JPH03131742A - Microsystem spectrophotometer - Google Patents

Abstract

PURPOSE:To make measurement regardless of shapes and sizes by installing the center of an aperture constituted of two sheets of specific disks on the optical axis in the imaging position of an objective lens. CONSTITUTION:Plural pieces of rectangular or slit-shaped holes which vary in short sides are bored on the circumference Ea of a radius (r) on the disk 33a by directing the long sides toward the circumferential direction. Plural pieces of the rectangular or slit-shaped holes which vary in short sides are bored on the circumference Eb of a radius (r) on the disk 33b by directing the long sides toward the radial direction. The disks 33a and 33b are superposed by fixing the centers Oa, Ob of the circles Ea, Eb on the same axis and are formed respectively, independently rotatable. The circumference Ea, Eb intersect orthogonally with the optical axis and, therefore, the aperture is formed in a rectangular shape and the long sides and short sides of the bored holes are made independently variable, by which the measurement is enabled regardless of the shapes and sizes of samples. The center of the aperture overlaps on the optical axis and the degradation in IR intensity is obviated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a microscopic spectrophotometer that measures an infrared absorption spectrum at the same time as wl detection at an extremely small measurement site.

[Conventional technology]

As is generally known, an infrared absorption spectrum measuring device
It consists of an infrared light source, a monochromator or interferometer for obtaining the infrared intensity of each wavelength component, an infrared detector, a sample chamber, etc.

Since the Fourier infrared spectrophotometer using an interferometer has high sensitivity for measuring the infrared absorption spectrum of extremely small parts, Robert O., Messerschmidt and others have traditionally used the NST Standard (ASTM).
American 5ociety for Test
ing and Materials STD) 9
49, pp. 27-31 (1987) [The Design, Sample Handling and Applications of InfraRed Microscopy]
ndling and Application of
Infrared Microscopes) J,
InfraRed Microspectroscopy (Pla
tical 5pectroscopy 5eries
Volume 6” Infrared Micr
ospectroscopy”, Edited by
Messerschmidt, Robert G.
M RCE L D EKKER Inc. (1988
)), pages 85 to 87, in combination with a microscopic device. In the above literature,
Microscopic diagrams such as those shown in FIGS. 4 and 5 are described.

23 in FIGS. 4 and 5 is a sample stage, 13
14 is a reflective objective lens, 14 is a condenser, and 33 in FIG.
33' and 33 in FIG. 5 indicate the measurement field of view!
27 in Fig. 15 is a reflective objective lens for condensing light, and 17 in Figs. 4 and 5 is an infrared detector. Infrared rays from the Fourier transform infrared spectrometer are shown at 35 in both FIGS. 4 and 5.

Measurement of the infrared absorption spectrum of a sample is generally performed in either transmission or reflection mode.

In the case of transmission measurement mode, in Figs. 4 and 5,
The infrared rays 35 from the Fourier transform infrared spectrometer are focused onto the sample by the condenser 14, and the infrared rays after passing through the sample pass through the reflective objective lens 13.

In the case of zero reflection measurement mode leading to the infrared detector 17, the infrared ray 35 from the Fourier transform infrared spectrometer in FIG.
The infrared rays are reflected by the parabolic mirror 11, the edge mirror 16, and the reflective objective lens 13 and are focused on the sample, and the infrared rays after being reflected by the sample reach the infrared detector 17 via the reflective objective lens 13.

In the apparatus configured as described above, the field of view is set at 33 and 33' in Fig. 4 in order to measure the infrared absorption spectrum of an extremely small part.
Alternatively, the irradiation can be performed by restricting the irradiation with the aperture shown at 33 in FIG. 5 and irradiating only the desired target area. These apertures are each made up of two sets of flat plates that can be moved in the front-rear direction and the left-right direction, and are configured by a combination of slits that open and close back and forth and slits that open and close left and right.

Therefore, although the shape of the aperture can be freely changed depending on the shape of the object to be measured, the above method does not necessarily always accurately align the center of the aperture with the optical axis.

Next, the sample stage 23 in Figure 5 has a hole through which infrared rays pass through for measurement in transmission measurement mode, and a sample larger than the hole is placed on top of this hole to measure the infrared absorption spectrum. ing.

[Problem to be solved by the invention]

In the above conventional technology, the center of the aperture for narrowing the field of view is
It is not designed to always be on the optical axis of the infrared rays, and if the center of the aperture deviates from the optical axis, the intensity of the infrared rays decreases significantly, making it impossible to always measure infrared absorption spectra in the best condition. was there.

