JPH03129929U - - Google Patents

Info

Publication number

JPH03129929U

JPH03129929U JP3815590U JP3815590U JPH03129929U JP H03129929 U JPH03129929 U JP H03129929U JP 3815590 U JP3815590 U JP 3815590U JP 3815590 U JP3815590 U JP 3815590U JP H03129929 U JPH03129929 U JP H03129929U

Authority

JP

Japan

Prior art keywords

chemical solution

spacers

sprayed

injection device

chamber

Prior art date

1990-04-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 125000006850 spacer group Chemical group 0.000 claims description 7
• 239000000243 solution Substances 0.000 claims description 5
• 239000000126 substance Substances 0.000 claims description 5
• 238000002347 injection Methods 0.000 claims description 4
• 239000007924 injection Substances 0.000 claims description 4
• 238000009792 diffusion process Methods 0.000 claims description 3
• 239000007921 spray Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 2
• 239000011521 glass Substances 0.000 description 1
• 238000005507 spraying Methods 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1