JPH0313506A - Apparatus and method for working under hot isostatic pressure - Google Patents

Abstract

PURPOSE:To enable work to difficult-to-working material by arranging a pressurizing member projecting to a piston fitted in a high pressure vessel, shifting the pressurizing member to the axial direction of the vessel and forge-working the material to be worked in a treating chamber under hot isostatic pressure. CONSTITUTION:The material 27 to be worked is laid on a lower die 26 and charged into the treating chamber 12 from lower part of the high pressure vessel 1, and by driving a vacuum pump 43, air in a high pressure chamber 8 and pressurizing chamber 16 is evacuated. Successively, after feeding inert gas, etc., into the high pressure chamber 8 and a pressure accumulator 49 from gas collecting device 33 by driving a compresser 34, electric power is supplied to heating element 11 to heat the treating chamber 12 to the prescribed temp., and the pressure in the high pressure chamber 8 and treating chamber 12 is raised. Successively, the piston 14 is made unclamping state, and pressure medium gas is fed into the pressurizing chamber 16 from the pressure accumulator 49, and the piston 14 is shifted to the pressurizing direction while taking pressure balance between the pressurizing chamber 16 and the high pressure chamber 8, and the forming work under hot isostatic pressing is executed to the material 27 to be worked between an upper die 24 and the lower die 26 in the pressurizing member 22. By this method, while restraining the development of void, the difficult-to- working material is worked under high temp. isostatic pressure.

Description

Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a processing device and a processing method under hot isostatic pressure, and relates to a processing apparatus and a processing method for processing difficult-to-process materials such as heat-resistant metal materials and ceramics under high-temperature isostatic pressure. It is used for processing.

(Prior art) Heat-resistant metal materials such as Ni-based alloys generally have poor workability, and therefore, for high-strength materials that cannot be forged, conventionally, fine grain superplasticity obtained by powder metallurgy has been used. It is being processed using

Furthermore, ceramics have poorer ductility than Ni-based alloys and are difficult to process, but in recent years, this has also been processed by utilizing the superplastic phenomenon.

(Problems to be Solved by the Invention) However, in superplastic working, the working limit due to the generation of voids is a big problem.

Another problem is that it requires processing at a low strain rate, resulting in poor productivity.

Furthermore, since conventional superplastic processing equipment was constructed using a mechanical press, it was difficult to control the atmosphere of the workpiece (workpiece), that is, to ensure an inert atmosphere.
Furthermore, it was troublesome to ensure uniformity of heating.

The first object of the present invention is to provide a hot isostatic pressure processing apparatus and a processing method that can suppress the generation of voids and raise the processing limit by processing a workpiece under high temperature isostatic pressure. It is a purpose.

Furthermore, the present invention provides a hot isostatic pressure processing apparatus and processing method that can increase productivity by increasing the processing speed, can easily control the atmosphere, can perform homogeneous heating, and can withstand upsizing. The second purpose is to provide the following.

Furthermore, a third object of the present invention is to provide a new processing technology that utilizes a high-temperature hydrostatic pressure environment.

(Means for Solving the Problems) The present invention provides an opening 1A at at least one end in the axial direction of the container.
(1B, high pressure vessel 1 containing IB and the opening 1A) (
A high-pressure chamber 8 is defined inside by 1B and a lid member 2 that can open and close 1B, and the high-pressure chamber 8 includes an inverted cup-shaped heat insulator 110 and a heating layer disposed inside the heat insulating layer 10. A hot isostatic pressure processing apparatus is provided with a processing chamber 12 in which a heating device 9 consisting of an element 11 is built in, and a processing chamber 12 for processing a workpiece 27 under hot isostatic pressure inside the heating device 9. To achieve this, we have taken the following technical measures:

That is, in the present invention, a piston 14 movable in the axial direction of the container is fitted into the high-pressure container 1, and the piston 14 is provided with a pressurizing member 22 that projects into the processing chamber 12.
It is characterized in that it is configured such that a workpiece 27 can be forged in the processing chamber 12 under hot isostatic pressure by moving the pressure member 22 in the axial direction of the container.

