JPH03161065A - Vacuum plasma flame spray robot - Google Patents

Abstract

PURPOSE:To hold down an excessive temp. rise by a method wherein a vacuum plasma flame spray robot is provided with cooling pipes in its interior and heat transfer members are interposed between electric motors. CONSTITUTION:A hot air produced by the first, second and third motors 34, 34A and 34B is transmitted through heat transfer sheets 42 high in cooling efficiency to a cooling water plate 43. This transmitted heat is cooled for removal by the cooling action of a cooling water being sent from a cooling water supply pipe 40 through a first cooling water pipe 40a into a cooling water pipe 46. The cooling water which has deprived the hot air of its heat is sent from the cooling water pipe 46 through a second cooling water pipe 40b back into the cooling water supply pipe 40 to produce a circulation of the cooling water. Usage for many hours is made possible without exceeding the limit of service temp. of the first, second and third motors 34, 34A and 34B.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an improvement in the structure of a vacuum plasma spraying robot that performs plasma spraying work in a vacuum and high temperature environment.

[Conventional technology]

Figure 11 shows a low-pressure plasma spray gun manipulator disclosed in Japanese Utility Model Application Publication No. 62-118551, etc. In the figure, (1) is defined by an airtight wall (2). This vacuum chamber (1)
The pressure is reduced to a minimum of about 10-' x 10-2 Torr, and to about 30 to 60 Torr during normal operation.

(3) is a hole drilled in the wall (2), and this hole (3)
There is a flange (4) on the edge of the side opposite to the vacuum chamber (1).
) is attached to this flange (4), and a base plate (6) with a through hole is attached to the flange (4) through a seal packing (5).
is attached, and this base plate (6) is provided with a casing (7) made of gas tight material or the like.

At the bottom of the wall (2) on the side opposite to the vacuum chamber (1), there is a gas-tight cover (9) that houses the motor (8).
is installed.

(10) is a rotatable sting that is supported horizontally through the lower part of the wall (2), and a seal (11) is attached heavily between the sting (10) and the wall (2). Also, a chuck (13) for holding the material to be thermally sprayed (12) is attached to the tip of the sting (lO), and a chuck (13) is attached to the tip of the sting (lO).
lO) A protector (l4) is provided to protect the tip. And Sting (10) has the above-mentioned motor (
8) rotates within the vacuum chamber (1).

(15) is an exhaust duct installed below the wall (2),
A pressure equalizing vibrator (16) is vertically connected to the exhaust duct (l5) and the lower part of the casing (7), and a filter (17) is connected below this pressure equalizing pipe (1B).
is installed.

(l8) is a robot, and this robot (18) has a mount part (l9) which is the main body, and a vacuum chamber (1 ) and a multi-jointed manibulator (20) extending within the interior. The mount portion (19) is housed within the casing (7),
It is screwed onto the base plate (6). Further, inside the manibulator (20), a plurality of motors for operating the manibulator (20) and a plurality of detectors (both not shown) for detecting the driving amount of the plurality of motors are arranged. , and at the tip of the manipulator (20),
A flange (2l) is fitted.

(22) is a plasma spray gun attached to the leading edge of the manibulator (20).
) is a plasma flame (23) applied to the material to be sprayed (12).
), and this plasma spray gun (2
2) includes a cable (
24) is connected. Similarly, plasma gas such as Anolegon gas can also be used in the Plasma i injection gun (22).
(not shown). (25) is a powder supply pipe connected to the plasma spray gun (22), and this powder supply pipe (25) supplies thermal spray powder to the plasma spray gun (22) together with an inert gas such as argon gas.
2), and also serves as a plasma spray gun (22
Thermal spray powder introduced into the plasma flame (
23), the particles become molten particles and collide with the material to be sprayed (12) at high speed, thereby shaping the sprayed film.

(26) is a flexible bellows that is loosely fitted to the manipulator (20), and the bellows that covers the manipulator (20) is made of a thin stainless steel plate, aluminum, aluminum alloy, etc. that does not easily rust. , and bellows (
Both ends of the base plate (6) and the flange (
2l) is screwed or welded. And bellows (
26) functions to hermetically protect the manipulator (20) from high temperatures and dust in the vacuum chamber (1).

