検出を終了した
後、伸長した磁区はパルス電流6の除去により、縮小さ
れ元の磁気バブル2に戻される。非破壊読出しではこの
磁気バブル2をさらに転送させる必要がある。破壊読出
しではパルス電流6を除去した後、第4図に示すパルス
電流6と逆方向のパルス電圧7を流して磁気バブル2を
カスプ5近傍が消滅させる。
Then, the magnetization of the detection line 4 changes due to the leakage magnetic field of the strip-shaped magnetic domain. This change is 1 to 4 mA to the detection line 4.
By flowing a DC current of about 100 volts, it is possible to extract a voltage signal having an amplitude of several mV to several tens of mV using the magnetoresistive effect of the soft magnetic material. After the detection is completed, the elongated magnetic domain is reduced and returned to the original magnetic bubble 2 by removing the pulse current 6. For non-destructive reading, it is necessary to further transfer this magnetic bubble 2. In destructive reading, after removing the pulse current 6, a pulse voltage 7 in the opposite direction to the pulse current 6 shown in FIG. 4 is applied to cause the magnetic bubble 2 near the cusp 5 to disappear.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

第3図に示した上記従来技術に従った検出器では、検出
線パターン4がイオン打込み転送路1のカスプ5上を交
差して配置されている。ところで、検出線パターン4に
は常時数mAの直流電流が流れているために、ジュール
熱により発熱し、この影響により検出線下のバブルガー
ネット膜も温度上昇する。このため、バブル消減磁界(
Ho )等のバブル材料特性が検出線下近傍では低磁界
側にシフトする。したがって、検出線4下に至った磁気
バブルの転送特性は低バイアス磁界側にシフトし、他の
機能部のバイアス磁界特性とのずれを生じるために、総
合動作バイアス磁界マージンが低下する問題があった。
In the detector according to the prior art shown in FIG. 3, the detection line pattern 4 is arranged to cross over the cusp 5 of the ion implantation transfer path 1. By the way, since a direct current of several mA is constantly flowing through the detection line pattern 4, heat is generated due to Joule heat, and the temperature of the bubble garnet film under the detection line also rises due to this influence. For this reason, the bubble extinguishing and demagnetizing field (
Bubble material properties such as Ho) shift to the lower magnetic field side near the detection line. Therefore, the transfer characteristics of the magnetic bubbles that have reached below the detection line 4 shift to the low bias magnetic field side, causing a deviation from the bias magnetic field characteristics of other functional parts, resulting in a problem that the overall operating bias magnetic field margin decreases. Ta.

本発明の目的は、イオン打込み転送路と交差する近傍の
検出線の発熱を低減し、良好な総合動作バイアス磁界マ
ージンをもつ磁気バブルメモリ素子を提供することにあ
る。
SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetic bubble memory element that reduces heat generation in the vicinity of a detection line that intersects with an ion implantation transfer path and has a good overall operating bias magnetic field margin.

〔課題を解決するための手段〕[Means to solve the problem]

上記目的は、イオン打込み転送路と交差する領域近傍の
検出線パターン幅を、他の部分より大きくする、もしく
は、イオン打込み転送路と交差する領域近傍の検出線を
2分割以上にすることにより達成される。
The above objective can be achieved by making the detection line pattern width near the area intersecting the ion implantation transfer path larger than other parts, or by dividing the detection line near the area intersecting the ion implantation transfer path into two or more. be done.

〔作用〕[Effect]