In addition, the size of the transmission measurement hole on the sample stage does not take into account changes in the size of the sample, and small samples not only cannot be placed on the sample stage, but also may be placed under the sample stage. The drawback was that the infrared rays fell onto the condensing mirror.

The present invention provides a microscopic spectrophotometer in which the center of the aperture is always formed on the optical axis, a sample of any size can be placed on the sample stage, and the sample does not fall onto the condenser mirror. The purpose is to

[Means to solve the problem]

To achieve the above objective, it is necessary to be able to freely change the size of the hole placed perpendicular to the optical axis at the imaging position of the objective lens. A first disk having a plurality of rectangular holes with different side lengths drilled on the same circumference and rotatable around the center of the holes; An aperture is formed by a second disc having rectangular holes bored therein so that its long sides intersect with each other, and the center of the aperture is placed on the optical axis at the imaging position of the objective lens.

For this purpose, a camera such as that used in ordinary cameras,
It is also possible to install something like a diaphragm that combines several movable blades, but although the above method can change the shape concentrically, it is not possible to make the shape of the hole rectangular. For this reason, two rectangular slits,
The slits are stacked so that their long sides intersect so that the width of each slit can be varied independently, and at the same time, the center of the hole is always located on the optical axis at the imaging position.

Furthermore, in order to align the shape direction of the sample with the shape direction of the aperture, the center of the sample stage was rotated. Further, in order to rotate the center, another disk was placed at the center of the sample stage, and the disk was rotated. Furthermore, several types of discs are prepared, such as those without a hole in the center for reflection measurements, and those with different hole diameters for transmission measurements, and by replacing them, it is possible to change the measurement mode and the sample. By replacing the disk with a disk appropriate for the size of the sample, we prevented the sample from falling onto the reflective condenser mirror located below the sample stage.

[Effect]

The operation of the present invention will be explained with reference to FIGS. 1, 2, and 3. In the figure, numerals 10 are two plane reflectors that receive parallel infrared rays modulated in frequency by the interferometer of the Fourier transform infrared spectrophotometer, and one is an optical system for the reflection measurement mode and is a parabolic This is a mirror for directing infrared rays in the direction of the surface reflecting mirror 11. The other is an optical system in transmission measurement mode, and is a mirror for directing infrared rays toward the plane mirror 12. In the case of the zero reflection measurement mode in which the infrared rays are focused and irradiated onto the sample 15 by the reflecting objective lens 13 and the ellipsoidal reflection It14, the infrared rays coming from the parabolic reflecting mirror 11 are reflected by the edge mirror 16 through the objective lens. The infrared rays from the sample 15 pass through the back side of the edge mirror 16 and reach the infrared detector 17. In the case of transmission measurement mode, measurement is performed with the edge mirror 16 removed from the optical path. I
EN: It is a parabolic reflecting mirror, and the ellipsoidal reflecting mirror 14 and the plane reflecting mirror 19.20 are mounted inside the boat-shaped stage 21. There is. Infrared rays from the Fourier transform infrared spectroscopy photometer are reflected by these mirrors and are incident on the sample 15 on the sample stage 23. The infrared rays that have passed through the sample 15 are converted into one beam by the reflective objective lens 13 and then reach the detector 17 . The above description is the action of each mirror when measuring an infrared absorption spectrum using a microscope.

By the way, the red rays transmitted or reflected by the sample 15 are condensed by the reflective objective lens 13, and
At the imaging position B, a sample image is formed by infrared rays magnified to the magnification of the reflective objective lens 13. The infrared absorption spectrum of the extremely small part can be measured by narrowing down the necessary partial force in this sample image using the seven-point filter 33 to prevent unnecessary infrared rays from reaching the detector.

Therefore, if the shape of the object to be measured is relatively long, such as a fiber, measurement can be carried out most efficiently by making the shape of the aperture 33 match the object. For this purpose, in the present invention, the shape of the aperture 33 is rectangular, and while the center of the aperture 33 is always on the optical axis, its long and short sides can be varied independently.

The action of the aperture 33 will be explained using FIG. 2.