In addition to the above-mentioned publications, prior art documents of this type include Japanese Utility Model Application Publication No. 82-118547.

(Problems to be Solved by the Invention) The conventional low-pressure plasma spray gun/manibulator is configured as described above, and due to the disappearance of the convection heat transfer phenomenon in a vacuum environment and the heat radiation of the plasma flame (23), the problem (not shown) There was a problem in that the heat dissipation of the motor and the detector was extremely insufficient, and the temperature exceeded the operating limit in a short period of time, easily causing a failure of the robot (18).

The present invention has been made in view of the above points, and an object of the present invention is to provide a vacuum plasma spraying robot that can be used for a long time by significantly suppressing the temperature rise of the motor and detector.

[Means to solve the problem]

In order to achieve the above-mentioned object, the present invention is equipped with a vacuum plasma spray gun that sprays a plasma flame onto a member to be sprayed, and a cooling pipe for guiding a cooling medium is installed inside the vacuum plasma spray robot. The present invention is characterized in that a conductive member is interposed between the cooling pipe and the electric motor that moves the movable part of the vacuum plasma spraying robot to transfer heat from the electric motor to the cooling pipe.

[Effect]

According to the present invention, inside the vacuum plasma spraying robot,
A cooling pipe is installed to guide the cooling medium, and a conductive member is interposed between the cooling pipe and the electric motor that moves the vacuum plasma spraying robot's movable parts to transfer heat from the electric motor to the cooling pipe. , the temperature rise of the motor and detector can be significantly suppressed, and stable plasma spraying work can be performed for long periods of time under vacuum.

(Example) Hereinafter, the present invention will be described in detail based on an example shown in Figs. This vacuum chamber (1) is reduced in pressure to a vacuum of about 10-' by a vacuum pump (not shown), and air and moisture are removed. After this removal, inert gas such as argon is heated to 10 Torr to 70 Torr.
The vacuum chamber (1) is filled with a pressure of rr. (27) is a holding device placed on one side of the floor (28), and the material to be sprayed (12) is vertically supported on the chuck of the rotatable table on the top of this holding device (27). It looks like this.

(28) is a robot placed on the other side of the floor (2A) using a fastener, and this robot (28) is screwed onto the floor (2A) using a fastener as shown in Figure 1. Base (2
9), a vertically swingable body part (30) rotatably supported on this base (29), and this body part (30);
A vertically swingable arm (3l) supported on the top of the arm (30), a wrist shaft (32) provided at the tip of this arm (31), and a wrist shaft (32) attached to the tip of this wrist shaft (32). flange (33). Inside the base (29), as shown in FIG.
30) in the horizontal direction, and a first motor (34) that detects the drive amount etc. of this first motor (34).
Detectors (35) are respectively arranged. Further, at the rear part of the arm (3l), there is a second motor (34^) for swinging the wrist shaft (32), and a second motor (34^) attached to the rear part of the second motor (34^). Detector (35A
) and a third motor (3) that rotates the wrist shaft (32).
4B) and a third detector (35B) attached to the rear of this third motor (348), and the second and third detectors (35A) (35B)
performs the same function as the first detector (35).

(36) are the first, second and third motors (34) and (
34^) and (34B), and this multiple motor casing (36) houses the first, second, and third motors (34) as shown in Fig. 2.
A power supply cable (37) for supplying power for driving is connected to (34A) and (34B), respectively. (38
) are the first, second and third detectors (35) and (35A
) and (35B), and this plurality of detector casings (38) include a second
As shown in the figure, the signal cable (39) for signal input/output
are connected to each other.

(22) is a plasma spray gun attached to the flange (33), and this plasma spray gun (22), which performs the same function as the conventional one, has one end of a cable (24) that supplies direct current electricity for plasma generation. is connected, and the other end of this cable (24) is connected to the body (30) and base (29).
- Connected to external power supply through the floor (2A). Similarly, plasma gas such as argon gas is also supplied to the plasma spray gun (22) (not shown).

