JPH0314420U - - Google Patents

Info

Publication number
JPH0314420U
JPH0314420U JP7354089U JP7354089U JPH0314420U JP H0314420 U JPH0314420 U JP H0314420U JP 7354089 U JP7354089 U JP 7354089U JP 7354089 U JP7354089 U JP 7354089U JP H0314420 U JPH0314420 U JP H0314420U
Authority
JP
Japan
Prior art keywords
light receiving
receiving section
gratings
predetermined pitch
light source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7354089U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0733134Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989073540U priority Critical patent/JPH0733134Y2/ja
Publication of JPH0314420U publication Critical patent/JPH0314420U/ja
Application granted granted Critical
Publication of JPH0733134Y2 publication Critical patent/JPH0733134Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Optical Transform (AREA)
JP1989073540U 1989-06-26 1989-06-26 光学式変位検出装置 Expired - Lifetime JPH0733134Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989073540U JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989073540U JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Publications (2)

Publication Number Publication Date
JPH0314420U true JPH0314420U (US06633600-20031014-M00021.png) 1991-02-14
JPH0733134Y2 JPH0733134Y2 (ja) 1995-07-31

Family

ID=31612442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989073540U Expired - Lifetime JPH0733134Y2 (ja) 1989-06-26 1989-06-26 光学式変位検出装置

Country Status (1)

Country Link
JP (1) JPH0733134Y2 (US06633600-20031014-M00021.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001289674A (ja) * 2000-02-03 2001-10-19 Mitsutoyo Corp 変位測定装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224315U (US06633600-20031014-M00021.png) * 1985-07-26 1987-02-14
JPS63249015A (ja) * 1987-04-03 1988-10-17 Mitsutoyo Corp 光学式変位検出器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6224315U (US06633600-20031014-M00021.png) * 1985-07-26 1987-02-14
JPS63249015A (ja) * 1987-04-03 1988-10-17 Mitsutoyo Corp 光学式変位検出器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001289674A (ja) * 2000-02-03 2001-10-19 Mitsutoyo Corp 変位測定装置
JP4588227B2 (ja) * 2000-02-03 2010-11-24 株式会社ミツトヨ 変位測定装置

Also Published As

Publication number Publication date
JPH0733134Y2 (ja) 1995-07-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term