JPH0316326U - - Google Patents

Info

Publication number
JPH0316326U
JPH0316326U JP7680489U JP7680489U JPH0316326U JP H0316326 U JPH0316326 U JP H0316326U JP 7680489 U JP7680489 U JP 7680489U JP 7680489 U JP7680489 U JP 7680489U JP H0316326 U JPH0316326 U JP H0316326U
Authority
JP
Japan
Prior art keywords
cleaned
objects
semiconductors
utility
scope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7680489U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7680489U priority Critical patent/JPH0316326U/ja
Publication of JPH0316326U publication Critical patent/JPH0316326U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP7680489U 1989-06-29 1989-06-29 Pending JPH0316326U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7680489U JPH0316326U (fr) 1989-06-29 1989-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7680489U JPH0316326U (fr) 1989-06-29 1989-06-29

Publications (1)

Publication Number Publication Date
JPH0316326U true JPH0316326U (fr) 1991-02-19

Family

ID=31618602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7680489U Pending JPH0316326U (fr) 1989-06-29 1989-06-29

Country Status (1)

Country Link
JP (1) JPH0316326U (fr)

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