JPH03125957U - - Google Patents
Info
- Publication number
- JPH03125957U JPH03125957U JP3573290U JP3573290U JPH03125957U JP H03125957 U JPH03125957 U JP H03125957U JP 3573290 U JP3573290 U JP 3573290U JP 3573290 U JP3573290 U JP 3573290U JP H03125957 U JPH03125957 U JP H03125957U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- blocks
- gas distribution
- valve
- purity gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Multiple-Way Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3573290U JPH03125957U (enExample) | 1990-04-04 | 1990-04-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3573290U JPH03125957U (enExample) | 1990-04-04 | 1990-04-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125957U true JPH03125957U (enExample) | 1991-12-19 |
Family
ID=31541341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3573290U Pending JPH03125957U (enExample) | 1990-04-04 | 1990-04-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125957U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034334U (enExample) * | 1973-07-18 | 1975-04-12 |
-
1990
- 1990-04-04 JP JP3573290U patent/JPH03125957U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5034334U (enExample) * | 1973-07-18 | 1975-04-12 |