JPH03151694A - Sealing method for electronic device housing - Google Patents
Sealing method for electronic device housingInfo
- Publication number
- JPH03151694A JPH03151694A JP29068589A JP29068589A JPH03151694A JP H03151694 A JPH03151694 A JP H03151694A JP 29068589 A JP29068589 A JP 29068589A JP 29068589 A JP29068589 A JP 29068589A JP H03151694 A JPH03151694 A JP H03151694A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- package
- solder
- electronic device
- welding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 8
- 238000007789 sealing Methods 0.000 title claims description 7
- 229910000679 solder Inorganic materials 0.000 claims abstract description 17
- 239000011521 glass Substances 0.000 claims abstract description 8
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 7
- 239000000956 alloy Substances 0.000 claims abstract description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 15
- 229910052742 iron Inorganic materials 0.000 claims description 7
- 238000003466 welding Methods 0.000 abstract description 18
- 229910000640 Fe alloy Inorganic materials 0.000 abstract description 3
- 230000008018 melting Effects 0.000 abstract description 3
- 238000002844 melting Methods 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000005476 soldering Methods 0.000 description 4
- 239000011651 chromium Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- MVLMQGYYLCWMFP-UHFFFAOYSA-N neodymium yttrium Chemical compound [Y].[Nd] MVLMQGYYLCWMFP-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[概要]
電子装置を内蔵する筐体の封止方法に関し、筐体に変形
を起こすことなくレーザ溶接することを目的とし、
ガラス端子を備えた鉄系合金よりなる容器に同じ鉄系合
金よりなる蓋を当接して密封する際に、両者の接合部に
半田シートを挿入し、レーザ照射を行って溶接すること
を特徴として電子装置筐体〔産業上の利用分野〕
本発明は電子装置筐体の封止方法に関する。[Detailed Description of the Invention] [Summary] Regarding a method of sealing a housing containing an electronic device, the purpose is to perform laser welding without causing deformation of the housing, and the present invention relates to a container made of an iron-based alloy and equipped with a glass terminal. Electronic device casing [Industrial application field] characterized in that when a lid made of the same iron-based alloy is brought into contact with the casing and sealed, a solder sheet is inserted into the joint between the two, and the welding is performed by laser irradiation. The present invention relates to a method for sealing an electronic device housing.
光伝送システムなど高度の信軌性が必要であるに拘らず
、戸外など温度や湿度が変化する環境に設置される電子
装置については、ハーメチックシール構造がとられてい
る。Although a high degree of reliability is required, such as in optical transmission systems, electronic devices installed in environments where temperature and humidity change, such as outdoors, have a hermetic seal structure.
こ\で、筐体(以後パッケージ)には入出力用のガラス
端子を設けることが必要なことから、ガラス端子の封止
材やパッケージの構成材としてはガラスに熱膨張係数を
近かずけた鉄系合金が使用されている。Since it is necessary to provide glass terminals for input and output on the casing (hereinafter referred to as the package), iron, which has a coefficient of thermal expansion close to that of glass, is used as a sealing material for the glass terminals and as a component of the package. alloys are used.
例えば鉄−42%ニッケル(Pe−42%Ni) 、
Pe−52%Ni、鉄−28%クローム(Fe−28%
Cr) +鉄29%ニッケルー17%コバルト(Fe−
29%−17%Co、通称コバール)+Fe−42%N
i−6%Cr、通称シルバニア)などがこれである。For example, iron-42% nickel (Pe-42% Ni),
Pe-52% Ni, iron-28% chromium (Fe-28%
Cr) +29% iron nickel-17% cobalt (Fe-
29%-17%Co, commonly known as Kovar) + Fe-42%N
Examples include i-6%Cr (commonly known as Sylvania).
そして、パッケージを構成する容器に電子装置を装着し
、入出力端子を容器に設けであるガラス端子に接続した
後に、蓋を位置合わせして溶接することによりハーメチ
ックシールパッケージが形成されている。Then, after mounting an electronic device in a container constituting the package and connecting input/output terminals to glass terminals provided on the container, the lid is aligned and welded to form a hermetically sealed package.
