JPH0315261A - Stepping type linear actuator - Google Patents

Abstract

PURPOSE:To reduce the cost by providing a fixed magnetic member, first and second moving bodies and a magnetic drive means. CONSTITUTION:A stepping type linear actuator comprises a fixed substrate 10 composed of magnetic material, and a pair of moving bodies 20, 40 to be supported thereon while abutting thereon. Yokes 22, 23 having rectangular cross section are arranged, while being coupled with a yoke 21, between the moving bodies thus constituting a magnetic drive means together with electromagnetic coils 30, 32. The fixed substrate 10 is provided with guide members 15, 16 for the moving bodies 20, 40. When power is fed alternately to the magnetic drive means according to the facing surface, the moving bodies 20, 40 make stepping movement continuously.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a step-type linear actuator that uses electromagnetic i-mechanical conversion means to enable linear motion with a simple configuration. 2. Description of the Related Art Conventionally, a method of achieving linear motion using an electromagnetic mechanical conversion means has been proposed, for example, in an optical pickup transport means of an optical disk device that reproduces recorded information from a disk-shaped recording medium having a spirally recorded information track. Generally speaking, there is a method of converting rotational motion into linear motion by using a conversion mechanism such as a ball screw or a lasso pinion in the rotary motor. Furthermore, a linear motor or linear pulse smoke is known as a method for directly driving a driven object without using the above conversion mechanism. These drive devices mainly consist of a stator made of a magnetic material that defines a running path, and a movable element that faces the stator with a small gap.

For example, FIG. 16 shows an example of a linear pulse mode.

In FIG. 16, a stator 210, which is a running path made of a magnetic material, has magnetic pole teeth 211 with a constant pitch P, and a movable element 220, which faces the stator 210 with a slight gap, has a permanent magnet 224. Clamping stator 2 {0
A pair of yokes 221 and 222 having magnetic pole teeth 225 having the same shape as the magnetic pole tJT211 but with a pitch shifted by P/2 and shifted by P/4 from each other, and the yoke 22l thereof.
, 222, a pair of electromagnetic coil means 231, 2
32, and its electromagnetic coil means 231, 23
2 are alternately excited, the magnetic flux from the permanent magnet 224 is controlled. For example, by passing a current in the direction of arrow A through the electromagnetic coil 232, the magnetic flux passing through the magnetic pole teeth 225 of the yoke 222 decreases on one side and decreases on the other. By increasing the magnetic pole teeth 225 of the mover 220 and the polar teeth 2 of the stator 210.
11 are attracted to each other, and the movable element 220 is displaced stepwise with respect to the stator 210.

Linear motors have long been known as a method of linear driving such as a method using a conversion mechanism or a method of direct driving.However, unlike the direct driving method such as the linear motor described above, there are other direct driving methods such as those disclosed in the U.S. patent. 4
697 No. 164 has proposed a method. This configuration consists of a pair of stator means attached to a base shaft which is a PJIH moving part, a pair of armatures slidably disposed on the base shaft relative to the stator means, and an end portion attached to the armature. It consists of a latching means that is rotatably connected and has a center hole surrounding the base shaft, and a spring member disposed between the stator means and the armature. In this type of driving method, a pair of electromagnetic coils included in the stator means are similarly excited alternately, so that the armature is attracted toward the stator against the pressing force of the spring member, and the armature and the tall The latching means on the disk performs a turning motion using its end as a turning fulcrum, gripping the base shaft at the center hole and driving in a straight line. iI that invention tries to solve! a However, in all of these methods of linear movement, the configuration of the traveling path is complicated, and in addition to the effective stroke of the moving part, the length of the moving part itself is required, which increases the area occupied by the entire device, making it difficult to obtain an effective stroke. There were limits at the top.

In addition, even in straight-travel drives such as linear pulse motors, the mover always runs through a certain small gap, so highly accurate protruding magnetic pole teeth are required over the entire travel path, and both the stator and the mover are high. In addition to requiring shape accuracy and increasing production costs, it was difficult to maintain the stability of the mover support mechanism relative to the running path due to external vibrations, shocks, and posture conditions. Furthermore, in the other direct drive methods mentioned above, a mechanical holding means is required in addition to the structurally electromagnetically acting members, which increases the number of components, increases size and cost, and requires mechanical gripping of the pivot. This causes wear and other problems, which poses problems in improving the reliability and precision of the device.

In view of the above-mentioned problems, the present invention provides a linear actuator that is compact and easily constructed in terms of linear motion, can be manufactured at low cost, and is highly productive.

Means for Solving the Problems In order to achieve the above object, the present invention comprises a fixing member made of a magnetic material and having a running path, and a magnetic coupling member that magnetically generates a contact force with respect to the fixing member. first and second movable bodies having opposing surfaces that are supported in abutment and are movable relative to each other within a predetermined stroke; and means for cooperating with the first and second movable bodies, the first and second movable bodies 2
and magnetic drive means for generating electromagnetic force on the opposing surface of the moving body.

Effects According to the present invention, the first and second movable bodies are always magnetically coupled to the stationary member by the magnetic flux generated by the magnetic coupling member, and by energizing the magnetic drive means, the opposing surfaces are An electric 6R force is generated and the first and second movable bodies are relatively displaced in the attracting direction within a predetermined stroke, and a magnetic flux path is created so that the magnetic flux that generates the electromagnetic force flows between each of the movable bodies and the fixed member. By superimposing the magnetic flux of the magnetic coupling member at the contact portion of each movable body with the fixed member, the magnetic coupling force with the fixed member increases or decreases. Therefore, by changing the energizing direction and magnitude of the electromagnetic coil, the respective contact forces of the first and second movable bodies with the fixed member can be selectively controlled such that one is made stronger and the other is made weaker. Due to the electromagnetic force acting on the opposing surfaces, each movable body is displaced in a two-pronged manner, with one side being held by the fixed member and the other being held by the fixed member. In addition to the above configuration, opposing surfaces of the first and second moving bodies are provided bidirectionally with respect to the traveling direction of the moving bodies centering on the abutment part, and magnetic drive means are provided respectively corresponding to the opposing surfaces and alternately. By energizing, the contact force of each moving body and the electromagnetic force of each opposing surface are selectively controlled, and while the relative position of each moving body is always returned to its initial position, each moving body is continuously moved in a step-like manner. By performing sidewalk motion and changing the energization direction and magnitude of the electromagnetic coil, each moving object can move in a straight line in both directions. EXAMPLE An example of the present invention will be described below with reference to the drawings.

