JPH03130355U - - Google Patents

Info

Publication number
JPH03130355U
JPH03130355U JP3893090U JP3893090U JPH03130355U JP H03130355 U JPH03130355 U JP H03130355U JP 3893090 U JP3893090 U JP 3893090U JP 3893090 U JP3893090 U JP 3893090U JP H03130355 U JPH03130355 U JP H03130355U
Authority
JP
Japan
Prior art keywords
polishing
movable platen
polishing film
section
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3893090U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644591Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3893090U priority Critical patent/JPH0644591Y2/ja
Publication of JPH03130355U publication Critical patent/JPH03130355U/ja
Application granted granted Critical
Publication of JPH0644591Y2 publication Critical patent/JPH0644591Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP3893090U 1990-04-11 1990-04-11 移動プラテン式研磨装置 Expired - Lifetime JPH0644591Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3893090U JPH0644591Y2 (ja) 1990-04-11 1990-04-11 移動プラテン式研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3893090U JPH0644591Y2 (ja) 1990-04-11 1990-04-11 移動プラテン式研磨装置

Publications (2)

Publication Number Publication Date
JPH03130355U true JPH03130355U (cs) 1991-12-27
JPH0644591Y2 JPH0644591Y2 (ja) 1994-11-16

Family

ID=31547377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3893090U Expired - Lifetime JPH0644591Y2 (ja) 1990-04-11 1990-04-11 移動プラテン式研磨装置

Country Status (1)

Country Link
JP (1) JPH0644591Y2 (cs)

Also Published As

Publication number Publication date
JPH0644591Y2 (ja) 1994-11-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term