JPH03123645U - - Google Patents
Info
- Publication number
- JPH03123645U JPH03123645U JP3303990U JP3303990U JPH03123645U JP H03123645 U JPH03123645 U JP H03123645U JP 3303990 U JP3303990 U JP 3303990U JP 3303990 U JP3303990 U JP 3303990U JP H03123645 U JPH03123645 U JP H03123645U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- spring
- cylinder
- pair
- disk substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 210000000078 claw Anatomy 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3303990U JPH03123645U (fr) | 1990-03-29 | 1990-03-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3303990U JPH03123645U (fr) | 1990-03-29 | 1990-03-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03123645U true JPH03123645U (fr) | 1991-12-16 |
Family
ID=31536387
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3303990U Pending JPH03123645U (fr) | 1990-03-29 | 1990-03-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03123645U (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008259735A (ja) * | 2007-04-13 | 2008-10-30 | Hideomi Mine | 微量放射線による浴用材 |
| JP4727393B2 (ja) * | 2005-11-11 | 2011-07-20 | 株式会社日立ハイテクコントロールシステムズ | 基板把持ハンド装置と基板把持方法及びそれを用いた基板搬送装置並びに基板処理装置 |
| JP2017189861A (ja) * | 2016-04-15 | 2017-10-19 | ファナック株式会社 | ロボット用把持装置 |
-
1990
- 1990-03-29 JP JP3303990U patent/JPH03123645U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4727393B2 (ja) * | 2005-11-11 | 2011-07-20 | 株式会社日立ハイテクコントロールシステムズ | 基板把持ハンド装置と基板把持方法及びそれを用いた基板搬送装置並びに基板処理装置 |
| JP2008259735A (ja) * | 2007-04-13 | 2008-10-30 | Hideomi Mine | 微量放射線による浴用材 |
| JP4517089B2 (ja) * | 2007-04-13 | 2010-08-04 | 英臣 峯 | 微量放射線による浴用材 |
| JP2017189861A (ja) * | 2016-04-15 | 2017-10-19 | ファナック株式会社 | ロボット用把持装置 |