JPH03151694A - Sealing method for electronic device housing - Google Patents

Sealing method for electronic device housing

Info

Publication number
JPH03151694A
JPH03151694A JP29068589A JP29068589A JPH03151694A JP H03151694 A JPH03151694 A JP H03151694A JP 29068589 A JP29068589 A JP 29068589A JP 29068589 A JP29068589 A JP 29068589A JP H03151694 A JPH03151694 A JP H03151694A
Authority
JP
Japan
Prior art keywords
laser
package
solder
electronic device
welding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP29068589A
Other languages
Japanese (ja)
Inventor
Kozo Shimizu
浩三 清水
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP29068589A priority Critical patent/JPH03151694A/en
Publication of JPH03151694A publication Critical patent/JPH03151694A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate deformation at a cover or the like by inserting a solder sheet to a junction and laser welding it. CONSTITUTION:When a cover made of the same iron alloy as that of a vessel is brought into contact with the vessel made of the alloy having a glass terminal and is hermetically sealed, a solder sheet is inserted to the junction of both, and welded by laser irradiation. That is, when a solder sheet 5 is inserted between the vessel 2 for forming a package 1 and a cover 3 and irradiated with a laser, the laser of the power of the degree for melting the solder is sufficient. Accordingly, the temperature rise of the parts of be welded may be low, and hence a stress is small. Thus, a deformation such as warpage of a package is eliminated, and an improper external appearance is eliminated.

Description

【発明の詳細な説明】 [概要] 電子装置を内蔵する筐体の封止方法に関し、筐体に変形
を起こすことなくレーザ溶接することを目的とし、 ガラス端子を備えた鉄系合金よりなる容器に同じ鉄系合
金よりなる蓋を当接して密封する際に、両者の接合部に
半田シートを挿入し、レーザ照射を行って溶接すること
を特徴として電子装置筐体〔産業上の利用分野〕 本発明は電子装置筐体の封止方法に関する。
[Detailed Description of the Invention] [Summary] Regarding a method of sealing a housing containing an electronic device, the purpose is to perform laser welding without causing deformation of the housing, and the present invention relates to a container made of an iron-based alloy and equipped with a glass terminal. Electronic device casing [Industrial application field] characterized in that when a lid made of the same iron-based alloy is brought into contact with the casing and sealed, a solder sheet is inserted into the joint between the two, and the welding is performed by laser irradiation. The present invention relates to a method for sealing an electronic device housing.

光伝送システムなど高度の信軌性が必要であるに拘らず
、戸外など温度や湿度が変化する環境に設置される電子
装置については、ハーメチックシール構造がとられてい
る。
Although a high degree of reliability is required, such as in optical transmission systems, electronic devices installed in environments where temperature and humidity change, such as outdoors, have a hermetic seal structure.

こ\で、筐体(以後パッケージ)には入出力用のガラス
端子を設けることが必要なことから、ガラス端子の封止
材やパッケージの構成材としてはガラスに熱膨張係数を
近かずけた鉄系合金が使用されている。
Since it is necessary to provide glass terminals for input and output on the casing (hereinafter referred to as the package), iron, which has a coefficient of thermal expansion close to that of glass, is used as a sealing material for the glass terminals and as a component of the package. alloys are used.

例えば鉄−42%ニッケル(Pe−42%Ni) 、 
Pe−52%Ni、鉄−28%クローム(Fe−28%
Cr) +鉄29%ニッケルー17%コバルト(Fe−
29%−17%Co、通称コバール)+Fe−42%N
i−6%Cr、通称シルバニア)などがこれである。
For example, iron-42% nickel (Pe-42% Ni),
Pe-52% Ni, iron-28% chromium (Fe-28%
Cr) +29% iron nickel-17% cobalt (Fe-
29%-17%Co, commonly known as Kovar) + Fe-42%N
Examples include i-6%Cr (commonly known as Sylvania).

そして、パッケージを構成する容器に電子装置を装着し
、入出力端子を容器に設けであるガラス端子に接続した
後に、蓋を位置合わせして溶接することによりハーメチ
ックシールパッケージが形成されている。
Then, after mounting an electronic device in a container constituting the package and connecting input/output terminals to glass terminals provided on the container, the lid is aligned and welded to form a hermetically sealed package.

