JPH03132910A - Thin film magnetic head - Google Patents

Abstract

PURPOSE:To realize the reduction of floating quantity due to the reduction of the area of a dynamic pressure generating surface while a thin film magnetic head element being prevented from being cut by providing the head with arc- shaped steps in level at both edges in the direction of the width of its rail, and simultaneously, bringing the tip edge of a conductor coil film close to a position 10 to 30 mum distant from the surface of the rail. CONSTITUTION:The rails 11,12 projecting to the surface opposite to a medium of the slider 1 of the head are formed into such shape that the steps in level 111,112,121,122 are provided at both the edges in the width direction intersecting the direction of the flow of air at right angles, and central parts are made into high step surfaces. These steps in level are arc-shaped, and are deep enough to make the high step surfaces practical dynamic pressure generating surfaces. Then, the thin film magnetic head elements 2 are installed at one end face of the rails 11,12 as seen in the direction of the flow of the air, and the tip edge of the conductor coil film is positioned 10 to 30 mum distant from the surface of the high step surface. Thus, since the area of the dynamic pressure generating surface is reduced, the floating quantity can be reduced.

Description

Detailed Description of the Invention <Industrial Application Field> The present invention relates to a floating type thin film magnetic head, in which an arcuate step is provided at both edges in the width direction of a rail, and the tip edge of a conductive coil film is formed on the rail. 10μl11-30μ from the surface of
By moving the head closer to the position m, it is possible to avoid cutting the thin-film magnetic head element, reduce the area of the dynamic pressure generating surface, reduce the flying height, and increase the head magnetic field strength. be.

<Conventional technology> A flying type thin @magnetic head uses dynamic pressure generated by the viscosity of air when moving at a high distance relative to a magnetic disk to create a small flying height between it and the magnetic disk surface. is generated to read and write magnetic recording from and to the magnetic disk. In this type of thin film bit head, in order to reduce spacing loss and achieve high recording density,
It is necessary to reduce the flying height as much as possible. In order to achieve a lower flying height, it is necessary to reduce the dynamic pressure generated in the slider that constitutes the thin-film magnetic head. In order to reduce the dynamic pressure, it is necessary to reduce the rail width where the dynamic pressure is generated. However, this type of thin-film magnetic head has a thin-film magnetic head element on the end surface of the rail.
The rail width is limited by the maximum pattern width of the thin film magnetic head element. The maximum pattern width of a thin film magnetic head element is, for example, about 300A1m, so under a normal rail structure, the rail width is equal to this maximum pattern width of 300A1m.
It is limited by μm, and it is difficult to reduce it below this value.

As a conventional technique aimed at solving such problems, the invention described in, for example, Japanese Patent Application Laid-Open No. 64-43812 is known. In this prior art, a step is provided at both ends of the rail in the width direction to form a stepped shape with a high step surface in the center, thereby substantially reducing the dynamic pressure generating area.

FIG. 5 is a perspective view of the thin film magnetic head described in the above publication. In the figure, 1 is the slider and 2 is the thin lI! In the magnetic head element, 3 is a protective film, and 4 is an extraction electrode of the thin film magnetic head element 2.

The slider 1 has two rails 11 and 12 that protrude at a distance from each other along the air flow direction a on the side facing the magnetic disk. Each of the rails 11.12 has a tapered surface 11a, 12a at one end in the air inflow direction.

The rails 11 and 12 have right-angled steps (11
1,112) and (121,122), and has a stepped shape with a high step surface 113.123 in the center, and the surface of the high step surface 113.123 is used as a dynamic pressure generating surface. It has become. On the sides of the rails 11.12, there are also:
Concave grooves 13 to 16 are provided, and between the concave grooves 14 and 15 is a stepped surface 17 that is lower than the high stepped surface 113.123 of the rail 11.12.