(25) is a powder supply pipe connected to the plasma spray gun (22) like the cable (24) above, and this powder supply vibrator (25) carries the thermal spray powder together with an inert gas such as argon gas. Plasma spray gun (2)
2), and also serves as a plasma spray gun (22
Thermal spray powder introduced into the plasma flame (
23), the particles become molten particles and collide with the material to be sprayed (12) at high speed, forming a sprayed film.

(40) is a plurality of water-cooled water pipes connected to the plasma spray gun (22) in the same way as the cable (24), and the plurality of water-cooled water pipes (40) supply cooling water to the plasma spray gun (22). water supply piping that removes the high heat generated by the plasma flame (23), and reflux piping that guides and discharges the cooling water from which the high heat has been removed from the plasma spray gun (22) to the outside of the vacuum chamber (1). It is equipped with piping. (41) is a plurality of pipe supports consisting of a bundled cable (24), a powder supply pipe (25), a plurality of water cooling pipes (40), and springs connected to the front and back of the lower part of the arm (31). be.

(42) is a rectangular heat transfer sheet superposed on both sides of the plurality of motor casings (36), (43)
) are rectangular water-cooled plates that are respectively superposed on the plurality of heat transfer sheets (42), and (44) are the plurality of heat transfer sheets (44).
2) and the rods (45) are inserted horizontally into the through holes at the four corners of the plurality of water cooling plates (43), respectively, and the rods (45) are screwed into the threaded rods protruding from the water cooling plates (43) at both ends of the plurality of rods (44). By tightening the numerous nuts (45), heat transfer sheets (42) and water cooling plates (43) are fitted on both sides of the plurality of motor casings (36).
) are polymerized and fixed (see Figure 2).

(46) is a substantially inverted S-shaped water-cooled wood pipe superimposed on each of the plurality of water-cooled plates (43), and (40a) is connected to one end of a water-cooled water pipe (46) on one side of the motor casing (36). The first water-cooled water pipe (40b) is the second water-cooled water pipe connected to one end of the water-cooled water pipe (46) on the other side of the motor casing (36), and (40c) is the motor casing (36).
36) This is a third water cooling pipe that connects the other ends of the water cooling wood pipes (46) on both sides (see Fig. 2).

And (47) is a distribution joint integrated with a throttle valve fitted in each of the plurality of water cooling water pipes (40), and the distribution joint (47) provided in the water cooling water pipe (40) for supply , the first water cooling water pipe (40a) is connected,
: Distribution joint (
47) is connected to a second water cooling water pipe (40b).

Therefore, the first, second and third motors (34) and (34A
)・(34B) is transferred to the water cooling plate (43) via the heat transfer sheet (42) that increases cooling efficiency.
This transferred heat is transferred from the supply water cooling water pipe (40) to the water cooling wood pipe (46) via the first water cooling water pipe (40a).
) is cooled and removed by the cooling action of the cooling water, and the cooling water that has taken this heat is passed from the water cooling water pipe (46) to
It is refluxed to the water-cooled water pipe (40) for reflux via the water-cooled water pipe (40b).

As described above, according to the present invention, the high heat generated from the first, second, and third motors (34), (34A), and (348) is cooled and Since it is designed to be removed, even if used for a long time, the first and second
・The operating temperature limit of the third motors (34), (348), and (34B) will not be exceeded, and therefore the robot (
28) can be used effectively for a long time. In addition, first and second water cooling water pipes (40a) and (4
0b) is connected to the water-cooled wood pipe (46), there is no need to provide separate piping equipment inside the robot (28).

In this embodiment, the bellows (26) is omitted, but a simple seal or cover can be used to prevent dust from being removed from the robot (26).
8) Intrusion into the mechanism can be prevented. In addition, by using vacuum/high-temperature grease with low vapor pressure and low vapor pressure for the movable parts of the robot (28), it is possible to ensure the life of the mechanical parts and prevent the thermal spray coating from being damaged by volatilization of oil. It is possible to prevent adverse effects and furthermore, it is expected that the use of dry contacts can be omitted.

Next, FIG. 3 shows a second embodiment of the present invention, in which (36a) is a plurality of water cooling holes vertically bored on both sides of the motor casing (36), The plurality of water cooling holes (36a) perform the same cooling function as the water cooling pipe (46). (40d) is the plurality of water cooling holes H6a)
The above first, second and third water cooling water pipes (40a) ・(
40b) and (40c) are the fourth water pipes connected to each other via a joint (48).

