JPH0312438U - - Google Patents

Info

Publication number
JPH0312438U
JPH0312438U JP7380689U JP7380689U JPH0312438U JP H0312438 U JPH0312438 U JP H0312438U JP 7380689 U JP7380689 U JP 7380689U JP 7380689 U JP7380689 U JP 7380689U JP H0312438 U JPH0312438 U JP H0312438U
Authority
JP
Japan
Prior art keywords
transfer machine
grip part
gripping portion
wafer transfer
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7380689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7380689U priority Critical patent/JPH0312438U/ja
Publication of JPH0312438U publication Critical patent/JPH0312438U/ja
Pending legal-status Critical Current

Links

JP7380689U 1989-06-23 1989-06-23 Pending JPH0312438U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7380689U JPH0312438U (enrdf_load_stackoverflow) 1989-06-23 1989-06-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7380689U JPH0312438U (enrdf_load_stackoverflow) 1989-06-23 1989-06-23

Publications (1)

Publication Number Publication Date
JPH0312438U true JPH0312438U (enrdf_load_stackoverflow) 1991-02-07

Family

ID=31612939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7380689U Pending JPH0312438U (enrdf_load_stackoverflow) 1989-06-23 1989-06-23

Country Status (1)

Country Link
JP (1) JPH0312438U (enrdf_load_stackoverflow)

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