A plurality of rectangular or slit-shaped holes having different short sides are bored on the circumference Ea of radius r in the disk 33a, with the long sides directed in the circumferential direction. In the disk 33b, a plurality of rectangular or slit-shaped holes with different short sides are bored on the circumference Eb of radius r, with the long sides facing in the radial direction, as shown in FIG. 2(b). ing. The disks 33a and 33b are stacked with the center convex a and the convex convex of the inner Ea and Eb fixed to the same axis, and are respectively rotatable independently about the axis. In addition, the above circumference Ea
, Eb are perpendicular to the optical axis. Therefore, since the aperture is made rectangular and the long and short sides of the perforation can be independently varied, measurements can be made regardless of the shape or size of the sample. Furthermore, the center of the aperture always overlaps with the optical axis, so the intensity of infrared rays does not decrease significantly.

FIG. 6 shows an alternative to the aperture 33 mentioned above. Disk 33c
(or 33d, below () indicates the case of 33d) has a circular arc shape with radius Re (Rd), and the width 2v (2w) is continuous from the minimum value 2ν1 (2 oath, ) to the maximum value 2ν2 (2w2) holes are drilled that vary in size. The disks 33c and 33d are 0 disks 3 that are rotatable independently around the centers of curvature Oc and 5d of the circular arcs, respectively.
3c and 33d are overlapped so that the optical axis passes through the intersection X of the arcs Ec and Ed. Therefore, the aperture can be formed into a nearly rectangular shape, and its long and short sides can be independently varied, making it possible to perform measurements regardless of the shape or size of the sample. Furthermore, since the aperture center always overlaps with the optical axis, the infrared intensity does not decrease significantly.

FIG. 7 shows another alternative for the aperture 33. The slit plate 33e (or 33f, below () indicates the case of 33f) has an upper base of 2v (2tz) and a lower base of 2v2.
(2w2), and the height is He (Hf).

A trapezoidal hole is drilled that is symmetrical about the straight line Le (Lf). The sulin 1-board 33e (or 33f) slides independently along the straight line Le (Lf). Further, the slit plates 33e and 33f are superimposed so that the straight lines Le and Lf intersect at right angles and the optical axis passes through the intersection X thereof.

Therefore, it is possible to make the aperture into a nearly rectangular shape and to make the long and short sides of the aperture variable independently, so that measurements can be made regardless of the shape or size of the sample. Also, since the center of the aperture always overlaps with the optical axis,
Infrared intensity does not decrease significantly.

FIG. 8 shows yet another alternative for the aperture 33.

Parallel rank link sequence QIP with p2 as a fixed point
Engineering p z Q 4 and Q, PiP, Q, are mutually linked Q! P work, Q, P□, and Q3P2 and Q4P2 are integrated. Slit plates 33g and 33h are attached to sinks Q, Q, and Q, Q in the parallel row of rank links. A parallel rank link string QsP3 that operates independently of the above parallel rank link string.
P4Qs and Q, P, P, Q, are installed so that they become P, P, IPLP2, and link Q.

The slit devices are installed in Q8, Q, and Q so that the optical axes of the slit plates 33i and 33j pass through the intersections of straight lines PIP2 and p and p4. Therefore, since the aperture can be made into a rectangular shape and its long and short sides can be independently varied, measurement is possible regardless of the shape or size of the sample. Furthermore, since the center of the aperture always overlaps the optical axis, the intensity of infrared rays does not decrease significantly.

On the other hand, a disk 30 is installed in the center of the sample stage 23,
Since the disk 30 is rotatable around the optical axis, it is possible to align the direction of the sample 15 with the opening direction of the aperture 33, regardless of the direction in which the sample 15 is placed on the disk 30. . Further, the disk 3o is replaceable, and in the reflection measurement mode, a disk without holes as shown in FIG. 3(a) is used, and in the transmission measurement mode, as shown in FIG. 3(b), By using a disk with a hole smaller than the sample, measurements can be performed without dropping the sample through the hole as in the conventional method.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing a first embodiment of a microscopic spectrophotometer according to the present invention, (,) is a diagram showing infrared rays emitted from the spectrophotometer, and (b) is a diagram showing the configuration of the microscopic spectrophotometer. The overall view, FIGS. 2(a) and (b) are views showing the respective disks constituting the aperture of the above embodiment, and FIGS. 3(a) and (b) are views showing the sample supporting disks, respectively. FIG. 6 is a diagram showing the configuration of the aperture in the second embodiment of the present invention, FIG. 7 is a diagram showing the configuration of the aperture in the third embodiment of the present invention, and FIG. 8 is a diagram showing the configuration of the aperture in the fourth embodiment of the present invention. FIG. 3 is a diagram showing the configuration of an aperture.