The thin film magnetic head element 2 is attached to one end surface of the slider 1 in the air flow direction a. Figure 6 is thin II! tn
FIG. 7 is an enlarged view of the air head element portion, and FIG. 7 is an enlarged cross-sectional view, respectively. In the figure, 21 is a first magnetic film, 22 is a gap film made of alumina or the like, 23 is a second magnetic film, 24 is a conductive coil film, 251 to 253 are insulating films made of novolac resin, etc., and 26.27 is a gap film made of alumina or the like. This is the extraction electrode.

The slider 1 has a structure in which an insulating film 102 made of Al2O3 or the like is deposited on a ceramic structure 101 such as A1203-Tic, and the first magnetic film 21 is made of a magnetic material such as permalloy. It is used to form on the slider 1. 211 is a ball portion, and 212 is a yoke portion. The conductor coil film 24 and the insulating films 251 to 253 are laminated on the first magnetic film 21 with the gap film 22 interposed therebetween.

The second magnetic film 23 is formed using permalloy or the like on the insulating film 253 formed to cover the conductor coils @24. 231 is a ball portion, and 232 is a yoke portion.

First magnetic I+! 21 and the second magnetic film 23, the ball portions 211-231 are opposed to each other via the magnetic gap G formed by the gap film 22, and the yoke portion 212.2
The rear end portions of the conductor coils 32 are connected to each other, and a conductive coil film 24 is formed in a spiral shape around this joint portion.

Maximum pattern width WM of the thin IIi magnetic head element 2 described above
is about 300 μm.

The steps (111, 112) and (121, 122) are formed in a right-angled step shape with a depth of 20 μm to 30 μm. As a result, the steps (111, 112), (121,
The generation of floating blades in the part 122) can be virtually ignored, and the dynamic pressure generation surface is the entire width w of the rail 101.
The width w2 of the high step surface 113 and 123 is obtained by subtracting the width ΔW1 of the steps (111, 112) and (121, 122) from 1.

Width △W of steps (111, 112) and (121, 122)
l is formed so that the width W2 of the high step surfaces 113 and 123 is smaller than the maximum pattern width w4 of the thin film magnetic head element 2. For example, in a thin film magnetic head whose maximum pattern width W2 is 300 Iim, the width W2
is set to about 200 μm. Japanese Patent Publication No. 64-43812
In the publication, even under such conditions, the steps (111, 11
2).

(121, 122) makes it thin! In order to prevent the head element 2 from being cut, the conductor coil film 24 is set so that the distance 'aJ21 from the surface of the high step surface 113.23 to the tip edge is 30 μm to 90 μm. Ta.

<Problems to be Solved by the Invention> As described above, in the conventional thin 11i ift air head, the steps (111, 112) and (121, 122) are step-shaped, falling at right angles from the high step surface 113, 123. Therefore, the right angle corners C+ and C2 (see Figure 6)
The rate at which the thin film 6N penetrates into the pattern forming region side of the head element 2 increases. Under such a conventional structure, the thin film magnetic head element 2 has steps (111, 112) and (121).
, 122), in order to avoid being cut by
Distance from the high step surface 113.123, which is the surface of the rail 11.12, to the tip edge of the conductor coil @24! i+ is about 3
The 0μ mark is the limit, and it cannot be reduced below that. For this reason, there is a limit to the strength of the magnetic field generated by the head when viewed from the end face of the ball portions 211 and 231.

Although it is possible to reduce the distance @ In order to do this, a depth hl of 20 μm to 30 μm must be ensured. After all, in the conventional structure, it was extremely difficult to set the distance +m flll from the high step surface 113, 123 to the tip edge of the conductive coil film 24 to 30 μm or less.

Therefore, an object of the present invention is to solve the above-mentioned conventional problems, to reduce the flying height by reducing the dynamic pressure generation area of the rail, and to improve the head magnetic field strength without causing breakage of the thin film magnetic head element. It is to provide the head.