〔従来の技術] パッケージのハーメチックシール方法としてはレーザ溶
接が行われている。
[Prior Art] Laser welding is used as a method for hermetically sealing packages.

こ−で、小形軽量の必要性からパッケージの板厚は薄く
なり、板厚としては0.5 mm程度のものが使用され
ているが、薄い材料同士の溶接では材料に剛性がないこ
とから、レーザ溶接後に反りなどの変形が発生し易い。
Due to the need for compactness and light weight, the thickness of the package has become thinner, and the thickness of the package is about 0.5 mm, but when welding thin materials together, the materials lack rigidity. Deformation such as warping is likely to occur after laser welding.

すなわち、熱収縮による応力を緩和できず、また材料自
身が薄くなるに従って弾性変形が生じやすいことから反
りが起こるのである。
In other words, warpage occurs because the stress caused by thermal contraction cannot be alleviated, and as the material itself becomes thinner, elastic deformation tends to occur more easily.

第2図はこの状態を示すもので、パッケージlを構成す
る容器2と蓋3とが接合している端面にレーザ光を走査
することにより溶接部4が作られているが、溶接後に蓋
3に反りが発生する。
FIG. 2 shows this state. A welded part 4 is created by scanning a laser beam on the end surface where the container 2 and the lid 3 that make up the package l are joined. After welding, the lid 3 Warping occurs.

そこで、従来は変形の生し易い部材(この場合は蓋)を
厚くする方法で対処していた。
Conventionally, this problem has been dealt with by increasing the thickness of the member that easily deforms (in this case, the lid).

然し、この方法では良好な溶は込み深さを得るには大き
な溶接エネルギーを必要とし、また溶接部4は1000
°C以上に加熱されるために、パッケージ1に格納され
ている電子装置への影響が懸念される。
However, this method requires a large amount of welding energy to obtain a good penetration depth, and the welded portion 4
Since it is heated to a temperature above .degree. C., there is concern that it may affect the electronic devices stored in the package 1.

そこで、この対策として半田づけ接合が考えられた。Therefore, soldering was considered as a countermeasure to this problem.

然し、半田づけする場合にはパッケージ全体を半田づけ
温度にまで加熱する必要があり、この場合は先と同様に
加熱による電子装置の劣化が懸念される。
However, when soldering, it is necessary to heat the entire package to a soldering temperature, and in this case, as before, there is a concern that the electronic device may deteriorate due to heating.

また、半田づけにはフラックスの使用が必要であるが、
パッケージ内部に付着するフラックスによる腐蝕の問題
がある。
Also, soldering requires the use of flux,
There is a problem of corrosion due to flux adhering to the inside of the package.

また半田の濡れ性を高めるために接合面には金(Au)
メツキなどの表面処理が必要である。
In addition, gold (Au) is applied to the bonding surface to improve solder wettability.
Surface treatment such as plating is required.

このように各種の方法が試みられてはいるが、これらは
コスト低減や軽量化の目標に反することから対策が必要
であった。
Although various methods have been tried as described above, countermeasures have been required since these go against the goals of cost reduction and weight reduction.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

電子機器をハーメチックシールするパッケージにはレー
ザ封止が行われおり、小形軽量化の必要性から厚さの薄
い鉄系合金が使用されている。
Laser sealing is used to hermetically seal electronic devices, and thin iron-based alloys are used to make them smaller and lighter.

然し、レーザ溶接後の熱収縮などが原因してパッケージ
を構成する蓋などに変形が生じ易く、この対策が必要で
あった。
However, the lid and other components of the package tend to deform due to heat shrinkage after laser welding, and countermeasures have been necessary.

〔課題を解決するための手段〕[Means to solve the problem]

上記の課題はガラス端子を備えた鉄系合金よりなる容器
に同じ鉄系合金よりなる蓋を当接してハーメチックシー
ルを行う際に、両者の接合部に半田シートを挿入し、レ
ーザ照射を行って溶接することを特徴として電子装置筐
体の封止方法を構成することにより解決することができ
る。
The problem mentioned above is that when a lid made of the same iron alloy is brought into contact with a container made of an iron alloy equipped with a glass terminal to form a hermetic seal, a solder sheet is inserted into the joint between the two and laser irradiation is performed. This problem can be solved by configuring a method for sealing an electronic device case using welding.