First Embodiment FIG. 1(b) showing the first embodiment is an apparatus that can measure the Fourier transform infrared absorption spectrum of a sample in two ways: transmission measurement mode and reflection measurement mode. The switching plane reflector 10 consists of two groups of mirrors: a reflector that directs the parallel infrared rays of the Fourier transform infrared spectrophotometer to a parabolic reflector 11 for the 5-reflection (epi-illumination) measurement mode, and a reflector for the transmission measurement mode. It consists of a mirror that directs the above infrared rays to a plane reflection 1A12 for the purpose of the invention, and these mirrors can be switched by a lever.

First, the optical system for 1-reflection mode measurement is shown in Figure 1(a).
The parallel infrared radiation 3 from the 0 spectrophotometer 34 is explained by
5 is ellipsoidally reflected by the parabolic reflector 11! After focusing the light on the first focus of t32, use an infrared detection plate to accurately adjust the focus of the parabolic reflector 11 on the pre-designed optical axis, and then Adjustments were made using an infrared detection plate to connect the two focal points to aperture 33.

As described above, the focus of the infrared optical system was adjusted using an infrared detection plate. The upper half of the edge mirror 16 is a mirror and the lower half is transparent. The infrared rays coming from the ellipsoidal reflection @32 are reflected by the edge mirror 16 toward the reflective objective lens 13. Further, the infrared rays reflected by the sample 15 on the sample stage 23 passed through the back side of the edge mirror 16 and reached the infrared detector 17.

Next, the optical system for transmission mode measurement will be explained. The switching plane reflector 1o is switched to direct the parallel infrared rays 35 from the spectroscope toward the plane reflector 12, and further parabolic reflection j! 18, the light was focused on the focal point of the ellipsoidal reflector 14 having a longer focal length. In order to focus the shorter side of the ellipsoidal reflector 14 on the sample 15, the optical path was raised by two plane reflectors 19° and 20. Further, the parabolic reflecting mirror 18, the ellipsoidal reflecting mirror 14, and the two plane reflecting mirrors were mounted on a boat-shaped stage 21. Further, the boat-shaped stage 21 can be focused by a vertical movement drive device 22 in either reflection mode measurement or transmission mode measurement.

Next, the structure of the aperture 33 will be explained with reference to FIG.

Eight rectangular holes are bored at 45° intervals on the circumference of the disk 33a shown in (a) and the disk 33b shown in (b) with a radius r=5 cm from the centers 5a and 5b. Said disk 33
The long sides of the rectangles a and 33b are perforated in the circumferential direction and the radial direction, respectively. The hole sizes for both disks 33a and 33b are 5.2X5.2 and 2.5X5.2.
,1.25X5.2,1. OX5.2, 0.75X5.
2,0.5X5.2,0.25X5.2,0. IX5.
2 (unit: mm). Said disks 33a and 3
3b is the center 5a.

5b, they are attached to a common axis and overlapped, and each is independently rotatable around the axis.

Image forming point B showing the disks 33a and 33b in FIG. 1(b)
It is installed at the position such that the circumferences Ea and Eb are perpendicular to the optical axis. For this reason, the aperture 33 is made into a rectangular shape,
Since the long and short sides can be made independently variable, measurements can be made regardless of the shape or size of the sample. Furthermore, since the center of the aperture always overlaps with the optical axis, the infrared intensity does not decrease significantly.

Next, the structure of the disk 30 provided at the center of the sample stage 23 will be explained with reference to FIG. FIG. 3(,) shows a disk 30 used for measuring the reflection mode.

The disk 30 is mounted on the sample stage 23 so as to be rotatable about the optical axis. In the reflection mode, there is no need to drill holes in the disk 30 since the infrared radiation is simply reflected on the sample. Therefore, a sample of any size can be placed on the sample stage 23. Also,
By rotating the disk 30, the orientation of the sample and the orientation of the aperture can be matched.

FIG. 3(b) shows a disk 30 used for transmission mode measurement. Several types are made with different diameters of the center hole, and they are mounted on the sample stage 23 in a replaceable and rotatable manner around the optical axis. Therefore, it is possible to select a disk 30 with a hole diameter that corresponds to the size of the sample, and any size sample can be placed on the sample stage 23.

Further, by rotating the disk 3o, the orientation of the sample and the orientation of the aperture can be made to match.

Second example A second embodiment of the present invention will be described with reference to FIG.