Means for Solving the Problems> In order to solve the above problems, the present invention provides a thin film 11f1 magnetic head in which a thin film magnetic head element is attached to a slider, the slider protruding toward the medium facing surface side. The rail includes a rail, and the rail has a shape with steps at both ends in the width direction perpendicular to the air flow direction and a high step surface in the center, and the step has an arc shape. The high step surface has a depth that becomes a substantial dynamic pressure generating surface, and the thin film magnetic head element includes a magnetic film and a conductive coil film that together with the magnetic film constitutes a thin film magnetic circuit. , is provided on one end surface of the rail as viewed in the air flow direction, and the conductor coil film is characterized in that a tlllli from the surface of the high step surface to the tip edge is 10 μm to 30 μm.

Effect> The rail has a shape with steps on both edges in the width direction perpendicular to the air flow direction and a high step surface in the center.
Since the step has a depth such that the high step surface becomes a substantial dynamic pressure generating surface, the area of the dynamic pressure generating surface is reduced. By reducing the area of this dynamic pressure generating surface, a lower flying height can be achieved.

Further, since the distance from the high step surface to the tip edge of the conductor coil film is set in the range of 10 μm to 30 μm, a large head-generated magnetic field can be obtained.

Moreover, since the steps are arcuate, the pattern formation area of the thin-film magnetic head element is increased compared to the conventional right-angled step-like steps. For this reason, the distance from the high step surface, which is the dynamic pressure generating surface, to the tip edge of the conductor coil membrane is set at 10 μm to 3 μm.
Even if the magnetic field generated by the head is increased by setting it in the range of 0 μm, the thin film 6N head element will not be cut.

As a practical example, the diameter of the conductor coil film in the rail width direction perpendicular to the air flow direction is 240 μm to 300 μm.
μm1 The diameter in the direction perpendicular to the rail width direction is 200μm
When formed to draw a circular arc or elliptical arc of ~260 μm, depth 20 μm ~ 60 μm 1 radius 20 μm ~ 60 μm
By forming the arc-shaped step of m, it is possible to avoid cutting of the thin NI III head element even when the distance from the surface of the rail to the tip of the conductive coil film is set in the range of 10 μm to 30 μm.

As in the past, the width of the high step surface is narrower than the maximum pattern width of the thin film magnetic head element, and the surface of the high step surface is substantially narrower than the maximum pattern width of the thin film magnetic head element. It becomes a surface that generates dynamic pressure and provides stable flying characteristics with a low flying height.

<Example> FIG. 1 is a front view of a floating type thin film magnetic head according to the present invention as seen from the thin film magnetic head element side, and FIG.
FIG. 3 is an enlarged plan view of a portion of the air head element, and FIG. 3 is an enlarged sectional view thereof. In the figure, the same reference numerals as in FIG. 5 indicate the same components. Slider 1 is
It is provided with rails 11 and 12 that protrude toward the medium facing surface. The rails 11.12 have steps (111, 112) and (121, 1) on both ends in the width direction perpendicular to the air flow direction a.
22), and has a stepped shape with a high stepped surface 113 and 123 at the center.

The steps (111, 112) and (121, 122) have a depth hl of 20 μm to 60 μm. Therefore, high stage WJl
The surface of 13.123 becomes a substantial dynamic pressure generating surface, and its area is reduced. Moreover, the width W2 of the high step surface 113 and 123 is equal to the maximum pattern width WM of the thin film 6fl air head element 2.
It is narrower than. Therefore, in a range narrower than the maximum pattern width WM of the thin film magnetic head element 2, the high step surface 113
．． The surface of 123 becomes a substantial dynamic pressure generating surface, and stable flying characteristics can be obtained with a low flying height.

The conductor coil film 24 has a distance 11111u+ from the high step surface 113.123, which is the surface of the rail 11.12, to the tip edge.
is set in the range of 10 μm to 30 μm. This makes it possible to obtain at least a larger head-generated magnetic field than conventionally.