〔従来の技術]
パッケージのハーメチックシール方法としてはレーザ溶
接が行われている。[Prior Art] Laser welding is used as a method for hermetically sealing packages.
こ−で、小形軽量の必要性からパッケージの板厚は薄く
なり、板厚としては0.5 mm程度のものが使用され
ているが、薄い材料同士の溶接では材料に剛性がないこ
とから、レーザ溶接後に反りなどの変形が発生し易い。Due to the need for compactness and light weight, the thickness of the package has become thinner, and the thickness of the package is about 0.5 mm, but when welding thin materials together, the materials lack rigidity. Deformation such as warping is likely to occur after laser welding.
すなわち、熱収縮による応力を緩和できず、また材料自
身が薄くなるに従って弾性変形が生じやすいことから反
りが起こるのである。In other words, warpage occurs because the stress caused by thermal contraction cannot be alleviated, and as the material itself becomes thinner, elastic deformation tends to occur more easily.
第2図はこの状態を示すもので、パッケージlを構成す
る容器2と蓋3とが接合している端面にレーザ光を走査
することにより溶接部4が作られているが、溶接後に蓋
3に反りが発生する。FIG. 2 shows this state. A welded part 4 is created by scanning a laser beam on the end surface where the container 2 and the lid 3 that make up the package l are joined. After welding, the lid 3 Warping occurs.
そこで、従来は変形の生し易い部材(この場合は蓋)を
厚くする方法で対処していた。Conventionally, this problem has been dealt with by increasing the thickness of the member that easily deforms (in this case, the lid).
然し、この方法では良好な溶は込み深さを得るには大き
な溶接エネルギーを必要とし、また溶接部4は1000
°C以上に加熱されるために、パッケージ1に格納され
ている電子装置への影響が懸念される。However, this method requires a large amount of welding energy to obtain a good penetration depth, and the welded portion 4
Since it is heated to a temperature above .degree. C., there is concern that it may affect the electronic devices stored in the package 1.
そこで、この対策として半田づけ接合が考えられた。Therefore, soldering was considered as a countermeasure to this problem.
然し、半田づけする場合にはパッケージ全体を半田づけ
温度にまで加熱する必要があり、この場合は先と同様に
加熱による電子装置の劣化が懸念される。However, when soldering, it is necessary to heat the entire package to a soldering temperature, and in this case, as before, there is a concern that the electronic device may deteriorate due to heating.
また、半田づけにはフラックスの使用が必要であるが、
パッケージ内部に付着するフラックスによる腐蝕の問題
がある。Also, soldering requires the use of flux,
There is a problem of corrosion due to flux adhering to the inside of the package.
また半田の濡れ性を高めるために接合面には金(Au)
メツキなどの表面処理が必要である。In addition, gold (Au) is applied to the bonding surface to improve solder wettability.
Surface treatment such as plating is required.
このように各種の方法が試みられてはいるが、これらは
コスト低減や軽量化の目標に反することから対策が必要
であった。Although various methods have been tried as described above, countermeasures have been required since these go against the goals of cost reduction and weight reduction.
電子機器をハーメチックシールするパッケージにはレー
ザ封止が行われおり、小形軽量化の必要性から厚さの薄
い鉄系合金が使用されている。Laser sealing is used to hermetically seal electronic devices, and thin iron-based alloys are used to make them smaller and lighter.
然し、レーザ溶接後の熱収縮などが原因してパッケージ
を構成する蓋などに変形が生じ易く、この対策が必要で
あった。However, the lid and other components of the package tend to deform due to heat shrinkage after laser welding, and countermeasures have been necessary.
上記の課題はガラス端子を備えた鉄系合金よりなる容器
に同じ鉄系合金よりなる蓋を当接してハーメチックシー
ルを行う際に、両者の接合部に半田シートを挿入し、レ
ーザ照射を行って溶接することを特徴として電子装置筐
体の封止方法を構成することにより解決することができ
る。The problem mentioned above is that when a lid made of the same iron alloy is brought into contact with a container made of an iron alloy equipped with a glass terminal to form a hermetic seal, a solder sheet is inserted into the joint between the two and laser irradiation is performed. This problem can be solved by configuring a method for sealing an electronic device case using welding.
