JPH03123551U - - Google Patents

Info

Publication number
JPH03123551U
JPH03123551U JP3308790U JP3308790U JPH03123551U JP H03123551 U JPH03123551 U JP H03123551U JP 3308790 U JP3308790 U JP 3308790U JP 3308790 U JP3308790 U JP 3308790U JP H03123551 U JPH03123551 U JP H03123551U
Authority
JP
Japan
Prior art keywords
handle portion
flow path
sliding body
head portion
water
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3308790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3308790U priority Critical patent/JPH03123551U/ja
Publication of JPH03123551U publication Critical patent/JPH03123551U/ja
Pending legal-status Critical Current

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  • Nozzles (AREA)
JP3308790U 1990-03-29 1990-03-29 Pending JPH03123551U (is)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3308790U JPH03123551U (is) 1990-03-29 1990-03-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3308790U JPH03123551U (is) 1990-03-29 1990-03-29

Publications (1)

Publication Number Publication Date
JPH03123551U true JPH03123551U (is) 1991-12-16

Family

ID=31536464

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3308790U Pending JPH03123551U (is) 1990-03-29 1990-03-29

Country Status (1)

Country Link
JP (1) JPH03123551U (is)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082359A (ja) * 2009-10-07 2011-04-21 Mitsubishi Electric Corp 基板処理装置および基板処理方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011082359A (ja) * 2009-10-07 2011-04-21 Mitsubishi Electric Corp 基板処理装置および基板処理方法

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