イオン打込み転送路と交差する近傍の軟磁性体から成る
検出線の幅を他の検出線領域に比べて大きくする。これ
により、検出線電流を通電した場合に、検出線幅を大き
くした領域は他の検出線領域に比べて電流密度が低減す
る。したがって、検出線幅を大きくした領域のジュール
熱は他の検出線領域に比べて低減する。よって、イオン
打込み転送路と交差する近傍の検出線の影響による温度
上昇を低減でき、バイアス磁界マージンへの悪影響を低
減できる。もう一つは、イオン打込み転送路と交差する
近傍の軟磁性体から成る検出線を2分割以上にする。こ
れにより、検出線電流はイオン打込み転送路と交差する
近傍の検出線には並列に流れる。したがって、イオン打
込み転送路と交差する近傍の検出線領域の電流密度は、
他の検出線領域に比べて低減できる。よって、イオン打
込み転送路と交差する近傍の検出線発熱の影響による温
度上昇を低減でき、バイアス磁界マージンへの悪影響を
低減できる。
The width of the detection line made of soft magnetic material in the vicinity intersecting the ion implantation transfer path is made larger than the width of other detection line regions. As a result, when a detection line current is applied, the current density in the area where the detection line width is increased is lower than in other detection line areas. Therefore, Joule heat in the region where the detection line width is increased is reduced compared to other detection line regions. Therefore, it is possible to reduce the temperature rise due to the influence of the detection line in the vicinity that intersects with the ion implantation transfer path, and the adverse effect on the bias magnetic field margin can be reduced. The other method is to divide the detection line made of soft magnetic material in the vicinity of the ion implantation transfer path into two or more parts. As a result, the detection line current flows in parallel to the detection lines in the vicinity that intersect with the ion implantation transfer path. Therefore, the current density in the detection line region near the intersection with the ion implantation transfer path is:
This can be reduced compared to other detection line areas. Therefore, it is possible to reduce the temperature rise due to the influence of heat generation in the vicinity of the detection line intersecting with the ion implantation transfer path, and to reduce the adverse effect on the bias magnetic field margin.

〔実施例〕〔Example〕

実施例1 以下、本発明の第1の実施例を第1図により説明する。 Example 1 A first embodiment of the present invention will be described below with reference to FIG.

図において、この実施例はイオン打込み転送路1上の磁
気バブル2を拡大するヘアピン型コンダクタ3と、磁気
抵抗効果を利用して磁気バブルを拡大したストリップ状
磁区の漏洩磁界を電気信号に変換する軟磁性体検出線4
とから構成される。ここでイオン打込み転送路1と交差
する近傍の軟磁性体検出線4の幅(W2)を他の領域の
検出線幅(Wl)より大きくした。この軟磁性体検出線
形状を除けば第3図に示した従来型の検出器と同様であ
る。
In the figure, this embodiment includes a hairpin type conductor 3 that expands a magnetic bubble 2 on an ion implantation transfer path 1, and a leakage magnetic field of a strip-shaped magnetic domain that expands the magnetic bubble using magnetoresistive effect, and converts it into an electric signal. Soft magnetic material detection line 4
It consists of Here, the width (W2) of the soft magnetic material detection line 4 in the vicinity intersecting the ion implantation transfer path 1 was made larger than the detection line width (Wl) in other areas. The detector is similar to the conventional detector shown in FIG. 3 except for the shape of the soft magnetic substance detection line.

ここでイオン打込み転送路1と交差する近傍の軟磁性体
検出線4の幅(W2)を5μm、他の領域の検出線幅(
Wr)を1.5μm とした。この場合の検出器の0.
8μm a磁気バブルを用いた時のバイアス磁界マージ
ンを調べた。検出線電流は3mAの直流である。第3図
に示すような従来の検出器の場合、(軟磁性体検出線幅
(W2)1.5μm)、検出器のバイアス磁界マージン
は、イオン打込みメージャライン転送路1のバイアス磁
界マージンに比べ、約100e低バイアス磁界側にシフ
トするために共通マージンがシフトした分。
Here, the width (W2) of the soft magnetic material detection line 4 in the vicinity intersecting the ion implantation transfer path 1 is set to 5 μm, and the detection line width (
Wr) was set to 1.5 μm. 0 of the detector in this case.
We investigated the bias magnetic field margin when using an 8 μm a magnetic bubble. The detection line current is 3 mA DC. In the case of a conventional detector as shown in Fig. 3, (soft magnetic material detection line width (W2) 1.5 μm), the bias magnetic field margin of the detector is compared to the bias magnetic field margin of the ion implantation measure line transfer path 1. , the amount by which the common margin is shifted due to the shift to the low bias magnetic field side by about 100e.

減少する。これに対して、上記実施例の検出器バイアス
磁界マージンは、イオン打込みメージャライン転送路1
にバイアス磁界マージンとほぼ等しくすることが出来、
従来に比べて共通マージンの拡大が図れた。
Decrease. On the other hand, the detector bias magnetic field margin of the above embodiment is as follows:
can be made almost equal to the bias magnetic field margin,
The common margin has been expanded compared to before.

実施例2 以下、本発明の第2の実施例を第2図により説明する。Example 2 A second embodiment of the present invention will be described below with reference to FIG.