Figure 1, Figure 2 (a), (b), Figure 3 (a). (
b) shows a stepping type linear actuator in the first embodiment of the present invention, and the stepping type linear actuator is supported in contact with a fixed base 10 made of a magnetic material and its substrate. Consisting of a pair of movable bodies 20 and 40 that can be relatively displaced by a predetermined stroke in the direction of travel, the movable body 20 is supported in contact with the fixed base plate 10 in a positional relationship perpendicular to the direction of travel, and has a pair of abutting portions 21a and 2lb. a U-shaped yoke 2l having a U-shaped yoke 2l, a yoke 24 whose end face faces the fixed substrate 10 with a certain gap in between near the center of its abutting portions 21a and 2lb, and a yoke 24 whose end face faces the fixed substrate 10 with a certain gap therebetween; It has a permanent magnet 25 whose both end faces having different magnetic poles are supported in the vicinity, and the permanent magnet 25
As the magnetomotive force, the yoke 21. Contact portion 21a. 2lb, anchoring group + Ii1 0 . Fixed substrate 10 and yoke end surface 24a
A magnetic flux path is formed such that a constant magnetic flux flows through the air gap between the two and the yoke 24.

On the other hand, the movable body 40 is symmetrical in a direction orthogonal to the U-shaped yoke 41 having contact parts 41a and 4lb that are supported in contact with the fixed board 10 in the traveling direction and the contact parts 41a and 4lb. It has a U-shape and has both end surfaces 43.
a, 43b have a yoke 43 facing the fixed substrate 10 with a certain gap therebetween, and a permanent magnet 42 sandwiched at both end faces having magnetic poles different from those of the yoke 43 near the center lower part of the yoke 41. Using the permanent magnet 42 as a magnetomotive force, the yoke 41, the contact parts 41a and 4lb, and the fixed substrate 10
and the yoke 43 through the gap between the yoke end faces 43a and 43b.
A magnetic flux path is formed so that a constant magnetic flux flows through. Therefore, the yoke and fixed member 10, which are the magnetic flux paths of each moving body 20.40, are mainly constructed of a magnetic material made of low carbon steel, and the permanent magnets 25.42 are connected to the moving body 2.
0's yoke end surface 24a and the moving body 40's yoke end surface 4
3a and 43b are magnetized to form the same magnetic pole, and together with the yoke and fixed substrate 10, constitute a magnetic coupling member.

Between the movable bodies 20 and 40, there are contact parts 21a and 2 of the movable body 20.
A yoke 22.2 having a rectangular cross section protrudes parallel to the fixed substrate 10 in both directions along the traveling direction with lb as the center.
3 is connected to the yoke 21, and faces the yoke end surface 22a thereof with respect to the inner surface 41c located perpendicularly to the fixed substrate 10 of the yoke 4l, and the yoke end surface 23a with respect to the inner surface 41d with a slight gap therebetween. mobile object 2
Construct each opposing surface of 0.40. On the other hand, a pair of electromagnetic coils 30.32 are attached to the protruding yoke 22.23 of the movable body 20, and are wound around a coil bobbin 31.33 made of resin and having a rectangular central hole. If the coils 30 and 32 are used as magnetomotive force, for example, if the electromagnetic coil 30 is used as magnetomotive force, then the yoke i-plane 22a
The yoke 41 and the contact portion 4 are connected through the gap between the yoke 41c and the yoke 41c.
1 a + 4 l b + fixed group Fi. The magnetic flux path is shaped so that a constant magnetic flux flows through the IO, the contact portion 2/182lb, and the yoke 21, and the magnetic flux causes the moving body 20
．． 40 opposing respective opposing surfaces 22a. An electromagnetic force is generated between the surface 41c and the opposing surfaces 23a and 41d, and the moving body 2
0.40 are relative displacements from each other in the suction direction.

In this embodiment, each yoke and electromagnetic coil 30, 32 forming a magnetic flux path are configured as magnetic drive means. The fixed 1M+1i10 is fixed to the main body of the device that uses the linear actuator of this embodiment as a drive device, and guides formed integrally in parallel on the flat substrate of the device to guide the movable body 20.40 along the traveling direction. Part 15.16
The guide member l5 has a guide surface 15a perpendicular to the fixed substrate 10 and a regulating surface 15b parallel to it, and the guide surface 15a guides the lower side surface 44a of the yoke 41 of the movable body 40, faces the lower upper surface 44b of the yoke 41,
The movable body 40 is prevented from detaching from the fixed substrate 10, and one guide member 16 similarly guides the lower side surface of the movable body 40. A casing l8 made of a non-magnetic material is attached to the upper surface of the central portion of the yoke 41 of the moving body 40 so as to surround each moving body 20, 40, and a driven body is attached to a part of the casing.

In addition to the structure of the guide members 15 and l6, as shown in FIG. 12, as a guide member, a groove 105 is provided directly in the moving direction in the fixed substrate 110, and the yoke end face of the movable body 40 is fitted in the groove 105. Guide pins 106 for guiding may be provided from 41a and 4lb, respectively, and the guide pins 106 may be slidably guided along the groove portions 105. Further, instead of the fixed substrate 10, a plate-shaped magnetic material having a constant width and corresponding to the width of the yoke contact portions 41a and 4lb of the movable body 4o is integrally attached to the fixed substrate made of citrus or a shaped article. By shaping it into a certain shape, a simple running path can be constructed, and by using the fixed substrate as the substrate of the main body of the device, the entire device can be simplified.

Furthermore, by making the guide members 15, 16 curved rather than straight, the movable body can be freely driven in any direction on the fixed base plate 10.

The operation of the stepping type linear actuator constructed as described above is shown in Fig. 2(a). (b), Figure 3 (
This will be explained using al, (b).

Fig. 2(a) 1 Fig. 3 (in al, the electromagnetic coil 30,
32 are not energized, a magnetic flux 29.49 flows along the above-described magnetic flux path in the direction of the dotted line due to the permanent magnet 25.42, and the magnetic flux 29.49 causes each contact portion 21a. Contact portion 41 of 2lb and yoke 41
A magnetic attraction force is generated at 4lb, and the yoke 21.41 is always magnetically self-held with respect to the fixed substrate IO. In addition, the end surface 24a of the yoke 24 and the yoke 43
Similarly, a magnetic force is generated on the yoke end surfaces 43a and 43b through a certain gap, but the opposing area of the yoke end surface 24a is
a, 43b is the area of contact portion 41a. By setting it larger than 4lb, the influence of magnetic force in the gap can be minimized.

