JPH03142170A - Free abrasive grain injection type work device - Google Patents

Abstract

PURPOSE:To perform the processing of a round edge and rough surface by providing a means for opening and closing a encircling body for jet control. CONSTITUTION:A jet control encircling body 30 is provided freely movably between a closing position ad releasing position by an opening and closing means(a rack 44 and pinion 45 included). The jet is stabilized and a micro processing is performed in the case of the space from an injection nozzle 10 to the body 31 to be worked being closed by this encircling body. When the encircling body 30 is moved to a release position side to the contrary, it flows along the surface of the body 31 to be worked radially as shown by a chain line. The end face of the edge part in the groove 32 of the body 31 to be worked becomes round because of the flow of the jet at this time flowing with its turbulence. Also the surface state of the bottom face of this groove 32 becomes rough at its waviness, the surface roughness becomes a large value as well and it has the surface property different from the case of the encircling body 30 being closed.

Description

DETAILED DESCRIPTION OF THE INVENTION 1 (Industrial Field of Application 1) The present invention relates to a free abrasive injection type machining device, particularly M1i
This invention relates to a machining tool that processes a workpiece by injecting a solid-gas two-phase flow of abrasive grains and gas onto the workpiece.

The injection space of free abrasive grains from the general blade injection nozzle of the K invention to the workpiece is surrounded by a jet flow control enclosure, and a solid-gas two-phase flow of free abrasive grains and gas is injected to the workpiece. In an apparatus for micromachining the surface of a workpiece, the jet flow control enclosure is movably opened and closed in the axial direction, and this opening/closing operation changes the surface properties of the workpiece. It was designed so that

K Conventional technology l Processing methods that perform mechanical energy processing using abrasive grains include:
There are processing using fixed abrasive grains and processing using free abrasive grains. Examples of processing using fixed abrasive grains include grinding, honing, super finishing, and coated abrasive processing. Examples of processing using free abrasive grains include lapping, borising, puff processing, barrel processing, ultrasonic processing, and jet processing. Furthermore, there is a sandblasting method as one of the copper processing methods.

2 For example, Japanese Patent Application Laid-Open No. 63-22272 discloses a Sand Plus 1 apparatus which is useful for removing rust from weathered surfaces of concrete structures such as buildings and metal structures. In other words, the conventional sandblasting method
An I-grind is used to spray at high pressure to remove chips from the workpiece, to remove grains from the workpiece, to carve glass, metal, etc. for decorative purposes, or to create a pane as disclosed in the above-mentioned publication. -C was used for the difference between 1 and rust removal.

The disadvantage of the conventional 逅1iiiIIL inkstone type processing armor is that the diameter of the loose grains is large and the surface roughness and surface precision are not good. Furthermore, there is a drawback that polishing sag occurs due to the edge portion being scraped. Therefore, it has been used for deburring, decorative processing, or as a metallization application due to its strict dimensions, and has the disadvantage that it cannot be used for microfabrication of semiconductors, magnetic disks, etc.

Furthermore, with conventional abrasive jet processing methods such as lint blasting, it was difficult to control the amount.

This is because the powder is not made into a beam = 3
- It is. Furthermore, the pressure distribution and flow velocity distribution were not made uniform, and the degree of turbulence in the flow velocity distribution was large.

Furthermore, there was a problem in that the resist formed on the workpiece was thick and the resolution was low.

In addition, there was stagnation of the abrasive grains in the sample, which affected the flatness of the sample and caused processing waviness.

In view of these problems-(-1) The applicant of the present application
No. 1-171707 proposes a free abrasive injection type fusing device Wi in which the injection space between the injection nozzle and the workpiece is surrounded by a cylindrical jet control enclosure. According to such RjE&, it is possible to make the jet jet ejected from the nozzle into a beam shape, and also to prevent disturbances in the flow of the jet flow, which enables fine processing and also prevents sesame dripping. It becomes too difficult to perform injections that do not occur.

Problems to be solved by the K invention However, the disadvantage of the above-mentioned loose particle injection processing device as previously proposed is that the accuracy of fine loading is limited to a constant f/tl. Alternatively, surface properties such as waviness and surface roughness may also be uniformly regulated. This means that the viscosity and roughness of the surface cannot be changed depending on the purpose. Therefore, depending on the object to be processed, it is not always possible to carry out optimum processing.

The present invention has been made in view of these problems, and it is an object of the present invention to provide a free abrasive injection type machining device that can appropriately change machining accuracy and surface roughness such as waviness and surface roughness. This is the purpose.