The other parts are the same as those in the above embodiment.

The same effects as those of the above embodiment can be expected from this embodiment as well, and the heat transfer sheet (42), water cooling plate (43), rod (44), nut (45), and water cooling pipe (46) can be omitted. Therefore, it is possible to reduce the number of parts, reduce weight, and simplify assembly work.

Next, FIG. 4 shows a third embodiment of the present invention. In the figure, (48) is a bowl-shaped heat shielding plate attached to the flange (33), and this heat shielding plate ( A water-cooled pipe (49) is attached to the outer periphery of the water-cooled pipe (48), and this water-cooled pipe (49) performs the same cooling function as the water-cooled wood pipe (46). (50
) is a plurality of cooling water pipes connected to this water cooling pipe (49), and the other end of the plurality of cooling water pipes (50) is a distribution joint (
47) are connected to the supply channel and the return channel of the water cooling water pipe (40), respectively, so that the supplied cooling water is constantly 'a'
It's like it's being washed away. Note that (50A) is a cooling water pipe for thermal spray gas.

The same effects as those of the above-mentioned embodiment can be expected from this embodiment, and when the continuous operation time of the robot is long, heating of the motor etc. can be significantly suppressed to ensure stable operation of the robot. becomes possible.

Next, FIG. 5 shows an embodiment of the present invention shown in FIG.
In this case, a water cooling pipe (49) is attached to the heat shielding plate (48).
A water cooling jacket (51) that performs the cooling function is installed in place of the water cooling jacket (51), and a pipe joint (52) is attached to this water cooling jacket (51).
) is connected to the cooling water pipe (50).

It is clear that this embodiment can also provide the same effects as the above embodiments.

Next, FIG. 6 shows a fifth embodiment of the present invention,
In the figure, (53) is a fitting (54) attached to the body (30).
This shielding plate (
The water cooling pipe (49) is attached to the water cooling pipe (49), and a plurality of branched water cooling pipes (40) are connected to the water cooling pipe (49) via pipe joints (52).

It is clear that the same effects as those of the above-mentioned embodiment can be expected from this embodiment, and heating of the body portion (30) can be significantly suppressed.

In this embodiment, the water cooling pipe (49) is attached to the shielding plate (53), but as shown in FIG.
3) may be equipped with the water cooling jacket (51) described above.

Next, Figures 8 to 10 show an example in which the present invention is applied to a research/experimental robot (28) in which thermal spraying work does not take a long time. As shown in the figure, this robot (28) has a base (29) screwed onto the floor (2A) using fasteners, and this base (28).
2g) A retractable arm post (30^) supported via the waist joint (29a), and this arm post (3
A swingable arm (31) supported on the upper side of 0A) via a shoulder joint (31a), and a swingable arm (31) supported at the tip of this arm (31) via an elbow joint (3lb). Second arm (31A) and this second arm (31A)
The wrist shaft (32) provided at the tip of the
2) and a flange (33) attached to the tip.

At the rear part of the arm (31), the arm (31)
A second motor (348) that swings the second arm (348) and a third motor (34B) that swings the second arm (31A) are respectively provided. At the rear of 34A) and (34B), there are second and third detectors (35A) and (34B) that perform the same functions as those described above.
5B) are installed respectively. In addition, the second arm (
A fourth motor (34C) that swings the wrist shaft (32) and a fifth motor (34D) that rotates the wrist shaft (32) are disposed at the rear of the wrist shaft (31A). , these fourth and fifth motors (34C) and (34D)
Fourth and fifth detectors similar to those described above are installed at the rear of the vehicle (not shown).

(55) is a heat conduction plate disposed on the arm (31), and this heat conduction plate (55) absorbs the radiant heat of the plasma flame (23) conducted via the elbow joint (3lb), and 4. It functions to transfer the heat of the fifth motor (34G) and (34D) to the arm post (30^). (40)
is floor (2A), base (29), arm post (30A)
), and (
Reference numeral 46) denotes a curved water-cooled wood pipe disposed within the arm post (30A), and both ends of this water-cooled wood pipe (46) are connected to the plurality of water-cooled water pipes (40), respectively.