Next, the electromagnetic coil 30 is moved along the aforementioned magnetic flux path as shown in FIG. 2(a). By energizing the magnetic flux 54 so that it flows in the direction of the solid line shown in FIG.
, 4lb, the magnetic flux due to the permanent magnet 25.42 is 29.
49, the magnetic flux increases more near the contact portions 41a and 4lb, and the contact force of the movable body 40 against the fixed substrate 10 increases more than when no electricity is applied, and conversely, the magnetic flux at the contact portions 21a and 2lb decreases. However, the contact force of the movable body 20 against the fixed base FILO decreases, and an electromagnetic force is similarly generated between the yoke end face 22a and the opposing yoke 41c due to the magnetic flux 54. Therefore, the amount of current flowing through the electromagnetic coil 30 is controlled by the contact portion 21a,
By setting the magnetic flux to almost zero near 2lb, that is, the magnetic potential is close to zero, the yoke 41 is fixed at the fixed base F.
The movable body 20 is held at the guide member 15.i10.
16 in a direction that reduces the gap between the yoke inner surface 41c and the yoke end surface 22a, and by stopping the energization of the electromagnetic coil 30, the fixed substrate 10 is moved as shown in FIGS. 2(b) and 3(b).
With the positional relationship shown in b), the moving body 20.40 becomes self-supported. Next, the electromagnetic coil 32 (in FIG. 2). By energizing so that the magnetic flux 55 flows in the direction of the solid line shown in FIG. 3(b), the movable body 20 is held on the fixed base 10, contrary to the above, and the movable body 40 is brought into a freely displaceable state. York 23
．． 41 facing surface 23a and . The movable body 40 is displaced in the direction in which the gap between the opposing surfaces 23a and 41d is reduced by the electromagnetic force generated on the fixed substrate 10, and by stopping the energization of the electromagnetic coil 32, the movable body 40 moves the opposing surface onto the fixed substrate 10. 23a,
416 is displaced in the traveling direction by the effective gap between
) and are self-maintained with the initial relative positional relationship shown in FIG. 3(a).

The above operation is one cycle of the stepwise linear actuator. Similarly, by alternately energizing the magnetic coils 30 and 32, the movable body 20 and 40 continuously perform stepwise motion, and An arbitrary stroke can be obtained by controlling a pulsed human power signal applied to 30.32.

A spacer 13, which is a thin resin sheet, is provided between the opposing surfaces 22a and 41c and the opposing surface 23a and 41d.
By adjusting the relative displacement l of the movable body 20.40 in the gap between the opposing surfaces, and by providing a certain gap when the opposing surfaces are in contact, a yoke is created by alternately energizing the electromagnetic coils. It works to reduce the residual magnetization of the magnet and the sound of collision on the opposing surface.

The desired characteristics of a linear actuator include a configuration that maximizes performance by minimizing device size and power consumption, and in this example, this is one of the measures of performance. The speed load characteristics are determined by the step amount in one cycle of driving, the opposing surfaces 22a and 41c, and the opposing surface 2.
It can be determined by the number of input pulses per unit time set by the magnetic force that is proportional to the square of the magnetic flux between 3a and 41d and inversely proportional to the area of the opposing surfaces and the mass of each of the moving bodies 20.40, and the parameter is The magnetic flux on one opposing surface is the magnetomotive force of the electromagnetic coil 30, 32 and the magnetic flux path,
It is mainly determined by the magnetic resistance of the gap between the opposing surfaces, and because it is driven more efficiently, the magnetic flux generated by the permanent magnets 25 and 42 is almost the same as that of the contact parts 41a and 4lb during driving
21a and 2lb should be set so that magnetic saturation does not occur when magnetic flux is superimposed, and it is necessary to consider that the holding force of the contact part in the traveling direction is always greater than the magnetic force on the opposing surface. There is. Next, a case will be described in which a straight movement is performed in a direction opposite to the traveling direction. Figure 2(a). In FIG. 3 (al), by energizing the 'r!lVi coil 30 so that a magnetic flux (not shown) flows in the opposite direction to the direction of movement described above, the holding force at the abutting portions 21a and 2lb is strengthened and the opposite abutting force is applied. The holding force at the contact portions 41a and 4lb weakens, and the movable body 20 is held on the fixed substrate 10 by the magnetic force between the opposing surfaces 22a41c generated at the same time, and the movable body 40 is displaced by a predetermined stroke in the opposite direction. The coil 32 is shown in Fig. 2(b).
, magnetic flux (not shown) in the opposite direction to that in Figure 3(b).
The movable body 40 is held by the fixed base plate 10 by energizing the electromagnetic coils 30 and 32 so that the movable body 20 is displaced by a predetermined stroke in the opposite direction to complete a cycle of operation. In the opposite direction the mobile body 20.40 is displaced continuously and stepwise.

FIG. 15(a) is a block diagram of a drive circuit that energizes the electromagnetic coils 30 and 32, and FIG. 15(b) shows the relationship between the input pulse and the behavior of the moving body 40 at that time.

A drive circuit 1 has a function of bidirectionally energizing the electromagnetic coils 30 and 32 in response to input pulses and direction signals of the traveling direction being input to a controller 150 having a normal multi-by-break function and signal switching by a gate.
52, 153 selectively output current pulses with a pulse width T to the electromagnetic coils 30, 32, and in response to the output, each moving body 2040 alternately changes its holding position with a delay time due to inertia with respect to the current pulse. In the same manner, a stepwise movement is performed stepwise by a distance Ns in proportion to the input pulse, and in the opposite direction, the stepwise movement is similarly performed by a distance S by switching the direction signal.

As described above, this embodiment selectively controls the holding force of each moving body by alternately energizing a pair of electromagnetic coils, which are magnetic drive means, and changing the direction and magnitude of the current. A linear actuator that performs forward motion is provided.

Therefore, since the drive system required for sidewalk movement is all housed within the actuator without requiring a special track on the running path, a simple configuration with a small number of parts can be realized overall. Furthermore, productivity is increased because high precision is not required for the entire running path and the support mechanism is simplified.

FIG. 4 shows a second embodiment of the present invention,
The stepping type linear actuator of this embodiment similarly includes a fixed substrate 10 and a pair of movable bodies 20.4 which are supported in contact with the substrate and are movable relative to each other by a predetermined stroke in the direction of movement.
0, the movable body 20 is arranged in parallel with the fixed substrate 10 in a positional relationship perpendicular to the direction of movement, and has contact portions 21a, 24.
a, and a permanent magnet 25 that constitutes a magnetic coupling member by sandwiching both end surfaces of different magnetic poles between the yoke 21.24 that abuts the fixed substrate 10, and the fixed substrate 10, each yoke 21. .24 to form a magnetic flux path and are magnetically coupled to the fixed substrate 10.

On the other hand, the movable body 40 is supported in contact with the fixed substrate 10 in the traveling direction by contact portions 41a to 4lb and contact portions 43a.
, 43b, each having a U-shaped yoke 41, 43 arranged in parallel, and a permanent magnet 42 having both end faces having different magnetic poles supported between the yokes 41, 43 and forming a magnetic coupling member. Similarly, the fixed substrate 10 and each yoke 4
1.43 forms a magnetic flux path and is magnetically coupled to the fixed substrate 1o, and the direction of magnetization of the permanent magnet 25.42 is such that the magnetic flux flows in the magnetic flux path in the moving body 20.40 in the same direction. They are magnetized in the same direction.

