JPH03142467A - Pellicle body - Google Patents

Abstract

PURPOSE:To allow the assurance of an actual inspection region to the max. exposing region or above by constituting the pellicle body of a black surface over the entire surface and forming the marginal part on the outer side as a light reflecting surface. CONSTITUTION:The laser from a laser projecting system 13 is projected to the prescribed point of the reflecting surface part 5 of a frame 3 of the pellicle body by which the laser is regular by reflected and is detected by detecting optical systems 18, 18' at the time when the frame 3 is detected. Since a prescribed angle of inclination with respect to an angle theta of irradiation is applied to the surface part 5, the projected laser is regularly reflected and is adequately received in the optical systems 18, 18'. The exact position of the frame 3 relative to a reticule 1 is obtd. in accordance with the photodetection data. The positional relation between the reticule 1 and the frame 3 is previously measured and, therefore, if the exact position of the frame 3 is obtd., the max. actual inspection region 7' is assured and the inspection region wider than the max. exposing region of a stepper is assured.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to the improvement of a pellicle body, particularly a pellicle frame, and can be used, for example, to inspect and control foreign substances in a water mask in the manufacturing process of semiconductor devices. Regarding what is valid.

[Conventional technology]

In the manufacturing process of semiconductor devices, as described in Japanese Patent Laid-Open No. 59-82726, a frame ( Some devices are configured to detect the mounting position of the frame by a detection means, and to detect foreign objects present in the inspection area surrounded by the frame based on the detected frame mounting position. In other words, in the 181st process of semiconductor devices, a foreign matter inspection is performed on the entire maximum exposure area of the stepper (step-and-repeat type small projection exposure device) within the frame of the pellicle body, and defects common to all pellets due to foreign matter are detected. Occurrence has been prevented.

In this case, fine aluminum chips generated by the mirror polishing work on the upper end surface of the pellicle frame may adhere to the pellicle frame as foreign matter, so the pellicle frame should be inspected in advance by visual inspection using a floodlight. This is being carried out by

[Problem to be solved by the invention]

However, when visually inspecting a pellicle frame for foreign matter using a projector, the reflected light from the upper end surface of the salt pellicle frame becomes an obstacle to the 100-view inspection, making it impossible to ensure sufficient reliability for the inspection.

Therefore, it is conceivable to make the entire pellicle frame black. However, if the pellicle frame is entirely blackened, it becomes impossible to automatically specify the inspection area in the foreign object detection method described above, so there is a problem that the maximum exposure area of the stepper cannot be sufficiently inspected.
revealed by the inventor.

SUMMARY OF THE INVENTION An object of the present invention is to provide a pellicle body that can ensure sufficient reliability in inspecting foreign matter attached to a pellicle frame, and can also perform foreign matter inspection for the maximum NkA in the pellicle frame.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Means to solve the problem]

An overview of typical inventions disclosed in this application is as follows.

That is, in a pellicle body in which a pellicle is stretched over one end surface of a frame formed in a frame shape so as to cover an opening of the frame, the surface of the frame is configured as a black surface as a whole, and the frame is A light reflecting surface portion is formed on the outer edge portion of one end surface.

[Effect]

According to the above-mentioned means, since the light reflecting surface portion is formed on the outer edge of the upper end surface of the pellicle frame, the position of the substrate relative to the frame can be accurately detected, and as a result, the actual inspection area can be exposed to maximum light. It is possible to secure more than the area.

In addition, since the surface of the pellicle frame is entirely black, it is possible to increase the reliability of visual inspection of foreign matter adhering to the frame, and improve the quality control of the pellicle body (measures against foreign matter). can.

〔Example〕

Fig. 1 is a perspective view showing a pellicle body which is an embodiment of the present invention, Fig. 2 is an enlarged partial perspective view thereof, Fig. 3 is an enlarged partial sectional view thereof, and Fig. 4 is a diagram for explaining its operation. Pattern diagram,
FIG. 5 is a perspective view showing a frame detection method.

In this example, the pellicle body according to the present invention protects the reticle l from contamination! The reticle 1 has a frame 3 on which a pellicle 2 covering one end surface of the reticle 1 is stretched.

The reticle 1 is a substrate made of quartz glass or the like and formed into a substantially square flat plate shape, on which a pattern (not shown) made of chrome or the like is formed in a desired shape by a suitable method such as vapor deposition. It is admonished by being fixed by means. The frame 3 is made of a material such as aluminum and has a square frame shape that is small and similar to the reticle 1, and is concentrically arranged and fixed on the reticle 1. The pellicle 2 is formed as a transparent thin film using resin or the like, and is placed on the end surface (hereinafter referred to as the top surface) of the frame 3 opposite to the reticle 1 so as to cover the upper opening surface of the frame 3. It is stretched evenly.

The frame 3 is entirely colored black as shown by diagonal lines, and a reflective surface 5 is formed by chamfering into a square ring shape with a constant width on the outer edge of the upper surface of the frame 3. The reflective surface portion 5 is formed by cutting or polishing the base material of the fly 143 such as aluminum so that it is exposed from the black surface 4 and giving it a mirror finish, as shown in FIG. Chamfering inclination angle of opposite part i side part 5 (L a n b /
a) is formed to be slightly larger than the laser irradiation angle θ shown in FIG.

Next, a method for detecting the frame 3 of the pellicle body according to the above configuration will be described in the case where the foreign object detection device shown in FIG. 5 is used.

