JPH03122533U - - Google Patents

Info

Publication number

JPH03122533U

JPH03122533U JP3217590U JP3217590U JPH03122533U JP H03122533 U JPH03122533 U JP H03122533U JP 3217590 U JP3217590 U JP 3217590U JP 3217590 U JP3217590 U JP 3217590U JP H03122533 U JPH03122533 U JP H03122533U

Authority

JP

Japan

Prior art keywords

wafer

tray

dry etching

placement part

wafer tray

Prior art date

1990-03-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004809 Teflon Substances 0.000 claims description 3
• 229920006362 Teflon® Polymers 0.000 claims description 3
• 238000001312 dry etching Methods 0.000 claims description 3
• 239000004642 Polyimide Substances 0.000 claims 1
• 229920001721 polyimide Polymers 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 239000010409 thin film Substances 0.000 claims 1
• 239000000853 adhesive Substances 0.000 description 1
• 230000001070 adhesive effect Effects 0.000 description 1
• 239000002184 metal Substances 0.000 description 1