The movable body 20.40 includes a pair of yokes 22.23 and one pair of yokes 26.27 that protrude parallel to the fixed substrate 10 in both directions along the traveling direction of each yoke 2124 and have a circular cross section. A pair of inner surfaces 4 are provided and are located perpendicularly to the fixed substrate IO of the yoke 41.
1c41d is the yoke end surface 22a, 23a of the moving body 20, and the inner surface 43c, 43d of the yoke 43 is the yoke end surface 26a,
27a with a slight gap therebetween, forming opposing surfaces, and one pair of yokes 22.23 and the other pair of yokes 26.27 are wound around coil bobbins 31.33 and 35.37. A pair of electromagnetic coils 30.3
2 and another pair of electromagnetic coils 34 and 36 are respectively attached, and the electromagnetic coils 3, 0 and 32 are used as magnetomotive force, for example! If the magnetic coil 30 is used as a magnetomotive force, the yoke 41, contact portions 41a, 4lb are generated via the yoke end face 22a.
, the fixed base Fi10, the contact portion 21a, and the yoke 2l, magnetic flux paths are formed so that a constant magnetic flux flows, and the magnetic flux is used to direct the opposing surfaces 22a, 41c, and 23, respectively.
An electromagnetic force is generated at points a and 41d, and the movable bodies 20 and 40 are displaced relative to the direction of movement in a direction in which they attract each other.
A similar magnetic flux path is also created by the electromagnetic coils 34 and 36. The guide members on the fixed board 10 are the same as those in the first embodiment. The operation of the stepwise linear actuator configured as described above is basically the same as that in the first embodiment, and when driving in the advancing direction, the moving body 40 is first held on the fixed substrate 10, and then the other moving bodies A pair of electromagnetic coils 30, 34 arranged in parallel so that the coils 20 are displaced by a predetermined stroke
At the same time, electricity is applied in different directions so that the N pole is generated at the yoke end surface 23a and the S pole is generated at the yoke end surface 26a. By energizing 27a so that the N pole is generated, the movable body 20 is held, and the movable body 40 completes a predetermined stroke displacement cycle, and by alternately energizing the pair of electromagnetic coils 2 & tl. As in the first embodiment, the movable body 20.40 can perform continuous step motion on the fixed substrate 10. In this embodiment, since the magnetic flux of the pair of electromagnetic coils 30.34 and 32.36 is easily superimposed on the magnetic flux caused by the magnetic coupling member of the fixed substrate 10 and the moving body 20.40, the moving body relative to the fixed substrate 10 The contact force of 20.40 mm can be selectively and reliably controlled. Further, in this embodiment, the electromagnetic coils 30, 32 and 34.
Figure 5(a).
As shown in FIG. 5(b), it is possible to perform a rotational movement centering on the permanent magnet 2542, and as shown in FIG. The 111 coils 30 and 36 arranged in the contact part 21
The magnetic flux 56.a is directed in the direction of the solid line in the figure so that the contact force decreases at the contact portions 41a, 24a and increases at the contact portions 41a, 4lb.
57 is energized to flow, the movable body 40 is held on the fixed substrate 10, and the movable body 20 is held on the opposing surface 41c. 2
The fifth
The positional relationship is as shown in figure (a), and then one pair of iti
ff coils 32, 34 in the direction of the dotted line of the arrow.
Similarly, by energizing 59 so that it flows, the moving body 20
is held on the fixed substrate l0, and the movable body 40 is held on the opposing surface 41d.
, 23a and 26a, 43c due to the moment of 'tm force, the effective air gap between the opposing surfaces and the permanent magnet 25.4
2 to complete the cycle of rotation by a step angle determined by the distance from each opposing surface.

Therefore, in the configuration of the present invention, two sets of i
! Each movable body 2 moves on the fixed substrate 10 by a combination of magnetic coils.
0.40 is displaced while being self-maintained in any direction. FIG. 6 shows a third embodiment, and this embodiment also includes a pair of movable bodies 20 which are supported in contact with a fixed substrate IO and can be relatively displaced by a predetermined stroke in the direction of movement.
．． 40, the means for always returning the relative position to the initial positional relationship during one cycle of operation of the movable body is performed by an elastic member instead of using the conventional electromagnetic coil.

The movable bodies 20 and 40 have permanent magnets 25 and 42 disposed on the sides of the fixed substrate 10 as described above, and have contact portions 21a, respectively.
and 41a, and are magnetically coupled onto the fixed substrate 10.

Between the movable bodies 20.40, a yoke 22 is connected to the yoke 21 and protrudes from the inner surface 41c of the yoke 4l so as to form opposing surfaces 22a and 41c.
2 is equipped with a magnetic coil 30 with a coil bobbin 31, and a magnetic flux path is formed so that a constant magnetic flux flows through the yoke 22, yoke 41, fixed substrate 10, and yoke 2l, and the magnetic flux causes relative displacement in the direction of attraction to each other. do. A compression coil spring l2 is provided coaxially with the electromagnetic coil 30 between the coil bobbin 31 of the moving body 20.40 and the opposing surface 41c, and biases the opposing surfaces 22a and 41c away from each other. Yoke 2 depending on power
A regulating member l4 integrally molded with resin on the outer side of the yoke 1 and regulating the displacement of the movable body 40 in the traveling direction and also regulating the width direction of the yoke 41 surrounds and holds the yoke 4l in contact with it.
In the stepwise actuator configured as described above, by energizing the electromagnetic coil 30, the movable body 40 is held on the fixed substrate 10, and the movable body 20 is brought into a state where it can be relatively displaced by a predetermined stroke, and the opposing surfaces 22a, Due to the electromagnetic force generated between 41c, the movable body 20 is displaced stepwise by an effective gap amount against the compression coil spring l2, and then by stopping the energization of the electromagnetic coil 30, the contact portions 21a and 4
The holding force due to the magnetic coupling member 1a and the moving body 2 when energized
With the pressing force of the coil spring 12 accumulated by the displacement of the coil spring 12, the moving bodies 20 and 40 are displaced in a direction away from each other to a position where the yoke 41 comes into contact with the regulating member l4, and the moving bodies 20 and 40 are moved away from each other by the electromagnetic coil. 30 and is relatively displaced while being returned by the coil spring 19. The returned displacement amount varies depending on the falling time of the electromagnetic coil 30, the mass of each moving body, and the holding force at each contact portion 21a, 41a caused by the magnetic force.

On the other hand, if it is driven in the opposite direction, the above! magnetic coil 30
By controlling the energization on and off in the opposite direction to that described above, the movable bodies 20.4'O are displaced relative to each other while being returned to the initial state by the coil spring 19. At this time, the driving circuit is similarly achieved by using the circuit shown in FIG. 15(a).

With the above configuration, this embodiment can perform linear movement in both directions with a very simple configuration such as one electromagnetic coil 30 and the elastic member l2.

