JPH03124635U - - Google Patents

Info

Publication number
JPH03124635U
JPH03124635U JP3281690U JP3281690U JPH03124635U JP H03124635 U JPH03124635 U JP H03124635U JP 3281690 U JP3281690 U JP 3281690U JP 3281690 U JP3281690 U JP 3281690U JP H03124635 U JPH03124635 U JP H03124635U
Authority
JP
Japan
Prior art keywords
tank
processing
discharge port
cleaning
processing tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3281690U
Other languages
English (en)
Other versions
JPH0737311Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990032816U priority Critical patent/JPH0737311Y2/ja
Publication of JPH03124635U publication Critical patent/JPH03124635U/ja
Application granted granted Critical
Publication of JPH0737311Y2 publication Critical patent/JPH0737311Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】
第１図は本考案の一実施例による処理槽及び気
泡発生防止装置の断面図、第２図は気泡発生防止
装置の他の実施例を示す説明図、第３図は洗浄ラ
インの説明図、第４図は同処理槽の説明図である
。 １…処理槽、３…基板、７…排出口、８…タン
ク、１０…気泡発生防止装置。

Claims (1)

    【実用新案登録請求の範囲】
  1. 基板を洗浄する処理槽の底部に、洗浄を終えた
    処理液を処理槽の下方に設けられたタンクへ落下
    させる排出口を設けると共に、この排出口内に、
    処理液のタンク内への落下衝撃を緩和して、気泡
    を最小限におさえる手段を設けてなる処理槽の気
    泡発生防止装置。
JP1990032816U 1990-03-30 1990-03-30 処理装置の気泡発生防止装置 Expired - Lifetime JPH0737311Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990032816U JPH0737311Y2 (ja) 1990-03-30 1990-03-30 処理装置の気泡発生防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990032816U JPH0737311Y2 (ja) 1990-03-30 1990-03-30 処理装置の気泡発生防止装置

Publications (2)

Publication Number Publication Date
JPH03124635U true JPH03124635U (ja) 1991-12-17
JPH0737311Y2 JPH0737311Y2 (ja) 1995-08-23

Family

ID=31536016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990032816U Expired - Lifetime JPH0737311Y2 (ja) 1990-03-30 1990-03-30 処理装置の気泡発生防止装置

Country Status (1)

Country Link
JP (1) JPH0737311Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011106888A (ja) * 2009-11-13 2011-06-02 Aloka Co Ltd 液体計量容器および液体計量装置
JP2012532471A (ja) * 2009-07-06 2012-12-13 ゲブリューダー シュミット ゲゼルシャフト ミット ベシュレンクテル ハフツング 基板を処理する方法および装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319331U (ja) * 1986-07-25 1988-02-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6319331U (ja) * 1986-07-25 1988-02-08

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012532471A (ja) * 2009-07-06 2012-12-13 ゲブリューダー シュミット ゲゼルシャフト ミット ベシュレンクテル ハフツング 基板を処理する方法および装置
JP2011106888A (ja) * 2009-11-13 2011-06-02 Aloka Co Ltd 液体計量容器および液体計量装置

Also Published As

Publication number Publication date
JPH0737311Y2 (ja) 1995-08-23

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