The foreign object detection device shown in FIG.
and a pair of detection optical systems 1B and 1B'. The laser irradiation system 13 is equipped with a laser generator 9, and an S polarizer 1G, a galvanometer mirror 11, and an f-θ lens] 2 are installed on the optical axis of the laser generator 9, and the laser is scanned to generate a predetermined image. The zero detection optical systems 18 and 18' are arranged at right angles to the laser irradiation system 13 and opposite to each other. 14.14', slit 15.15'
, a polarizing plate 16.16' and a detector 17.17'.

When the frame 3 of the pellicle body is detected, as shown in FIG. The reflected light is received by detection optical systems 18 and 18'. At this time, since the reflective surface portion 5 is given a predetermined inclination angle with respect to the irradiation angle θ, the laser irradiated onto the reflective surface portion 5 is specularly reflected, so that it is properly aligned with the detection optical system 18 and 1B'. The light will be received by the Based on the light reception data of the detection optical systems 18 and 18', the position of the frame 3 with respect to the reticle I can be accurately determined.

When the position of the frame 3 with respect to the reticle I is determined accurately in this way, the maximum actual inspection area 7' shown in FIG. As a result, an inspection area wider than the maximum exposure area 8 of the stepper is secured. In addition,
In FIG. 4, X and Y are the X coordinate axes and Y coordinate axes of the foreign object detection device, 6 is the center point of the foreign object detection device, and 7 is the center point of the foreign object detection device.
is the actual inspection area.

On the other hand, when the frame 3 is inspected for attached foreign matter, when the frame 3 is irradiated with illumination light, the illumination light is scattered by the foreign matter attached to the frame 3. At this time, since the entire surface of the frame 3 is formed into a black surface 4, the scattered light from the foreign object can be seen very clearly. As a result, the reliability of visual inspection of the frame 3 for foreign matter adhering to it can be increased.

According to the embodiment described above, the following effects can be obtained.

(1) Outside at the top end of the pellicle frame! ! By forming the light-reflecting surface portion on the edge portion, the position of the substrate relative to the frame can be accurately detected, so that the actual inspection area can be secured to be larger than the maximum exposure area.

(2) By configuring the entire surface of the pellicle frame to be black, it is possible to increase the reliability of visual inspection of foreign matter adhering to the frame, thereby improving quality control of the pellicle body (measures against foreign matter). Can be done.

(3) According to 0) and (2) above, it is possible to prevent the occurrence of defects common to all pellets, increase the manufacturing yield of semiconductor devices, and improve the quality and reliability of semiconductor devices.

(4) By chamfering the outer edge of the frame to form a reflective surface, the reflective surface can be processed at the time of frame manufacture, and it can be detected by matching the laser irradiation angle of the foreign object detection device. The reflection angle of light can be set appropriately.

Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

For example, the reflective surface portion formed on the frame is not limited to being formed in an annular shape around the entire circumference of the frame, but as shown in FIG. They may be formed at respective distribution positions.

Further, the reflective surface portion is not limited to being formed by chamfering the frame, but may be formed by adhering a reflective tape 5B having a reflective surface to a predetermined position of the frame 3, as shown in FIG. .

The shape of the frame is not limited to a square frame shape, but may be formed into a circular frame shape or the like.

In the above explanation, the invention made by the present inventor was mainly applied to a pellicle body attached to a reticle, which is the background field of application, but the present invention is not limited to this. It can be applied to all pellicle bodies attached to etc.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

By forming the light reflecting surface portion on the outer edge portion of the upper end surface of the pellicle frame, the position of the substrate relative to the frame can be accurately detected, so that the actual inspection area can be secured to be larger than the maximum exposure area. In addition, by configuring the entire surface of the pellicle frame to be black, it is possible to increase the reliability of visual inspection of foreign matter adhering to the frame, thereby improving quality control (measures against foreign matter) of the pellicle body. can.

[Brief explanation of the drawing]

Fig. 1 is a perspective view showing a pellicle body which is an embodiment of the present invention, Fig. 2 is an enlarged partial perspective view thereof, Fig. 3 is an enlarged partial sectional view thereof, and Fig. 4 is a diagram for explaining its operation. The schematic diagram and FIG. 5 are perspective views showing a frame detection method. FIG. 6 is a perspective view showing another embodiment of the invention. FIG. 7 is an enlarged partial sectional view showing another embodiment of the present invention. 1... Reticle (base and half), 2... Pellicle, 3...
...Frame, 4...Black surface, 5...Reflective surface part, 7
...Actual inspection area, 7'...Maximum actual inspection area, 8...
・Stepper maximum exposure area, 9...Laser generator, 1
0...S@photon, tt...galvano mirror-12...
・r・θ lens, 13...Laser irradiation system, 14.14
'... Condensing lens, 15.15'... Thrift,
I6.16'...Polarizing plate, 17.17'...Detector, 18, ]8'...Detection optical system. Figure 1 Figure 2 Figure 4 Figure 5 Figure 6

Claims (1)

[Scope of Claims] 1. A pellicle body in which a pellicle is stretched over one end surface of a frame formed in a frame shape so as to cover an opening of the frame, wherein the surface of the frame is entirely black. What is claimed is: 1. A pellicle body comprising: a light reflecting surface portion formed on an outer edge portion of one end surface of the frame; 2. The pellicle body according to claim 1, wherein the light reflecting surface portions are formed at positions distributed along the aperture center line on one end surface of the frame. 3. The pellicle body according to claim 1, wherein the light reflecting surface portion is formed of a tape having a reflecting surface.