In addition, FIG. 7 shows a fourth embodiment, which has the same basic structure as the third embodiment and has a structure that simplifies the drive circuit configuration when driving in both directions. The body 20 includes a pair of yokes 2223 and a pair of electromagnetic coils 30a, 30b attached to the yokes 22.23, which are disposed in both directions along the traveling direction with the contact portion 21a with the fixed substrate 10 as the center. Moving bodies 40a and 40b are arranged to face opposing surfaces 22a and 23a of 22 and 23, respectively.

Permanent magnets 25.42a and 42b, which are magnetic coupling members, are attached to the fixed substrate 10 and 25.
The contact portions 21a, 41a and 4lb are magnetized so that the direction of magnetic flux is constant, and both end faces are supported by other yokes 24, 43a and 43b, respectively.
Between each moving body 20 and 40a and between moving bodies 20 and 40b, compression coil springs 12a and 12b, which are elastic members, are provided coaxially with the yokes 22 and 23 to urge the moving bodies away from each other. , the moving body 4
A regulating member 14 that regulates the displacement of moving bodies 40a. The moving body 20 surrounds 40b.
It is attached as an integral part of the temple.

The operation of the stepwise actuator that has been sideways controlled as described above is basically the same as that of the third embodiment, and when driven in the eight directions of the arrow, @ the on/off control of the energization of the magnetic coil 30a and the elastic member 12a. As a result, the moving bodies 20 and 40a or the moving bodies 20 and 40b are gradually moved relative to each other while being constantly returned to the initial state by energizing the R coil 30b and the elastic member 12b in the direction opposite to the eight arrow directions. Displace.

In the configuration of this embodiment, each electromagnetic coil 30a and 3
0b is energized only in one direction, which simplifies the configuration of the drive circuit.

FIG. 8 shows a fifth embodiment, and this embodiment also includes a pair of movable bodies 20 which are supported in contact with a fixed base plate 10 and are relatively displaceable by a predetermined stroke in the direction of movement.
．． 40, and the magnetic coupling member of each moving body 20.40 is constructed by using a permanent magnet and an electromagnetic coil for magnetic coupling, and the other construction is the same as that of the third embodiment.

The movable bodies 20 and 40 have yokes 21.41 with respective abutting parts 21a and 41a on the fixed substrate 10 as described above, and the fixed base i is provided on each side of the yoke 21.41.
Another yoke 24.43 having a certain gap is integrally connected to the yoke 24.43, and an electromagnetic coil 46.47 constituting a magnetic coupling member is attached to the yoke 24.43, and the movable body 20.43 is connected to the fixed substrate IO. 40 are each magnetically coupled.

Between the movable bodies 20 and 40, mutually opposing surfaces 22a and 4 are provided.
A protruding yoke 22 constituting a yoke 1c is connected to a yoke 2l of the movable body 20, and an electromagnetic coil 3o constituting a magnetic drive means is attached to the yoke 22. A pair of leaf springs 19, which are elastic members and have a dogleg shape, are attached to the opposing surface 22a.
, 41c are biased away from each other, and due to the shape accuracy and rigidity of the temporary spring 19, the opposing surfaces 22a, 4
The gap between 1c can be set arbitrarily. A thin sheet-like spacer l3 is disposed between at least one of the opposing surfaces 22a and 41c, and the movable body 20.40 is guided along the guide member 15.16 on the fixed substrate lo. In the step-type linear actuator configured as above, as shown in FIG. 9(a). (b). (C
) to explain its operation. In FIG. 9(a), when moving in the direction of arrow X, the electromagnetic coil 46 of the movable body 20 is always energized, and the movable body 2o moves in the direction of arrow A with the electromagnetic coil 46 as a magnetomotive force with respect to the fixed board 10. are magnetically coupled by the magnetic flux.

Next, as shown in Fig. 9), by energizing the electromagnetic coil 30 constituting the magnetic drive means in the direction of eliminating the magnetic flux in the eight directions of arrows at the contact part 21a, the holding force of the contact part 21a is reduced. On the other hand, since the magnetic flux in the direction of arrow B flows through the contact portion 41a, the movable body 40 is held on the fixed substrate 10 and the movable body 2
0 is in a slidable state and a magnetic force is generated between each opposing surface 22a, 41c of the movable body 20.40, so that the opposing surfaces 22a, 41c are moved against the pressing force of the pair of leaf springs 19.
The moving body 20 is relatively displaced in a direction that reduces the gap between them.

At this time, the movable body 40 is placed on the fixed substrate 10 on the opposing surface 2.
At the same time as the electromagnetic coil 30 is energized, the electromagnetic coil 47, which is a magnetic coupling member of the movable body 40, is connected to the contact portion 41 in order to ensure that the electromagnetic coil 47 is held securely against the magnetic force between the moving body 40 and the electromagnetic coil 30.
At point a, electricity is applied so that the magnetic flux flows in the same direction as arrow B, further increasing the holding force at the contact portion 41a. Next, as shown in FIG. 9(C), by stopping the energization of the im coils 30 and 47, the magnetic flux at the contact portion 41a decreases rapidly, while the magnetic flux at the contact portion 21a decreases from the electromagnetic coil 4.
6 is maintained, the movable body 20 is held at the contact portion 21a, and the movable body 40 is moved by the accumulated leaf spring 19.
The pressing force causes displacement in the advancing direction only by a predetermined stroke.

The above movement is one cycle of sidewalk movement, and the facing surface 22
Only the effective gap ΔS between a and 41c is progressively displaced.

On the other hand, when the moving body 40 is displaced in the opposite direction to the arrow X direction, the moving body 40
By keeping the electromagnetic coil 47, which is a magnetic coupling member, energized at all times, and simultaneously controlling the energization of the electromagnetic coil 30, which is a magnetic drive means, and the electromagnetic coil 46 in the moving body 20, it is possible to perform step motion in the same way. can.

With the above configuration, this embodiment can perform bidirectional linear motion with a reliable step amount with a very simple configuration such as one electromagnetic coil 30 and elastic member 19. FIG. 10 shows a sixth embodiment, the basic components of which are the same as those of the fifth embodiment, and are configured to simplify the drive circuit and reliably perform stepwise displacement when driving in both directions. Similarly, the movable bodies 20 and 40 are supported in contact with the fixed substrate 10, and the movable body 20 is disposed in both directions along the traveling direction with the abutting portion 21a as the center, and has a pair of opposing surfaces 22a, 41c, and 23a. ．． 41d, and an electromagnetic coil 30.32 serving as a magnetic drive means is attached to the yoke 22.23, and each moving body 20 and 40
Similarly, doglegged leaf springs 19a and 19b are provided between the two and biased in the direction of movement away from each other. The movable body 20 has permanent magnets 25a. 2
5b as a magnetomotive force, the movable body 40 uses the electromagnetic coil 48 provided on the side surface of the central portion of the yoke 4l as a magnetomotive force to move the fixed substrate 10.
A magnetic flux path is formed between each of the concubine parts 21a and 4.
1a and 4lb are magnetized or energized so that the direction of magnetic flux is the same.