The steps (111, 112) and (121, 122) have an arc shape with a radius R of 20 μm to 60 μm. The arcuate steps (111, 112) and (121, 122) have a smaller intrusion area into the pattern formation region of the thin film magnetic head element 2 than the right-angled steps. For this reason, the distance λ from the high step surface 113, 123, which is the dynamic pressure generating surface, to the tip edge of the conductor coil membrane 24 is set to 10 μm to 30 μm.
Even if the head generation field 6ii is increased by setting it within the range of , the thin film 6n air head element 2 will not be cut.

The conductor coil film 24 has a diameter D1 of 240 μm to 300 μm in the rail width direction perpendicular to the air flow direction a, and a diameter D2 of 200 μm to 260 μm in the direction perpendicular to the rail width direction.
It is formed to draw a circular or elliptical arc. The steps (111, 112) and (121, 122) have a depth hl
is 20 μm to 60 μm, and the radius R is 20 μm to 6 μm.
It has an arc shape of 0 μm. This allows the tip edge of the conductor coil film 24 to be 10 μm to 30 μm from the rail surface.
Even when the distance is set to MfL+, a thin film magnetic head is obtained in which the thin film magnetic head element 2 is not cut by the steps (111, 112) and (121, 122) at both edges in the width direction.

In the embodiment shown in FIG. 1, the step surface 17 between the rails 11 and 12 is entirely flat, but
As shown in FIG. 4, there is a groove lower than the stepped surface 17 on the inner side of the rail 11, 12! 4, I5 may be provided. Alternatively, the stepped portions 13.16 may be omitted and formed directly on the side surface.

<Effects of the Invention> As described above, according to the present invention, the following effects can be obtained.

(a) The slider is equipped with a rail that protrudes toward the medium facing surface side, and the rail has a shape with a stepped surface at both ends in the width direction perpendicular to the air flow direction and a high stepped surface in the center. Since the step has a depth such that the high step surface becomes the substantial dynamic pressure generation surface, the thin film magnetic head has a small dynamic pressure generation area and has stable flying characteristics with a low flying height. can be provided.

(b) Since the conductor coil film has a distance of 10 μm to 30 μm from the surface of the high step surface to the tip edge, it is possible to provide a high performance thin film magnetic head with head magnetic field strength enhanced compared to conventional ones. .

(C) Since the step is arcuate, even if the tip edge of the conductive coil film is set at a distance of 10μI11 to 30μm from the rail surface to increase the head generated magnetic field, the step will cut the thin film magnetic head element. Therefore, it is possible to provide a thin-film magnetic head that does not cause problems.

[Brief explanation of the drawing]

FIG. 1 is a front view of a floating thin-film magnetic head according to the present invention viewed from the thin-film magnetic head element side, FIG. 2 is an enlarged plan view of the thin-film magnetic head element, and FIG. 3 is an enlarged sectional view thereof. , FIG. 4 is a front view of another embodiment of the floating thin film magnetic head according to the present invention, FIG. 5 is a perspective view of a conventional thin film magnetic head, and FIG. 6 is a thin film magnetic head in a conventional floating thin film magnetic head. Enlarged plan view of the head element part, No. 7
The figure is also an enlarged sectional view. 1...Slider 2...Thin film magnetic head element 11.12...Rail 111.112.121.122...Step 113. 21 ・ ・ 22 ・ ・ 23 ・ ・ 24 ・ ・ 123...High step surface, second magnetic film, gap film, third 611 magnetic film, conductor coil film Diagram

Claims (1)

[Claims] (1) A thin-film magnetic head in which a thin-film magnetic head element is attached to a slider, wherein the slider is provided with a rail protruding toward the medium facing surface, and the rail is arranged in a width direction perpendicular to the air flow direction. It has a shape with a step on both edges and a high step surface in the center, and the step is arcuate and has a depth at which the high step surface becomes a substantial dynamic pressure generating surface. The thin film magnetic head element has a magnetic film and a conductor coil film that together with the magnetic film constitutes a thin film magnetic circuit, and is provided on one end surface of the rail as viewed in the air flow direction; A thin film magnetic head characterized in that the conductor coil film has a distance from the surface of the high step surface to the tip edge of 10 μm to 30 μm.