((Means for solving the problem) The present invention performs processing by injecting a solid-gas two-phase flow of free abrasive grains and gas onto a workpiece.
A device in which the injection path from a nozzle that injects a phase flow to a workpiece is covered by a jet flow control enclosure, and a means for opening and closing the jet flow control enclosure is provided. It is.

The K-actuating blade and thus the means for opening and closing make it possible to move the jet control enclosure between a closed position and an open position. When the space between the injection nozzle and the workpiece is closed by this enclosure, the jet flow is stabilized and fine machining becomes possible. On the other hand, if the enclosure is moved to the open position side, it is possible to not only process the end face into a rounded shape, but also to roughen the surface properties such as waviness and surface roughness. Moreover, it becomes possible to appropriately control the roughness and surface properties of the processing depending on the position of the enclosure.

``Example I Figure 1 shows the main parts of a trial processing apparatus for abrasive grain jets 1i11 according to an embodiment of the present invention, and this Dokoka is equipped with an injection nozzle 10 in its center ing. Injection nozzle 1
0 is connected to the tip of a two-phase flow pipe 11 made of stainless steel. Further, an abrasive grain supply pipe 12 is provided on the side of this pipe line 11.
is connected. An absorption nozzle 13 is provided in the conduit 11 at the connection point of the supply pipe 12. In addition, the tip of the two-phase flow pipe 11 is fixed by being screwed into a female screw hole 15 of a lip stand d. An O-ring 17 is attached to the nozzle 10, and the O-ring 17 provides a seal between the outer circumferential surface of the nozzle 10 and the inner circumferential surface of the through hole of the GJ stand 14.

The outer peripheral part of the mounting base 14 is connected to the lower mounting plate 21 via a cylindrical insulator 20. Connection to the insicolator 20 is achieved by holes 1 to 22 that penetrate in the axial direction on the outer peripheral surfaces of the upper and lower parts 14.21, and these ports [- 22 is screwed in. Also, in the -1: side installation, the vibe joints 1 to 24 are connected to the plate 21, and the pipe 25 is connected to these joints 24. A stack type piezoelectric body 26 is bonded to the lower surface of the lower mounting plate 21.The piezoelectric body 26 has a donut-like shape, and the vibration joint 1 -24 is made to escape through the hole.

For lower mounting, a circular opening 29 is formed in the center of the plate 21, and a jet flow control ring 30 is attached to the lower mounting plate 21 so as to fit into the hole 29. . A workpiece 31 is placed so as to cover the lower opening of the ring 30.

Note that AlTiC, which is a hard material, is used here as the workpiece 31. The workpiece 31 is mounted and held on a stand 33. For mounting, the table 33 is equipped with a vacuum suction port 3/I so that the workpiece 31 can be held by suction.

As shown in FIG. 1, the jet control ring 30 has a rack 44 formed on a part of its outer peripheral surface so as to extend in the vertical direction. And this rack 44 is a binion 45
It meshes with the. Binion 45 is output shaft 4 of motor 46
7 and is rotationally driven by a motor 46. The motor 46 is fixed to the plate 21 on the lower side by bolts 48.

The main parts of the injection IJ'1 type machining equipment as shown in Figure 1 are
As shown in the figure, it is housed in a jet processing container 37. In this container 37, the processing section shown in FIG. 1 is movable in each of the X-axis, Y-axis, and Z-axis directions by a moving mechanism not shown, and the movement is controlled by the combi coater. It looks like this. Further, through holes 38, 39, and 40 are formed in the container 37, and the two-phase flow pipe 11, the abrasive grain supply pipe 12, and the pipe 25 are led out to the outside of the container 37 through these through holes 38 to 40. It looks like this. In addition, pipes 11, 12, and 25 are flexible at their joints, and
One method is provided that can accommodate the movement of the turtle in the axial direction, Y-axis direction, and Z-axis direction.

Further, a dust collection vibrator 41 is connected to the lower part of the container 37, so that a portion of the dust generated by processing the workpiece 31 can be collected.

Next, the operation of such a device will be explained.

High-pressure gas consisting of a mixture of dry nitrogen and air is
Processed to a pressure of 10 kg/c+F, such high pressure gas is injected through the absorption nozzle 13 of the two-phase flow line 11. Then, due to the effect of the absorption nozzle 13, 1illll of loose abrasive grains are sucked from the supply pipe 12. Here, 5iC18f! is used as a free abrasive grain. , 203, etc. are used. In this way, the fine abrasive grains are mixed with the high-pressure gas at 'e' to form a mixed two-phase flow, which becomes a jet stream from the tip of the injection nozzle 10 and is injected onto the surface of the workpiece 31.
The grooves 32 are processed by the jet flow containing such fine abrasive grains.