In the stepwise linear actuator configured as described above, its operation is basically the same as that in the fifth embodiment, and it is always magnetically coupled to the fixed substrate lO by the magnetic coupling member of the moving body 20. When traveling in the direction of arrow
By simultaneously controlling the energization of the movable bodies 20 and 40, the movable bodies 20 and 40 are displaced stepwise in both directions using the restoring force of the leaf springs 19a and 19b, which are elastic members.

In the configuration of this embodiment, each electromagnetic coil 30, 32 is energized in only one direction, which simplifies the configuration of the drive circuit and allows bidirectional linear movement with a reliable step amount.

FIG. 11 shows a seventh embodiment, in which the fixing member is composed of a shaft-like member 111 made of a magnetic material and having a central axis in the direction of travel, and is brought into contact with the shaft-like member 111. It consists of a pair of movable bodies 120 and 140 that are supported and can be displaced relative to each other by a predetermined stroke in the traveling direction. It has a disk-shaped yoke 121 that is supported in abutment and has an abutment part 121a, and a central hole end surface 124a that is adjacent to the yoke 121 and is similarly arranged coaxially with the shaft-like member 111 with a certain gap therebetween. It has a yoke 124 and a ring-shaped permanent magnet 125 whose end faces with different magnetic poles are supported by the yokes 121 and 124 and which is also arranged coaxially with the shaft-shaped member l1l. As yoke l21, contact part 1 2 1
a, shaft-shaped member 111, ring-shaped member 21 and yoke end surface 12
A magnetic flux path is formed such that a constant magnetic flux flows through the air gap between the 4a and the yoke 124. On the other hand, the movable body 140 has a yoke 141 which is disposed coaxially on the shaft member 111 and spaced apart from the yoke 121 and has a similar configuration to the movable body 120.
It has a yoke contact portion 141a, a yoke 143, and a permanent magnet 142, and a magnetic flux path is formed between the shaft-like member 111 and the movable body 140 using the permanent magnet 142 as a magnetization nozzle, and the contact portion 121a. The magnetization directions of the permanent magnets 125 and 142 are magnetized in the same direction so that the direction of magnetic flux is constant at 141a, and each moving body 120, 140 is magnetically connected to the shaft member 111 by a magnetic coupling member. combined.

The yoke 12 of the moving body 120 is located between the moving bodies 120 and 140.
A cylindrical yoke 1 connected to 1 and coaxial with the shaft member 111.
22 is disposed, and its end surface 122a faces the inner surface 14lb of the yoke 141 with a slight gap therebetween, and the movable body 120
．． The yoke 1 constitutes a pair of opposing surfaces of the yoke 140.
An electromagnetic coil 130 with a coil bobbin 131 is installed inside the yoke 122a and the yoke 122a and the side surface 14lb using the electromagnetic coil 130 as a magnetomotive force. A magnetic flux path is formed between the yoke 141, the shaft-shaped member 1l1, the contact portion 121a, and the yoke 121, and the magnetic flux generates 11 magnetic force between the opposing surfaces 122a and 14lb, and the moving body 1
20 and 140 are displaced relative to each other on the shaft-like member 111 in the suction direction. In addition, the coil hobbin 131 and the yoke side surface 1
A compression coil spring 112 is connected to the shaft-like member 11 between the 4 lbs. so as to bias the yokes 121 and 141 in the direction away from each other.
A cup-like casing 113 and its casing 1 are provided coaxially with the movable bodies 120 and 140 on the outer periphery of the movable bodies 120 and 140.
A disk member 114 that is engaged with the yoke 13 and restricts the axial displacement of the yoke 124 of the movable body 120 is attached.
In this embodiment, the contact portion 1 of the yokes 121 and 141 is
21a and 141a also serve as guide members.

In the stepping actuator configured as described above, by energizing the IF magnetic coil 130, the movable body 140 is held on the fixed substrate 111 similarly to the above-described embodiment, and the movable body 120 can be relatively displaced by a predetermined stroke. When the state is reached, the opposing surface 122a. Due to the electromagnetic force generated between 14lb and 14lb, the movable body 120 is displaced stepwise by the effective gap amount against the compression coil spring 112, and then by stopping the current supply to the 'R magnetic coil 130, the contact portions 121a, 14
The holding force by the magnetic coupling member at 1a and the moving body 1 when energized
The coil spring 112 accumulated by the displacement of 20
Due to the pressing force, the movable bodies 120 and 140 are displaced in a direction away from each other to a position where the yoke 124 comes into contact with the disk member 14, and the movable bodies 120 and 140 are displaced relative to each other.

With the above structure, this embodiment uses the shaft member as a fixed member and also as a guide member, and has one electromagnetic coil 30 and one elastic member 1.
2, it is possible to perform linear movement in both directions, and a very simple linear actuator can be constructed even when the main body of the device is a die-cast substrate made of aluminum or the like.

12 and 13 show the eighth embodiment, which basically has the same configuration as the first embodiment, but in the first embodiment, it can be slid freely on the fixed substrate. Either one of the pair of supported moving bodies 20.40 is fixed to the main body of the device to which this linear actuator is mounted, and the other moving body and the fixed base FilO can be relatively displaced within a predetermined stroke. In FIG. 12, a fixing member 70 having a configuration similar to that of the movable body 40 in FIG.
is fixed at the lower surface of the center of the yoke 71, and a pair of abutting portions 71a and 7lb arranged in the direction of movement supports a movable substrate 60 made of a magnetic material so as to be relatively displaceable. Joint part 71a. A moving body 90 having a structure similar to the moving body 20 in FIG. 1 and having a yoke 91 is installed between 7lb.
The movable plate 6 is moved at the contact portions 91a and 9lb of the yoke 91.
Permanent magnets 72.95, which are magnetic coupling members, are in contact with the fixed member 70 and the movable body 90, respectively. They are magnetized and held so that the magnetic flux flows in the same direction.

Between the fixed member 70 and the movable body 90, there is an inner surface 71 of the yoke 7l.
Yokes 92 and 93 forming opposing surfaces with c and 71d and protruding from the yoke 9l in both directions parallel to the substrate 1lO.
is arranged, and the electromagnetic coil 80 is placed on the yoke 92,93.
．． 82 is wound around and attached to coil bobbins 81 and 83, and when the electromagnetic coil 80 is used as a magnetomotive force, the yoke 92
, opposing surface 92a and yoke inner surface 71C1 contact portion 71a,
7lb, movable plate 61. A magnetic flux path is formed so that a constant magnetic flux flows through the contact portions 91a, 9lb and the yoke 91, and together with the electromagnetic coils 80 and 82, they constitute a magnetic drive means.

