JPH031425U - - Google Patents

Info

Publication number
JPH031425U
JPH031425U JP5946089U JP5946089U JPH031425U JP H031425 U JPH031425 U JP H031425U JP 5946089 U JP5946089 U JP 5946089U JP 5946089 U JP5946089 U JP 5946089U JP H031425 U JPH031425 U JP H031425U
Authority
JP
Japan
Prior art keywords
wafer
holding
transport section
held
facing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5946089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5946089U priority Critical patent/JPH031425U/ja
Publication of JPH031425U publication Critical patent/JPH031425U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP5946089U 1989-05-22 1989-05-22 Pending JPH031425U (US06623731-20030923-C00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5946089U JPH031425U (US06623731-20030923-C00012.png) 1989-05-22 1989-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5946089U JPH031425U (US06623731-20030923-C00012.png) 1989-05-22 1989-05-22

Publications (1)

Publication Number Publication Date
JPH031425U true JPH031425U (US06623731-20030923-C00012.png) 1991-01-09

Family

ID=31585970

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5946089U Pending JPH031425U (US06623731-20030923-C00012.png) 1989-05-22 1989-05-22

Country Status (1)

Country Link
JP (1) JPH031425U (US06623731-20030923-C00012.png)

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