Furthermore, the present invention provides a method for processing a workpiece 27 under hot isostatic pressure in a processing chamber 12 using a hot isostatic pressurizing device, the method comprising: a container shaft extending into the processing chamber 12; This is characterized in that the workpiece 27 is forged under hot isostatic pressure by a pressure member 22 that moves in the direction.

Further, the present invention performs sintering and/or densification treatment under hot isostatic pressure on the workpiece 27 in the processing chamber 12, and subsequently densifies the workpiece 27 in the processing chamber 12 under hot isostatic pressure. It is characterized by forging under water pressure.

Furthermore, the present invention is characterized in that the workpiece 27 is forged in the processing chamber 12 under hot isostatic pressure, and then at least densification treatment is performed in the processing chamber 12 under hot isostatic pressure. That is.

(Example and operation) In Figs. 1 to 5, 1 is a high-pressure container, which is formed in a cylindrical shape, and has upper and lower openings 1A) (1B, IB) at both ends in the axial direction of the container. .2 is a lid member;
The upper opening 1A) (the upper lid 4 which is removably fitted into the upper opening 1B and is made airtight with a sealing material 3, and the lower opening IB)
The lower lid 6 is removably fitted into the ring-shaped upper and lower lids 6A and the upper nuclear lid 6A to form a seal. It consists of upper and lower lids 6B that are made airtight with material 7.

Note that a press frame (not shown) in the form of a rectangular frame is detachably connected to the upper lid 4 and the lower lid 6 so as to bear an axial force acting in the axial direction of the container during the pressurization process.

8 is a high pressure chamber, which includes the high pressure container 1 and its opening LA;
It is formed by upper and lower lids 4.6 that are fitted into the IB. Note that the high-pressure container 1 may have a bottomed cylindrical shape having an opening at only one end.

9 is a heating device (heating furnace), which consists of an inverted cup-shaped heat insulating layer 10 and a heating element 11 placed inside the heat insulating layer 10; It is equipped with a processing chamber 12 in which an object 27 is processed under hot isostatic pressure, and a heating element 11 and its power supply member 13 are provided in the upper and lower lids 6A.

The heat insulating layer 10 includes gas-impermeable inner and outer metal cylinders 10A, 108.
A fibrous heat insulating material 10G is filled in between.

Reference numeral 14 denotes a piston, which is fitted to the upper lid 4 side of the high-pressure container 1 via a sealing material 5 so as to be airtight and movable in the axial direction of the container. In this embodiment, the piston 14 is provided with the heat insulating layer 10 It is installed in a suspended manner.

16 is a pressurized chamber, which is divided by fitting the piston 14 into the high-pressure container 1;
By supplying a gas pressure medium from a passage 17 formed in the piston 14, it is possible to apply pressure in the axial direction of the container to the piston 14.

Reference numeral 1g designates a clamp member, which is provided on the upper lid 4 so as to be freely rotatable around the vertical axis, and a hook 19 at the lower end of the clamp member formed on the piston 14 can be freely engaged with and detached from a portion 20; The crank block device is shown.

Therefore, the hook part 9 of the clamp member 18 is hooked on the part 2.
The piston 14 is held in a locked state at 0,
By unlocking, the piston 14 becomes movable in the axial direction of the container.

Reference numeral 22 denotes a pressure member, which is composed of a cylindrical connector 23 made of a heat insulating material and an upper mold 24, both of which are collinear with the piston 14 with bolts etc. It is arranged on the axis and protrudes into the processing chamber 12 . Note that the heat insulating layer 10 and the connector 23 are joined in a gas-tight manner.

Reference numeral 25 denotes a hearth made of a heat insulating material, which is placed on the upper and lower lids 6B.A lower mold 26 is placed on the hearth 25, and the workpiece (workpiece) is placed between the upper and lower molds 24 and 26. Therefore, in this embodiment, the workpiece 27 is located in the processing chamber 1.
2 is loaded and unloaded from below.

A stroke sensor 28 is provided on the bottom side of the container 1 to detect the lower end position of the heat insulating layer 10, and its detection signal is sent to the controller 29.

Note that the stroke sensor 28 may detect the movement of the piston 14, but this is advantageous because the bottom side of the container 1 is cooler than the top side.

