JPH0314949U - - Google Patents
Info
- Publication number
- JPH0314949U JPH0314949U JP7428389U JP7428389U JPH0314949U JP H0314949 U JPH0314949 U JP H0314949U JP 7428389 U JP7428389 U JP 7428389U JP 7428389 U JP7428389 U JP 7428389U JP H0314949 U JPH0314949 U JP H0314949U
- Authority
- JP
- Japan
- Prior art keywords
- main shaft
- shaft
- load
- hydrostatic
- motor according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 2
- 230000002706 hydrostatic effect Effects 0.000 claims 6
- 229910000831 Steel Inorganic materials 0.000 claims 1
- 239000000919 ceramic Substances 0.000 claims 1
- 239000010959 steel Substances 0.000 claims 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
- Motor Or Generator Frames (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989074283U JPH0742213Y2 (ja) | 1989-06-22 | 1989-06-22 | 主軸モータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1989074283U JPH0742213Y2 (ja) | 1989-06-22 | 1989-06-22 | 主軸モータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0314949U true JPH0314949U (sv) | 1991-02-14 |
JPH0742213Y2 JPH0742213Y2 (ja) | 1995-09-27 |
Family
ID=31613840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1989074283U Expired - Lifetime JPH0742213Y2 (ja) | 1989-06-22 | 1989-06-22 | 主軸モータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0742213Y2 (sv) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003111352A (ja) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62107554U (sv) * | 1985-12-23 | 1987-07-09 |
-
1989
- 1989-06-22 JP JP1989074283U patent/JPH0742213Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62107554U (sv) * | 1985-12-23 | 1987-07-09 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003111352A (ja) * | 2001-09-26 | 2003-04-11 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0742213Y2 (ja) | 1995-09-27 |