JPH03123662U - - Google Patents
Info
- Publication number
- JPH03123662U JPH03123662U JP3172890U JP3172890U JPH03123662U JP H03123662 U JPH03123662 U JP H03123662U JP 3172890 U JP3172890 U JP 3172890U JP 3172890 U JP3172890 U JP 3172890U JP H03123662 U JPH03123662 U JP H03123662U
- Authority
- JP
- Japan
- Prior art keywords
- guide
- movable unit
- unit
- reflecting mirror
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Machine Tool Sensing Apparatuses (AREA)
- Machine Tool Units (AREA)
Description
第１図は第１実施例の平面図、第２図は光学系
の説明図、第３図は第２実施例の平面図、第４図
は従来例の説明図である。
１０……固定ユニツト、１１……可動ユニツト
、１２，１３……ガイド、１４……ワークテーブ
ル、１５……第１反射鏡、１６……第１干渉計、
１７……第２反射鏡、１８……第２干渉計、１９
……レーザトランスジユーサ、２０……ビームス
プリツタ、２１，２２……レシーバ、２５……テ
ーブル。
FIG. 1 is a plan view of the first embodiment, FIG. 2 is an explanatory diagram of the optical system, FIG. 3 is a plan view of the second embodiment, and FIG. 4 is an explanatory diagram of the conventional example. 10... fixed unit, 11... movable unit, 12, 13... guide, 14... work table, 15... first reflecting mirror, 16... first interferometer,
17...Second reflecting mirror, 18...Second interferometer, 19
... Laser transducer, 20 ... Beam splitter, 21, 22 ... Receiver, 25 ... Table.
Claims (1)
記のガイドに搭載され、かつ上記軸方向と直角の
軸方向のガイドを有する可動ユニツトの組合せか
ら成り、上記可動ユニツトのガイドにワークテー
ブルを搭載した位置決め装置において、可動ユニ
ツトのガイドに第１反射鏡を取付け、その第１反
射鏡と対向した干渉計を固定ユニツト又はそのユ
ニツトと連続した装置の固定部分に設置し、可動
ユニツトのワークテーブルに第２反射鏡を取付け
、その第２反射鏡と対向した第２干渉計を可動ユ
ニツトに設置したことを特徴とする位置決め装置
。 A positioning device consisting of a combination of a fixed unit having a uniaxial guide and a movable unit mounted on the guide and having an axial guide perpendicular to the axial direction, and a work table is mounted on the guide of the movable unit. , a first reflecting mirror is attached to the guide of the movable unit, an interferometer facing the first reflecting mirror is installed on the fixed unit or a fixed part of the device continuous with the unit, and a second reflecting mirror is attached to the work table of the movable unit. A positioning device characterized in that a mirror is attached and a second interferometer facing the second reflecting mirror is installed in a movable unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3172890U JPH03123662U (en) | 1990-03-26 | 1990-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3172890U JPH03123662U (en) | 1990-03-26 | 1990-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123662U true JPH03123662U (en) | 1991-12-16 |
Family
ID=31534519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3172890U Pending JPH03123662U (en) | 1990-03-26 | 1990-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123662U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277909A (en) * | 1987-05-11 | 1988-11-15 | Canon Inc | Length measuring instrument |
-
1990
- 1990-03-26 JP JP3172890U patent/JPH03123662U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63277909A (en) * | 1987-05-11 | 1988-11-15 | Canon Inc | Length measuring instrument |