30 is a pressure medium supply/discharge device; in this embodiment, a gas collecting device 33 is connected to a passage 31 formed in the upper and lower lids 6A via a conduit 32;
, is equipped with on-off valves 35 and 36, a pressure gauge 37 and a safety valve 38, and has a recovery pipe 39 between the on-off valves 35 and 36, and the recovery pipe 39 has an on-off valve 40 and a throttle valve 41. are doing.

Furthermore, a vacuum line 4 is provided between the on-off valve 36 and the safety valve 38.
2 is connected and equipped with a vacuum pump 43, and 4
4.45 indicates its on-off valve. Note that 46 indicates an opening/closing valve for opening to the atmosphere.

It is a 47-port pressurizing piston drive device, and a lid pressure device 49 is connected to the passage 7 of the upper M4 via a pipe 48, and the pipe 48 is equipped with a pressure gauge 50, a safety valve 51, and an on-off valve 52°5.
3 in series, and a bypass circuit 56 having a throttle valve 54 and an on-off valve 55, and each having on-off valves 57 and 58 to share the compressor 34 of the pressure medium supply and discharge device 30. 59 and 60, and transmits a feedback signal from the controller 29 to the throttle valve 54 to control the pressurization speed.

For example, in the case of the Ni-based super-superalloy workpiece 27 whose processing temperature is about 1000° C. to 1100° C., the heat insulating layer 10 is made of Inconel, stainless steel, etc., and the heating element 11 is made of Fe − A special alloy such as TZM is used for the upper and lower molds 24 and 26, and a ceramic heat insulating material such as 'h03 is used for the connector 23 and the hearth 25.
+ It is preferable to use Zr01 or a composite material thereof.

Next, the operation of the first embodiment described above will be briefly explained with reference to FIGS. 1 to 5.

The workpiece 27 is passed through the hearth 25 and the lower mold 26 to the upper and lower lids 6.
B is placed in the processing chamber 12 from below the high pressure vessel 1.
is loaded into the

In this case, the pressure piston 14 is held in the retracted (raised) position by its clamp member 18.

Next, proceed to the degassing step. In addition, in FIG. 2 to FIG. 5, each on-off valve 35, 36.40, 44.45.46
．． 52°53.54, 55.57.58, in the figure, black indicates the closed state and white indicates the open state.

In the deaeration step shown in FIG. 2, when the vacuum pump 43 is driven with the on-off valve 57 open, the high pressure chamber 8 is
, lines 32, 42, while the pressurized chamber 16 is evacuated via channel 17, lines 4B, 49, 42.

After the deaeration is completed, when the compressor 34 is driven in the valve state shown in FIG. 3, a pressure medium gas such as an inert gas is sent from the gas collecting device 33 to the high pressure chamber 8 via the pipe line 32 and the passage 31. At the same time, the pressure accumulator 49 is filled with air via the connecting pipe 60.

When the supply of air at a predetermined pressure to the high pressure chamber 8 is completed, the on-off valve 35 is closed, and when the air supply to the accumulator 49 is completed, the on-off valve 35 is closed.
6.58.53 is closed (see Figure 3).

Next, power is supplied to the heating element 11 to bring the temperature of the processing chamber 12 to a predetermined temperature. At this time, the pressures in the high pressure chamber 8 and the processing chamber 12 rise as the temperature rises.

When a predetermined temperature and pressure is reached, the clamp member 18 that was holding the piston 14 is untarramped to release the piston 1.
4 in a position capable of moving in the axial direction of the container, open the on-off valve 55 as shown in FIG. The piston 14 is moved in the pressurizing direction (forging direction) while maintaining pressure balance with the piston 8. As a result, the workpiece 27 undergoes forging under hot isostatic pressure, that is, superplastic working, between the upper die 24 and the lower die 26 of the pressure member 22.

In this case, the movement stroke of the piston 14 in the axial direction of the container in this embodiment detects the lower end of the heat insulating layer 10 with the stroke sensor 28, transmits this detection signal to the controller 29, and transmits the signal of the controller 29 to the throttle valve. 54 to the throttle valve 54
The speed of the piston 14 is controlled by increasing the pressure in the pressurizing chamber 16 and the pressure in the high pressure chamber 8 by adjusting the opening degree of the piston 14 (see FIG. 4).