The movable plate 60 has both side portions 60a. Guide member 74 that guides 60b
．． 75 is integrally provided, and the movable plate 60 is movably displaced by a predetermined stroke along the traveling direction.

The basic operation of the present invention having the above configuration is the same as that of the first embodiment, and when no electricity is applied, the movable temporary 60 is self-retained by the fixed member 70 by the magnetic coupling member, and the movable body 90 is self-retained by the movable Fi 60. By energizing the Nm coil 80 so that the magnetic flux 88 flows in the direction of the solid line shown in FIG.
8.98 and the contact portions 71a and 7l of the fixing member 70
At b, the contact force decreases and the contact portion 91a of the moving body 90
At , the contact force increases, and the electromagnetic force generated between the opposing surfaces 71C and 92a causes the movable plate 60 to move in the direction of reducing the gap between the opposing surfaces 71c and 92a of the fixed member 70 while being held by the movable body 90. It is displaced together with the body 90.

Next, by stopping the energization of the electromagnetic coil 80 and energizing the electromagnetic coil 82, the contact force increases at the contact portions 71a, 7lb of the fixing member 70, contrary to the above, and the contact portions 91a, 7lb increase.
At 9lb, the contact force decreases, and the electromagnetic force generated between the opposing surfaces 71d and 93a returns only the movable body 90 to the initial relative positional relationship shown in FIG. 1O, with the movable body 60 being held by the fixed member 70. After completing the recycle operation, the movable plate 6 is similarly energized alternately to the electromagnetic coils 80 and 82.
The movable plate 60 can be moved in the opposite direction by changing the direction in which the electromagnetic coils 80 and 82 are energized.

Note that the electromagnetic coils 80 and 82 have the same function even if they are placed on the fixing member 70 side.

As described above, in this embodiment, if the movable plate 60 is made of a magnetic material or a substrate integrally formed with a magnetic material, it is possible to perform stepwise motion and realize a linear actuator having a simple structure with a small number of parts.

Furthermore, it is easy to use the movable plate as a member of the device main body to which the linear actuator is attached, and the entire device can be simplified.

Further, the magnetic driving means may be the fixed member 70 or the movable body 90.
Since it is fixed to the side, there is no movement associated with the wiring, which increases the reliability of the device, and there are fewer places where precision is required for the required stroke, making it superior in terms of cost}, &[l. ．． In addition, in the above embodiment, the fixed substrate IO is used as a fixed member, and the movable plate 60 is used as a movable member.
was given as an example, but if it is made of a magnetic material and is linear, for example, if it is shaft-shaped with its central axis in the direction of travel, it will have the same function, and if the permanent magnet of the magnetic coupling member is connected to the electromagnetic coil. Even if it is replaced with excitation, it will perform the same function.

Moreover, the shapes of the fixed member moving body and the guide member shown in this example are not limited.

FIG. 14 shows an example of the application of the present invention, in which recorded information is transferred from a disk-shaped recording medium 1 (11) having information tracks recorded in a spiral or concentric form to an optical binocular amplifier 102 using semiconductor laser light. The stepping linear actuator 100 is supported in contact with a fixed substrate 110, which is the base of the disk device, and the optical pick amplifier 102 is mounted on the actuator 100. Retained.

The recording medium 1 (11) is rotationally driven by a spindle motor 1 (13), and a groove 105 is provided on the fixed substrate 110 along the radial direction of the recording medium 1 (11).
A guiding guide pin 106 protruding from the lower part of the linear actuator lOO is disposed at 5 so as to be freely fitable therein.

The linear actuator 100 is guided by the groove 105 and driven in the radial direction of the recording medium 1 (11) while correcting the trunk error of the optical pick anop 102 with respect to the recording medium 1 (11).

As described above, by providing a guide groove integrally with the fixed substrate 110, which is a fixed member, and allowing the actuator 100 to slide in contact with the groove 105, the number of parts of the entire optical disk device can be significantly reduced, making it compact and thin. The transformation is measured.

Further, the guide groove portion 105 can be set at any position if the magnetic material #4 is used, and the degree of freedom in designing the entire drive #i position can be increased.

Effects of the Invention As described above, the present invention provides a fixing member made of a magnetic material and having a running path, and a six-way coupling member that magnetically generates an abutting force on the fixing member. first and second movable bodies having opposing surfaces so as to be relatively displaceable within a stroke; and means for working with the first and second movable bodies, the first and second movable bodies facing each other; By providing a magnetic driving means that generates a TiI force on the surface, the fixed member is always held in stable contact with the fixed member by a magnetic coupling member of a simple structure such as a permanent magnet, and the first and second movements are All of the drive parts that can obtain a specified stroke relative to the inside of the body are housed, and the structure does not require special tracks such as protruding magnetic pole teeth on the fixed member that serves as the travel path, so the overall number of parts is reduced. This has the excellent effect of realizing a simple and compact drive device with a small number of units.

In addition, the support mechanism of the movable body relative to the fixed member can be simplified, and by simply managing the main accuracy within the actuator, high-precision positioning control and arbitrary stroke settings can be performed using pulse-shaped input signals, making it possible to set the entire device. It is possible to provide a linear actuator with low cost and high productivity.

Furthermore, by using the linear actuator of the present invention, a guide member can be provided that also serves as a part of the entire drive device, making it possible to reduce the cost and size of the entire drive device.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view of a stepping linear actuator according to a first embodiment of the present invention, and FIGS.
Side sectional view at 1-1' in Figure (a), Figure 3 (a),
(b) is a side sectional view taken along line 2-2' in FIG. 2(a);
FIG. 4 is an exploded perspective view of a stepping linear actuator according to a second embodiment of the present invention, FIGS. 5(a) and (b) are cross-sectional views of FIG. 4, and FIG. FIG. 7 is an exploded perspective view of the stepping linear actuator in the fourth embodiment of the present invention, and FIG. 8 is a fifth embodiment of the present invention. An exploded perspective view of the stepping linear actuator in FIG. 9(a). (b), (C) are side sectional views of Fig. 8,
Figure O is an exploded perspective view of a stepping linear actuator according to a sixth embodiment of the present invention, and Figure 1l is a side sectional view of a stepping linear actuator according to a seventh embodiment of the present invention.
FIG. 12 is an exploded perspective view of a stepping type linear actuator in the eighth embodiment of the present invention, FIG. 13 is a side sectional view of FIG. 12, and FIG. 14 is a stepped linear actuator in the first embodiment of the present invention. FIG. 15 is a perspective view of an optical pisok-up transfer device to which a linear actuator is applied (al is a circuit diagram of the stepwise linear actuator of the present invention, and in FIG. 15) is an explanatory diagram of the operation of the stepwise linear actuator of the present invention. , FIG. 16 is a conceptual diagram of a conventional linear valve smoke. lO...Fixing member, l2...Elastic member, 13...Spacer, 14...Regulating member, 15.16...Guiding member , 20...
- First moving body, 21, 22.23... Yoke of first moving body, 25... Permanent magnet forming magnetic coupling member, 30.32... - Electromagnetic coil constituting the magnetic drive means, 40... second moving body,
41.43...Yoke of second moving body, 42.
...Permanent magnet that constitutes the magnetic coupling member.