The other parts are the same as those described above.

Therefore, the radiant heat of the plasma flame (23) and the heat generated by the fourth and fifth motors (34C) and (34D) are transferred from the second arm (31A) to the heat conduction plate (55) via the elbow joint (3lb). ), and then the arm post (30A
). In addition, the radiant heat of the plasma flame (23) and the heat generated by the second and third motors (34A) and (34B) are transferred to the arm post (3) via the shoulder joint (31a).
Heat is transferred to OA). And arm post (30A)
The concentrated heat is cooled and removed by the cooling water flowing in the water pipe (4B).

Figure 10 shows the cooling effect of this embodiment in comparison with that of the prior art.
3rd, 4th, and 5th motors (348), (34B), (
34G) and (34D), when operating in vacuum for a long time, each motor frame would easily exceed the rated temperature, causing failure of the coils and detectors (35) to (35D). On the other hand, according to this embodiment, the temperature does not exceed the rated temperature, so the robot (28) can operate stably. Furthermore, since the water-cooled wood pipe (46) is arranged inside the arm post (30A), a plurality of water-cooled wood pipes (46) are arranged inside the arm post (30A).
0) can be limited to the waist joint (29a), making it possible to prevent damage to the water cooling pipe (40) due to twisting, shorten the pipe, and suppress pressure loss.

In each of the above embodiments, water is used as the cooling medium, but air or an inert gas may also be used. Further, even when the present invention is applied to robots that work in vacuum drying of food and pharmaceutical products, robots that operate continuously for long periods of time in high-temperature environments such as drying furnaces, blast furnaces, and bread baking ovens, the same effects as in the above embodiments can be obtained. [Effects of the Invention] As described above, according to the present invention, a cooling pipe that guides a cooling medium is installed inside a vacuum plasma spraying robot, and a cooling pipe that guides a cooling medium is installed between the cooling pipe and the electric motor that moves the movable part of the vacuum plasma spraying robot. The robot is equipped with a conductive member that transfers heat from the electric motor, etc. to the cooling tube, thereby providing a vacuum plasma spraying robot that can be used for long periods of time while greatly suppressing the temperature rise of the motor and detector. can do.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the vacuum plasma spraying robot according to the present invention, FIG. 2 is a perspective view of essential parts showing an embodiment of the vacuum plasma spraying robot according to the present invention, and FIG. 3 is a cross-sectional view showing an embodiment of the vacuum plasma spraying robot according to the present invention. FIG. 2 is a diagram corresponding to the second embodiment of the vacuum plasma spraying robot according to the present invention, FIG. 4 is an explanatory diagram showing the third embodiment of the vacuum plasma spraying robot according to the present invention, and FIG. FIGS. 6 and 7 are explanatory diagrams showing a fourth embodiment of the vacuum plasma spraying robot according to the present invention, and FIGS. 8 and 9 are explanatory diagrams showing the fifth embodiment of the vacuum plasma spraying robot according to the present invention. 1 is a diagram showing a sixth embodiment of the vacuum plasma spraying robot according to the present invention, and FIG. FIG. 11 is a sectional view showing a conventional vacuum blast gun manipulator. In the figure, (12) is the material to be sprayed, (22) is the plasma spray gun, (23) is the plasma flame, (28) Di robot, (34) to (340) are the 1st, ¥S2, 3rd, and 4
・The fifth motor, (35) to (35D) are the first, second, and
3rd, 4th, and 5th detectors, (42) is a heat transfer sheet, (
No. 430 is a water-cooled plate, (46) is a water-cooled water pipe, (49) is a water-cooled wood pipe, (5l) is a water-cooled jacket, and (55) is a heat conductive plate. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.

Claims (1)

[Claims] In a vacuum plasma spraying robot equipped with a vacuum plasma spray gun that sprays a plasma flame onto a member to be sprayed, a cooling pipe for guiding a cooling medium is installed inside the vacuum plasma spraying robot, and the cooling pipe and the vacuum plasma spraying robot are connected to each other. A vacuum plasma spraying robot characterized in that a conductive member that transfers heat from the motor or the like to a cooling tube is interposed between the electric motor that moves the movable part.