本発明は接合部に半田シートを挿入してレーザ溶接を行
う行うものであり、第1図は溶接後の断面図である。In the present invention, laser welding is performed by inserting a solder sheet into the joint, and FIG. 1 is a sectional view after welding.
すなわち、パッケージIを構成する容器2と蓋3との間
に半田シート5を挿入してレーザ照射を行うもので、こ
の場合、レーザ照射は半田が溶融する程度のパワーで足
りるため溶接部の温度上昇は少なくて済み、従って応力
の発生量は少ない。That is, the solder sheet 5 is inserted between the container 2 and the lid 3 that constitute the package I, and laser irradiation is performed. Less rise is required and therefore less stress is generated.
また、使用する半田としては鉛(Pb)系の高融点半田
が適当であるが、pb系の半田は伸びの大きな材料であ
るために熱収縮に伴う応力も半田自体の塑性変形によっ
て吸収されると云う利点がある。In addition, lead (Pb)-based high melting point solder is suitable as the solder to be used, but since PB-based solder is a material with high elongation, stress caused by thermal contraction is absorbed by the plastic deformation of the solder itself. There is an advantage.
そのために、第1図に示すようにパッケージ1を構成す
る容器2と蓋3を同じ厚さの材料を用いても反りなどの
変形が生ずることはない。Therefore, as shown in FIG. 1, even if the container 2 and the lid 3 constituting the package 1 are made of materials with the same thickness, no deformation such as warpage will occur.
次に、接合面にAuメツキが施されている場合もあるが
、従来の溶接においては^Uからなる溶接部にFeが混
入して凝固割れを生じ、不良となると云う問題があるが
、半田シートを挿入する場合にはこのような問題はなく
信顛性の高い溶接を行うことが可能となる。Next, in some cases, the joint surfaces are plated with Au, but in conventional welding, there is a problem that Fe gets mixed into the welded part made of ^U, causing solidification cracks and resulting in defects. When inserting a sheet, there is no such problem and it becomes possible to perform highly reliable welding.
パッケージ材料としてFe−42%Niを用い、これを
用いて第1図に示すような厚さが0.5 mmの容器2
と蓋3を形成した。Using Fe-42%Ni as a package material, a container 2 with a thickness of 0.5 mm as shown in FIG.
and lid 3 was formed.
次に、半田シートとして組成がPbi、0%5n−1,
5%Ag(融点309°C)で厚さが0.3Mのものを
準備し、これを容器2と蓋3との間に挟んで従来のよう
にしてレーザ溶接を行った。Next, as a solder sheet, the composition was Pbi, 0%5n-1,
A sample made of 5% Ag (melting point 309°C) and a thickness of 0.3M was prepared, and this was sandwiched between the container 2 and the lid 3, and laser welding was performed in the conventional manner.
すなわち、レーザとしてはネオジウム−イツトリウム・
アルミニウム・ガーネ・ント(Nd−vAG) レザ
を用い、条件は、
パルス幅:3〜6IIls、 焦点外し量:On+
m平均出カニ50〜150 W、 パルスレー1・:
60ppS。In other words, as a laser, neodymium-yttrium
An aluminum garnet (Nd-vAG) laser was used, and the conditions were: Pulse width: 3 to 6 IIls, Defocus amount: On+
m average power output 50-150 W, pulse ray 1:
60ppS.
溶接速度: 150 mm7分。Welding speed: 150 mm 7 minutes.
レンズ焦点距離: too mm、 シールドガス:^
rガス圧カニ 1.5 kg/ cm2 ガス流量:
30j!/分である。Lens focal length: too mm, shielding gas: ^
r Gas pressure crab 1.5 kg/cm2 Gas flow rate:
30j! /minute.
この結果、蓋3に反りのないハーメチックシールパッケ
ージを得ることができた。As a result, it was possible to obtain a hermetically sealed package in which the lid 3 did not warp.
第3図はパルス幅を3〜6msと変えて得たレーザ出力
と接合強さとの関係図であって、溶接部の接合強さはレ
ーザ出力が100 Wの場合が最大であって約2.5k
g/ mm2の値を得ることができる。FIG. 3 is a graph showing the relationship between laser output and bond strength obtained by changing the pulse width from 3 to 6 ms, and shows that the bond strength of the welded part is maximum when the laser output is 100 W, and is approximately 2.5 ms. 5k
A value of g/mm2 can be obtained.