Two discs 33c and 33d forming the aperture 33
An arc-shaped hole with radius Rc=Rd=5an is bored in the hole. The width of this hole 2v=2ty is the minimum value 2V,=
2w, = 0.1mm to maximum value 2v2 = 2w2 = 181
It is designed to change continuously up to II11. Radius R
The distances between the circle Ec (Ed) of e (Rd) and the inner and outer edges of the slit are both equal to v (w). The side where the width of the hole is the minimum value 2vt = 2s, and the side where the maximum width is 2Vz = 2tz2 are in a circle E.
It is located on the opposite side to the center of c (Ed) C)c (C)d). The width of the hole 2v=2w is the arc Re and Rd
It is made to increase continuously from 2v = 2w1 to 2v2 = 2v2 in proportion to the central angle of . Disks 33c and 33d are central convex C and 5d of circles Ec and Ed.
The convex C and C11d are attached to the rotating shaft with a distance of 7a11 from each other. At this time, 1 circle Ec and Ed are almost orthogonal.

Furthermore, the disks 33c and 33d are independently rotatable. These disks 33c.

33d is attached to the position of the imaging point B shown in FIG. 1, with the optical axis passing through the intersection X of EC and Ed. This allows the aperture to be rectangular and its long and short sides to be variable independently, making it possible to measure regardless of the shape or size of the sample. always overlaps with the optical axis, so the intensity of infrared rays does not decrease significantly. Furthermore, the disks 33c, 3
The size of the aperture can be read by marking the edge of 3d.

Third embodiment A third embodiment of the present invention will be described with reference to FIG.

The slit plates 33e and 33f shown in FIG. 7 have an upper base side of 2v, =2w1=0.1no++, and a lower base side of 2V2.
=2v2=18mm, 1%He=Hf=10an
holes are drilled. These holes are symmetrical about the lines Le and Lf. The slit plates 33e and 33f are overlapped so that the straight lines Le and Lf are perpendicular to each other.

This allows them to slide independently along Lf. These slit plates 33e and 33f are installed at the imaging point B shown in FIG. 1 so that the intersection X of the straight lines Le and Lf coincides with the optical axis. This allows the aperture to be shaped close to a rectangle, with the long and short sides of the aperture being able to be varied independently, making measurement possible regardless of the shape or size of the sample. Since the center of the aperture always overlaps with the optical axis, the infrared intensity does not decrease significantly.Furthermore, the slit plate 33
The size of the aperture can be read by marking the edges of e and 33f.

Fourth example A fourth embodiment of the present invention will be described with reference to FIG.

Links Q1P iQ z and Q3P2Q4, which are rotatably provided around the fixed point P2, are connected to the parallel rank link row Q along with the slit plates 33g and 33h.
, P, P2Q, and Q 2 P iP 2 Q 3. In addition, there are links Q h P a Q- and Q7P4Q@ that can rotate around the fixed point P3P4.
is arranged to form rank link rows Q, P3P4Qs and QsP3P4Q7 parallel to each other with the slit plates 33i and 33j. Here, P-work Q-work = P z Q 2
= P 2 Q x = P z Q 4 = Lower 3QG =
P3QG=P4Q? =P4Ql=151111111, Q4=Q-Q, =Q, Q-=Q-Q, = 100+u
+ In addition, the connection point QtQ4 and the slit 33
Distance from edge of g Ug+ Qa, Q3 and slit 33
Distance between h and edge Uh = Qs - Qs and slit 33
The distance Ui between the edge of i and the distance Uj between Q, Q7 and the edge of the slit 33j are all 6 mm. Also, the fixed point P1. P2. P,,P4 is P1P2 SatP
,P,, P,P4=P4P2=P,P,=Pworkp,=
The position is set to 71ms+.

The slit device configured as described above is installed at the imaging point B shown in FIG. 1(b) so that the optical axis passes through the intersection of PlP, P, and P4. As a result, the aperture can be made rectangular and its long and short sides can be independently varied from 0 to 18 m1+, making it possible to perform measurements regardless of the shape or size of the sample. Furthermore, since the center of the aperture always overlaps with the optical axis, the intensity of infrared rays does not decrease significantly.

Note that by forming the holes for forming the apertures described in each of the above embodiments by etching, it is possible to process the holes with higher precision, and to obtain an aperture with a precise shape and size.

