JPH03125065U - - Google Patents
Info
- Publication number
- JPH03125065U JPH03125065U JP3375690U JP3375690U JPH03125065U JP H03125065 U JPH03125065 U JP H03125065U JP 3375690 U JP3375690 U JP 3375690U JP 3375690 U JP3375690 U JP 3375690U JP H03125065 U JPH03125065 U JP H03125065U
- Authority
- JP
- Japan
- Prior art keywords
- titanium alloy
- alloy ring
- etching
- substrate
- lower support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910001069 Ti alloy Inorganic materials 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims 4
- 239000004809 Teflon Substances 0.000 claims 1
- 229920006362 Teflon® Polymers 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3375690U JPH03125065U (enExample) | 1990-03-30 | 1990-03-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3375690U JPH03125065U (enExample) | 1990-03-30 | 1990-03-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03125065U true JPH03125065U (enExample) | 1991-12-18 |
Family
ID=31537672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3375690U Pending JPH03125065U (enExample) | 1990-03-30 | 1990-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03125065U (enExample) |
-
1990
- 1990-03-30 JP JP3375690U patent/JPH03125065U/ja active Pending