When the predetermined processing operation is completed, the power supply to the heating element 11 is cut off, and the on-off valve 52°58.40 is closed as shown in FIG.
When the throttle valve 41 is opened and the gas in the pressurizing chamber 16 is recovered to the gas collecting device 33 through the passage 17, the pipes 48 and 60, and the recovery pipe 39, the piston 14 rises. , the clamp member 1 in the raised position
Hold at 8 (see Figure 5).

Next, after the temperature of the high pressure chamber 8 and the processing chamber 12 has decreased, the on-off valves 35 and 40 are opened to open the passage 31 through the throttle valve 41.
, recovered to the gas collection device 33 through the pipes 32 and 39,
Finally, the on-off valve 46 is opened to reduce the pressure to atmospheric pressure, and then the upper and lower lids 6B are lowered to take out the workpiece 27 that has been subjected to a predetermined process.

FIG. 6 shows a second embodiment of the device of the present invention, and parts common to the first embodiment described above are indicated by common symbols, and hereinafter,
Explain the differences.

In this second embodiment, the pressurizing operation of the piston 14 is performed by pressure reduction control based on the opening degree adjustment by the throttle valve 41, and for this purpose, the feedback signal from the controller 29 is applied to the throttle valve 41. Sent to the throttle valve 41
The opening degree of the valve is adjusted.

FIG. 7 shows a third embodiment of the device of the present invention, in which the piston 14
is fitted into the lower part of the high pressure vessel 1, and a hearth 25 and a lower mold 26 are attached to this piston 14 to form a pressurizing member 22, and the heat insulating layer 10 is connected to the upper lid via a connector 23. The heating element II is suspended and fixed to the upper lid 4, and is supported by the upper lid 4 via a current-carrying member 13.

Further, the clamp member 18 and its lock device 21 are provided on the lower lid 6, and a stroke sensor 28
is adapted to detect the movement of the piston 14.

According to the seventh embodiment, since the temperature gradient in the high pressure chamber 8 is normally lower at the lower side of the high pressure vessel 1 than at the upper side, the durability of the sealing member 15 of the piston 14 and the piston 1
This embodiment is more advantageous than the first and second embodiments in terms of processing speed controllability and the like.

Although not shown in the third embodiment, the pressure medium supply and discharge device and the piston drive device described in the first and second embodiments can be used. Further, in this third embodiment, the workpiece 27 is loaded and unloaded through the upper opening 1A) (1B) of the high-pressure container 1.

Furthermore, in each of the embodiments described above, the pressurizing force for the piston 14 is generated by using the pressurized gas to the processing chamber 12; however, the gas for generating the pressurizing force is A separate drive 47 independent of the evacuation device 30 can be followed. However, as shown in each embodiment, sharing the gas is advantageous in terms of simplifying the device configuration and ensuring cleanliness.

Furthermore, in the device configuration (hereinafter abbreviated as the device) according to the present invention described above, the following types of processing methods can be employed in addition to the processing described above.

■; Ceramics that exhibit superplastic phenomena such as zirconia,
The material is sintered in the device, and then superplastic working (forging) under hot isostatic pressure is performed in the device.

(2): After the workpiece is densified under hot isostatic pressure in the apparatus, superplastic working (forging) under hot isostatic pressure is subsequently performed in the apparatus.

In particular, according to the processing method (2), structural defects in the workpiece are eliminated by HRP treatment before forging, and even during forging, voids are not generated due to the action of hydrostatic pressure, resulting in large Deformation processing or processing under high strain rates can be performed.

Moreover, by performing the HIP process again after the forging process is completed, voids generated during the process can be eliminated, and further improvement in strength can be expected.

(Example 1) Submicron particle size (7) 3s II 9'6 YzOs
-TZR/' 20wt% Al2O3 sintered body (140
Sintered at 0℃ in air for 1.5 hours, density 5.32, φ80
Tsuru Processed into a shape with a taper angle of 45" and a depth of 20B under the various conditions described below, a bending test piece compliant with JIS R1601 was cut out from near a part of the mold taper and subjected to a room temperature bending test. As a result, the following was obtained. Met.

(Next page) ① Ni-based alloy powder, etc. that exhibits superplastic working phenomenon is encapsulated and first densified under hot isostatic pressure, followed by superplastic working under hot isostatic pressure.