〔作用〕[Effect]

本発明は接合部に半田シートを挿入してレーザ溶接を行
う行うものであり、第1図は溶接後の断面図である。
In the present invention, laser welding is performed by inserting a solder sheet into the joint, and FIG. 1 is a sectional view after welding.

すなわち、パッケージIを構成する容器2と蓋3との間
に半田シート5を挿入してレーザ照射を行うもので、こ
の場合、レーザ照射は半田が溶融する程度のパワーで足
りるため溶接部の温度上昇は少なくて済み、従って応力
の発生量は少ない。
That is, the solder sheet 5 is inserted between the container 2 and the lid 3 that constitute the package I, and laser irradiation is performed. Less rise is required and therefore less stress is generated.

また、使用する半田としては鉛(Pb)系の高融点半田
が適当であるが、pb系の半田は伸びの大きな材料であ
るために熱収縮に伴う応力も半田自体の塑性変形によっ
て吸収されると云う利点がある。
In addition, lead (Pb)-based high melting point solder is suitable as the solder to be used, but since PB-based solder is a material with high elongation, stress caused by thermal contraction is absorbed by the plastic deformation of the solder itself. There is an advantage.

そのために、第1図に示すようにパッケージ1を構成す
る容器2と蓋3を同じ厚さの材料を用いても反りなどの
変形が生ずることはない。
Therefore, as shown in FIG. 1, even if the container 2 and the lid 3 constituting the package 1 are made of materials with the same thickness, no deformation such as warpage will occur.

次に、接合面にAuメツキが施されている場合もあるが
、従来の溶接においては^Uからなる溶接部にFeが混
入して凝固割れを生じ、不良となると云う問題があるが
、半田シートを挿入する場合にはこのような問題はなく
信顛性の高い溶接を行うことが可能となる。
Next, in some cases, the joint surfaces are plated with Au, but in conventional welding, there is a problem that Fe gets mixed into the welded part made of ^U, causing solidification cracks and resulting in defects. When inserting a sheet, there is no such problem and it becomes possible to perform highly reliable welding.

〔実施例〕〔Example〕

パッケージ材料としてFe−42%Niを用い、これを
用いて第1図に示すような厚さが0.5 mmの容器2
と蓋3を形成した。
Using Fe-42%Ni as a package material, a container 2 with a thickness of 0.5 mm as shown in FIG.
and lid 3 was formed.

次に、半田シートとして組成がPbi、0%5n−1,
5%Ag(融点309°C)で厚さが0.3Mのものを
準備し、これを容器2と蓋3との間に挟んで従来のよう
にしてレーザ溶接を行った。
Next, as a solder sheet, the composition was Pbi, 0%5n-1,
A sample made of 5% Ag (melting point 309°C) and a thickness of 0.3M was prepared, and this was sandwiched between the container 2 and the lid 3, and laser welding was performed in the conventional manner.

すなわち、レーザとしてはネオジウム−イツトリウム・
アルミニウム・ガーネ・ント(Nd−vAG)  レザ
を用い、条件は、 パルス幅:3〜6IIls、   焦点外し量:On+
m平均出カニ50〜150 W、  パルスレー1・:
 60ppS。
In other words, as a laser, neodymium-yttrium
An aluminum garnet (Nd-vAG) laser was used, and the conditions were: Pulse width: 3 to 6 IIls, Defocus amount: On+
m average power output 50-150 W, pulse ray 1:
60ppS.

溶接速度: 150 mm7分。Welding speed: 150 mm 7 minutes.

レンズ焦点距離: too mm、 シールドガス:^
rガス圧カニ 1.5 kg/ cm2  ガス流量:
30j!/分である。
Lens focal length: too mm, shielding gas: ^
r Gas pressure crab 1.5 kg/cm2 Gas flow rate:
30j! /minute.

この結果、蓋3に反りのないハーメチックシールパッケ
ージを得ることができた。
As a result, it was possible to obtain a hermetically sealed package in which the lid 3 did not warp.