As shown by the solid line in FIG.
When it is closed and its lower end is in contact with the surface of the workpiece 31, the mixed two-phase flow injected from the nozzle 10 is sent from the nozzle 1o to the surface of the workpiece 31, and then It spreads out in the radial direction on the surface of this workpiece 31, and then rises along the inner peripheral surface of the control row ring 30, and is mounted on the table 1.
4 and the lower attachment lead to the space between the plate 21 and after this it will be suctioned through the pipe 25. At this point, the control ring 30 turns the solid-gas two-phase flow into a laminar flow, so the edges of the grooves 32 formed on the surface of the workpiece 31 have a sharp shape, as shown in FIG. Become. Therefore, in this case, highly accurate micromachining will be performed. Further, the surface of the groove 32 at this time has very fine undulations and surface roughness and has excellent surface properties.

Next, when the motor 46 is driven, the rotation of the motor 46 is transmitted to the pinion 45 via the output shaft 47, and the pinion 45 is rotated. Then, the jet flow control ring 30 having the rack 44 meshing with the pinion 45 moves upward as shown by the chain line in FIG. Due to this movement, a gap is formed between the lower end of the ring 30 and the surface of the workpiece 31, and the jet IJ space of the solid-gas two-phase flow is opened.

Therefore, in this case, the jet stream 11 injected from the nozzle 10 first descends toward the upper surface of the workpiece 31, and then runs along the surface of the workpiece 31 in a sword-like manner as shown by the chain line in FIG. It flows like this. Since the jet flow at this time flows in a turbulent manner, the shape of the workpiece 31 becomes smaller as shown in FIG. 4, and the end surfaces of the edge portions of the grooves 32 become rounded.

Also, the surface condition of the bottom surface of this groove 32 is rough and the surface roughness shows a large value, and the surface is different from that when the control ring 30 is closed! You will be able to turn 1 to the right.

That is, by moving the jet flow control ring 30, it is possible to change the properties of the jet flow from the nozzle 10 and change the surface properties of the workpiece 31.

In this way, the free abrasive grains IIl! according to this example! 1 Copper processing bag type processing device Nozzle 1 sprays two-phase flow containing abrasive grains at high pressure
A two-phase flow jet flow control ring 30 is provided near the injection nozzle 10 to the liquid adding J object 31 from 0 to 10, and by opening and closing this control ring 30, the workpiece 31
The surface quality of the material is changed.

12 Therefore, by closing the control ring 30, the end face can be sharply processed, and the control ring 30 can be closed.
By opening the end face, a shape having a rounded end face is processed. In addition, the surface properties, that is, waviness and surface roughness, become rough when the jet flow control ring 30 is opened, and become fine when closed, so that it is possible to obtain surface properties that suit the purpose. become. Moreover, such processing is possible with a simple structure for opening and closing the jet flow control ring 30 (=J+). Furthermore, such processing equipment enables extremely high-efficiency processing, and has a machining speed approximately one million times faster than ion beam machining.

Effects of the Invention 1 As described above, the present invention is provided with means for opening and closing the jet flow control enclosure. Therefore, by closing the injection space between the sentry side nozzle and the workpiece using this jet flow control envelope, it is possible to perform micromachining by turning the solid-gas two-phase flow into a laminar flow, and this jet flow By opening the control enclosure by means of opening and closing, it is possible to perform machining with rounded edges and rough surfaces.

[Brief explanation of the drawing]

Fig. 1 is a vertical sectional view of the main parts of a processing device according to an embodiment of the present invention, Fig. 2 is a longitudinal sectional view of the entire same, and Fig. 3 is an enlarged view showing the processing cross section when the control ring is closed. 4 is an enlarged sectional view showing a processed cross section of the ring for the restraint 11. The names of the main parts in the drawings are as follows. 0 1 2 0 1 2 4 - Injection nozzle - Two-phase flow pipe - Abrasive grain supply pipe - Jet flow control ring - Workpiece - Groove - Rack 5 Binion 6 Motor

Claims (1)

[Claims] 1. Machining is performed by injecting a solid-gas two-phase flow of free abrasive grains and gas onto the workpiece, and jet flow control is performed on the injection path from the nozzle that injects the solid-gas two-phase flow to the workpiece. What is claimed is: 1. A free abrasive jet machining device, characterized in that the device is covered with an envelope for controlling a jet flow, and is further provided with means for opening and closing the envelope for controlling jet flow.