A fine grain structure exhibiting superplasticity is obtained through the previous densification (HIP treatment), and furthermore, based on the action of hot isostatic pressure, it is possible to process large deformations or process at high strain rates without generating voids. It is also an economical treatment method in terms of continuity of thermal action.

(Example 2) Ni-based alloy (12,5Cr
-17,9Co -3,3Mo-4,89Al-4,2
9Ti -0,6V -Remaining Ni (wt%),
A stainless steel capsule with a diameter of 120 mm and a height of 90 mm was filled and sealed in a vacuum.

This powder-filled capsule was heated to 1050℃ and 1700kgf.
/col, hot isostatic processing under the conditions of 1.5 hr,
A Ni-based alloy billet with a density of 100% was obtained. Subsequently, the piston is immediately actuated under hot isostatic pressure (1000 kg
f/c+J) superplastic working (forging) was performed. The conditions at this time were 1050℃, strain rate 2X10-'
It was set as S phase.

As a result, the forging process was completed in 6 wins, making it possible to significantly shorten the time, and the structure of the workpiece was found to be an extremely uniform and good forged structure with no voids observed at all.

■; The molded product encapsulated in the capsule described in (■) above can be made of two or more materials, for example, it can be subjected to forging after joining plate materials under hot isostatic pressure in advance, or it can be made of powder material and plate material. After processing, the materials are held under hydrostatic pressure and bonded, thereby producing a composite material. Further, at this time, the composite material can also be manufactured by deforming and diffusion bonding the plate material itself as part or all of the capsule.

(Example) A Ni-based alloy HIP billet (see TMP-3 below) has an outer diameter of 80mm and an inner diameter of 6011mm. After making a container with a height of 60 fins and a bottom of 5 fins, and a base with a thickness of 5 fi that fits into the inner diameter part, a HIP billet of Ni-based alloy powder (see AF115 below) made of a different material is hermetically sealed inside. , 1075℃,
After hot isostatic pressure treatment at 1700 kgf/cd and 1.5 hr holding, 1100°C, 100100O/
The same forging process as described above was performed with aJ, strain rate, and 2XIQ-' S-1.

As a result, it was found that a bonded disk with different materials in the center and periphery could be forged without forming voids.

(wt wing l7ntCCr Co Mo HAI TI
V B Zr Hf Nb NiT? F-30
, f7710.86.93.13.43.92.8-0
．． 010.05-3.9 Oboro AF1150.0510.
914.92.85.93.73.8-0.020.0
50.81.9 M According to the above items 1 to 2, the present invention provides hot isostatic processing of a workpiece 27 in a hot isostatic processing apparatus using a pressure member 22 that protrudes into the processing chamber 12 and moves in the axial direction of the container. It also provides a method for forging under water pressure.

We also offer the following processing methods:

(2) A method in which the workpiece is sintered and/or densified under hot isostatic pressure, and then forged under hot isostatic pressure.

This is suitable for processing ceramics by forging under hot isostatic pressure after sintering.

Furthermore, by performing HIP treatment after preliminary sintering and then forging, it is possible to perform forging after removing defects in the sintered crystal, making it suitable for processing ceramics.

■; A method in which the workpiece is encapsulated and forged under hot isostatic pressure.

Since this is a forging process after densification, it is suitable for processing encapsulated Ni-based powder alloys.

In this case, the workpiece may be made of two or more materials (
The workpiece itself may be part or all of the capsule.

■: Processing method in which a hot isostatic pressure densification process (HIP process) is performed after forging under hot isostatic pressure.

This can be applied to ceramics since defects can be removed by HIP treatment after forging, and in the case of encapsulated composite materials, it can be joined after forging.

The method of the present invention described above can be carried out with the apparatus shown in FIGS. 1 to 7, but can also be carried out with the apparatus shown in FIG.

Fig. 8 shows the pressurizing piston 14 in the cover member 2, and in the case of rotation, the upper cover 4.
The tip of the piston 14 is made to protrude from the lid member 2 so that it can be forged under hot isostatic pressure via the pressure member 22. It is pressurized by a drive device 66 using fluid such as gas or oil, which has a valve 62, a switching valve 63, and a pilot check valve 64, 65, and is capable of retracting.The machining speed is controlled by a relief valve 62 from a controller 29. The speed can be controlled by sending a feedback signal.

