JPH0316323U - - Google Patents
Info
- Publication number
- JPH0316323U JPH0316323U JP7490489U JP7490489U JPH0316323U JP H0316323 U JPH0316323 U JP H0316323U JP 7490489 U JP7490489 U JP 7490489U JP 7490489 U JP7490489 U JP 7490489U JP H0316323 U JPH0316323 U JP H0316323U
- Authority
- JP
- Japan
- Prior art keywords
- reticle
- retake
- conveying device
- case
- storage stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7490489U JPH0316323U (cs) | 1989-06-28 | 1989-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7490489U JPH0316323U (cs) | 1989-06-28 | 1989-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316323U true JPH0316323U (cs) | 1991-02-19 |
Family
ID=31615011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7490489U Pending JPH0316323U (cs) | 1989-06-28 | 1989-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316323U (cs) |
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1989
- 1989-06-28 JP JP7490489U patent/JPH0316323U/ja active Pending