なお、レーザ出力がそれ以上に増すと、半田シートだけ
でなく接合部の容器2と蓋3も溶けるようになり、この
場合は接合強さは逆に減少してくる。Note that if the laser output increases beyond that, not only the solder sheet but also the container 2 and lid 3 at the joint will melt, and in this case the joint strength will conversely decrease.
同図で破線6はこの状態を示しているが、パルス幅が3
11Isと411Isの場合はエネルギーが大きいため
にレーザ出力150Wの場合に既に顕著な溶解が認めら
れる。In the same figure, the broken line 6 indicates this state, and the pulse width is 3.
In the case of 11Is and 411Is, significant dissolution is already observed at a laser output of 150 W because the energy is large.
次に、気密性についてはヘリウム(He)リークディテ
クターで試験を行ったが、何等問題は認められなかった
。Next, airtightness was tested using a helium (He) leak detector, but no problems were found.
以上記したように本発明の実施により、パッケージの反
りなどの変形がなくなり、これにより外観不良をなくす
ることができる。As described above, by carrying out the present invention, deformation such as warping of the package is eliminated, thereby eliminating appearance defects.
また同じ板厚の金属板を使えるために軽量化も同時に達
成することができる。Furthermore, since metal plates of the same thickness can be used, weight reduction can be achieved at the same time.
第1図は本発明を実施したパッケージの溶接後の断面図
、
第2図は従来の溶接後の状態を示す断面図、第3図はレ
ーザ出力と接合強さとの関係図、である。
図において、
1はパッケージ、 2は容器、3は蓋、
4は溶接部、5は半田シート、
である。FIG. 1 is a cross-sectional view of a package according to the present invention after welding, FIG. 2 is a cross-sectional view showing the conventional state after welding, and FIG. 3 is a relationship between laser output and bonding strength. In the figure, 1 is the package, 2 is the container, 3 is the lid,
4 is a welded part, and 5 is a solder sheet.
Claims (1)
合金よりなる蓋を当接して密封する際に、両者の接合部
に半田シートを挿入し、レーザ照射を行って溶接するこ
とを特徴とする電子装置筐体の封止方法。When a container made of an iron-based alloy with a glass terminal is brought into contact with a lid made of the same iron-based alloy and sealed, a solder sheet is inserted into the joint between the two, and laser irradiation is performed to weld the two. A method for sealing an electronic device case.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29068589A JPH03151694A (en) | 1989-11-08 | 1989-11-08 | Sealing method for electronic device housing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29068589A JPH03151694A (en) | 1989-11-08 | 1989-11-08 | Sealing method for electronic device housing |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03151694A true JPH03151694A (en) | 1991-06-27 |
Family
ID=17759177
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP29068589A Pending JPH03151694A (en) | 1989-11-08 | 1989-11-08 | Sealing method for electronic device housing |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03151694A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7902481B2 (en) * | 2004-03-31 | 2011-03-08 | Citizen Holdings Co., Ltd | Method of manufacturing sealed electronic component and sealed electronic component |
JP2017535466A (en) * | 2014-09-03 | 2017-11-30 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツングConti Temic microelectronic GmbH | Control device for automobile and method for manufacturing the control device |
-
1989
- 1989-11-08 JP JP29068589A patent/JPH03151694A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7902481B2 (en) * | 2004-03-31 | 2011-03-08 | Citizen Holdings Co., Ltd | Method of manufacturing sealed electronic component and sealed electronic component |
JP2017535466A (en) * | 2014-09-03 | 2017-11-30 | コンティ テミック マイクロエレクトロニック ゲゼルシャフト ミット ベシュレンクテル ハフツングConti Temic microelectronic GmbH | Control device for automobile and method for manufacturing the control device |
US10188005B2 (en) | 2014-09-03 | 2019-01-22 | Conti Temic Microelectronic Gmbh | Control unit device for a motor vehicle and method for manufacturing such a device |
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