Claims (19)

[Claims] (1) A fixed member having a running path made of a magnetic material, an opposing surface that is in contact with and supported by the fixed member and is disposed with a gap therebetween so as to be able to move relative to each other within a predetermined stroke, and the fixed member. A means for cooperating with first and second moving bodies comprising magnetic coupling members each magnetically generating a contact force, and a means for cooperating with the first and second moving bodies, the opposing surface of each of the moving bodies generates a magnetic force to magnetically control the respective contact forces of the first and second movable bodies by the magnetic coupling member, and also relatively displaces each movable body by the magnetic force to the fixed member. A step-type linear actuator characterized in that it comprises magnetic drive means for step-by-step displacement of the first and second movable bodies. (2) The magnetic coupling members of the first and second movable bodies are connected to the yoke member and its abutment portion, each having a contact portion with respect to the fixed member, so that each movable body forms a magnetic flux path between the fixed members. 2. The stepwise linear actuator according to claim 1, further comprising a permanent magnet magnetized so that the directions of magnetic flux are the same and held by the yoke member. (3) The opposing surfaces of the first and second movable bodies are connected to the yoke member of the magnetic coupling member, and the end face of the yoke member is disposed on each movable body so as to be parallel to the fixed member. 2. The step-type linear actuator according to claim 1, wherein the gaps are arranged variably along the traveling direction of the moving body. (4) The stepping type linear actuator according to claim (3), wherein the opposing surfaces of each moving body are located on the center line of the contact portion of the magnetic coupling member. (5) Claim (3) characterized in that a sheet-shaped spacer made of a non-magnetic material is added to the opposing surface of each moving body.
The stepping linear actuator described. (6) The magnetic driving means is configured such that opposing surfaces between each moving body are arranged bidirectionally along the traveling direction centering on the contact portion of the magnetic coupling member, and magnetic force is alternately generated on each of the opposing surfaces. A pair of electromagnetic coils are attached to the yoke member having each of the opposing surfaces so that a magnetic flux path is formed between the first and second movable bodies and the fixed member through the contact portions of the coupling members. The stepping linear actuator according to claim 1, characterized in that: (7) Claim (1) characterized in that the magnetic coupling members of the first and second movable bodies are configured such that a gap is provided between each movable body and the fixed member in a magnetic flux path created between the fixed members. The stepping linear actuator described. (8) A magnetic drive means is arranged between a pair of opposing surfaces between each moving body, and an electromagnetic coil attached to a yoke member having the opposing surfaces is arranged between each moving body to move the opposing surfaces away from each other in the traveling direction. 2. The stepping linear actuator according to claim 1, further comprising an elastic body that biases the linear actuator in a direction. (9) The stepping type linear actuator according to claim (8), wherein the elastic body of the magnetic drive means is constituted by a compression coil spring disposed coaxially with the yoke member. (10) A stepping type linear train according to claim (8), characterized in that one of each of the moving bodies is integrally formed with a regulating member that regulates the relative displacement of the other moving body in the direction of movement. actuator. (11) The magnetic driving means is arranged with facing surfaces between each moving body bidirectionally along the traveling direction centering on the contact surface of the magnetic coupling member, and alternately generates magnetic force on each of the facing surfaces. A pair of electromagnetic coils attached to the yoke member having the opposing surfaces so that a magnetic flux path is formed between the first and second moving bodies and the fixed member through the abutting portions of the coupling members, and each of the moving bodies. 2. The stepping type linear actuator according to claim 1, further comprising an elastic body disposed between the elastic bodies and urging the facing surfaces in a direction away from each other in the traveling direction. (12) The magnetic coupling members of the first and second movable bodies are connected to a yoke member having an abutting portion on the fixed member and the respective abutting portions so that each movable body forms a magnetic flux path between the fixed members. 2. The stepping type linear actuator according to claim 1, further comprising an electromagnetic coil attached to the yoke member so that the direction of the magnetic flux is the same. (13) A claim characterized in that the fixed member is composed of a plate-shaped fixed substrate having a flat running path, and a guide member is arranged so as to freely guide the first and second movable bodies along the traveling direction. The stepping linear actuator according to item (1). (14) Claim (13) characterized in that the guide member of the fixed member is constituted by a groove provided integrally with the fixed member and a guide pin provided on each movable body and slidably fitted into the groove. The stepping linear actuator described. (15) The step according to claim (13), wherein the guide member of the fixed member is constituted by a regulating surface that prevents each movable body from separating from the fixed member and a guide surface that guides each movable body. Progressive linear actuator. (16) Claim (1) characterized in that the fixing member is constituted by a linear shaft-like member having a central axis in the direction of movement.
The stepping linear actuator described. (17) The stepping linear actuator according to claim (16), wherein the first and second movable bodies having magnetic coupling members and the magnetic drive means are configured coaxially with the axial fixed member. . (18) The magnetic coupling member of each moving body is magnetized with a pair of yoke members each having a pair of abutting portions against the fixed member, and each of the abutting portions is magnetized so that the magnetic flux direction is the same, and both end faces in the magnetization direction are magnetized. a permanent magnet sandwiched between the pair of yoke members, and the magnetic drive means is arranged bidirectionally along the traveling direction centering on the pair of abutting portions of the magnetic coupling member between each moving body. A pair of yoke members having opposing surfaces and respectively connected to the pair of yoke members of the magnetic coupling member are disposed, and the yoke member, the fixed member, and the contact portion of the yoke member of each magnetic coupling member having magnetic flux in the same direction are provided. 2. The stepping linear actuator according to claim 1, further comprising a pair of electromagnetic coils attached to the pair of yoke members such that a magnetic flux path is formed through the pair of yoke members. (19) A fixed member fixed to the device main body, a movable member that is supported in contact with the fixed member and has a running path made of a magnetic material, and a movable member that is spaced apart from the fixed member and supports the movable member in contact with it. A movable body that has opposing surfaces with a gap between the fixed members and in the direction of movement and is movable relative to each other within a predetermined stroke; A magnetic coupling member that generates a contact force, a means for cooperating between the fixed member and the movable body, which generates a magnetic force on the opposing surface and magnetically reduces the contact force between the fixed member and the movable body by the magnetic coupling member. and a magnetic drive means for controlling the movable member relative to the fixed member and displacing the movable member stepwise with respect to the fixed member by using the magnetic force of the moving member. actuator.