〔Effect of the invention〕

As described above, the microscopic spectrophotometer according to the present invention is a microscopic spectrophotometer that measures the infrared absorption spectrum of extremely small parts, and in which a plurality of rectangular holes having different radial side lengths are arranged in the same circle. A first circular plate with a hole drilled on its circumference and rotatable around the center of the disk, and a second disk with a rectangular hole with each long side extending in a direction intersecting the long side of the hole. The center of the aperture is located at the imaging position of the objective lens and is located on the optical axis, so that the aperture has a rectangular shape and its long and short sides are can be changed independently, and by rotating the disk in the center of the sample stage,
Since the orientation of the sample can be adjusted to 7 degrees, it has the advantage that measurements can be made regardless of the shape or size of the sample. Furthermore, since the center of the aperture is always on the optical axis, the infrared intensity does not decrease significantly, and a decrease in the S/N ratio can be suppressed. Furthermore, since the hole in the disk at the center of the sample stage can be changed depending on the size of the sample, there is an effect that measurement can be carried out without the sample falling through the hole.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing a fourth embodiment of a microscopic spectrophotometer according to the present invention, (a) is a diagram showing infrared rays emitted from the spectrophotometer, and (b) is a diagram showing the configuration of the microscopic spectrophotometer. The overall view, FIGS. 2(a) and (b) are views showing the respective disks constituting the seven pachiyas of the above embodiment, and FIGS. 3(a) and (b) are views showing the sample supporting disks, respectively. , FIG. 4 is a microscopic diagram used in the prior art, FIG. 5 is a diagram showing another example of the above-mentioned microscopic diagram, FIG. 6 is a diagram showing the configuration of an aperture in the second embodiment of the present invention, and FIG. 7 8 is a diagram showing the configuration of an aperture in a third embodiment of the present invention, and FIG. 8 is a diagram showing the configuration of an aperture in a fourth embodiment of the present invention. 3... Sample stage 3... Aperture 3b... Second disc plate 3j... Slit plate 3... Reflective objective lens 2 0... Sample support disc 3 3a... th 1 disc 3 3e, 33f... variable sulin 3g, 33h, 33i, 3

Claims (1)

[Claims] 1. In a microscopic spectrophotometer for measuring infrared absorption spectra of extremely small parts, a plurality of rectangular holes having different radial side lengths are bored on the same circumference, An aperture is formed by a first disc that is rotatable around the center of the circle, and a second disc that has a rectangular hole drilled therein, with each long side extending in a direction that intersects the long side of the hole. consists of
A microscopic spectrophotometer, characterized in that the center of the aperture is located on the optical axis at the imaging position of the objective lens. 2. The microscopic spectrophotometer according to claim 1, wherein the aperture has a rectangular shape, and the long side and short side thereof can be changed independently. 3. The aperture has a first hole having a circular arc shape with a first radius of curvature and whose width changes continuously, and is rotatable about the center of curvature of the first circular arc. and a second circular plate having a circular arc shape with a second radius of curvature and a hole whose width changes continuously, and which is rotatable about the center of curvature of the second circular arc. 2. The microscopic spectrophotometer according to claim 1, wherein the first circular arc and the second circular arc intersect with each other. 4. The aperture connects the first slit plate with a symmetrical first trapezoidal hole and the second slit plate with a symmetrical second trapezoidal hole between the two. Claim 1, characterized in that the slit plates are stacked one on top of the other so that they can slide independently in the height direction.
The microscopic spectrophotometer described in section. 5. The above aperture consists of two links of equal length with the midpoint as the fixed point, a slit plate connected by one end of one of these links with one end of the other link, and the above-mentioned 2.
2. The microscopic spectrophotometer according to claim 1, wherein the slit device comprises a slit plate of the same shape attached to the other end of each of the book links. 6. The microscope as set forth in claim 5, wherein the slit device for forming the aperture includes two slit devices stacked one on top of the other so that the slit plates intersect with each other. Method spectrophotometer. 7. The microscopic spectrophotometer according to claim 3 or 4, wherein the disc or slit plate has a scale on its edge. 8. Claim 1, wherein the hole forming the aperture is formed by etching.
The microscopic spectrophotometer described in any one of Items 1, 3, and 4. 9. The microscopic spectrophotometer according to claim 1, wherein a disk rotatable about the optical axis is provided at the center of the sample stage on the optical axis. 10. Claim 9, wherein the disk is detachable and replaceable with a disk without a hole in the center and a plurality of disks with holes each having a different diameter. The microscopic spectrophotometer described in section.