JPH0314144U - - Google Patents
Info
- Publication number
- JPH0314144U JPH0314144U JP7480189U JP7480189U JPH0314144U JP H0314144 U JPH0314144 U JP H0314144U JP 7480189 U JP7480189 U JP 7480189U JP 7480189 U JP7480189 U JP 7480189U JP H0314144 U JPH0314144 U JP H0314144U
- Authority
- JP
- Japan
- Prior art keywords
- chamber body
- chamber
- workpiece
- compressed air
- cooling passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 238000001816 cooling Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 1
- 238000013021 overheating Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7480189U JPH0314144U (lt) | 1989-06-26 | 1989-06-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7480189U JPH0314144U (lt) | 1989-06-26 | 1989-06-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0314144U true JPH0314144U (lt) | 1991-02-13 |
Family
ID=31614814
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7480189U Pending JPH0314144U (lt) | 1989-06-26 | 1989-06-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0314144U (lt) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015000994A (ja) * | 2013-06-13 | 2015-01-05 | 株式会社アルバック | 真空処理装置 |
-
1989
- 1989-06-26 JP JP7480189U patent/JPH0314144U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2015000994A (ja) * | 2013-06-13 | 2015-01-05 | 株式会社アルバック | 真空処理装置 |