第3図はパルス幅を3〜6msと変えて得たレーザ出力
と接合強さとの関係図であって、溶接部の接合強さはレ
ーザ出力が100 Wの場合が最大であって約2.5k
g/ mm2の値を得ることができる。
FIG. 3 is a graph showing the relationship between laser output and bond strength obtained by changing the pulse width from 3 to 6 ms, and shows that the bond strength of the welded part is maximum when the laser output is 100 W, and is approximately 2.5 ms. 5k
A value of g/mm2 can be obtained.

なお、レーザ出力がそれ以上に増すと、半田シートだけ
でなく接合部の容器2と蓋3も溶けるようになり、この
場合は接合強さは逆に減少してくる。
Note that if the laser output increases beyond that, not only the solder sheet but also the container 2 and lid 3 at the joint will melt, and in this case the joint strength will conversely decrease.

同図で破線6はこの状態を示しているが、パルス幅が3
11Isと411Isの場合はエネルギーが大きいため
にレーザ出力150Wの場合に既に顕著な溶解が認めら
れる。
In the same figure, the broken line 6 indicates this state, and the pulse width is 3.
In the case of 11Is and 411Is, significant dissolution is already observed at a laser output of 150 W because the energy is large.

次に、気密性についてはヘリウム(He)リークディテ
クターで試験を行ったが、何等問題は認められなかった
Next, airtightness was tested using a helium (He) leak detector, but no problems were found.

〔発明の効果〕〔Effect of the invention〕

以上記したように本発明の実施により、パッケージの反
りなどの変形がなくなり、これにより外観不良をなくす
ることができる。
As described above, by carrying out the present invention, deformation such as warping of the package is eliminated, thereby eliminating appearance defects.

また同じ板厚の金属板を使えるために軽量化も同時に達
成することができる。
Furthermore, since metal plates of the same thickness can be used, weight reduction can be achieved at the same time.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明を実施したパッケージの溶接後の断面図
、 第2図は従来の溶接後の状態を示す断面図、第3図はレ
ーザ出力と接合強さとの関係図、である。 図において、 1はパッケージ、     2は容器、3は蓋、   
      4は溶接部、5は半田シート、 である。
FIG. 1 is a cross-sectional view of a package according to the present invention after welding, FIG. 2 is a cross-sectional view showing the conventional state after welding, and FIG. 3 is a relationship between laser output and bonding strength. In the figure, 1 is the package, 2 is the container, 3 is the lid,
4 is a welded part, and 5 is a solder sheet.

Claims (1)

【特許請求の範囲】[Claims]  ガラス端子を備えた鉄系合金よりなる容器に同じ鉄系
合金よりなる蓋を当接して密封する際に、両者の接合部
に半田シートを挿入し、レーザ照射を行って溶接するこ
とを特徴とする電子装置筐体の封止方法。
When a container made of an iron-based alloy with a glass terminal is brought into contact with a lid made of the same iron-based alloy and sealed, a solder sheet is inserted into the joint between the two, and laser irradiation is performed to weld the two. A method for sealing an electronic device case.
JP29068589A 1989-11-08 1989-11-08 Sealing method for electronic device housing Pending JPH03151694A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP29068589A JPH03151694A (en) 1989-11-08 1989-11-08 Sealing method for electronic device housing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29068589A JPH03151694A (en) 1989-11-08 1989-11-08 Sealing method for electronic device housing

Publications (1)

Publication Number Publication Date
JPH03151694A true JPH03151694A (en) 1991-06-27

Family

ID=17759177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP29068589A Pending JPH03151694A (en) 1989-11-08 1989-11-08 Sealing method for electronic device housing

Country Status (1)

Country Link
JP (1) JPH03151694A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7902481B2 (en) * 2004-03-31 2011-03-08 Citizen Holdings Co., Ltd Method of manufacturing sealed electronic component and sealed electronic component
JP2017535466A (en) * 2014-09-03 2017-11-30 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツングConti Temic microelectronic GmbH Control device for automobile and method for manufacturing the control device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7902481B2 (en) * 2004-03-31 2011-03-08 Citizen Holdings Co., Ltd Method of manufacturing sealed electronic component and sealed electronic component
JP2017535466A (en) * 2014-09-03 2017-11-30 コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツングConti Temic microelectronic GmbH Control device for automobile and method for manufacturing the control device
US10188005B2 (en) 2014-09-03 2019-01-22 Conti Temic Microelectronic Gmbh Control unit device for a motor vehicle and method for manufacturing such a device

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