JPH03125252U - - Google Patents

Info

Publication number

JPH03125252U

JPH03125252U JP3453090U JP3453090U JPH03125252U JP H03125252 U JPH03125252 U JP H03125252U JP 3453090 U JP3453090 U JP 3453090U JP 3453090 U JP3453090 U JP 3453090U JP H03125252 U JPH03125252 U JP H03125252U

Authority

JP

Japan

Prior art keywords

section

silicon substrate

ion response

integrated circuit

sfet

Prior art date

1990-03-31

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 229910052710 silicon Inorganic materials 0.000 claims description 3
• 239000010703 silicon Substances 0.000 claims description 3
• 239000000758 substrate Substances 0.000 claims description 3
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 2
• 230000003071 parasitic effect Effects 0.000 claims 1
• 239000002131 composite material Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (3)