本実施例では、イオン打込み転送路1と交差する軟磁性
体検出線4の通電径路を2分割にした。この軟磁性体検
出線形状を除けば第3図に示した従来型の検出器と同様
である。本実施においても実施例1と同様の良好な特性
が得られた。
In this embodiment, the energization path of the soft magnetic material detection line 4 that intersects with the ion implantation transfer path 1 is divided into two. The detector is similar to the conventional detector shown in FIG. 3 except for the shape of the soft magnetic substance detection line. In this embodiment as well, good characteristics similar to those in Example 1 were obtained.

又、本実施例においては、通電径路を2分割にしたが、
3分割以上でも同様の効果が得られる。
In addition, in this embodiment, the energization path is divided into two, but
A similar effect can be obtained by dividing into three or more.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、イオン打込み転送路と交差する近傍の
軟磁性体検出線の検出線電流による発熱を低減できるた
めに良好な総合動作バイアス磁界マージンが得られる。
According to the present invention, it is possible to reduce heat generation due to the detection line current of the soft magnetic material detection line in the vicinity of intersecting the ion implantation transfer path, so that a good overall operating bias magnetic field margin can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す磁気バブル検出器の平
面図、第2図は本発明の他の実施例を示す磁気バブル検
出器の平面図、第3図は従来の磁気バブル検出器を示す
平面図、第4図は磁気バブルメモリ素子の駆動電圧パル
スを示す図である。 1 ・イオン打込み転送路、2・・・磁気バブル、3・
ヘアピン型コンダクタ、4・・・軟磁性体検出線、5・
・・カスプ、6・・・ストレッチパルス電流、7・・ア
ナイアレートパルス電′A、。 第 口 一一一一 ■ 図 とr 泊 図 とゲ 力 霞
Fig. 1 is a plan view of a magnetic bubble detector showing one embodiment of the present invention, Fig. 2 is a plan view of a magnetic bubble detector showing another embodiment of the invention, and Fig. 3 is a conventional magnetic bubble detector. FIG. 4 is a plan view showing the device, and FIG. 4 is a diagram showing the driving voltage pulse of the magnetic bubble memory element. 1. Ion implantation transfer path, 2. Magnetic bubble, 3.
hairpin type conductor, 4... soft magnetic body detection wire, 5...
... Cusp, 6... Stretch pulse current, 7... Annihilation pulse electric 'A'. Part 111■ Diagram and r Tomarizu and Gerikikasumi

Claims (1)

【特許請求の範囲】[Claims] 1、磁気バブルの転送手段として選択的に他の部分とは
異なるイオン打込み条件で形成した転送路を用い、該転
送路に沿つて転送された磁気バブルを検出するためのヘ
アピン型導体パターンと軟磁性体薄膜検出線から成り、
且つ該軟磁性体薄膜検出線の一部が該転送路と交差して
成る検出器において、該転送路と交差する近傍の該軟磁
性体薄膜検出線の線幅が他の該軟磁性体薄膜検出線の線
幅よより大きいか、もしくは該転送路と交差する近傍の
該軟磁性体薄膜検出線が2本以上に分割されて配置され
ていることを特徴とする磁気バブルメモリ素子。
1. As a means of transferring magnetic bubbles, a transfer path is selectively formed under different ion implantation conditions from other parts, and a hairpin-shaped conductor pattern and soft wire are used to detect the magnetic bubbles transferred along the transfer path. Consists of magnetic thin film detection wire,
In the detector in which a portion of the soft magnetic thin film detection line intersects with the transfer path, the line width of the soft magnetic thin film detection line in the vicinity of intersecting the transfer path is greater than that of the other soft magnetic thin film. A magnetic bubble memory element characterized in that the soft magnetic thin film detection line, which is larger than the line width of the detection line or in the vicinity of intersecting the transfer path, is divided into two or more lines.
JP1302153A 1989-11-22 1989-11-22 Magnetic bubble memory element Pending JPH03165395A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1302153A JPH03165395A (en) 1989-11-22 1989-11-22 Magnetic bubble memory element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1302153A JPH03165395A (en) 1989-11-22 1989-11-22 Magnetic bubble memory element

Publications (1)

Publication Number Publication Date
JPH03165395A true JPH03165395A (en) 1991-07-17

Family

ID=17905549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1302153A Pending JPH03165395A (en) 1989-11-22 1989-11-22 Magnetic bubble memory element

Country Status (1)

Country Link
JP (1) JPH03165395A (en)

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