Other basic configurations are the same as those in FIGS. 1 to 5, so they are indicated by common symbols.

In the apparatus shown in FIG. 8, the pressurizing piston 14 may be provided in the lower lid 6.

Further, the apparatus of the present invention can also be used for extrusion processing under hot isostatic pressure by making the mold into a die shape.

(Effects of the Invention) The present invention is as described above, and the present invention has the following advantages.

■ Enables processing under hot isostatic pressure, expanding the range of plastic processing of difficult-to-work materials based on the increase in ductility due to the action of hydrostatic pressure, as well as developing superplastic phenomena such as Ni-based alloys and ceramics. It is possible to suppress the generation of voids in the material and significantly improve the processing limit of the material, or to increase the processing speed and improve productivity.

■ At that time, the axial force required for forging process uses the pressure of the pressure medium used to generate the hot isostatic pressure environment.
The configuration is simple, which is advantageous from the point of view of ensuring economic efficiency, and it is also advantageous when it comes to increasing the size of the device.
There is no problem in ensuring temperature uniformity as the size increases.

Furthermore, the present invention can of course be applied to defect removal, densification, and joining of workpieces at the same time, and by combining these processes with forging using a pressurized member, the process limits already mentioned can be overcome. or make it possible to manufacture composite materials of unprecedented shapes.

Therefore, the present invention can provide an extremely useful technique for processing in the field of advanced materials that are difficult to process, and which will continue to increase in the future.

[Brief explanation of drawings]

The drawings show each embodiment of the present invention, and FIGS.
The figures are elevational cross-sectional views showing the operating steps according to the first embodiment of the present invention device, FIG. 6 is an elevational cross-sectional view showing the second embodiment of the present invention device, and FIG. 7 is the present invention A partially omitted elevational sectional view showing a third embodiment of the apparatus, and FIG. 8 is an elevational sectional view showing another apparatus applicable to the method of the present invention. ■... High pressure container, 1A) (1B, IB... Opening, 2... Lid member, 8... High pressure chamber, 9... Heating device, 10... Heat insulation layer, 11...・Heating element, 12...
Processing chamber, 14... Piston, 22... Pressurizing member. Patent applicant: Kobe Steel, Ltd. 4

Claims (4)

[Claims] (1) An opening (1A) (
1B) and the opening (1A) (
A high pressure chamber (8) is defined inside by the lid member (2) that can be opened and closed freely, and the high pressure chamber (8) includes an inverted cup-shaped heat insulating layer (10) and the heat insulating layer (10). ) A heating device (9) consisting of a heating element (11) arranged inside the
is built in, and the workpiece (27) is heated inside the heating device (9).
) in a hot isostatic processing apparatus equipped with a processing chamber (12) for processing under hot isostatic pressure, a piston (14) movable in the axial direction of the container is fitted into the high pressure container (1). The piston (14) is provided with a pressurizing member (22) that protrudes into the processing chamber (12), and the movement of the pressurizing member (22) in the axial direction of the container causes the air to be heated inside the processing chamber (12). Processed product (27)
A hot isostatic pressing apparatus characterized in that it is configured to be able to forge under hot isostatic pressure. (2) An opening (1A) (
1B) and the opening (1A) (
A high pressure chamber (8) is defined inside by the lid member (2) that can be opened and closed freely, and the high pressure chamber (8) includes an inverted cup-shaped heat insulating layer (10) and the heat insulating layer (10). ) A heating device (9) consisting of a heating element (11) arranged inside the
is built in, and the workpiece (27) is heated inside the heating device (9).
) is processed in the processing chamber (
12) is a method of processing under hot isostatic pressure, the workpiece (27) being hot-processed by a pressure member (22) protruding into the processing chamber (12) and moving in the axial direction of the container. A processing method characterized by forging under hydrostatic pressure. (3) The workpiece (27) is sintered and/or densified under hot isostatic pressure in the processing chamber (12), and then the workpiece (27) is sintered in the processing chamber (12). ) is forged under hot isostatic pressure. (4) Forging the workpiece (27) under hot isostatic pressure in the processing chamber (12), and then performing at least densification treatment under hot isostatic pressure in the processing chamber (12). The processing method according to claim (2), characterized in that: